CN2931847Y - Double-obstruct oil-free ultra-clean vacuum system device - Google Patents
Double-obstruct oil-free ultra-clean vacuum system device Download PDFInfo
- Publication number
- CN2931847Y CN2931847Y CN 200620072726 CN200620072726U CN2931847Y CN 2931847 Y CN2931847 Y CN 2931847Y CN 200620072726 CN200620072726 CN 200620072726 CN 200620072726 U CN200620072726 U CN 200620072726U CN 2931847 Y CN2931847 Y CN 2931847Y
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- oil
- vacuum system
- system device
- utility
- clean vacuum
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Abstract
The utility model relates to a double barrier non-oil super-clean vacuum system device. This utility model installs the first set of oil resistance at the gas return path of a mechanical pump and a molecular pump, the second set of oil resistance is arranged between the molecular pump and a pumped vessel. This present utility model resolved the existing technology's problems such as time-consuming, reduced vacuum degree, serious pollution and effects of high-purity materials' synthesis and melting. In this utility model the first set of oil resistance separates and collects the oil steam back streaming from the mechanical pump, preventing the oil stream from polluting the pipeline of the vacuum system and the blade of the molecular pump. The second set of oil resistance re-separates and recollects the oil molecules which have entered into the molecular pump, preventing the oil stream from polluting the pumped vessel. The present utility has the advantages of simple construction, obvious effects and convenient operation.
Description
Technical field
The utility model relates to a kind of vacuum system, particularly a kind of two no oily ultra-clean vacuum system devices that intercept.
Background technique
Before the present utility model, the vacuum system priming speed of traditional diffusion pump series connection mechanical pump is slow, the spent time of bleeding of preheating and cooling is long, and diffusion pump oil steam backflows in the vacuum chamber easily, these oil vapors enter immediately to be taken out in the container, makes degree of vacuum reduce oxidation electrothermal body and processed workpiece, cause vacuum indoor material and device severe contamination, influence the synthetic and melting of high-purity material; Simultaneously, because mechanical pump has oil to exist, all can produce in various degree pollution to connecting tube, valve and mechanical pump.Therefore, this traditional vacuum system does not reach synthetic requirement and the condition with the needed ultra-clean vacuum environment of melting of high-purity material.
Summary of the invention
The purpose of this utility model just is to overcome above-mentioned defective, design, a kind of two no oily ultra-clean vacuum system devices that intercept of development.
The technical solution of the utility model is:
Two obstructs do not have oily ultra-clean vacuum system device, mechanical pump, molecular pump are arranged, taken out container, and its major technique is characterised in that first oil block device is set in the gas return path of mechanical pump, molecular pump, at molecular pump, taken out second oil block device is set between the container.
Advantage of the present utility model and effect be to be separately positioned on two oil block devices in the gas return path of mechanical pump, molecular pump and at molecular pump, taken out between the container, first oil block device intercepts the oil vapor that mechanical pump backflows, collect, prevent the pollution of oil vapor to vacuum system pipeline, molecular pump blade, second oil block device will intercept the oil molecule that enters the molecular pump pump chamber again, collect, and prevent that oil vapor is to being taken out the pollution of container.
The utility model is simple in structure, and effect is obvious, and is easy to operate.
Advantage of the present utility model and effect will be proceeded to describe below.
Description of drawings
Fig. 1---the utility model structural representation.
Fig. 2---oil block device structural representation.
Fig. 3---oil block device modular construction schematic representation.
Tube construction schematic representation in Fig. 4---the oil block device.
Oil baffle structural representation in Fig. 5---the oil block device.
Embodiment
As shown in Figure 1, the high vacuum gas return path is: gas is flowed through second oil block device 6 to high vacuum valve 5 from taking out container 7, to the lower valve 3 and first oil block device 2, discharges atmosphere by mechanical pump 1 (direct connection twin-stage mechanical pump) at process molecular pump 4 at last; The rough vacuum gas return path is: gas is flowed through and is gone up valve 8 to first oil block devices 2 from taking out container 7, discharges atmosphere by mechanical pump 1 (direct connection twin-stage mechanical pump) at last.
Shown in Fig. 2,3,4,5, first oil block device 2, second oil block device, 6 structures are identical, are that pipe 13 (band tightening nut) is made with copper material in it, have the good heat transfer conductance, inject liquid nitrogen 14 (liquid nitrogen condensation oil vapor) in the pipe 13; Two above oil baffles 10 of socket on pipe 13 adopt 6 oil baffles 10 in this example, oil baffle 10 usefulness stainless steel materials are made, and between per two oil baffles 10 spacer 11 are arranged, and it is separated, and spacer 11 is socketed on the pipe 13; Oil baffle 10 outer end edges are downward-sloping, have several angle, make the oil vapor of obstruct can accumulate in the oil block device bottom, drain oil 9 are set, so that oil vapor is discharged from drain oil 9 at the bottom of oil block device; Oil baffle 10 can adopt semicircle square or oval or circular arc etc., and what oil baffle 10 adopted in this example is semicircular structure.
