CN2871529Y - Waveguide glass substrate clamp by ion exchanging method - Google Patents

Waveguide glass substrate clamp by ion exchanging method Download PDF

Info

Publication number
CN2871529Y
CN2871529Y CN 200520046277 CN200520046277U CN2871529Y CN 2871529 Y CN2871529 Y CN 2871529Y CN 200520046277 CN200520046277 CN 200520046277 CN 200520046277 U CN200520046277 U CN 200520046277U CN 2871529 Y CN2871529 Y CN 2871529Y
Authority
CN
China
Prior art keywords
glass substrate
clamp sheet
anchor clamps
clamp
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN 200520046277
Other languages
Chinese (zh)
Inventor
韩秀友
方祖捷
庞拂飞
叶青
初凤红
蔡海文
瞿荣辉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Institute of Optics and Fine Mechanics of CAS
Original Assignee
Shanghai Institute of Optics and Fine Mechanics of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Institute of Optics and Fine Mechanics of CAS filed Critical Shanghai Institute of Optics and Fine Mechanics of CAS
Priority to CN 200520046277 priority Critical patent/CN2871529Y/en
Application granted granted Critical
Publication of CN2871529Y publication Critical patent/CN2871529Y/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Landscapes

  • Surface Treatment Of Glass (AREA)

Abstract

The utility model relates to a substrate glass jig used for the preparation of wave-guide by means of an ion-exchange method, which is connected by a lift link, a jig piece, a jig support and a connection piece; the lift link can elevate flexibly; to open the furnace chamber during the ion exchanging process is not necessary, thereby guarantee the stability of the exchanging temperature; the cross section at the upside of the substrate glass support in the jig support takes the shape of a triangle or a hemicycle; at the end of the ion exchange, the jig is lifted, and the molten salt can flow down totally without any residue at the bottom of the substrate glass, guaranteeing the cleanness of the substrate glass. The utility model substrates the glass jig used for the preparation of wave-guide by means of an ion-exchange method is simple in structure, convenient in machining, and reliable in operation.

