CS271245B1 - Device for hard-meltable oxides' monocrystals pulling from liquid alloy - Google Patents

Device for hard-meltable oxides' monocrystals pulling from liquid alloy Download PDF

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Publication number
CS271245B1
CS271245B1 CS865569A CS556986A CS271245B1 CS 271245 B1 CS271245 B1 CS 271245B1 CS 865569 A CS865569 A CS 865569A CS 556986 A CS556986 A CS 556986A CS 271245 B1 CS271245 B1 CS 271245B1
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CS
Czechoslovakia
Prior art keywords
slider
support column
chamber
tubes
support plate
Prior art date
Application number
CS865569A
Other languages
Czech (cs)
Other versions
CS556986A1 (en
Inventor
Jurij A Moskva Osipjan
Vitalij A Tatarcenko
Nikolaj I Kozin
Georgij S Medko
Alexandr M Avrutik
Sergej N Rossolenko
Boris S Redkin
Vladimir A Borodin
Vladimir N Kurlov
Tatjana I Jalovec
Sergej I Stoljarov
Alexandr Trifonov
Ivan S Kararizov
Paskal B Boncev
Iva A Topcinskij
Rajco D Velkov
Georgi V Siskov
Kristno V Morev
Stefan B Michajlov
Pavel A Alexiev
Nedjalko L Latev
Christo T Georgijev
Nedka D Sopova
Nikola Ch Atlarskij
Original Assignee
Osipjan Jurij A Mos
Vitalij A Tatarcenko
Nikolaj I Kozin
Georgij S Medko
Alexandr M Avrutik
Sergej N Rossolenko
Boris S Redkin
Vladimir A Borodin
Vladimir N Kurlov
Tatjana I Jalovec
Sergej I Stoljarov
Alexandr Trifonov
Ivan S Kararizov
Paskal B Boncev
Iva A Topcinskij
Rajco D Velkov
Georgi V Siskov
Kristno V Morev
Stefan B Michajlov
Pavel A Alexiev
Nedjalko L Latev
Christo T Georgijev
Nedka D Sopova
Nikola Ch Atlarskij
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Osipjan Jurij A Mos, Vitalij A Tatarcenko, Nikolaj I Kozin, Georgij S Medko, Alexandr M Avrutik, Sergej N Rossolenko, Boris S Redkin, Vladimir A Borodin, Vladimir N Kurlov, Tatjana I Jalovec, Sergej I Stoljarov, Alexandr Trifonov, Ivan S Kararizov, Paskal B Boncev, Iva A Topcinskij, Rajco D Velkov, Georgi V Siskov, Kristno V Morev, Stefan B Michajlov, Pavel A Alexiev, Nedjalko L Latev, Christo T Georgijev, Nedka D Sopova, Nikola Ch Atlarskij filed Critical Osipjan Jurij A Mos
Publication of CS556986A1 publication Critical patent/CS556986A1/en
Publication of CS271245B1 publication Critical patent/CS271245B1/en

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/30—Mechanisms for rotating or moving either the melt or the crystal

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Nitrogen And Oxygen Or Sulfur-Condensed Heterocyclic Ring Systems (AREA)
  • Curing Cements, Concrete, And Artificial Stone (AREA)

Abstract

In a device a growth chamber (5) is connected at its lower part by means of a pedestal (6) to a support plate (1), while a stand (2) with a carrying pillar (3), a cantilever (4), the growth chamber (5), the pedestal (6) and the support plate (1) form a closed rigid ''frame''-type contour.

Description

271 245 -1-271 245 -1-

OIIHCAHHE H3OEPETEHHH K ABTOPCKOMY CBHUETEJ1BCTBY 3anBJieHo: 09. OB. 85 3aaBKa: No 3946561/31-26 MKH4: C30B 15/00. 15/30OIIHCAHHE H3OEPETEHHH TO ABTOPCKOMY CBHUETEJ1BCTBY 3anBJieHo: 09. OB. 85 3aaBKa: No 3946561 / 31-26 MKH4: C30B 15/00. 15/30

Abtopm: ».A.OcHnbnH. B.A.TaTapnenKo, H.H.Ko3hh, r.C.MeabKo, A.M.ABpyTHK. C.Η.PoccoaeHKO, E.C.PeabKHH. B.A.EopoaHH, B. H.KypjioB. T.H.HaoBeu. C.H.CToaapOB. CSU), Α.Τρηφοηοβ, H.KapapH3OB, Π.Εοημθβ, H.Τοπίηηοκη , Ρ.Βθλκοβ, Γ.Εηιβκοβ. K.Mopee,C.MHxaBaoB, H.AJieKCHeB, H-JIaTee, X-TeopmeB, H.UJanoBa h H.ATaapcKH <BG).Abtopm: ».A.OcHnbnH. B.A.TaTapnenKo, H.H.Ko3hh, r.C.MeabKo, A.M.ABpyTHK. C.Η.PoccoaeHKO, E.C.PeabKHH. B.A.EopoaHH, B.H.KypjioB. T.H.HaoBeu. C.H.CToaapOB. CSU), Α.Τρηφοηοβ, H.KapapH3OB, Π.Εοημθβ, H.Τοπίηηοκη, Ρ.Βθλκοβ, Γ.Εηιβκοβ. K.Mopee, C.MHxaBaoB, H.JieKCHeB, H-JaTee, X-TeopmeB, H.UJanoBa h H.ATaapcKH <BG).

