CN85106106A - Slender glass is the preparation method of the prefabricated component used of optical waveguides particularly - Google Patents

Abstract

With SiO ₂Prepare for basic components in the method for elongated glass body (as optical waveguded preform), in order to simplify the conformal pressing process, pre-compacted powder when technology of the present invention is packed compacting tool set at glass powder; After charging finished, compacting pre-compacted powder obtained porous insert.Step of the present invention and measure make the shape of the easily gentle bent flexible pipe that is suitable for use as compacting tool set most keep stable in the charging process.Screw feeder or several coaxial placement or screw feeder arranged side by side are mutually used in charging, form the porous insert that meets the requirements to obtain radially material.The compacting tool set of the different designs that preparation tubulose or bar-shaped porous insert use has also been described.

Description

Slender glass is the preparation method of the prefabricated component used of optical waveguides particularly

The present invention relates to prepare elongated glass body, particularly with SiO ₂The method of the prefabricated component of using for the optical waveguides of raw material in this method, is made porous insert by glass powder earlier, then porous insert is sintered into vitreum.

In DE-OS3217965, introduced a kind of like this method.In the method, the process of being made porous insert by glass powder is as follows: the glass powder loosely is packed in the compacting tool set, then loose powder of packing into is pressed into the shape of porous insert.This charging step also can be called once charging, particularly has under the situation of segmenting very much cloth at powder, only can obtain very little density.The result makes and keeps the compacting of shape to become very difficult.Have again, in the charging process of carrying out, owing to form bridge construction in the powder with this method.Thereby may produce the cavity, thereby make the compacting tool set non-uniform charging.

DE-PS32 40 355 has also introduced a kind of similar preparation method.In the method, the frit loosely of fine granularity is piled a kind of blocks, in its banking process, shape is stablized around this blocks.Use drawing method then, make porous insert by them.This preparation method also has following shortcoming, and from piling up, the density in this block is very little, and might form the hole, and this point makes and keeps the compacting of shape to become very difficult.

For this reason, target of the present invention is to provide a kind of preparation method that can avoid these shortcomings of traditional method.The method that proposes in the claim 1 has reached this target.Proposed this preparation method's optimum implementation in the dependent claims and further developed.Especially, claim 14 relates to the equipment of implementing the method according to this invention.

Below, with reference to the accompanying drawings 1 to 3 and in conjunction with example, explain the present invention in more detail, in the accompanying drawings:

Fig. 1 shows that the preparation method that proposes according to the present invention is pack into a kind of equipment of compacting tool set of glass powder.

Fig. 2 has showed a kind of device of the charging that is used to regulate equipment shown in Fig. 1.

Fig. 3 a has showed the some of a kind of feeder apparatus that is used to make the tubulose porous insert.

Fig. 3 b has showed a kind of compacting tool set that the feeder apparatus shown in Fig. 3 a matches.

Below, be conceived to the practical application of the present invention aspect the prefabricated component used of preparation fiber waveguide, the present invention is described, its raw material is with SiO₂Be main, in order to change the refractive index of material, usually contain one or more adulterants in the raw material, such as GeO₂、P ₂O ₅、F、B ₂O ₃ Should be pointed out that according to preparation method of the present invention and also be suitable for preparing other goods except fiber waveguide. As long as can make employed raw material Powderedly, can be pressed into porous body to them, and porous body is sintered into vitreum.

Equipment shown in Fig. 1 comprises a bank 1, and the glass dust raw material wherein is housed, and this bank seals, and is isolated with ambient atmosphere. With regard to above-mentioned practical situations, relate to SiO₂For Main Ingredients and Appearance, with the glass powder of synthetic method preparation, wherein also may add some adulterants. In order to prepare material, not only can use the above-mentioned chemical gas-phase reaction method of introducing in having earlier openly, and flame hydrolysis (being also referred to as pyrolysismethod), so-called " wet-chemical " method also can be used, in this wet chemistry method, be precipitated thing by the chemical liquid phase reaction. Sediment oven dry obtained powder thereafter.

