CN302423843S - Antioxidant gas supply for semiconductor manufacturing equipment - Google Patents

Antioxidant gas supply for semiconductor manufacturing equipment

Info

Publication number
CN302423843S
CN302423843S CN201230476210.X CN302423843S CN 302423843 S CN302423843 S CN 302423843S CN 302423843 S CN302423843 S CN 302423843S
Authority
CN
China
Prior art keywords
design
semiconductor manufacturing
manufacturing equipment
product
gas supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN201230476210.X
Other languages
Chinese (zh)
Inventor
国吉勝俊
木内逸人
Original Assignee
株式会社新川
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社新川 filed Critical 株式会社新川
Application granted granted Critical
Publication of CN302423843S publication Critical patent/CN302423843S/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

1.本外观设计产品的名称:半导体制造装置用氧化防止气体供给器。2.本外观设计产品的用途:安装在通过引线连接半导体芯片的电极和基板电极之间的被称为引线焊接机的半导体制造装置的焊接头使用。3.本外观设计的设计要点:本外观设计产品的形状、图案或者其结合。4.最能表明设计要点的图片或者照片:立体图。1. The name of the product with this design: Oxidation prevention gas supplier for semiconductor manufacturing equipment. 2. Application of this design product: It is used as a bonding head of a semiconductor manufacturing apparatus called a wire bonding machine, which is installed between the electrodes of the semiconductor chip and the substrate electrodes connected by wires. 3. Design points of this design: the shape, pattern or combination of the product of this design. 4. The picture or photo that best shows the main points of the design: the stereogram.

CN201230476210.X 2012-04-02 2012-10-08 Antioxidant gas supply for semiconductor manufacturing equipment Expired - Lifetime CN302423843S (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012-007723 2012-01-18

Publications (1)

Publication Number Publication Date
CN302423843S true CN302423843S (en) 2013-05-01

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Legal Events

Date Code Title Description
CX01 Expiry of patent term

Granted publication date: 20130501

Main classification number: 15-09