3anBHTejIb: HHCTHTyT ΦΗ3ΗΚΗ τβθρλογο Tejia AH CCCP3anBHTejIb: HHCTHTyT ΦΗ3ΗΚΗ τβθρλογο Tejia AH CCCP

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UeJib HsaepeTeHHS - noBbiiuemie KoaecTBa KpHCTajuia 3a tpieT yMeHbweHHa MexaHHxecKxxUeJib HsaepeTeHHS - noBbiiuemie KoaecTBa KpHCTajuia 3a tpieT yMeHbweHHa MexaHHxecKxx

HapyuieHHň πρπ BMpawHBaHHH npHCTaJiJioe.HapyuieHHn πρπ BMpawHBaHHH npHCTaJiJioe.

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YcTaHOBKa coaep*HT CTaHHHy 1 c nepeMewaeMofí b hbíí TeJiecKonHHecKoň kojiohhoB 2. onopHy»njiHTy 3. UHJiHHapHHecKyio otíeaaňKy repMeTHHHoR K.aMepu 4 c aeepb» 5. ano 6 η βορχηιοιο npuuiKy 7KaMepM, yKpenjieHHyio na KpanurreHne 8. BnyTpn naMepw pa3MeuieHbi rare-nb 9 c pacnjiaBOM,BMTarHBaeMHň Ha 3aTpaBKy KpncTaaa 10. CHCTeMa 11 TenaoH3OjiauHH THrjia h KpHCTajuia, a TaxweHHayKTop 12. B noJiouTb KaMepM BBeaeHH BepxHHH uitok 13 h hhwhhh uitok 14. BepxHHň H hhwhhhiutokh nepeMewauoTca h epawanTCa c noMowbio eepxHero MexamoMa 15 nepexeiiieKHS h BpaweHHa WTOKa hMexaHH3Ma 16 nepeMeiueHHa h BpaweHHSi HHWHero WTOKa. KaMepa ycTaHOBJíeHa Ha cTOJie 17.YcTaHOBKa coaep * HT CTaHHHy nepeMewaeMofí b 1 c hbíí TeJiecKonHHecKoň kojiohhoB second onopHy »njiHTy third UHJiHHapHHecKyio otíeaaňKy repMeTHHHoR K.aMepu 4 c aeepb» fifth yes 6 η βορχηιοιο npuuiKy 7KaMepM, yKpenjieHHyio to KpanurreHne eighth BnyTpn naMepw pa3MeuieHbi rare-nb 9 c pacnjiaBOM, BMTarHBaeMHň Ha 3aTpaBKy KpncTaaa 10th CHCTeMa TenaoH3OjiauHH THrjia 11 h KpHCTajuia and 12th TaxweHHayKTop B noJiouTb KaMepM BBeaeHH BepxHHH uitok 13h hhwhhh uitok 14th BepxHHň hhwhhhiutokh nepeMewauoTca H H c epawanTCa noMowbio eepxHero MexamoMa nepexeiiieKHS 15 h BpaweHHa WTOKa hMexaHH3Ma 16 nepeMeiueHHa h BpaweHHSi HHWHero WTOKa. KaMepa ycTaHOBJíeHa Ha cTOJie 17.