Before batch can that powder is packed into, according to the humidity and the purity of the powder that obtains by synthesis method.Have and necessary powder carried out drying treatment and/or powder is purified by the thermal treatment in chloride environment by tempering in a vacuum; Or preferably carry out these processing.Because the surface of powder is very big, so the effect of this drying and purification is more much bigger than the effect of the respective handling after making porous insert.Correspondingly, this pre-treatment allows to use purity low and humidity is big and the lower material of preparation cost.In order to increase the volume density of powder, thereby be convenient to keep the compacting of shape, have necessity or preferably make the powder conglomeration, for this purpose, adoptable method has thermal treatment, mechanical treatment or liquid treatment.

Near bottom place, a screw feeder 3 is arranged in bank 1, it is electric motor driven by the outside.By means of this screw feeder, the powder that is contained in bank can transport from bank 1 by a long feeding pipeline.Feeding pipeline 4 extend in the pressing die to be feeded.In the example that provides, pressing die is a flexible pipe 5 that flexibility is arranged, and at its end that is positioned at feed direction, with lid 6 it is sealed.Because the feed power that screw feeder produces by the electric motor by it is towards the direction binder of lid 6, and covers 6 and be subjected to the effect of the opposite force opposite, thereby produced charging pressure with feed direction.

In order to limit charging pressure, a kind of equipment that can produce adjustable opposite force is provided, with reference to Fig. 2 this equipment is described hereinafter.The effect of charging pressure can make the gentle bent flexible pipe of making compacting tool set expand brokenly, can produce sizable departing from the desired cylindrical material of packing into like this.For this cause, in the charging process, make the shape of flexible pipe 5 keep stable with a rigid shape holding member around flexible pipe.In fact, a pipe just is enough to reach this purpose, and this pipe was filled in the end of flexible pipe, and flexible pipe pastes the inwall of paying this pipe in the charging process.But, because in the pressing process of thereafter the hose material of packing into, sizable contraction can take place in volume, so in this pressing process, can cause wrinkle in flexible pipe 5.These wrinkle can be seen on resulting porous insert surface, if do not take special countermeasure, can make the porous insert surface produce undesirable wrinkle and ripple.According to by a preparation method's of the present invention optimum implementation, propose one and tackled measure, promptly in the charging process, make flexible pipe 5 give expansion and carry out, thereby prevent to form fold in afterwards the pressing process.Can realize this point, be that the inwall of this twin wall emitter lateral 7 has been beaten many apertures as shown in FIG. because use a kind of twin wall emitter lateral 7 as stable shaped stiffener, and the pressure of increase can either be born in the internal space between two walls, also can bear the pressure that reduces.In order to realize the variation of pressure, be provided with the opening of loading onto tube stub (or socket) 8 at the outer wall of managing 7, can put the vacuum pump extraction pipe on this tube stub.This vacuum pump as water ejector pump, produces negative pressure in the space between tube wall.This negative pressure acts on the flexible pipe 5 by the porous inwall, draws it along the direction of inwall, and makes it be expanded to the degree that smoothly contacts with this inwall.Therefore, such rigid shape keeper makes flexible pipe 5 give expansion, simultaneously, makes the shape of flexible pipe 5 keep stable in the charging process.

In order to seal feeder sleeve 4 and to give the space of expanding between the flexible pipe 5, with the exit end of wear ring 9 around feeder sleeve 4, this wear ring is fixed on the feeder sleeve, and providing a constant frictional force at feeder sleeve 4 and 5 of predilation flexible pipes with it, the length that this frictional force and feeder sleeve 4 extend in the compacting tool set is irrelevant.

Seal the pressing die port that is positioned on the feed direction with above-mentioned lid 6, in the side of this lid facing to pressing die, be provided with a truncated cone shape protuberance 10, it covers on flexible pipe 5 and is pressed towards the port of pipe 7, thereby its sleeve surface is contacted with the port of flexible pipe securely, thereby with its sealing.With unillustrated stationary installation among the figure, for example clamp is contained in this lid on the pipe 7, and it can be contained in the outside of pipe 7, perhaps with a screwed cap that surrounds this lid it is screwed on the outside of pipe 7.

