DD117143A1 - - Google Patents

Info

Publication number
DD117143A1
DD117143A1 DD17893574A DD17893574A DD117143A1 DD 117143 A1 DD117143 A1 DD 117143A1 DD 17893574 A DD17893574 A DD 17893574A DD 17893574 A DD17893574 A DD 17893574A DD 117143 A1 DD117143 A1 DD 117143A1
Authority
DD
German Democratic Republic
Application number
DD17893574A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to DD17893574A priority Critical patent/DD117143A1/xx
Publication of DD117143A1 publication Critical patent/DD117143A1/xx

Links

DD17893574A 1974-06-04 1974-06-04 DD117143A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DD17893574A DD117143A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-06-04 1974-06-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD17893574A DD117143A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-06-04 1974-06-04

Publications (1)

Publication Number Publication Date
DD117143A1 true DD117143A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-12-20

Family

ID=5496033

Family Applications (1)

Application Number Title Priority Date Filing Date
DD17893574A DD117143A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-06-04 1974-06-04

Country Status (1)

Country Link
DD (1) DD117143A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3237047A1 (de) * 1981-10-07 1983-05-26 Hitachi, Ltd., Tokyo Waermebehandlungs-einrichtung
DE4404110A1 (de) * 1993-04-22 1994-10-27 Mitsubishi Electric Corp Substrathalter für MOCVD und MOCVD-Vorrichtung

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3237047A1 (de) * 1981-10-07 1983-05-26 Hitachi, Ltd., Tokyo Waermebehandlungs-einrichtung
DE4404110A1 (de) * 1993-04-22 1994-10-27 Mitsubishi Electric Corp Substrathalter für MOCVD und MOCVD-Vorrichtung
DE4404110C2 (de) * 1993-04-22 1998-01-22 Mitsubishi Electric Corp Substrathalter für die metallorganische chemische Dampfabscheidung

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