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BbtcoKOHacTQTHoe HanpaxieHHe Ha HHayKTop 12. YBeJiHHHBanT HanpameHHa ao pacnaaeaeHHa 3arpy3KH b THrae 9. PacnenaaioT ojieKTpoMarHHTHyio ny*Ty 24 c bhhtom 18. BKJH0Ha»T oaeKTpoaBHraTeJib 29 271 245 -2- yc-KopeHHoro nepeMemeHHSi 3aTpaBKH. lepea peayKTop 27. uiecTepHH 26 H ajieKTpOMarHHTHyio My»Ty 25Bpauienne ot ABHraTejia nepeaaeTCSi BHHTy 18. Ha kotopuh HaKpyHHBaiOTCH raňKH 19. nepeMeuiaa BHH3oeoňMy 20 h KapeTKy 21. Πρη btom noJiyocH 31. CMeuiaaci. B otbbpcthsx 32. racsT KOJieeaHHsi.B03HHKaiouiHe πρη pa«3OTe MexaHHSMa. KapeTKa 21 Ha pcuiHKax 22 xaTKTCsi no HanpaBJísiiouteň 23.nepeMemaa npH stom bhh3 uitok 13. fiocjie τογο. xax 3aTpaBxa oxawerca b HecKOJii.Knx MHJUiHMeTpaxot pacnjiaBa. ABHraTemi· 29 oTKJiioHaioT. BKJHonaioT ABHraTejib 35. kotopuh nepea peayKTop 36.ayenaTue Koaeca 37 iiphbohht bo BpaiuenHe Báji 38, BpauianuiHH CKOJiB3siuiyn no uuiHiiesuM na3aM 39uiecTepHK). npHBOAsiiuyn bo BpauieHHe uitok 13, nepea uiecTepHio 41. 3aTeM OTKJinxanT ajieKTPOMarHHTHynμυφτυ 25, ocBOSOíKflaa bhht 18 ot CBH3H c 3JieKTpOABHraTejieM 29. BKJiuHauT ajieKTpoMarHHTHye μυφτυ24. CBaauBaa bhht 18 c ajieKTpOABHraTejieM 28. BKJinnanT ajieicTPoaBHraTe» 28 H nepeMeuianT uitokao norpy*enHa aaTpaBKH b pacnjiaa. 3aTen BKjinnanT noateM uiTOKa u noMOUl&amp;n 3JieKTpOABHraTeJia 28 HHaHHHaioT pa3pauiHBaHHe KpHCTajuia. KpHCTaJiJi 10 'iepea TSiry 45 nepeaaeT ycHJiHe abthhku Beca. Πρη3tom cHrHaji ot AaHHKa Beca nocwnaeT 8 3BM. Cnruaji iianHKa eeca HBJíaeTca onopHUM CHmajioM ajihynpaBJíeHHH npoueccoM. Πο Hepe BupaeciTKH pacnjiaea ocyuiecTBJíHeToa nepeMemeHHe h BpameHHe τηγμc noMouiHo nepeMemeHHSi H BpamenHsi th™, aiiaaorHiHoro nexaHH3My nepeMemeHHSi H BpameHHSiBbtcoKOHacTQTHoe HanpaxieHHe Ha HHayKTop 12. YBeJiHHHBanT HanpameHHa o pacnaaeaeHHa 3arpy3KH b THrae 9. PacnenaaioT ojieKTpoMarHHTHyio ny * Ty 24 c bhhtom 18. BKJH0Ha »T oaeKTpoaBHraTeJib 29,271,245 -2- yc-KopeHHoro nepeMemeHHSi 3aTpaBKH. lepea peayKTop 27. uiecTepHH 26 H ajieKTpOMarHHTHyio We »Ty 25Bpauienne ot ABHraTejia nepeaaeTCSi BHHTy 18. Ha kotopuh HaKpyHHBaiOTCH ranKH 19. nepeMeuiaa BHH3oennoMy 20 h KapeTKy 21. Πρη btom noJiyocH 31. CMeuiaaci. B otbbpcthsx 32. RacsT KOJieeaHHsi.B03HHKaiouiHe πρη pa «3OTe MexaHHSMa. KapeTKa 21 Ha pcuiHKax 22 xaTKTCsi no HanpaBJísiiouteň 23.nepeMemaa npH stom bhh2 uitok 13. fiocjie τογο. xax 3aTpaBxa oxawerca b HecKOJii.Knx MHJUiHMeTpaxot pacnjiaBa. ABHRATemi · 29 oTKJiioHaioT. BKJHonaioT ABHraTejib 35. kotopuh nepea peayKTop 36.ayenaTue Koaeca 37 iiphbohht bo BpaiuenHe Bai 38, BpauianuiHH CKOJiB3siuiyn no uuiHiiesuM na3aM 39uiecTepHK). npHBOAsiiuyn bo BpauieHHe uit 13, doTeepHio 41. 3aTeM OTKJinxanT ajieKTPOMarHHTHynHopingHowHyToNHyHyHyHyBhH 18h CBH3H c 3JieKTpOABHraTejieM 29. BKJiuHauT ajieKTpoMarHHTHye μυφτυ24. CBaauBaa bhht 18 c ajieKTpOABHraTejieM 28. bJinnanT ajieicTPoaBHraTe »28 H nepeMeuianT uitokao norpy * enHa aaTpaBKH b pacnjiaa. 3aTen BKjinnanT noateM uiMaL & n 3JieKTpOABHraTeJia 28 HHaHHHaioT pa3pauiHBaHHe KpHCTajuia. KpHCTaJiJi 10 'iepea TSiry 45 nepeaaeT ycHJiHe abthhku Beca. Πρη3tom cHrHaji ot AaHHKa Beca nocwnaeT 8 3BM. Cnruaji iianHKa eeca HBJiaeTca onopHUM CHMajioM ajihynpaBJiHHH npoueccoM. Πο Hepe BupaeciTKH pacnjiaea ocyuiecTBJíHeToa nepeMemeHHe h BpameHHe τηγμc noMouiHo nepeMemeHHSi H BpamenHsi th ™, aiiaaorHiHoro nexaHH3My nepeMemeHHSi H BpameHHSi