In the time of in described pressing die that powder is packed into, charging pressure makes powder obtain pre-compacted.In this process, the feed of screw feeder is tried hard to recommend the moving whole pressing die that comprises shape holding part, its direction makes compacting tool set leave feeder sleeve along feed direction with to act on the opposite force that covers opposite, has almost all filled the pre-compacted powder up to the entire inner space of flexible pipe 5.During loading operation, compacting tool set with respect to the direction of motion of feeder sleeve by compacting tool set down between shown in arrow represent that it points to along feed direction (Fig. 1).

Loading operation is closed vacuum pump after finishing, and takes off extraction pipe from tube stub or socket 8.The pre-compacted powder of packing into makes and remains on its expansion state through the flexible pipe 5 that gives expansion.At this moment, take off the compacting tool set of the shape holding part that comprises it from loading device, whole loading device is shown in Fig. 2, hereinafter also will describe.Again with one corresponding to the another port sealing of the lid of above-mentioned lid 6 with compacting tool set, then it is placed in the working liquid of isostatic pressing machine.The working liquid of these static pressure machines is entered in the gap of twin wall emitter lateral 7 by tube stub or socket 8, and the air in the space is also from this tube stub or socket, or overflows from another opening.Subsequently, the pressure of isostatic pressing machine is controlled in the scope of 100 to 300 crust (bar), this pressure acts on the outside of predilation flexible pipe by managing 7 porous inwall, makes radially pressurized of whole flexible pipe, thereby obtains desired porous insert.Though the isostatic pressing machine structure of this in being contained in press in all its bearings applies uniform pressure, but under present situation, because the two ends of flexible pipe are all sealed by rigid cap, so this pressure just radially acts on the compacting tool set, in pressing process, the longitudinal size of the material of packing into remains unchanged like this.

Different with the isobaric pressing process as a kind of best drawing method among the above-mentioned DE-PS 3040355, radially compacting making and makes long continuous multi-hole body and become easily specially, because the parameter of pressing process and can't help length and change.

After pressing operation is finished, from isostatic pressing machine, take off pipe 7, one or two lids are opened, take off the pressurized body that is surrounded by flexible pipe 57 from managing then.Then, further expansion flexible pipe 5 takes off the porous insert that presses therefrom, in further first being processed, has necessary using such as the method for lapped face mechanical workout is carried out on the porous insert surface, meets the requirements up to its geometrical shape.

Then porous insert is carried out physics and/or chemically cleaning processing.As the physics clean, can be placed on it in the electric arc or carry out clean in the high pressure plasma, and handle as chemically cleaning, can in chloride environment, it be heat-treated, so that from porous insert, remove any hydroxyl and the transition metal impurity that may contain.

The porous insert that is obtained by above-mentioned preparation method has uniform material and forms.At this moment, can further be processed into optical waveguides to it, for example, porous insert be made vitreum by sintering, be drawn into glass fibre from the vitreum of making then.

Under the simplest situation, can in pulling process, be coated in the little transparent plastics covering of refractive index ratio frit on the glass fibre, obtain the optical waveguides of plastics covering fibers form thus, promptly so-called PCS(PCS plastic-clad silica) fiber.But also can further be processed into various types of optical waveguidess to porous insert with other any methods, this point also will illustrate hereinafter.

Now, with reference to Fig. 2 the entire infrastructure of loading device is described, (wherein relevant with preparation method of the present invention material particular is in shown in Fig. 1) particularly illustrates the equipment of the opposite force that between charging period generation is opposite with the feed force direction of screw feeder.Following parts all are fixedly mounted on the base plate 11: bank 1, stretch out feeder sleeve 4 above it; Vertically be placed on the mounting plate 12 on the base plate, mounting plate 12 and bank 1 are set at the relative two ends of base plate 11; Resting support 13, it is contained on the base plate in bridge shape mode, and promptly the longitudinal axis of the length direction of its lintel 14 and base plate is perpendicular, and parallels with the direction of mounting plate 12.Be equipped with between resting support vertical part and mounting plate 12 as two of conduit 15 guiding parts parallel to each other, on conduit 15, the back-pressure plate 16 that pilot sleeve 17 is housed can vertically moving between resting support and mounting plate along base plate.

