CS125488A1 - Method of process of spent etch bath for copper - Google Patents

Method of process of spent etch bath for copper

Info

Publication number
CS125488A1
CS125488A1 CS881254A CS125488A CS125488A1 CS 125488 A1 CS125488 A1 CS 125488A1 CS 881254 A CS881254 A CS 881254A CS 125488 A CS125488 A CS 125488A CS 125488 A1 CS125488 A1 CS 125488A1
Authority
CS
Czechoslovakia
Prior art keywords
copper
etch bath
spent
spent etch
bath
Prior art date
Application number
CS881254A
Other languages
Czech (cs)
Other versions
CS263985B1 (en
Inventor
Otomar Ing Csc Spalek
Valerij K Varencev
Original Assignee
Otomar Ing Csc Spalek
Valerij K Varencev
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Otomar Ing Csc Spalek, Valerij K Varencev filed Critical Otomar Ing Csc Spalek
Priority to CS881254A priority Critical patent/CS263985B1/en
Publication of CS125488A1 publication Critical patent/CS125488A1/en
Publication of CS263985B1 publication Critical patent/CS263985B1/en

Links

CS881254A 1988-02-29 1988-02-29 Method of process of spent etch bath for copper CS263985B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CS881254A CS263985B1 (en) 1988-02-29 1988-02-29 Method of process of spent etch bath for copper

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CS881254A CS263985B1 (en) 1988-02-29 1988-02-29 Method of process of spent etch bath for copper

Publications (2)

Publication Number Publication Date
CS125488A1 true CS125488A1 (en) 1988-09-16
CS263985B1 CS263985B1 (en) 1989-05-12

Family

ID=5346455

Family Applications (1)

Application Number Title Priority Date Filing Date
CS881254A CS263985B1 (en) 1988-02-29 1988-02-29 Method of process of spent etch bath for copper

Country Status (1)

Country Link
CS (1) CS263985B1 (en)

Also Published As

Publication number Publication date
CS263985B1 (en) 1989-05-12

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