DD114316A1 - - Google Patents
Info
- Publication number
- DD114316A1 DD114316A1 DD16287372A DD16287372A DD114316A1 DD 114316 A1 DD114316 A1 DD 114316A1 DD 16287372 A DD16287372 A DD 16287372A DD 16287372 A DD16287372 A DD 16287372A DD 114316 A1 DD114316 A1 DD 114316A1
- Authority
- DD
- German Democratic Republic
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DD16287372A DD114316A1 (en:Method) | 1972-05-10 | 1972-05-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DD16287372A DD114316A1 (en:Method) | 1972-05-10 | 1972-05-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DD114316A1 true DD114316A1 (en:Method) | 1975-07-20 |
Family
ID=5486510
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DD16287372A DD114316A1 (en:Method) | 1972-05-10 | 1972-05-10 |
Country Status (1)
| Country | Link |
|---|---|
| DD (1) | DD114316A1 (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0033138A1 (en) * | 1980-01-23 | 1981-08-05 | Hitachi, Ltd. | A method for correcting deflection distortions in an apparatus for charged particle lithography |
-
1972
- 1972-05-10 DD DD16287372A patent/DD114316A1/xx unknown
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0033138A1 (en) * | 1980-01-23 | 1981-08-05 | Hitachi, Ltd. | A method for correcting deflection distortions in an apparatus for charged particle lithography |