In compacting tool set is arranged, and there is feeder sleeve 4 to stretch into wherein pipe 7, can be as back-pressure plate 16, move along the longitudinal, because it is rigidity but removably is connected with back-pressure plate 16, perhaps because it is to be placed on movably in the guide channel, it is contacted with the back-pressure plate by a port of a lid sealing and is not connected.By an adjustable weight 18, from the outside back-pressure plate 16 this end with pipe 7 is adjacent to mutually, this weight 18 is suspended on the resting support 13 by drag rope 19 and rope sheave 20, because the effect of screw feeder, push this end of this pipe to managing 7 interior powders, drag rope 19 is contained in the both sides of back-pressure plate 16.

Like this, in the charging process, because the effect of screw feeder, compacting tool set is pushed away out feeder sleeve along feed direction, and the result makes the powder of packing into obtain pre-compacted.The pressure that carries out pre-compacted depends on weight 18, this weight extruding back-pressure plate, therefore also just with the direction opposite with the feed force direction of screw feeder, pushing this end of feeder sleeve, pack into the feeding speed of mould of powder is by the structure of screw feeder and rotating speed decision thereof, and charging pressure can be regulated by weight 18.

Self-evident, also have some other equipment also to be suitable for powder being packed in the compacting tool set with adjustable charging pressure.For example, a kind of equipment that direction of operating is opposite on kinematics also is possible, in this equipment, pipe 7 is provided with regularly, and the adjustable weight opposite with the feed force direction with action direction is relative, and bank makes it and can move along the direction opposite with feed direction together with the setting of feeder sleeve 4.

In principle, the formation that also can be applied to porous insert to be made with reference to the described loading operation of Fig. 1 is inhomogeneous, but material is formed along radially changing this situation of material.This is possible, because except shown in the powder in the compacting tool set longitudinal axis zone be transported to the screw feeder 3 in it, one or several other screw feeder with the 3 coaxial placements of center convolution loader also can be installed, be used for the material of other structure is packed near the coaxial zone of central zone.At this moment, these screw feeders are configured in the space between the loader pipeline of several coaxial placements.To each screw feeder, can both regulate its feeding speed and charging pressure respectively.Just as previously mentioned, the maximum that reaches in each zone charging pressure depends on and acts on seal for pipe joints end opposite force.By regulating the charging pressure that is produced respectively by different screw feeders respectively, each regional material radially adjacent one another are is formed selected variation in the axial direction.In order to prepare various types of optical waveguidess,, utilize this close coupled type screw feeding apparatus by preparation method of the present invention, can make the porous insert of forming by the stamen frit, and if necessary, it is radially formed and can gradually change, and the outside is the cladding glass material by any institute calling hierarchy.

Utilization is placed to such as triangular form quadrate screw feeder, and is surrounded by the loader pipeline respectively around this loader, can also prepare the porous insert that other do not have complete rotational symmetry structure as described above.Like this, just, can prepare many stamens optical waveguides.In this many stamens optical waveguides, independently optical signal can be propagated parallel to each other, and perhaps this optical waveguides has the characteristic that keeps the optical signal polarization state.If this many stamens device also needs to be with one deck or which floor covering, the screw feeder that utilizes other one or several to extend so round this many stamens device, one or more material pack into the coaxial zone of many stamens device in, also can realize this point.Here, to each loader, can both regulate its charging pressure and feeding speed respectively.

In the above-mentioned part of this specification sheets, the compacting tool set of description is independent of the screw feeding apparatus, and its shape is a hollow cylinder.Like this, the always bar-shaped porous insert that obtains by the compacting of carrying out thereafter.But, also can design compacting tool set like this, making the porous insert that obtains is piped, for this purpose, needs to use a kind of screw feeder different with the screw feeder shown in Fig. 1.This loader does not transport the material in its axis zone, but transport with the coaxial circular cylindrical cross-section zone of its turning axle in material.Shown a kind of such screw feeder among Fig. 3 a.

This screw feeder 20 in the interior pipe 21 of co-axial alignment and the space between the outer tube 22 around interior pipe rotation so that glass powder by this space input compacting tool set and the zone of coaxially leaving axis.

