CS172988A1 - Bath for chrome silicide layers etching for solid-phase integrated circuits - Google Patents

Bath for chrome silicide layers etching for solid-phase integrated circuits

Info

Publication number
CS172988A1
CS172988A1 CS881729A CS172988A CS172988A1 CS 172988 A1 CS172988 A1 CS 172988A1 CS 881729 A CS881729 A CS 881729A CS 172988 A CS172988 A CS 172988A CS 172988 A1 CS172988 A1 CS 172988A1
Authority
CS
Czechoslovakia
Prior art keywords
bath
solid
integrated circuits
silicide layers
phase integrated
Prior art date
Application number
CS881729A
Other languages
Czech (cs)
Other versions
CS272371B1 (en
Inventor
Jiri Ing Holoubek
Karel Ing Bok
Jaromir Ing Valicek
Original Assignee
Jiri Ing Holoubek
Karel Ing Bok
Jaromir Ing Valicek
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jiri Ing Holoubek, Karel Ing Bok, Jaromir Ing Valicek filed Critical Jiri Ing Holoubek
Priority to CS881729A priority Critical patent/CS272371B1/en
Publication of CS172988A1 publication Critical patent/CS172988A1/en
Publication of CS272371B1 publication Critical patent/CS272371B1/en

Links

CS881729A 1988-03-17 1988-03-17 Bath for etching chromium silicide layers for solid phase integrated circuits CS272371B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CS881729A CS272371B1 (en) 1988-03-17 1988-03-17 Bath for etching chromium silicide layers for solid phase integrated circuits

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CS881729A CS272371B1 (en) 1988-03-17 1988-03-17 Bath for etching chromium silicide layers for solid phase integrated circuits

Publications (2)

Publication Number Publication Date
CS172988A1 true CS172988A1 (en) 1990-05-14
CS272371B1 CS272371B1 (en) 1991-01-15

Family

ID=5352394

Family Applications (1)

Application Number Title Priority Date Filing Date
CS881729A CS272371B1 (en) 1988-03-17 1988-03-17 Bath for etching chromium silicide layers for solid phase integrated circuits

Country Status (1)

Country Link
CS (1) CS272371B1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6833084B2 (en) * 1999-04-05 2004-12-21 Micron Technology, Inc. Etching compositions

Also Published As

Publication number Publication date
CS272371B1 (en) 1991-01-15

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