CS685785A1 - Justazny znak pre priamu elektronovu litografiu - Google Patents

Justazny znak pre priamu elektronovu litografiu

Info

Publication number
CS685785A1
CS685785A1 CS856857A CS685785A CS685785A1 CS 685785 A1 CS685785 A1 CS 685785A1 CS 856857 A CS856857 A CS 856857A CS 685785 A CS685785 A CS 685785A CS 685785 A1 CS685785 A1 CS 685785A1
Authority
CS
Czechoslovakia
Prior art keywords
priamu
litografiu
justazny
elektronovu
znak
Prior art date
Application number
CS856857A
Other languages
Czech (cs)
Other versions
CS254170B1 (en
Inventor
Stefan Ing Csc Chromik
Pavol Ing Roman
Peter Ing Hudek
Original Assignee
Stefan Ing Csc Chromik
Pavol Ing Roman
Peter Ing Hudek
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Stefan Ing Csc Chromik, Pavol Ing Roman, Peter Ing Hudek filed Critical Stefan Ing Csc Chromik
Priority to CS856857A priority Critical patent/CS254170B1/en
Publication of CS685785A1 publication Critical patent/CS685785A1/en
Publication of CS254170B1 publication Critical patent/CS254170B1/en

Links

CS856857A 1985-09-26 1985-09-26 Justifying symbol for direct electron lithography CS254170B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CS856857A CS254170B1 (en) 1985-09-26 1985-09-26 Justifying symbol for direct electron lithography

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CS856857A CS254170B1 (en) 1985-09-26 1985-09-26 Justifying symbol for direct electron lithography

Publications (2)

Publication Number Publication Date
CS685785A1 true CS685785A1 (en) 1987-05-14
CS254170B1 CS254170B1 (en) 1988-01-15

Family

ID=5416550

Family Applications (1)

Application Number Title Priority Date Filing Date
CS856857A CS254170B1 (en) 1985-09-26 1985-09-26 Justifying symbol for direct electron lithography

Country Status (1)

Country Link
CS (1) CS254170B1 (en)

Also Published As

Publication number Publication date
CS254170B1 (en) 1988-01-15

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