In order to form tubular body arranged inside, can use the compacting tool set of type shown in Fig. 1, but must revise it a little this moment, also can use compacting tool set shown in Figure 3.The modification of the compacting tool set shown in Fig. 1 is comprised the longitudinal axis along it, pass through, dispose a rod or pipe, for example quartzy rod or the pipe of manufacturing, for example, can be contained in it and cover in 6 the central recess, and behind the charging end of processing, also be contained in it in the corresponding recesses of another lid so long.This screw feeder shown in Fig. 3 a, with corresponding to the front with reference to the described the sort of mode of Fig. 1, powder is packed in the space between this quartz glass bar or pipe and the predilation flexible pipe 5.After pressing process finishes, can easily take out this bar-shaped or tubular matrix from the porous insert center that presses.

Include two wear rings 23 and 24 at the device shown in Fig. 3 a at its front end, be used for sealing the zone that powder enters compacting tool set.These two wear rings 23 are identical with wear ring 9 in the device shown in Fig. 1 with 24, and the constant friction power with location independent can be provided.Under the situation of the compacting tool set shown in Fig. 1, inner seal ring 23 is contained in the inside of interior pipe 21.And contact with the outside of bar-shaped or tubular matrix, and outer seal ring 24 is contained in the outside of outer tube 22, and contact with the inboard of flexible pipe 25.

In Fig. 3 b, shown and adopted this class screw feeder shown in Fig. 3 a to manufacture the another embodiment of the compacting tool set of tubulose porous insert.This compacting tool set is made up of easily gentle bent flexible pipe 25 and rigidity outer tube 26.By the device shown in Fig. 3 a, pack into space between flexible pipe 25 and the outer tube 26 of powder.For the shape that makes flexible pipe 25 during loading operation keeps stable, it is enclosed within on the rigid matrix.The most handy perforated tube 27 is as such matrix, and by hole or the hole on this perforated tube 27, the working liquid of pressing machine can put on its pressure the inside of flexible pipe 25.Like this, can be being contained between flexible pipe and the rigidity outer tube, and between charging period by the powder of pre-compacted along radially pressing to the rigid pipe outer wall.Different with the device of Fig. 1, will flexible pipe 25 predilations in this device, because here during pressing operation, flexible pipe is from inside to outside expanded.Rather than resemble compression from outside to inside the situation of Fig. 1.During loading operation, with rigid cap 228,, flexible pipe 25 that contacts with perforated tube 27 and the space between the rigidity outer tube 26 are sealed at compacting tool set one end that is positioned at feed direction, this rigidity is stamped an annular boss 29 and stretches in this space, from all around it being sealed.In order to make working liquid can enter perforated tube 27 internally after loading operation finishes, there is an aperture at the center of lid 28.As the corresponding lid that is pressed in the compacting tool set opposite side.After loading operation, use the device shown in Fig. 1, an adjustable opposite force is added in covers 28 the back side, this opposite force has limited charging pressure.And, for the described same reason of reference Fig. 1, use this compacting tool set to compacting along radially carrying out, also caused same advantage in this case.

There are several methods to change into the elongated bar-shaped vitreum that is suitable for doing optical waveguide preforms to the tubulose porous insert.Through corresponding to the front in conjunction with the illustrated physics of bar-shaped porous insert, chemical treatment, and after the mechanical treatment where necessary, can sinter this tubulose porous insert into bar-shaped vitreum.Second kind of possibility is that bar-shaped porous insert is inserted in the tubulose porous insert for preparing with preceding method, then this porous rod one tubular construction is carried out sintering and obtains bar-shaped vitreum, if the bar-shaped porous insert that the tubulose porous insert is made up of clad material and its stamen material of optical waveguides is formed.Then in this case, the enough glassiness prefabricated rods that obtains thus of energy produce the optical waveguides of a stamen cladding structure.

Another kind of feasible method by bar-shaped porous insert and tubulose porous insert making elongated glass body, be that the tubulose porous insert is sintered into Glass tubing, bar-shaped porous insert is sintered into glass stick, then glass stick is inserted in the Glass tubing, and this structure fusion is obtained elongated glass body.

