CN2896680Y - Three-phase power adjustable power supply for vacuum carbon tube furnace - Google Patents
Three-phase power adjustable power supply for vacuum carbon tube furnace Download PDFInfo
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- CN2896680Y CN2896680Y CN 200620084604 CN200620084604U CN2896680Y CN 2896680 Y CN2896680 Y CN 2896680Y CN 200620084604 CN200620084604 CN 200620084604 CN 200620084604 U CN200620084604 U CN 200620084604U CN 2896680 Y CN2896680 Y CN 2896680Y
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- phase
- circuit
- vacuum carbon
- power supply
- voltage regulator
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title abstract 3
- 229910052799 carbon Inorganic materials 0.000 title abstract 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 27
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 27
- 239000010703 silicon Substances 0.000 claims abstract description 27
- 230000001105 regulatory effect Effects 0.000 claims abstract description 17
- 238000004804 winding Methods 0.000 claims description 30
- 229910052573 porcelain Inorganic materials 0.000 claims description 14
- 230000005284 excitation Effects 0.000 claims description 13
- 238000009966 trimming Methods 0.000 claims description 12
- 230000008021 deposition Effects 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000003610 charcoal Substances 0.000 description 2
- 230000001276 controlling effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
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Abstract
The utility model discloses a three-phase power adjustable power supply for vacuum carbon tube stove is that three-phase power supplies power for three-phase magnetic voltage regulator in the circuit, and three-phase magnetic voltage regulator and phase voltage fine setting circuit connection, automatic regulating circuit, manual regulating circuit trigger the silicon controlled rectifier module through manual automatic switching circuit and rectification and are connected, and the rectification triggers the silicon controlled rectifier module and is connected with phase voltage fine setting circuit, three-phase vacuum carbon tube stove of three-phase magnetic voltage regulator's three-phase output connection, the utility model has the characteristics of can keep the electric wire netting balance, solve wave form distortion that the silicon controlled rectifier pressure regulating caused, three-phase power adjustable simultaneously, again single-phase power fine setting.
Description
One, technical field
The utility model relates to the power technique fields of vapour deposition with the vacuum carbon-tube oven, especially relates to adjustable simultaneously, the power supply that does not damage grid supply quality that can also single-phase fine setting of three phase power.
Two, background technology
At present, the vacuum carbon-tube oven that is used for vapour deposition all is a charcoal pipe heater to be set in the vacuum furnace form.Used power supply is that controllable silicon is at the low-voltage of transformer former limit pressure regulation, the single-phase power controllable electric power of big electric current.This power supply can cause the imbalance of three phase network on the one hand, and that phase waveform distortion that powerful on the other hand silicon-controlled voltage regulation can use influences the power supply quality of electrical network.
Three, summary of the invention
The purpose of this utility model is to improve the deficiency of prior art and a kind of balance that keeps electrical network is provided, solves adjustable simultaneously, the vacuum carbon-tube oven three phase power regulated power supply that can the single-phase power fine setting of wave distortion, three phase power that silicon-controlled voltage regulation causes.
The purpose of this utility model is to realize like this, a kind of vacuum carbon-tube oven three phase power regulated power supply, be characterized in that three phase mains is given the power supply of three-phase magnetic voltage regulator in circuit, the three-phase magnetic voltage regulator is connected with the phase voltage trimming circuit, auto-adjusting circuit, manual adjustments circuit are connected with the rectifier and trigger silicon controlled module by the hand automatic switching circuit, the rectifier and trigger silicon controlled module is connected with the phase voltage trimming circuit, and the three-phase output of three-phase magnetic voltage regulator connects three-phase vacuum carbon-tube oven.
In order further to realize the purpose of this utility model, can be that the three-phase magnetic voltage regulator is connected with the heater of three-phase vacuum carbon-tube oven can be the head end that three-phase output end connects three heaters of three-phase vacuum carbon-tube oven respectively, the tail end of three heaters connects together, form Y-connection, the head end that also can be three heaters of three-phase output end and three-phase vacuum carbon-tube oven of three-phase magnetic voltage regulator is connected, three heaters are linked in sequence from beginning to end, form triangle and connect.