BepxHero umná. ΠρΗ pasoTe ycTaHOBKH soaa nocTynaeT b uiTyuep 47 uiTOKa 13. aaTeM no hojiocth, OTaeasieMoňBepTHKaJii.HUMH neperopoaxaMH 34 Kemay Hapymoň h BHyTpeHHeň TpyeaMH. nocTynaeT ao ahsi uiTOKa,npoxoAHT b Apyrym noJiocTb Memay HapyuiHoň h BHyTpeHHeň TpyeaMH h buxoaht b urryiiep 48. npeAJiaraeMaa ycTaHOBxa ποββομβτ nojiynaTi. xpHCTaaau TyronaaBKHX okhcjiob eoaee BucoxoroxanecTBa aa οΜβτ peaKoro CHHweHHSi ‘'annapaTypHoň nanocxaTOCTH" xpHCTaaaOB η chh>k&amp;híih uHcaaaoMeH, Tax HanpHMep, yMBHMaei jioKaJibHue ηθοληοροαηοοτη noKaaaTeJia npejioMjieHHsi Ha nojiocaxpocTa b MOHOKPHCTaJiJiax HHoeaTa JiHTHa b 5-8 pa3 h yBejiHinsaeT ajtHuy MOHOAOMeHHoň xacTHKPHCTaJiJia b 4-6 pa3. 271 245 -3-BepxHero umná. Π Η o c a a a a a a a a a a a a a a a a a a a a UM UM UM UM UM UM UM UM UM UM UM UM UM UM UM UM UM Kem Kem Kem Kem Kem Kem Kem. T T y y y y y y y y y y y y y y y y y y y y y y y y y y y pe pe pe pe pe pe pe pe pe pe pe pe pe pe pe pe pe. xpHCTaaau TyronaaBKHX okhcjiob EOAE BucoxoroxanecTBa aa οΜβτ peaKoro CHHweHHSi 'annapaTypHoň nanocxaTOCTH "xpHCTaaaOB CHH η> k &amp; Hiih uHcaaaoMeH, Tax HanpHMep, yMBHMaei jioKaJibHue ηθοληοροαηοοτη noKaaaTeJia npejioMjieHHsi Ha nojiocaxpocTa b MOHOKPHCTaJiJiax HHoeaTa JiHTHa b PA3 5-8 h yBejiHinsaeT ajtHuy MOHOAOMeHHoň xacTHKPHCTaJiJia b 4- 6 pa3 271,245 -3-

«QPMyJIA H3OBPETEHHH 1. YcTaHOBKa zuisi BupauiHBaHHH MOHOKPHCTaJuioe TyronjiaBKHX okhcjiob ηί pacnjiaea. BK-inoxaiouianCTaHHHy c Heuyuieň κολοημοΑ. ycTaHOBJíeHHyn Ha οπορηοη πλητθ. KaMepy pocia c paaMeiueHHMM b hbhMMHKaTopoM, BHyTpH κοτοροΓο Ha BonooxJiawaaeMOM HHmrteM uiToxe ycTaHOBJíeH Turejib c CHCTeMoňTeMOH3OJismnn, pacnoJioweHHwň Haa rarjieM h cocTOsnimA na HecxojibKnx KoaKUHaJifcHbix Tpye uitok, coenHHeiiHHH c 3aTpaBKonepM<aTejieM. bbpxhhh η hhmhhh uitokh hx BpaiueHHH h nepeMeweHHsi. yMenuiHMH xapeTxy, ycTaHOBJíBHHyio cno BepTHKajiHoK HanpaBJímoiueň. h BHHTOBy» uiapHKoeyio napy. rafixab xapeTxe. a χολοβοη βηητ οοθληηθη c aneKTpoaBHraTeJiex paeoxero nepeMeuteHHS H c«QPMyJIA H3OBPETEHHH 1. YcTaHOBKa zuisi BupauiHBaHHH MOHOKPHCTaJuioe TyronjiaBKHX okhcjiob ηί pacnjiaea. BK-inoxaiouianCTaHHHy c Heuyuien κολοημοΑ. ycTaHOBJeHHyn Ha οπορηοη πλητθ. KaMepy POCl c paaMeiueHHMM b hbhMMHKaTopoM, BHyTpH κοτοροΓο Ha BonooxJiawaaeMOM HHmrteM uiToxe ycTaHOBJíeH Turejib c CHCTeMoňTeMOH3OJismnn, pacnoJioweHHwň Haa rarjieM h at cocTOsnimA HecxojibKnx KoaKUHaJifcHbix Tpye uitok, coenHHeiiHHH c 3aTpaBKonepM <aTejieM. bbpxhhh η hhmhhh uitokh hx bpaiueHHH h nepeMeweHHsi. yMenuiHMH xapeTxy, ycTaHOBJíBHHyio cno BepTHKajiHoK HanpaBJímoiueň. h BHHTOBy »uiapHKoeyio napy. rafixab xapeTxe. an ο λ λ λ λ λ λ c c c c c c c

