CN302454189S - Vertical wafer shape measuring instrument - Google Patents
Vertical wafer shape measuring instrumentInfo
- Publication number
- CN302454189S CN302454189S CN201330025760.4 CN302454189S CN 302454189 S CN302454189 S CN 302454189S CN 302454189 S CN302454189 S CN 302454189S
- Authority
- CN
- China
- Prior art keywords
- design
- measuring instrument
- shape measuring
- product
- vertical wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Abstract
1． 1. 本外观设计产品的名称：立式晶圆形状测量仪。 The name of this design product: vertical wafer shape measuring instrument. 2． 2. 本外观设计产品的用途：本外观设计产品用于太阳能电路板测量行业精密设备领域，具体涉及针对不同厚度晶圆形状特征（平面度和厚度）进行精密测量的形状测量仪器。 Purpose of this design product: This design product is used in the field of precision equipment in the solar circuit board measurement industry, and specifically relates to a shape measuring instrument for precise measurement of the shape characteristics (flatness and thickness) of wafers of different thicknesses. 3． 3. 本外观设计产品的设计要点：在于产品的结构和形状。 The main point of the design of this design product: lies in the structure and shape of the product. 4． 4. 最能表明本外观设计设计要点的图片或照片：立体图。 The picture or photo that best shows the main points of the design: a three-dimensional diagram.
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN302454189S true CN302454189S (en) | 2013-06-05 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103389052A (en) * | 2013-08-09 | 2013-11-13 | 昆山允可精密工业技术有限公司 | Vertical shape measuring device capable of compensating shaft system errors of wafer |
| CN103389051A (en) * | 2013-08-09 | 2013-11-13 | 昆山允可精密工业技术有限公司 | Vertical-type wafer shape measuring instrument |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103389052A (en) * | 2013-08-09 | 2013-11-13 | 昆山允可精密工业技术有限公司 | Vertical shape measuring device capable of compensating shaft system errors of wafer |
| CN103389051A (en) * | 2013-08-09 | 2013-11-13 | 昆山允可精密工业技术有限公司 | Vertical-type wafer shape measuring instrument |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130605 Main classification number: 10-04 Termination date: 20140128 |