The three-phase magnetic voltage regulator is that each of three phase mains is imported mutually with magnetic saturation reactor DK1, DK2, DK3 coil head end and is connected, the tail end of magnetic saturation reactor DK1, DK2, DK3 coil is connected with the head end of three-phase transformer T primary coil, the tail end of three-phase transformer T primary coil interconnects, form Y-connection, the initial and end end that also can be three-phase transformer T primary coil is linked in sequence, and forms triangle and connects; The head end of the secondary coil of three-phase transformer T is exported as three-phase, three tail ends are connected, form Y-connection, also can be three-phase transformer T secondary coil head end as output time the initial and end end with its coil be linked in sequence, forming triangle connects, interlinkage each phase magnetic saturation reactor DK1, DK2, three magnet exciting coil LC1, LC2 of DK3 coil, LC3 tail end are drawn as three excitation negative terminals, and its head end links together and draws as the excitation anode.
The phase voltage trimming circuit is that the head end of porcelain dish potentiometer RP1, RP2, RP3 connects together, and again with being connected of rectifier and trigger silicon controlled module, the tail end of porcelain dish potentiometer RP1, RP2, RP3 connects together with sliding end separately, is connected with the three-phase magnetic voltage regulator again.
Auto-adjusting circuit is that input signal 7,9 ends of PID temperature controller WK are connected with three-phase vacuum carbon-tube oven respectively, and output 14,15 ends of PID temperature controller WK are connected with the hand automatic switching circuit, and output 11,12,13 ends of PID temperature controller WK connect power supply AC220V.
The manual adjustments circuit is that upper end, sliding end, the lower end of potentiometer RP is connected with the hand automatic switching circuit respectively.
The hand automatic switching circuit is that the common port of the 1st winding point of change over switch K2, the common port of the 2nd winding point, the common port of the 3rd winding point are connected with the rectifier and trigger silicon controlled module, be connected with the manual adjustments circuit the normal battle of the normal battle of the 1st winding point of change over switch K2, the normal battle of the 2nd winding point, the 3rd winding point respectively, and the normally closed point of the 2nd winding point of change over switch K2, the normally closed point of the 3rd winding point are connected with auto-adjusting circuit respectively.
The rectifier and trigger silicon controlled module be can pressure regulation the silicon controlled rectifier module that triggers link that has, 6,7 ends of rectification module ZL are connected with rectifier power source, 8 ends are connected with the three-phase magnetic voltage regulator, 9 ends are connected with the phase voltage trimming circuit, 1 end, 2 ends, 3 ends are changed automatically with hand respectively and are connected, 4 ends are connected with external working power DC12V negative pole, and 5 ends are connected with external working power DC12V is anodal.
Compared with the prior art the utility model has following distinguishing feature and good effect: power supply of the present utility model is at three charcoal pipe heaters are set in the vacuum furnace, three groups of heaters perhaps are set, every group is all several heaters, the power supply formation is the head end that the three-phase output end of three-phase magnetic voltage regulator connects three heaters separately, the tail end of three heaters connects together, the two ends that form Y-connection or heater are linked in sequence and form the triangle connection, by thermocouple, temperature controller, rectifier transformer, the field circuit that rectification module is formed carries out excitation to magnetic voltage regulator, thereby has formed the three phase power regulated power supply of closed loop.
