CS79487A1 - Etching equipment with etching agent regeneration - Google Patents

Etching equipment with etching agent regeneration

Info

Publication number
CS79487A1
CS79487A1 CS87794A CS79487A CS79487A1 CS 79487 A1 CS79487 A1 CS 79487A1 CS 87794 A CS87794 A CS 87794A CS 79487 A CS79487 A CS 79487A CS 79487 A1 CS79487 A1 CS 79487A1
Authority
CS
Czechoslovakia
Prior art keywords
etching
equipment
agent regeneration
etching agent
regeneration
Prior art date
Application number
CS87794A
Other languages
Czech (cs)
Other versions
CS264525B1 (en
Inventor
Radko Ing Cxsc Volf
Ivan Ing Zehle
Miloslav Ing Csc Stastny
Milan Ing Csc Karlik
Bohuslav Doc Ing Csc Dolezal
Zdenek Ing Samek
Petr Kosar
Original Assignee
Radko Ing Cxsc Volf
Zehle Ivan
Stastny Miloslav
Karlik Milan
Dolezal Bohuslav
Samek Zdenek
Petr Kosar
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Radko Ing Cxsc Volf, Zehle Ivan, Stastny Miloslav, Karlik Milan, Dolezal Bohuslav, Samek Zdenek, Petr Kosar filed Critical Radko Ing Cxsc Volf
Priority to CS87794A priority Critical patent/CS264525B1/en
Publication of CS79487A1 publication Critical patent/CS79487A1/en
Publication of CS264525B1 publication Critical patent/CS264525B1/en

Links

CS87794A 1987-02-06 1987-02-06 Etching device with etching agent regeneration CS264525B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CS87794A CS264525B1 (en) 1987-02-06 1987-02-06 Etching device with etching agent regeneration

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CS87794A CS264525B1 (en) 1987-02-06 1987-02-06 Etching device with etching agent regeneration

Publications (2)

Publication Number Publication Date
CS79487A1 true CS79487A1 (en) 1988-11-15
CS264525B1 CS264525B1 (en) 1989-08-14

Family

ID=5340724

Family Applications (1)

Application Number Title Priority Date Filing Date
CS87794A CS264525B1 (en) 1987-02-06 1987-02-06 Etching device with etching agent regeneration

Country Status (1)

Country Link
CS (1) CS264525B1 (en)

Also Published As

Publication number Publication date
CS264525B1 (en) 1989-08-14

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