Ha ΒβρΧΗθΜ iiitokb pa3MeuieH aaTHHK MaccuHa ΜβρΧΗθΜ iiitokb pa3MeuieH aaTHHK Maccu

BoaooxJiaxtaaeMbiii βθρχηηΑCOeaHHeHM C MSXaHH3MaMH BO3MOM<HOCTbn ΠβρβΜβΙΙΙβΗΗΗ κοτοροΒ pa3MeuieHa b oeofiMe, 3aKpenjiennciHajieKTpoMarHHTHoň My«Toň, B3aHMoneficTByiomefi cΒΛβκτροΛΒΗΓβτβΛβΜ ycxopeHHoro nepeneiueHnn. hBoaooxJiaxtaaeMbiii βθρχηηΑCOeaHHeHM C MSXaHH3MaMH BO3MOM <HOCTbn ΠβρβΜβΙΙΙβΗΗΗ κοτοροΒ pa3MeuieHa b oeofiMe, 3aKpenjiennciHajieKTpoMarHHTHoň We "tone B3aHMoneficTByiomefi cΒΛβκτροΛΒΗΓβτβΛβΜ ycxopeHHoro nepeneiueHnn. h

KPHCTajuia. oTJiHHanuiancH τβΜ, hto, c uejibn noBuuieHHsi KatecTBa xpHCTajiJia 3a cxeTyMeHbuieHHR MexaHHHecKHX Hapyuiennň πρκ BbipauiHBaHHH KpHCTajuioB, xawepa sepxHeň xacTbio mecTKocBH3aHa c Hecyuiefi kojiohhoR. a ηηηϊηθΒ - c onopHoR ojihtoR. πρη stoh xaMepa, Hecyutan KOJioHHa,CTaHHHa h onopHas πλητβ oepa3y»T wecTXHR 0-ospa3HuR xoHTyp, xamauB nexaHH3M nepeMeueHHsiiutokob cHaemeH aonojjHHTejitiHoří sjíeKTpoMarHHTHoR My®ToR juih coenHHeHHH χμοβογο BHHTa c3JieKTpoaBHraTejieM ycicopeHHoro nepeMeuieHHH, raRxa bhhtoboR uiapHKOBoň napu BbinoJiHena ro aeyxHe3aBHCHMUX xacTeR. a oeofiMa cxaemeHa pacnojioweHHUMH b ropH3OHTajibHofi njiocxocTH. npoxoasiuieR xepea BepTHKajibHbie och BHHTa h xapeTKH. BByMH COOCHMMH nOJlyOCHMH . BepxHHH UITOK ΒΜΠΟΛΗβΗ H3 aeyx KoaKCHaJibHMX Tpye, nojiocTb Mewy kotopmmh pasaejieHa προλολβημμη neperopoaxaMH na aeeKPHCTajuia. oTJiHHanuiancH τβΜ, hto, c uejibn noBuuieHHsi KatecTBa xpHCTajiJia 3a cxeTyMeHbuieHHR MexaHHHecKHX Hapyuiennn πρκ BbipauiHBaHHH KpHCTajuioB, xawepa sepxHen xacTbio mecTKocBH3aHa c Hecyuiefi kojiohhoR. and ηηηϊηθΒ - c onopHoR ojihtoR. πρη stack xaMepa, Hecyutan KOJioHHa, CTaHHHa h onopHas πλητβ oepa3y »T-0 wecTXHR ospa3HuR xoHTyp, xamauB nexaHH3M nepeMeueHHsiiutokob cHaemeH aonojjHHTejitiHoří sjíeKTpoMarHHTHoR My®ToR juih coenHHeHHH χμοβογο BHHTa c3JieKTpoaBHraTejieM ycicopeHHoro nepeMeuieHHH, raRxa bhhtoboR uiapHKOBoň napu BbinoJiHena ro aeyxHe3aBHCHMUX xacTeR. and oeofiMa cxaemeHa pacnojioweHHUMH b ropH3OHTajibHofi njiocxocTH. npoxoasiuieR xepea BepTHKajibHbie and BHHTa h xapeTKH. BByMH COOCHMMH nOJlyOCHMH. BepxHHH UITOK ΒΜΠΟΛΗβΗ H3 aeyx KoaKCHaJibHMX Tpye, nojiocTb Mewy kotopmmh pasaejieHa προλολβημμη neperopoaxaMH on aee