Because the weighing apparatus that is uneven between three-phase voltage, also have three calandria resistance values variant, cause between three heaters that a point for measuring temperature is controlled automatically, bigger temperature difference being arranged, the utility model is with a three phase excitation coil of the three-phase magnetic voltage regulator interlinkage tri-phase iron core of standard, changes three coils into, is installed on three groups of reactance iron cores, the head end of three coils connects together and draws, connect the field circuit anode, tail end is drawn separately, and each connects RP
1-RP
3The porcelain dish potentiometer, other terminates at together, connects the pair end of field circuit, and magnetic voltage regulator can be transferred also and can single-phasely finely tune by three-phase altogether; Aborning, according to the indication of multipoint recorder, can find out the temperature contrast of respectively organizing between the calandria.Suitably finely tune RP
1-RP
3In certain porcelain dish potentiometer, just can suitably adjust the output voltage of a certain phase of magnetic voltage regulator, three groups of calandria temperature are equated.
Waveform after the pressure regulation of three-phase magnetic voltage regulator output is sinusoidal wave, can not cause the imbalance of waveform distortion of the power supply network and three phase network power supply, and keep stable.
The utility model can keep electrical network not to be hit, and keeps grid supply quality, and the three-phase by the magnetic pressure regulation is in harmonious proportion the power adjustments of single-phase fine setting altogether, makes temperature unanimity in each calandria, improves the quality of products.Three-phase vacuum carbon-tube oven is used in vapour deposition.
Four, description of drawings
Below in conjunction with drawings and Examples the utility model is further specified.
Fig. 1 is the utility model electrical principle schematic diagram.
Fig. 2 is a kind of electrical schematic diagram of the utility model.
Five, specific embodiments
Embodiment 1, a kind of vacuum carbon-tube oven three phase power regulated power supply, with reference to Fig. 1, Fig. 2, be in electric wiring magnetic voltage regulator 1 respectively with three phase mains, phase voltage trimming circuit 2 connects, auto-adjusting circuit 4, manual adjustments circuit 5 is connected with rectifier and trigger silicon controlled module 7 by hand automatic switching circuit 6, rectifier and trigger silicon controlled module 7 is connected with phase voltage trimming circuit 2, the three-phase output of magnetic voltage regulator 1 connects three-phase vacuum carbon-tube oven 3, it can be the head end that three-phase output end connects three heaters of three-phase vacuum carbon-tube oven 3 respectively that three-phase magnetic voltage regulator 1 is connected with three-phase vacuum carbon-tube oven 3 heaters, the tail end of three heaters connects together, form Y-connection, the head end that also can be 3 three heaters of three-phase output end and three-phase vacuum carbon-tube oven of three-phase magnetic voltage regulator 1 is connected, three heaters are linked in sequence from beginning to end, forming triangle connects, three-phase magnetic voltage regulator 1 is that each of three phase mains is imported and magnetic saturation reactor DK1 mutually, DK2, the head end of DK3 coil connects, the tail end of magnetic saturation reactor coil is connected with the head end of three-phase transformer T primary coil, the tail end of three-phase transformer T primary coil can interconnect the composition Y-connection, the head and the tail that also can be three-phase transformer T primary coil are linked in sequence, forming triangle connects, the head end of three-phase transformer secondary coil is exported as three-phase, three tail ends can interconnect the composition Y-connection, also can be that the head end of three-phase transformer secondary coil is linked in sequence the two ends of its coil when exporting as three-phase, forming triangle connects, the head and the tail of coil are linked in sequence, forming triangle connects, each phase magnetic saturation reactor DK1 of interlinkage, DK2, three magnet exciting coil LC1 of DK3 coil, LC2, the LC3 tail end is drawn as three excitation negative terminals, its head end links together and draws as the excitation anode, a porcelain dish potentiometer RP1-RP3 is set in each phase excitation coil loop, phase voltage trimming circuit 2 is porcelain dish potentiometer RP1, RP2, the head end of RP3 connects together, be connected with 9 ends of rectifier and trigger silicon controlled module 7 again, porcelain dish potentiometer RP1, RP2, the tail end of RP3 connects together with sliding end separately, be connected separately with three excitation negative terminals of three-phase magnetic voltage regulator 1, the excitation anode of three-phase magnetic voltage regulator 1 is connected with 8 ends of rectifier and trigger module 7 again; Auto-adjusting circuit 4 is that PID temperature controller WK input signal 7,9 