CN302454361S - Vacuum adsorption platform for wafer adsorption - Google Patents
Vacuum adsorption platform for wafer adsorptionInfo
- Publication number
- CN302454361S CN302454361S CN201330025768.0 CN302454361S CN 302454361 S CN302454361 S CN 302454361S CN 302454361 S CN302454361 S CN 302454361S
- Authority
- CN
- China
- Prior art keywords
- wafer
- adsorption
- design
- product
- platform
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
1． 1. 本外观设计产品的名称：晶圆吸附用真空吸附平台。 The name of this design product: vacuum adsorption platform for wafer adsorption. 2． 2. 本外观设计产品的用途：本外观设计产品用于晶圆精密测量设备领域，具体涉及一种针对晶圆厚度、平面度测量过程中对晶圆进行吸附、固定、定位用的真空吸附平台。 Purpose of this design product: This design product is used in the field of wafer precision measurement equipment, and specifically relates to a vacuum adsorption platform for the adsorption, fixation and positioning of the wafer during the measurement of the thickness and flatness of the wafer. 3． 3. 本外观设计产品的设计要点：在于产品的结构和形状。 The main point of the design of this design product: lies in the structure and shape of the product. 4． 4. 最能表明本外观设计设计要点的图片或照片：立体图。 The picture or photo that best shows the main points of the design: a three-dimensional diagram.
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN302454361S true CN302454361S (en) | 2013-06-05 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103389052A (en) * | 2013-08-09 | 2013-11-13 | 昆山允可精密工业技术有限公司 | Vertical shape measuring device capable of compensating shaft system errors of wafer |
| CN103389051A (en) * | 2013-08-09 | 2013-11-13 | 昆山允可精密工业技术有限公司 | Vertical-type wafer shape measuring instrument |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103389052A (en) * | 2013-08-09 | 2013-11-13 | 昆山允可精密工业技术有限公司 | Vertical shape measuring device capable of compensating shaft system errors of wafer |
| CN103389051A (en) * | 2013-08-09 | 2013-11-13 | 昆山允可精密工业技术有限公司 | Vertical-type wafer shape measuring instrument |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130605 Main classification number: 10-07 Termination date: 20140128 |