CN85200016U - Silicon pieroresistance probe for measuring the velocity of pulsating flow - Google Patents

Silicon pieroresistance probe for measuring the velocity of pulsating flow Download PDF

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Publication number
CN85200016U
CN85200016U CN 85200016 CN85200016U CN85200016U CN 85200016 U CN85200016 U CN 85200016U CN 85200016 CN85200016 CN 85200016 CN 85200016 U CN85200016 U CN 85200016U CN 85200016 U CN85200016 U CN 85200016U
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CN
China
Prior art keywords
velocity
measuring
probe
pressure
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN 85200016
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Chinese (zh)
Inventor
张训时
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Tsinghua University
Qinghua University
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Tsinghua University
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Publication date
Application filed by Tsinghua University filed Critical Tsinghua University
Priority to CN 85200016 priority Critical patent/CN85200016U/en
Publication of CN85200016U publication Critical patent/CN85200016U/en
Expired - Lifetime legal-status Critical Current

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Abstract

The utility model relates to a silicon pieroresistance probe for measuring the velocity of pulsating flow, which belongs to the technical field of the probe for measuring the fluctuating velocity of the water flow. The utility model provides a new style fluctuating velocity measuring probe for the water flow. The utility model is formed by that a midget silicon piezoresistance pressure sensor is arranged on the end of the velocity measuring probe of which the external shape is similar to a traditional pitot; the midget silicon piezoresistance pressure sensor perceives the pressure value of the flow velocity of the water stream; the pressure value is converted into the electrical signal and is transported to the measuring instrument. In this way, the timely average value of the pulsating quantity of the flow velocity of the water stream is measured. The utility model is mainly used for measuring the fluctuating velocity of the water flow and the time average flow velocity and can also be used for pressure measurement and the measurement of the flow velocity of the water.

Description

Silicon pieroresistance probe for measuring the velocity of pulsating flow
The utility model relates to a kind of probe of measuring the flow fluctuation flow velocity.
The existing device of measuring the flow fluctuation flow velocity has two kinds: a kind of is the laser current meter, and its equipment complexity costs an arm and a leg, and is not easy to operate, can only test the speed in the current of glass experimental tank usually, therefore is difficult to widespread use.Second kind is heated filament (or hotting mask) anemoscope, and it is successfully used to gas flow measurement, and still some technology is to be solved to be used for current, now existing experiment illustrations, but serviceable life is limited.
Traditional pitot tube type knotmeter is the front end current formation stationary point at pitot tube, thereby convert flow velocity V to force value ρ (V2)/2, wherein ρ is a density of liquid, measure this force value and obtain water velocity with specific pressure, because the fluid column inertia in the specific pressure meter is very big, do not catch up with the variation of flow fluctuation flow velocity, thus can only be used for the measurement of time average velocity usually, and energy measurement fluctuating velocity not.
The objective of the invention is to provide a kind of probe of novel measurement flow fluctuation flow velocity, it can not only measure the fluctuating velocity and the time average velocity of current exactly, and simple structure, and easy to operate, waterproof is reliable, long service life.
Invention is achieved in that the small-sized silicon piezoresistive pressure sensor that utilizes semiconductor and IC fabrication techniques diameter very little, be contained in the end of the profile holes probe similar, directly experience the force value ρ (V of water velocity V by the silicon piezoresistive pressure sensor to traditional pitot tube 2)/2, and convert the electric signal that is proportional to this force value to, through lead this electric signal is transferred to measuring amplifier and register instrument, directly measure the pulsating quantity and the hourly value of flow rate of water flow.
Because the pressure-sensitive area of silicon piezoresistive pressure sensor is very little, about 1 * 1 square millimeter, can regard a deformation-free element as, and the liquid weight that is comprised in this section channel volume the interior silicon piezoresistive pressure sensor that installs to popping one's head in from the pressure sensing hole of popping one's head in only 0.05~0.1 restrains, make whole holes probe have good frequency response characteristic, can directly experience the flow rate of water flow pulsatile change, carry out the measurement of fluctuating velocity.
The invention solves the medium-term and long-term problem that needs the measurement flow fluctuation flow velocity of solution in hydraulic measurement field, though the present invention is simple in structure very effective, in addition, the present invention is easy to operate, and waterproof is reliable, long service life.This probe is mainly used in the fluctuating velocity of measuring current, also can be used for the measurement of current time average velocity and pressure, also can be used for the measurement of rivers flow velocity.
The concrete structure of invention is provided by following embodiment and accompanying drawing thereof:
Fig. 1 is the sectional view of the silicon pressure drag fluctuating velocity measuring sonde of proposition according to the present invention.Describe the details of the holes probe of the present invention's proposition in detail in conjunction with Fig. 1.
This holes probe is by shell (1) and silicon piezoresistive pressure sensor (2), (3) form, the end of shell (1) and side have two pressure sensing holes (4), (5) and pressure-sensitive passage (6), and (7) are in pressure-sensitive passage (6), (7) end is equipped with silicon piezoresistive pressure sensor (2), (3), water pressure is through pressure-sensitive passage (6), and (7) act on silicon piezoresistive pressure sensor (2), (3) on, the lead that is connected with silicon piezoresistive pressure sensor is drawn by lead-in wire groove (8).
Pressure-sensitive passage (6) should be lacked as far as possible, and wherein liquid weight is preferably 0.05~0.1 gram, and pressure-sensitive passage (6) can inject light-weight water-proof oil guard silicon piezoresistive pressure sensor in (7).
Shell (1) the most handy stainless steel or copper material are made.
If block pressure sensing hole (5) with copper wire or scolding tin, can form the single hole holes probe, measure fluctuating velocity specially.