ends are connected with the positive and negative end of three-phase vacuum carbon-tube oven 3 thermocouple RE respectively, output 14,15 ends of PID temperature controller WK are connected with the each point of the change over switch K2 automated location of hand automatic switching circuit 6, and output 11,12,13 ends of PID temperature controller WK connect working power AC220V; Manual adjustments circuit 5 is that the upper end of potentiometer RP was connected with the normal battle of the 1st winding point of the change over switch K2 of hand automatic switching circuit 6, sliding end was connected with the normal battle of the 2nd winding point of the change over switch K2 of hand automatic switching circuit 6, and the lower end was connected with the normal battle of the 3rd winding point of the change over switch K2 of hand automatic switching circuit 6; Hand automatic switching circuit 6 is that the common port of the 1st winding point of change over switch K2 is connected with anodal 1 end of rectifier and trigger silicon controlled module 7 out-put supplies, the common port of the 2nd winding point is connected with signal positive input 2 ends of rectifier and trigger silicon controlled module 7, the common port of the 3rd winding point is connected with out-put supply negative pole 3 ends of rectifier and trigger silicon controlled module 7, the normal battle of the 1st winding point of change over switch K2, the upper end with the potentiometer RP of manual adjustments circuit 5 was connected, the normal battle of the 2nd winding point, the sliding end with the potentiometer RP of manual adjustments circuit 5 was connected, normally closed point is connected with 14 ends of the temperature controller WK of auto-adjusting circuit 4, and the normal battle of the 3rd winding point, the lower end with the potentiometer RP of manual adjustments circuit 5 was connected, normally closed point is connected with 15 ends of the temperature controller WK of auto-adjusting circuit 4; Rectifier and trigger silicon controlled module 7 be can pressure regulation the silicon controlled rectifier module that triggers link that has, 6 of rectification module ZL, 7 ends are connected with the secondary of rectifier transformer T1, the upper end on the former limit of rectifier transformer T1 is connected with the end of fuse RD1, the other end of fuse RD1 is connected with the end of double-pole switch K1, the other end of double-pole switch K1 is connected with the W of power supply 220V, the end of the lower end double-pole switch K1 on the former limit of rectifier transformer T1 connects, the other end of double-pole switch K1 is connected with the N of power supply 220V, 8 ends of the rectification module ZL of rectifier and trigger silicon controlled module 7 are connected with the excitation anode of three-phase magnetic voltage regulator 1, the porcelain dish potentiometer RP1 of 9 ends and phase voltage trimming circuit 2, RP2, RP3's and connect end and connect, 1 end is connected with the common port of the 1st winding point of the change over switch K2 of hand automatic switching circuit 6,2 ends are connected with the common port of the 2nd winding point of the change over switch K2 of hand automatic switching circuit 6,3 ends are connected with the common port of the 3rd winding point of the change over switch K2 of hand automatic switching circuit 6,4 ends are connected with external working power DC12V negative pole, and 5 ends are connected with external working power DC12V is anodal.
In the embodiment shown in accompanying drawing 1 and the accompanying drawing 2, temperature controller WK adopts the SR93PID adjuster, rectification module ZL adopts the MZKD-ZL-100 intelligent thyristor module, is the temperature control requirement that adapts to the three-phase carbon-tube oven, and the TSJH-250/0.5 magnetic voltage regulator CT of standard is transformed.The magnetic voltage regulator raw parameter is as follows: output capacity 250KVA, input voltage 3 phase 380V, maximum input current 434A, output voltage 7-70V is adjustable, maximum output current 2062A, maximum controlling current 15A, maximum power controlling 2155W; The secondary of the transformer of improved magnetic voltage regulator is by 8 circle continous way windings, changes double joint into and around 3 circle continous way windings, output voltage is adjustable by 7-70V, and it is adjustable to change 2.6-26V into, and output current increases nearly one times.After load-side threephase load Y connect, load voltage was that 1.5-15V is adjustable.The magnetic of improved magnetic voltage regulator is transferred the magnet exciting coil of part, is changed into three coils of each each phase of interlinkage by a coil of three groups of three-phase reactors of interlinkage.The principle that the magnetic flux that the IW=IW1+IW2+IW3 three-phase produces equates with original total magnetic flux, the number of turn of each phase excitation coil all with original the same 660 circles of coil, and electric current is unlikely overheated for making coil about 15A/3-5A, and enamelled wire line footpath is taken as Φ 1.5 by original Φ 2.0.
