CS61988A1 - Method of components' surface etching for microelectronic and optoelectronic structures preparation of gallium n-arsenide - Google Patents

Method of components' surface etching for microelectronic and optoelectronic structures preparation of gallium n-arsenide

Info

Publication number
CS61988A1
CS61988A1 CS88619A CS61988A CS61988A1 CS 61988 A1 CS61988 A1 CS 61988A1 CS 88619 A CS88619 A CS 88619A CS 61988 A CS61988 A CS 61988A CS 61988 A1 CS61988 A1 CS 61988A1
Authority
CS
Czechoslovakia
Prior art keywords
microelectronic
arsenide
gallium
components
surface etching
Prior art date
Application number
CS88619A
Other languages
English (en)
Other versions
CS270018B1 (cs
Inventor
Vaclav Ing Csc Svorcik
Vladimir Rndr Csc Rybka
Vladimir Doc Ing Csc Myslik
Original Assignee
Svorcik Vaclav
Vladimir Rndr Csc Rybka
Myslik Vladimir
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Svorcik Vaclav, Vladimir Rndr Csc Rybka, Myslik Vladimir filed Critical Svorcik Vaclav
Priority to CS88619A priority Critical patent/CS270018B1/cs
Publication of CS61988A1 publication Critical patent/CS61988A1/cs
Publication of CS270018B1 publication Critical patent/CS270018B1/cs

Links

CS88619A 1988-02-01 1988-02-01 Způsob leptáni povrchu eoučáetl pro přípravu mikroelektronických a optoelektronických etruktur z n-areenidu galitého CS270018B1 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CS88619A CS270018B1 (cs) 1988-02-01 1988-02-01 Způsob leptáni povrchu eoučáetl pro přípravu mikroelektronických a optoelektronických etruktur z n-areenidu galitého

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CS88619A CS270018B1 (cs) 1988-02-01 1988-02-01 Způsob leptáni povrchu eoučáetl pro přípravu mikroelektronických a optoelektronických etruktur z n-areenidu galitého

Publications (2)

Publication Number Publication Date
CS61988A1 true CS61988A1 (en) 1989-10-13
CS270018B1 CS270018B1 (cs) 1990-06-13

Family

ID=5338619

Family Applications (1)

Application Number Title Priority Date Filing Date
CS88619A CS270018B1 (cs) 1988-02-01 1988-02-01 Způsob leptáni povrchu eoučáetl pro přípravu mikroelektronických a optoelektronických etruktur z n-areenidu galitého

Country Status (1)

Country Link
CS (1) CS270018B1 (cs)

Also Published As

Publication number Publication date
CS270018B1 (cs) 1990-06-13

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