Should also be noted that each stage, up to sintering the elongated glass body that is suitable for use as prefabricated component into, must prevent that all material from being polluted from the preparation powder in above-mentioned preparation method.

For this purpose, preferably allow the bank sealed air-tight all the time that holds powder, and in sealed environment, for example in the glove box that vacuumizes the powder compacting tool set of packing into.One or several loader pipeline stretches in the glove box by the vacuum-sealing passage from the outside.Just after the usefulness lid is airtight the compacting tool set both sides, just compacting tool set is taken out from this glove box, then it is put into isostatic pressing machine.

Another measure of avoiding polluting is, in chlorine gas environment, carry out the thermal treatment of porous insert, then in a kind of equipment, it is sintered into vitreum, in this equipment, between the thermal treatment and sintering process of porous insert in chloride compression ring border, be in the sealed environment always.For example, mobile from bottom to top porous insert allows its first zone by heat-treating earlier, its is directly moved into therefrom carry out second zone of agglomerating again.

Below, the another kind of preparation method that can supply the pattern of sampling is described, it adopts equally according to principle of the present invention.I.e. pre-compacted glass powder in the process of compacting tool set that material is packed into, but, in this method, when being packed into compacting tool set, do not use in material any screw feeder, the preparation method of this modification is, the design compacting tool set can use the same method, perhaps compacting tool set and described above similar, but during loading operation, make the compacting tool set rotation, even centrifugal force works along its y direction, powder is loaded into compacting tool set, and obtains pre-compacted under this action of centrifugal force, and charging pressure depends on centrifugal force.In this method, also can use several coaxial pipelines to prepare the porous insert of radially forming gradual change, perhaps the tubulose porous insert.

Claims (21)

1, the preparation elongated glass body is particularly with SiO ₂The method of the prefabricated component of using for the optical waveguides of basic component, earlier glass powder is processed into porous insert in the method, again porous insert is sintered into vitreum, it is characterized in that pack into the mode of compacting tool set (5,25,26) of glass powder should make it to obtain pre-compacted in the charging process, and after charging is finished, this materials processing through pre-compacted is become porous insert with drawing method.

2, as the method that claim 1 proposed, it is characterized in that: as compacting tool set, and between charging period, make the flexible pipe shape keep stable by shape holding part (7) around this flexible pipe with a flexible pipe (5) that flexibility is arranged.

3, as the method that claim 2 proposed, it is characterized in that: use a kind of twin wall emitter lateral (7) as shape holding part, its inwall is drilled with aperture, and the pressure in the space between pipe two walls can reduce or increase.

4, as method that claim 3 proposed, it is characterized in that: between charging period, by reducing the pressure in the space between pipe (7) two walls, make above-mentioned flexible pipe (5) predilation that flexibility is arranged, and after the charging process is finished, by increasing the pressure in this space, radially compress flexible pipe, promptly the material that has filled is pressed into porous insert thus.

5, as the method that any one proposed in the claim 1 to 4, it is characterized in that: adjustable continuously by screw feeder (3,20) at pressure, under the condition that feeding speed is adjustable, glass powder is packed in the compacting tool set (5,25,26).

6, as the method that any one proposed in the claim 1 to 4, it is characterized in that: with the device of a plurality of coaxial screw feeders compositions, pack into the zone of near axis of this device of the powder of first kind of composition, and at least a kind of different powders of forming pack into at least one coaxial zone of above-mentioned near axis zone in, under pressure can be in harmonious proportion the respectively adjustable condition of feeding speed respectively continuously, material is packed in the compacting tool set (5,25,26).

7, as any one proposed in the claim 1 to 4 method, it is characterized in that: with the screw feeder of several arrangements parallel to each other, same composition or the different material of the forming interior region of packing into, center on this interior region with one or several again, and mutual coaxial screw feeder, the material of other composition is packed in its next-door neighbour's the zone, and packing into respectively of these materials carried out under pressure can be in harmonious proportion the adjustable respectively condition of feeding speed continuously.