Be the Δ/Δ connection in the transformer among the embodiment 1, during with three porcelain dish potentiometer fine settings, transfer a moving two-phase, after three porcelain dish potentiometers are looked for difference several times, just reach requirement.
Among the embodiment 2, be the Y/Y connection in the transformer, during with the fine setting of three porcelain dish potentiometers, can a porcelain dish potentiometer at a phase voltage, pressure regulation is accurate.
Claims (8)
1, a kind of vacuum carbon-tube oven three phase power regulated power supply, it is characterized in that three phase mains is given three-phase magnetic voltage regulator (1) power supply in circuit, three-phase magnetic voltage regulator (1) is connected with phase voltage trimming circuit (2), auto-adjusting circuit (4), manual adjustments circuit (5) are connected with rectifier and trigger silicon controlled module (7) by hand automatic switching circuit (6), rectifier and trigger silicon controlled module (7) is connected with phase voltage trimming circuit (2), and the three-phase output of three-phase magnetic voltage regulator (1) connects three-phase vacuum carbon-tube oven (3).
2, vacuum carbon-tube oven three phase power regulated power supply according to claim 1, it is characterized in that it can be the head end that three-phase output end connects three heaters of three-phase vacuum carbon-tube oven (3) respectively that three-phase magnetic voltage regulator (1) is connected with the heater of three-phase vacuum carbon-tube oven (3), the tail end of three heaters connects together, form Y-connection, the head end that also can be (3) three heaters of three-phase output end and three-phase vacuum carbon-tube oven of three-phase magnetic voltage regulator (1) is connected, three heaters are linked in sequence from beginning to end, form triangle and connect.
3, vacuum carbon-tube oven three phase power regulated power supply according to claim 1, it is characterized in that three-phase magnetic voltage regulator (1) is that each of three phase mains is imported mutually with magnetic saturation reactor DK1, DK2, DK3 coil head end and is connected, the tail end of magnetic saturation reactor DK1, DK2, DK3 coil is connected with the head end of three-phase transformer T primary coil, the tail end of three-phase transformer T primary coil interconnects, form Y-connection, the initial and end end that also can be three-phase transformer T primary coil is linked in sequence, and forms triangle and connects; The head end of the secondary coil of three-phase transformer T is exported as three-phase, three tail ends are connected, form Y-connection, also can be three-phase transformer T secondary coil head end as output time the initial and end end with its coil be linked in sequence, forming triangle connects, interlinkage each phase magnetic saturation reactor DK1, DK2, three magnet exciting coil LC1, LC2 of DK3 coil, LC3 tail end are drawn as three excitation negative terminals, and its head end links together and draws as the excitation anode.
4, vacuum carbon-tube oven three phase power regulated power supply according to claim 1, it is characterized in that phase voltage trimming circuit (2) is that the head end of porcelain dish potentiometer RP1, RP2, RP3 connects together, again with being connected of rectifier and trigger silicon controlled module (7), the tail end of porcelain dish potentiometer RP1, RP2, RP3 connects together with sliding end separately, is connected with three-phase magnetic voltage regulator (1) again.
5, vacuum carbon-tube oven three phase power regulated power supply according to claim 1, it is characterized in that auto-adjusting circuit (4) is that input signal 7,9 ends of PID temperature controller WK are connected with three-phase vacuum carbon-tube oven (3) respectively, output 14,15 ends of PID temperature controller WK are connected with hand automatic switching circuit (6), and output 11,12,13 ends of PID temperature controller WK connect power supply AC220V.
