CS172988A1 - Bath for chrome silicide layers etching for solid-phase integrated circuits - Google Patents
Bath for chrome silicide layers etching for solid-phase integrated circuitsInfo
- Publication number
- CS172988A1 CS172988A1 CS881729A CS172988A CS172988A1 CS 172988 A1 CS172988 A1 CS 172988A1 CS 881729 A CS881729 A CS 881729A CS 172988 A CS172988 A CS 172988A CS 172988 A1 CS172988 A1 CS 172988A1
- Authority
- CS
- Czechoslovakia
- Prior art keywords
- bath
- solid
- integrated circuits
- silicide layers
- phase integrated
- Prior art date
Links
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 title 1
- 238000005530 etching Methods 0.000 title 1
- 229910021332 silicide Inorganic materials 0.000 title 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 title 1
- 239000007790 solid phase Substances 0.000 title 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CS881729A CS272371B1 (en) | 1988-03-17 | 1988-03-17 | Bath for etching chromium silicide layers for solid phase integrated circuits |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CS881729A CS272371B1 (en) | 1988-03-17 | 1988-03-17 | Bath for etching chromium silicide layers for solid phase integrated circuits |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CS172988A1 true CS172988A1 (en) | 1990-05-14 |
| CS272371B1 CS272371B1 (en) | 1991-01-15 |
Family
ID=5352394
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CS881729A CS272371B1 (en) | 1988-03-17 | 1988-03-17 | Bath for etching chromium silicide layers for solid phase integrated circuits |
Country Status (1)
| Country | Link |
|---|---|
| CS (1) | CS272371B1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6833084B2 (en) * | 1999-04-05 | 2004-12-21 | Micron Technology, Inc. | Etching compositions |
-
1988
- 1988-03-17 CS CS881729A patent/CS272371B1/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| CS272371B1 (en) | 1991-01-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0497595A3 (en) | Local interconnect for integrated circuits | |
| TW299897U (en) | A semiconductor integrated circuit | |
| EP0239489A3 (en) | A process for forming vias on integrated circuits | |
| EP0413348A3 (en) | Inductive structures for semiconductor integrated circuits | |
| EP0478233A3 (en) | Process for fabricating integrated circuits | |
| EP0517368A3 (en) | Local interconnect for integrated circuits | |
| EP0354371A3 (en) | Semiconductor integrated circuit for a radio | |
| EP0473127A3 (en) | Semiconductor integrated circuit | |
| EP0416809A3 (en) | Reduced size etching method for integrated circuits | |
| EP0489394A3 (en) | Semiconductor integrated circuit | |
| EP0417992A3 (en) | A stackable multilayer substrate for mounting integrated circuits | |
| DE3571723D1 (en) | A process for forming vias on integrated circuits | |
| EP0472357A3 (en) | A semiconductor integrated circuit | |
| GB2209872B (en) | Fabrication method for semiconductor integrated circuits | |
| EP0461750A3 (en) | Interconnect for integrated circuits | |
| GB8723539D0 (en) | Integrated circuits | |
| EP0652588A3 (en) | Process for etching conductor layers in integrated circuits. | |
| ZA897262B (en) | Metallization process for an integrated circuit | |
| EP0489541A3 (en) | Integrated circuit fabrication utilizing amorphous layers | |
| CS172988A1 (en) | Bath for chrome silicide layers etching for solid-phase integrated circuits | |
| GB9226463D0 (en) | Integrated circuits | |
| EP0333206A3 (en) | Semiconductor integrated circuit | |
| GB2284315B (en) | Integrated oscillator circuits | |
| EP0445765A3 (en) | Semiconductor integrated circuit having an oriented resistance pattern | |
| GB9127476D0 (en) | A semiconductor integrated circuit |