CN302351179S - Plasma Power Delivery Rods for Semiconductor Deposition Tools - Google Patents
Plasma Power Delivery Rods for Semiconductor Deposition ToolsInfo
- Publication number
- CN302351179S CN302351179S CN201230267374.1 CN302351179S CN 302351179 S CN302351179 S CN 302351179S CN 302351179 S CN302351179 S CN 302351179S
- Authority
- CN
- China
- Prior art keywords
- plasma power
- design
- semiconductor deposition
- power delivery
- deposition tools
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Abstract
1.本外观设计产品的名称为“用于半导体沉积器具的等离子体功率传送杆”。2.本外观设计产品用于将由等离子体功率发生器产生的等离子体功率传送至腔室。3.本外观设计的设计要点在于外观设计产品的形状。4.最能表明设计要点的图片为立体图。1. The name of this design product is "Plasma Power Transmission Rod for Semiconductor Deposition Apparatus". 2. This design product is used to transmit the plasma power generated by the plasma power generator to the chamber. 3. The design point of this design is the shape of the design product. 4. The picture that best shows the main points of the design is the three-dimensional picture.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR30-2012-0026479 | 2012-05-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN302351179S true CN302351179S (en) | 2013-03-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
GR01 | Patent grant | ||
CX01 | Expiry of patent term |
Granted publication date: 20130313 Main classification number: 15-09 |