CS559883A1 - Zarizeni pro naprasovani tenkych vrstev magnetronovou depozici - Google Patents

Zarizeni pro naprasovani tenkych vrstev magnetronovou depozici

Info

Publication number
CS559883A1
CS559883A1 CS835598A CS559883A CS559883A1 CS 559883 A1 CS559883 A1 CS 559883A1 CS 835598 A CS835598 A CS 835598A CS 559883 A CS559883 A CS 559883A CS 559883 A1 CS559883 A1 CS 559883A1
Authority
CS
Czechoslovakia
Prior art keywords
vrstev
tenkych
naprasovani
magnetronovou
depozici
Prior art date
Application number
CS835598A
Other languages
Czech (cs)
Other versions
CS239277B1 (en
Inventor
Jan Jakes
Frantisek Ing Jares
Jindrich Ing Drsc Musil
Oldrich Rybar
Milan Ing Exner
Augustin Frey
Original Assignee
Jan Jakes
Jares Frantisek
Jindrich Ing Drsc Musil
Oldrich Rybar
Exner Milan
Augustin Frey
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jan Jakes, Jares Frantisek, Jindrich Ing Drsc Musil, Oldrich Rybar, Exner Milan, Augustin Frey filed Critical Jan Jakes
Priority to CS835598A priority Critical patent/CS239277B1/en
Publication of CS559883A1 publication Critical patent/CS559883A1/en
Publication of CS239277B1 publication Critical patent/CS239277B1/en

Links

CS835598A 1983-07-26 1983-07-26 Apparatus for powdering of thin layers by magnetrone deposition CS239277B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CS835598A CS239277B1 (en) 1983-07-26 1983-07-26 Apparatus for powdering of thin layers by magnetrone deposition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CS835598A CS239277B1 (en) 1983-07-26 1983-07-26 Apparatus for powdering of thin layers by magnetrone deposition

Publications (2)

Publication Number Publication Date
CS559883A1 true CS559883A1 (en) 1985-05-15
CS239277B1 CS239277B1 (en) 1986-01-16

Family

ID=5401155

Family Applications (1)

Application Number Title Priority Date Filing Date
CS835598A CS239277B1 (en) 1983-07-26 1983-07-26 Apparatus for powdering of thin layers by magnetrone deposition

Country Status (1)

Country Link
CS (1) CS239277B1 (en)

Also Published As

Publication number Publication date
CS239277B1 (en) 1986-01-16

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