Claims (2)

1, a kind of probe of measuring water velocity, there are pressure sensing hole [4], [5] and pressure-sensitive passage [6], [7] in the end of shell [1] and side, it is characterized in that the interior liquid weight of described pressure-sensitive passage [6] is 0.05~0.1 gram, at pressure-sensitive passage [6], [7] end silicon piezoresistive pressure sensor [2], [3] are housed, go up the lead that connects in silicon piezoresistive pressure sensor [2], [3] and draw, in pressure-sensitive passage [6], [7], inject light-weight water-proof oil through lead-in wire groove [8].
2, probe according to claim 1 is characterized in that pressure-sensitive aperture (5) blocked by copper wire or scolding tin.
CN 85200016 1985-04-01 1985-04-01 Silicon pieroresistance probe for measuring the velocity of pulsating flow Expired - Lifetime CN85200016U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 85200016 CN85200016U (en) 1985-04-01 1985-04-01 Silicon pieroresistance probe for measuring the velocity of pulsating flow

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 85200016 CN85200016U (en) 1985-04-01 1985-04-01 Silicon pieroresistance probe for measuring the velocity of pulsating flow

Publications (1)

Publication Number Publication Date
CN85200016U true CN85200016U (en) 1985-09-10

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN 85200016 Expired - Lifetime CN85200016U (en) 1985-04-01 1985-04-01 Silicon pieroresistance probe for measuring the velocity of pulsating flow

Country Status (1)

Country Link
CN (1) CN85200016U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101283237B (en) * 2005-06-17 2011-01-19 埃朗根纽伦堡弗里克德里亚历山大大学 Method and device for determining the instantaneous mass flow of pulsating flows
CN109646791A (en) * 2018-12-14 2019-04-19 温州医科大学 A kind of kidney urine drainage system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101283237B (en) * 2005-06-17 2011-01-19 埃朗根纽伦堡弗里克德里亚历山大大学 Method and device for determining the instantaneous mass flow of pulsating flows
CN109646791A (en) * 2018-12-14 2019-04-19 温州医科大学 A kind of kidney urine drainage system

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