Mac™. cnaemennMe uiTynenaMH, a oepXHHe topum neperopoaoK cnaeweHU πολυκολβηομ, pasaeJisiKiiuHM nojiocTb b nonepexHOM cexeHHH. 2. ycTaHOBita no η. 1. oTJiHManuiascH tom. hto OHa cHaeweHa MoayjibHMMHpeayKTOpaMH, coeaHHbiiouiHMH χολοβοη βηητ c BJieKTPoaBHraieaeM ycKopenHoro nepeMeuieHHH. <565 npocnexT Equipment for Productlon of Monocrystals and Epi-waters of Galllumftrsenlde Research and development crystals puller for GaftS. 1978. 271 245 -4-Mac ™. cnaemennMe uiTynenaMH, and oepXHHe topum neperopoaoK cnaeweHU πολυκολβηομ, pasaeJisiKiiuHM nojiocTb b nonepexHOM cexeHHH. 2. ycTaHOBita no η. 1. oTJiHManuiascH tom. hto OHa cHaeweHa MoayjibHMMHpeayKTOpaMH, coeaHHbiiouiHMH χολοβοη βηητ c BJieKTPoaBHraieaeM ycKopenHoro nepeMeuieHHH. <565 npocnexT Product for Monocrystals and Epi-waters of Galllumftrsenlde Research and development crystals puller for GaftS. 1978. 271 245 -4-