In the practical application, the vacuum system device begins to vacuumize, and mechanical pump 1 starts, and opens valve 8 and takes out rough vacuum, and gas is discharged gas compression by mechanical pump 1 through last valve 8 to first oil block devices 2; When degree of vacuum less than 10
-1During Pa, start molecular pump 4, open lower valve 3 and high vacuum valve 5, vacuum system can obtain less than 10
-5The ultra-clean high vacuum of Pa; Since mechanical pump 1 when beginning to vacuumize from barometric pressure, thereby unavoidably understand backflowing of generating pump oil, at this moment, the oily vapours that first oil block device 2 backflows mechanical pump 1 intercepts and collects, prevent the pollution of oil vapor to system pipeline and molecular pump 4 blades, second oil block device intercepts and collects the oil molecule that enters molecular pump 4 pump chambers, prevents that oil vapor is to being taken out the pollution of container 7.Through this pair of barrier design, vacuum chamber return oily rate less than 5 * 10
-7G/cm
2S can satisfy the requirement to vacuum system of high-purity material melting and physics, chemical vapor deposition method fully.Liquid nitrogen 14 in the pipe 13 with oil baffle 10 intercept the oil vapor of collecting lower the temperature handle after, its oil then flows out from the drain oil 9 of oil block device bottom.
The utility model system architecture is simple, selected materials is easily processed, cost is low and can satisfy the high-purity material melting and physics, chemical vapor deposition method to the requirement of vacuum system.
The scope that the utility model is asked for protection is not limited only to foregoing description.
Claims (8)
1. two obstructs do not have oily ultra-clean vacuum system device, mechanical pump, molecular pump are arranged, taken out container, it is characterized in that being provided with in the gas return path of mechanical pump, molecular pump first oil block device, at molecular pump, taken out second oil block device is set between the container.
2. two no oily ultra-clean vacuum system device that intercepts according to claim 1 is characterized in that the oil block device structure is that the centre has a pipe, and two of sockets are provided with spacer on the pipe between the oil baffle more than the oil baffle on the pipe.
3. two no oily ultra-clean vacuum system device that intercepts according to claim 2 is characterized in that the oil block device bottom is provided with drain oil.
4. two no oily ultra-clean vacuum system device that intercepts according to claim 2 is characterized in that the oil baffle outer end edges is to bottom angled.
5. two no oily ultra-clean vacuum system device that intercepts according to claim 2 is characterized in that square or the oval or circular arc of oil baffle semicircular in shape.
6. two no oily ultra-clean vacuum system device that intercepts according to claim 2 is characterized in that hollow in the pipe, injects liquid nitrogen.
7. two no oily ultra-clean vacuum system device that intercepts according to claim 6 is characterized in that pipe is that copper material is made.
8. two no oily ultra-clean vacuum system device that intercepts according to claim 2 is characterized in that oil baffle is that stainless steel is made.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620072726 CN2931847Y (en) | 2006-04-25 | 2006-04-25 | Double-obstruct oil-free ultra-clean vacuum system device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620072726 CN2931847Y (en) | 2006-04-25 | 2006-04-25 | Double-obstruct oil-free ultra-clean vacuum system device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2931847Y true CN2931847Y (en) | 2007-08-08 |
Family
ID=38348346
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200620072726 Expired - Fee Related CN2931847Y (en) | 2006-04-25 | 2006-04-25 | Double-obstruct oil-free ultra-clean vacuum system device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2931847Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102901658A (en) * | 2012-10-10 | 2013-01-30 | 中国石油天然气股份有限公司 | Device and method for extracting rare gas from crude oil and formation water |
| CN109545420A (en) * | 2018-11-21 | 2019-03-29 | 中国科学院合肥物质科学研究院 | A kind of ion beam biological irradiation device and method |
-
2006
- 2006-04-25 CN CN 200620072726 patent/CN2931847Y/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102901658A (en) * | 2012-10-10 | 2013-01-30 | 中国石油天然气股份有限公司 | Device and method for extracting rare gas from crude oil and formation water |
| CN102901658B (en) * | 2012-10-10 | 2015-06-03 | 中国石油天然气股份有限公司 | Method for extracting rare gas from crude oil and formation water |
| CN109545420A (en) * | 2018-11-21 | 2019-03-29 | 中国科学院合肥物质科学研究院 | A kind of ion beam biological irradiation device and method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20070808 Termination date: 20100425 |