6, vacuum carbon-tube oven three phase power regulated power supply according to claim 1 is characterized in that manual adjustments circuit (5) is that upper end, sliding end, the lower end of potentiometer RP is connected with hand automatic switching circuit (6) respectively.
7, vacuum carbon-tube oven three phase power regulated power supply according to claim 1, it is characterized in that hand automatic switching circuit (6) is that the common port of the 1st winding point of change over switch K2, the common port of the 2nd winding point, the common port of the 3rd winding point are connected with rectifier and trigger silicon controlled module (7), be connected with manual adjustments circuit (5) the normal battle of the normal battle of the 1st winding point of change over switch K2, the normal battle of the 2nd winding point, the 3rd winding point respectively, and the normally closed point of the 2nd winding point of change over switch K2, the normally closed point of the 3rd winding point are connected with auto-adjusting circuit (4) respectively.
8, vacuum carbon-tube oven three phase power regulated power supply according to claim 1, it is characterized in that rectifier and trigger silicon controlled module (7) be can pressure regulation the silicon controlled rectifier module that triggers link that has, 6,7 ends of rectification module ZL are connected with rectifier power source, 8 ends are connected with three-phase magnetic voltage regulator (1), 9 ends are connected with phase voltage trimming circuit (2), 1 end, 2 ends, 3 ends are changed (6) respectively automatically and are connected with hand, 4 ends are connected with external working power DC12V negative pole, and 5 ends are connected with external working power DC12V is anodal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620084604 CN2896680Y (en) | 2006-05-19 | 2006-05-19 | Three-phase power adjustable power supply for vacuum carbon tube furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620084604 CN2896680Y (en) | 2006-05-19 | 2006-05-19 | Three-phase power adjustable power supply for vacuum carbon tube furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2896680Y true CN2896680Y (en) | 2007-05-02 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200620084604 Expired - Fee Related CN2896680Y (en) | 2006-05-19 | 2006-05-19 | Three-phase power adjustable power supply for vacuum carbon tube furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2896680Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102573163A (en) * | 2012-01-18 | 2012-07-11 | 桂林电子科技大学 | Control method of high-voltage power supply of electron beam melting furnace and power supply device |
| CN103259417A (en) * | 2012-02-21 | 2013-08-21 | 陈守君 | Novel magnetic voltage regulating power source and electricity-saving method thereof |
-
2006
- 2006-05-19 CN CN 200620084604 patent/CN2896680Y/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102573163A (en) * | 2012-01-18 | 2012-07-11 | 桂林电子科技大学 | Control method of high-voltage power supply of electron beam melting furnace and power supply device |
| CN102573163B (en) * | 2012-01-18 | 2013-08-21 | 桂林电子科技大学 | High-voltage power supply of electron beam melting furnace |
| CN103259417A (en) * | 2012-02-21 | 2013-08-21 | 陈守君 | Novel magnetic voltage regulating power source and electricity-saving method thereof |
| CN103259417B (en) * | 2012-02-21 | 2016-04-20 | 淄博顺拓电气有限公司 | Novel magnetic voltage controller power source and power-saving method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: YINTAI LUHANG CABON MATERIAL SCIENCE CO., LTD. Free format text: FORMER OWNER: YINTAI METALLURGY NEW MATERIAL INSTITUTE Effective date: 20090724 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20090724 Address after: No. 1, Mudanjiang Road, Yantai economic and Technological Development Zone, Shandong 264006, China Patentee after: Yantai Luhang Material Science and Technology Co., Ltd. Address before: No. 1, Mudanjiang Road, Yantai economic and Technological Development Zone, Shandong 264006, China Patentee before: Yantai Inst. of Metallurgical New Materials |
|
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20070502 Termination date: 20100519 |