8, as the method that any one proposed in the claim 1 to 7, it is characterized in that: the design of described compacting tool set (5) makes the porous insert of making be bar-shaped form.

9, as the method that any one proposed in the claim 1 to 7, it is characterized in that: the design of described compacting tool set (25,26) makes the porous insert of making get tubular form.

10, as method that claim 9 proposed, it is characterized in that: center in described compacting tool set (5), extend to the other end from the one end along the longitudinal, place a bar-shaped matrix, with glass powder in pre-compacted is packed space between this matrix and compacting tool set sidewall into, compacting then after pressing process finishes, is taken out bar-shaped matrix from porous insert.

11, as method that claim 9 proposed, if not according to claim 9, then with reference to claim 2,3,4 and 7, it is characterized in that: the device that described compacting tool set (25,26) is made up of the rigid pipe (26) of coaxial placement and the bent flexible pipe (25) that can soften, the powder of pre-compacted is packed in the space between flexible pipe (25) and rigid pipe (26), rigid cylindrical body (27) is inserted in the flexible pipe, make the shape of this flexible pipe (25) in the charging process, keep stable.

12, as the method that claim 11 proposed, it is characterized in that: use perforated tube (27) as the rigid cylindrical body, behind the charging end of processing, increase the pressure in the perforated tube, make flexible pipe (25) expansion, thereby make the powder of packing into, be pressed into the tubulose porous insert from inside to outside along radially being compressed.

13, according to the method that any one proposed in the claim 1 to 12, it is characterized in that: be used for the pressure that pre-compacted is contained in the glass powder of compacting tool set, depend on the power of screw feeder (3,20), and be subjected to acting on compacting tool set (5; 25,26) a end is positioned at the restriction of the adjustable opposite force on the feed direction.

14, the equipment of the method that is proposed in the enforcement claim 13, it is characterized in that: each screw feeder (3 that works individually or in device, work, 20), all be placed on loader pipeline (4) or this loader plumbing installation (21,22) in, powder is being packed into by shape retaining member (7,27) make its shape keep stable compacting tool set (5,25) in during, one end of compacting tool set seals, loader pipeline (4) or this loader plumbing installation (21,22) the vertical the other end from it along compacting tool set stretches into, and compacting tool set is placed along feed direction also can be with respect to loader pipeline (4,21,22) move facing to the opposite force that acts on its sealed end.

15, as the method that any one proposed in the claim 1 to 13, it is characterized in that, after installing powder, each with a rigid cap (6,28) this compacting tool set (5 that keeps its dimensionally stable by shape retaining member (7,27); 25,26) sealed at both ends, then it is placed on and stands to act on from every side its lateral pressure in the isostatic pressing machine, promptly exert pressure in such a way, make working liquid only the porous wall by shape retaining member (7,27) along radially to this compacting tool set (5; 25,26) exert pressure.

16, the technology as being proposed in the claim 15 is characterized in that: the clean of the porous insert that is obtained by compacting being carried out physics or chemistry.

17, as the technology that claim 16 proposed, it is characterized in that: before above-mentioned porous insert is carried out clean, earlier mechanical workout is carried out on its surface, meet the requirements up to its geometrical shape.

18, as the technology that claim 17 proposed, it is characterized in that: prepare bar-shaped porous insert and tubulose porous insert respectively, bar-shaped porous insert is inserted in the tubulose porous insert, obtain vitreum thereby rod one tubular construction that obtains is thus carried out sintering.

19, the technology that is proposed as right 17, it is characterized in that: prepare bar-shaped porous insert and tubulose porous insert respectively, and they are prepared into bar-shaped vitreum and tubular glass body, and bar-shaped vitreum is inserted in the tubulose vitreum, then both fusions are obtained vitreum.

20, as technology that above any one claim proposed, it is characterized in that: the glass powder that uses synthesis method to obtain, before compacting tool set that glass powder is packed into, elder generation carries out drying treatment with the vacuum tempering method to them and/or purifies with the heat treating method in the atmosphere containing chlorine.

21, as the technology that above-mentioned any one claim proposed, it is characterized in that: before compacting tool set that glass powder is packed into, allow their conglomerations earlier to increase volume density.

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