CN302351179S - Plasma Power Delivery Rods for Semiconductor Deposition Tools - Google Patents

Plasma Power Delivery Rods for Semiconductor Deposition Tools

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Publication number
CN302351179S
CN302351179S CN201230267374.1 CN302351179S CN 302351179 S CN302351179 S CN 302351179S CN 302351179 S CN302351179 S CN 302351179S
Authority
CN
China
Prior art keywords
plasma power
design
semiconductor deposition
power delivery
deposition tools
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN201230267374.1
Other languages
Chinese (zh)
Inventor
李政镐
金友赞
郑相振
张显秀
Original Assignee
Asm知识产权控股有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asm知识产权控股有限公司 filed Critical Asm知识产权控股有限公司
Application granted granted Critical
Publication of CN302351179S publication Critical patent/CN302351179S/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

1.本外观设计产品的名称为“用于半导体沉积器具的等离子体功率传送杆”。2.本外观设计产品用于将由等离子体功率发生器产生的等离子体功率传送至腔室。3.本外观设计的设计要点在于外观设计产品的形状。4.最能表明设计要点的图片为立体图。1. The name of this design product is "Plasma Power Transmission Rod for Semiconductor Deposition Apparatus". 2. This design product is used to transmit the plasma power generated by the plasma power generator to the chamber. 3. The design point of this design is the shape of the design product. 4. The picture that best shows the main points of the design is the three-dimensional picture.

CN201230267374.1 2012-05-29 2012-06-21 Plasma Power Delivery Rods for Semiconductor Deposition Tools Expired - Lifetime CN302351179S (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR30-2012-0026479 2012-05-29

Publications (1)

Publication Number Publication Date
CN302351179S true CN302351179S (en) 2013-03-13

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Legal Events

Date Code Title Description
GR01 Patent grant
CX01 Expiry of patent term

Granted publication date: 20130313

Main classification number: 15-09