DD111935A1 - - Google Patents

Info

Publication number
DD111935A1
DD111935A1 DD17919974A DD17919974A DD111935A1 DD 111935 A1 DD111935 A1 DD 111935A1 DD 17919974 A DD17919974 A DD 17919974A DD 17919974 A DD17919974 A DD 17919974A DD 111935 A1 DD111935 A1 DD 111935A1
Authority
DD
German Democratic Republic
Application number
DD17919974A
Other versions
DD111935B3 (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to DD17919974A priority Critical patent/DD111935B3/xx
Publication of DD111935A1 publication Critical patent/DD111935A1/xx
Publication of DD111935B3 publication Critical patent/DD111935B3/xx

Links

DD17919974A 1974-06-17 1974-06-17 Vorrichtung zur erzeugung duenner, homogener schichten auf erhitzten unterlagen DD111935B3 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DD17919974A DD111935B3 (de) 1974-06-17 1974-06-17 Vorrichtung zur erzeugung duenner, homogener schichten auf erhitzten unterlagen

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD17919974A DD111935B3 (de) 1974-06-17 1974-06-17 Vorrichtung zur erzeugung duenner, homogener schichten auf erhitzten unterlagen

Publications (2)

Publication Number Publication Date
DD111935A1 true DD111935A1 (cs) 1975-03-12
DD111935B3 DD111935B3 (de) 1991-01-17

Family

ID=5496180

Family Applications (1)

Application Number Title Priority Date Filing Date
DD17919974A DD111935B3 (de) 1974-06-17 1974-06-17 Vorrichtung zur erzeugung duenner, homogener schichten auf erhitzten unterlagen

Country Status (1)

Country Link
DD (1) DD111935B3 (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4414083A1 (de) * 1994-04-22 1995-10-26 Leybold Ag Vorrichtung zum Herstellen dünner Schichten auf Kunststoff-Substraten und zum Ätzen solcher Substrate
DE102008034330A1 (de) 2008-07-23 2010-01-28 Ionbond Ag Olten CVD-Reaktor zur Abscheidung von Schichten aus einem Reaktionsgasgemisch auf Werkstücken

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4414083A1 (de) * 1994-04-22 1995-10-26 Leybold Ag Vorrichtung zum Herstellen dünner Schichten auf Kunststoff-Substraten und zum Ätzen solcher Substrate
DE4414083C2 (de) * 1994-04-22 2000-01-20 Leybold Ag Vorrichtung zum Herstellen dünner Schichten auf Kunststoff-Substraten und zum Ätzen solcher Substrate
DE102008034330A1 (de) 2008-07-23 2010-01-28 Ionbond Ag Olten CVD-Reaktor zur Abscheidung von Schichten aus einem Reaktionsgasgemisch auf Werkstücken

Also Published As

Publication number Publication date
DD111935B3 (de) 1991-01-17

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Legal Events

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