Ρ Ε Φ Ε P A TΕ Ε Ε Ε P A T

yCTAHOBKA AJIÍ1 BHPAUIHBAHHH MOHOKPHCTAJUIOB ΤΥΓΟΠΛΛΒΚΗΧ OKHCJIOB H3 PACIUIABA K3OípeTeHHe OTHQCHTCH K TeXHOJlOrHH tlOJiynpOBOaHHKOBUX MaTePHaJTOB. a ΗΜβΗΗΟ K yCTaHOBKejuisi BupauiHBaHHH MCiHCJKpHCTajiJiOB TyronjiaBKHX okhcjiob H3 pacnjiaea. h oeecneMHBaeT noBuuienHexanecTBa KpHcraJiJioa 3a cmět yMeHbureHHST MexaHHHecKHX HapyuieHHH. ycTaiiQBKa coctoht na cTaHHHSi c necymeň kojiohkoh, ycTaHOBJíeHHoň Ha οπορηοΚ njiHTe, KaMepupacTa, B KOTCipoň Ha ηητκηθμ ιιιτοκβ ycTaHOBJíeH THrejib. a Ha ΒβρχΗβΜ BoaooxjiawaaeMOM ιιιτοκβ3aKpenjreH 3aTpaBKo.nep>KaTejTi>. UItokh (xjL'jiHHi.'Hhi c McxííHMjM.iMH KX is[j.'iiuuiiíix n nepeMeuieHHH,HMenuiHMH xapeTKy. ycTaHOBJíeHHye c bo3moikhocti>io πβρβΜβιιιβΗΗίΐ no BepTHKa.Jit.HOH HanpaBJíHiomeň. hBHHTOByio uiapHKOByn napy, panna κοτοροη 3aKperuiena b κβρετκβ, a xoaoboh bhht coeaHHeH cBJieKTpoMarHHTHofi MyíToí, BaayMOaeňcTByioiueň c 3JieKTpoaBHraTejieM paeonero πβρβΜβιιιβΗΗΗ HBjieKTpoaBHraTeJieM ycKopeHHoro nepeMeuieHHS. Otjihhhb 3aKJTi0HaeTcsi b tom. mto KaMepa sepxHeňxacTbe mecTKO cesnaHa c Hecymeň kojiohhoh, a ηητκηβΑ - c οπορηοη njiHToň. KaMepa. HecyuianKOJioHHa, CTaHHHa h onopnan njiHTa oepa3yioT τκββτκΗΗ O-opepaoHMH KOHTyp. Kawaufí nexaHH3MnepeMememia uitokob CHasweH aonaJiHHTeJit>HOH ojieKTpoMarHHTHoň My*TOÍí ajra coeaHHeHHH BHHTa cajieicrpanBHraTejieM ycKopeHHoro nepeMeueHHa. raňKa BunoJiHena H3 aeyx He3aBHCHMMX aacTeň. aKapeTKa ημθθτ bosmotuhoctL· caMoycTaHOBKH. BepxHHň uitok eunojmeH H3 aeyx KoaKCHajibHux Tpyc.pa3aeJieHHbix προλολβημμη neperopoaxaMH Ha aee aacra. Kawaaa H3 hhx CHaemeHa urrynepaMH. BepxHHeTopnu neperopoeoK coeaHHBHu nojiyKOJinnoM. Οτληηηθ coctoht ramne b tom. sto ycTaHOBKa cHaeweHayCTAHOBKA AJI1 BHPAUIHBAHHH MOHOKPHCTAJUIOB ΤΥΓΟΠΛΛΒΚΗΧ OKHCJIOB H3 PACIUIABA K3OípeTeHHe OTHQCHTCH TO TeXHOJlOrHH tlOJiynpOBOaHHKOBUX MaTePHaJTOB. and ΗΜβΗΗΟ K yCTaHOBKejuisi BupauiHBaHHH MCiHCJKpHCTajiJiOB TyronjiaBKHX okhcjiob H3 pacnjiaea. h oeecneMHBaeT noBuuienHexanecTBa KpHcraJiJioa 3a cme yMeHbureHHST MexaHHHecKHX HapyuieHHH. ycTaiiQBKa coctoht on cTaHHHSi c necyme kojiohkoh, ycTaHOBJeHHo Ha οπορηοΚ njiHTe, KaMepupacTa, B KOTCipo Ha η rej rej rej rej and Ha aoβρχΗβΜ BoaooxjiawaaeMOM ιιιτοκβ3aKpenjreH 3aTpaBKo.nep> KaTejTi>. UItokh (c xjL'jiHHi.'Hhi McxííHMjM.iMH KX bis [N j.'iiuuiiíix nepeMeuieHHH, HMenuiHMH xapeTKy. YcTaHOBJíeHHye c bo3moikhocti> io πβρβΜβιιιβΗΗίΐ no BepTHKa.Jit.HOH HanpaBJíHiomeň. HBHHTOByio uiapHKOByn Napa, virgin κοτοροη 3aKperuiena b κβρετκβ and xoaoboh bhht coeaHHeH cBJieKTpoMarHHTHofi MyíToí, BaayMOaeňcTByioiueň c 3JieKTpoaBHraTejieM paeonero πβρβΜβιιιβΗΗΗ HBjieKTpoaBHraTeJieM ycKopeHHoro nepeMeuieHHS. Otjihhhb 3aKJTi0HaeTcsi b it. MTO KaMepa sepxHeňxacTbe mecTKO cesnaHa c Hecymeň kojiohhoh and ηητκηβΑ - c οπορηοη njiHToň. KaMepa. HecyuianKOJioHHa, CTaHHHa h onopnan njiHTa oepa3yioT τκββτκΗΗ O opepaoHMH KOHTyp . Kawaufí nexaHH3MnepeMememia uitokob CHasweH aonaJiHHTeJit> HOH ojieKTpoMarHHTHoň My * Sort the washing Ajra coeaHHeHHH BHHTa cajieicrpanBHraTejieM ycKopeHHoro nepeMeueHHa. RANK BunoJiHena H3 aeyx He3aBHCHMMX aacTeň. aKapeTKa ημθθτ bosmotuhoctL · caMoycTaHOBKH. BepxHHň uitok eunojmeH H3 aeyx KoaKCHajibHux TPY c.pa3aeJieHHbix προλολβημμη neperopoaxaMH Ha aee aacra Kawaaa H3 hhx CHaemeHa urrynepaMH. BepxHHeTopnu neperopoeoK coeaHHBHu nojiyKOJinnoM. Cτληηηθ coctoht ramne b tom. one hundred ycTaHOBKa cHaeweHa

MoayjibHMMH pewropaMH. 1-6 φηγ.MoayjibHMMH pewropaMH. 1-6 φηγ.

Claims (2)

