CS176690B1 - - Google Patents

Info

Publication number
CS176690B1
CS176690B1 CS143675A CS143675A CS176690B1 CS 176690 B1 CS176690 B1 CS 176690B1 CS 143675 A CS143675 A CS 143675A CS 143675 A CS143675 A CS 143675A CS 176690 B1 CS176690 B1 CS 176690B1
Authority
CS
Czechoslovakia
Application number
CS143675A
Other languages
Czech (cs)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to CS143675A priority Critical patent/CS176690B1/cs
Priority to DE19762606937 priority patent/DE2606937A1/de
Priority to NL7602116A priority patent/NL7602116A/xx
Priority to JP2270076A priority patent/JPS51112182A/ja
Publication of CS176690B1 publication Critical patent/CS176690B1/cs

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
CS143675A 1975-03-04 1975-03-04 CS176690B1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CS143675A CS176690B1 (ja) 1975-03-04 1975-03-04
DE19762606937 DE2606937A1 (de) 1975-03-04 1976-02-20 Verfahren und vorrichtung zum erzeugen magnetoaktiven plasmas zum duennen beschichten fester substrate
NL7602116A NL7602116A (nl) 1975-03-04 1976-03-01 Werkwijze voor het verkrijgen van een magnetisch actief plasma voor het vormen van dunne lagen aan het oppervlak van vaste substraten, en een inrichting voor het uitvoeren van deze werkwijze.
JP2270076A JPS51112182A (en) 1975-03-04 1976-03-04 Method and apparatus for generating plasma acted by magnetism to form thin film on surface of solid substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CS143675A CS176690B1 (ja) 1975-03-04 1975-03-04

Publications (1)

Publication Number Publication Date
CS176690B1 true CS176690B1 (ja) 1977-06-30

Family

ID=5348709

Family Applications (1)

Application Number Title Priority Date Filing Date
CS143675A CS176690B1 (ja) 1975-03-04 1975-03-04

Country Status (4)

Country Link
JP (1) JPS51112182A (ja)
CS (1) CS176690B1 (ja)
DE (1) DE2606937A1 (ja)
NL (1) NL7602116A (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2587729B1 (fr) * 1985-09-24 1988-12-23 Centre Nat Rech Scient Procede et dispositif de traitement chimique, notamment de traitement thermochimique et de depot chimique dans un plasma homogene de grand volume
CH671407A5 (ja) * 1986-06-13 1989-08-31 Balzers Hochvakuum
JP2805009B2 (ja) * 1988-05-11 1998-09-30 株式会社日立製作所 プラズマ発生装置及びプラズマ元素分析装置
JP2546405B2 (ja) * 1990-03-12 1996-10-23 富士電機株式会社 プラズマ処理装置ならびにその運転方法

Also Published As

Publication number Publication date
NL7602116A (nl) 1976-09-07
JPS51112182A (en) 1976-10-04
DE2606937A1 (de) 1976-09-23

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