271 245 -5- PŘEDMĚT VYMftLEZU271 245 -5- SUBJECT MATTER 1. Zařízení pro tažení monokrystale, těžkotavltelných oxldfl z taveniny, zahrnující stojans nosným sloupem, umístěný na opěrné desce, růstovou komoru s v ní umístěným lnduktoremuvnitř něhož je na spodní pístnlci, s vodním chlazením umístěn kelímek se soustavou tepelnéIzolace, horní pístnlci s vodním chlazením umístěnou nad kelímkem, tvořenou několika souosýmitrubkami a spojenou s držákem zárodečného krystalu. přičemž horní a spodní pístnice jsouspojeny s mechanismy pro jejich otáčení a posuv, které mají jezdec. umístěný s možnostíposuvu po vertikální vodící ploše, a kuličkový vodící šroub, jehož matice je umístěnav objímce. upevněné v jezdci, a který je spojen s elektromagnetickou spojkou, navzájempůsobící s elektromotorem pracovního posuvu a s elektromotorem zrychleného posuvu, a na hornípístnlci je umístěn snímač hmoty krystalu, vyznačující se tím. že za účelem zvýšení kvalitykrystalu v důsledku snížení mechanických poruch při tažení krystalů je komora horní částípevně spojena s nosným sloupem. a spodní - s opěrnou deskou. přičemž komora, nosný sloup,stojan a opěrná deska vytvářejí pevnou soustavu ve tvaru □. každý mechanismus posuvu pístnicje vybaven doplňkovou elektromagnetickou spojkou pro spojení vodícího šroubu s elektromotoremzrychleného posuvu, matice kuličkového vodícího šroubu je provedena ze dvou nezávislých částía objímka je vybavena dvěma souosými poloosami. rozmístěnými v horizontální rovině,procházející vertikálními osami šroubu a jezdce, horní pístnice je provedena ze dvou souosýchtrubek, dutina mezi těmito trubkami je rozdělena podélnými přepážkami na dvě části, vybavenéhrdly, a horní čela přepážek jsou vybavena půleným kroužkem, rozdělujícím dutinu v příčnémřezu.An apparatus for drawing monocrystal, heavy-duty oxldfl from a melt, comprising a support column, placed on a support plate, a growth chamber with an inductor positioned therein, on which a crucible with a thermal system is positioned on the lower piston, a water-cooled upper piston a crucible consisting of several coaxial tubes and connected to a seed crystal holder. wherein the upper and lower piston rods are coupled to mechanisms for rotating and sliding them to the slider. positioned with the possibility of sliding along the vertical guide surface, and a ball guide screw whose nut is located in the sleeve. mounted in a slider, and which is connected to an electromagnetic clutch, interacting with the working feed electric motor and the accelerated electric motor, and a crystal mass sensor is disposed on the upper piston, characterized in that: that, in order to increase the quality of the crystal due to the reduction of mechanical defects in the drawing of crystals, the chamber is rigidly connected to the support column. and bottom - with backing plate. wherein the chamber, the support column, the stand and the support plate form a fixed u-shaped system. each piston rod displacement mechanism is equipped with an additional electromagnetic clutch for connecting the lead screw to the electromotor of the accelerated feed, the ballscrew nut is made of two independent parts and the sleeve is equipped with two coaxial axes. spaced in a horizontal plane passing through the vertical axes of the bolt and the slider, the upper piston rod is made of two coaxial tubes, the cavity between the tubes is divided by longitudinal baffles into two parts, equipped with neck, and the upper part of the baffles are provided with a halving ring dividing the cavity in the transverse cut. 2. Zařízení podle bodu 1. vyznačující se tím. že je vybavena modulovou převodovkouspojující vodící šroub s elektromotorem zrychleného posuvu. 4 výkresy2. Apparatus according to claim 1, characterized in that: that it is equipped with a modular gear-connecting guide screw with an accelerator. 4 drawings
CS865569A 1985-08-09 1986-07-22 Device for hard-meltable oxides' monocrystals pulling from liquid alloy CS271245B1 (en)

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SU853946561A SU1397555A1 (en) 1985-08-09 1985-08-09 Installation for growing monocrystals of refractory oxides from melt

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JPH04260686A (en) * 1991-02-08 1992-09-16 Shin Etsu Handotai Co Ltd Device of pulling up single crystal
RU2191228C1 (en) * 2001-04-20 2002-10-20 Федеральное государственное унитарное предприятие "Конструкторское бюро общего машиностроения им. В.П.Бармина" Apparatus for melting and crystallizing materials
CN102286782A (en) * 2011-09-15 2011-12-21 江苏华盛天龙光电设备股份有限公司 Sapphire crystal growth method
US8891681B2 (en) 2012-03-20 2014-11-18 Intel Mobile Communications GmbH Transmitters and methods
RU2555481C1 (en) * 2014-02-14 2015-07-10 Федеральное государственное унитарное предприятие Экспериментальный завод научного приборостроения со Специальным конструкторским бюро Российской академии наук Unit for growth of sapphire monocrystals by kyropoulos method

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US3359077A (en) * 1964-05-25 1967-12-19 Globe Union Inc Method of growing a crystal
FR1542742A (en) * 1966-09-08 1968-10-18 Siemens Ag Device for drawing crystals
US3865554A (en) * 1971-09-23 1975-02-11 Little Inc A Pressure-and temperature-controlled apparatus for large-scale production of crystals by the czochralski technique
US4302280A (en) * 1978-11-14 1981-11-24 Texas Instruments Incorporated Growing gadolinium gallium garnet with calcium ions
FR2551470B1 (en) * 1983-09-06 1985-11-08 Crismatec SINGLE CRYSTAL DRAWING HEAD

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CS556986A1 (en) 1989-08-14
SU1397555A1 (en) 1988-05-23
EP0233950A4 (en) 1988-11-23
DD273556A3 (en) 1989-11-22
HUT45282A (en) 1988-06-28
HU200372B (en) 1990-05-28
EP0233950A1 (en) 1987-09-02
WO1987000870A1 (en) 1987-02-12
BG45486A1 (en) 1989-06-15

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