Description

Ion exchange method prepares the glass chip clamp of waveguide
Technical field
The utility model relates to fiber waveguide device, is the glass chip clamp that a kind of ion exchange method prepares waveguide, and these anchor clamps are mainly used in and utilize ion exchange method to prepare the extraction of glass substrate in the technological process of glass waveguide device.
Background technology
In recent years, along with developing rapidly of integrated optics technique, people are more and more deep to the research of optical waveguides, and the making of optical waveguides mainly is at Si, InP, LiNbO at present 3, finish on the substrate material such as glass, main preparation technology has plasma chemistry vapor deposition method, sputtering method, sol-gel processing, ion exchange method etc.Wherein utilize ion exchange method to prepare glass light waveguide device to have that manufacture craft glass waveguide device simple, with low cost, preparation has that transmission loss is low, specific refractory power and mould field distribution and optical fiber coupling well, be convenient to advantages such as integrated, in optical communication, optical sensor and other fields that need handle and control optical signal, wide application prospect is arranged.
The ultimate principle of utilizing ion exchange method to prepare glass waveguide is: glass substrate is immersed in the fused salt with certain temperature (as AgNO 3, KNO 3Deng), metallic cation is (as Na in the glass +) with fused salt in metallic cation (as Ag +Or K +) exchange, the positively charged ion in the fused salt enters into glass, and the positively charged ion in the glass is displaced, thereby causes the change of exchange place specific refractory power, causes that the mechanism of refraction index changing mainly contains following three kinds:
(1) the radius difference of exchange ion causes that glass internal structure and molecular volume change;
(2) the electricdisplacement polarizability difference of exchange ion causes that the electricdisplacement polarizability changes;
(3) ion diffusion causes the variation of glass internal stress.
By the concentration of exchange ion and the time and the temperature of ion diffusion in the control fused salt, can control the change amount and the index distribution of specific refractory power, thereby prepare satisfactory glass waveguide device.To the good control of ion exchange process, as the homogeneity of fused salt, the homoeostasis of temperature etc. are the keys of the reliable and stable glass waveguide device of processability, then need once can carry out ion-exchange to the multi-disc glass substrate simultaneously for producing in batches simultaneously.Carried out ion-exchange is directly glass substrate to be put into the fused fused salt with tweezers in the past, with tweezers glass substrate is taken out after exchange finishes again, and this process must be opened the exchange furnace chamber, thereby can cause the variation of furnace temperature; When the multi-disc glass substrate was carried out ion-exchange simultaneously, each glass substrate overlaped easily in addition, caused exchange inhomogeneous, finally can influence the performance of glass waveguide device, was unfavorable for producing in batches.
Summary of the invention
The utility model provides a kind of glass chip clamp that ion exchange method prepares waveguide that is used at the problem that above ion exchange process exists, and this glass chip clamp should have simple in structure, and is easy to use and reliable, overcomes the shortcoming of above-mentioned prior art.In preparation waveguide process, needn't open the exchange furnace chamber, thereby can not cause the variation of furnace temperature; When the multi-disc glass substrate was carried out ion-exchange simultaneously, each glass substrate can be not overlapping, and ion-exchange is even, can produce in batches.
Technical solution of the present utility model is as follows:
A kind ofly be used for the glass chip clamp that ion exchange method prepares waveguide, it is by lifting rod, first clamp sheet, second clamp sheet and anchor clamps holder combine by a connection piece, described first clamp sheet, second clamp sheet respectively is a rectangular block, place two ends, the described web member left and right sides relative and parallel, be connected with described web member respectively, described anchor clamps holder is connected with the bottom surface of described web member, described lifting rod is connected with the end face of described web member, described first clamp sheet, the opposite face of second clamp sheet digs the groove of the relative one by one up/down perforation that plugs for glass substrate that is provided with two pairs or more, the end face of the glass substrate holder of described anchor clamps holder is prismatic or circular arc, described first clamp sheet, the bottom surface of second clamp sheet and anchor clamps holder is in same plane.
The cross section of described groove is rectangle or trilateral or semicircle.
Describedly be connected to fixedly connectedly, or dismountable bolt connects.When adopting bolt connecting mode, selects the web member connection of different length after, applicable to the glass substrate of different size.
The advantage of the utility model anchor clamps is:
1, the groove on first clamp sheet and second clamp sheet separates glass substrate, guarantees that fused salt can fully contact with glass substrate in ion exchange process.
2, glass substrate vertically inserts in the described groove of anchor clamps, after finishing, exchange mentions lifting rod, fused salt on the glass substrate flows down owing to action of gravity, can not remain in glass surface, glass substrate holder top cross section is trilateral or semicircle simultaneously, guarantee that fused salt flows down fully, also can not remain in the bottom of glass substrate.
3, these anchor clamps can be raised neatly, thereby after making glass substrate put into stove of exchanging, need not to open the exchange furnace chamber when carrying out preheating, exchange, annealing process, have guaranteed the stability of exchange temperature.
4, the length of first clamp sheet of the utility model anchor clamps and second clamp sheet can prolong as required, increase the right number of groove, the multi-disc glass substrate is carried out ion-exchange simultaneously, when particularly the lifting rod of these anchor clamps, clamp sheet, anchor clamps holder and web member adopt dismountable bolt connecting mode to make up, only need select the web member of different lengths for use, promptly be applicable to the glass substrate of different size, assembling is regulated flexibly, is suitable for producing in batches.
Description of drawings
Fig. 1 is the stereo appearance figure of the utility model glass chip clamp embodiment 1
Fig. 2 is the schematic exploded perspective view of embodiment 1
Fig. 3 is the stereo appearance figure of the utility model embodiment 2
Among the figure:
1-lifting rod 11-screw thread
2-first clamp sheet 21,22-manhole 23, the groove that the 2N-glass substrate is put
3-second clamp sheet 31,32-manhole 33, the groove that the 3N-glass substrate is put
4-anchor clamps holder 41,44-glass substrate holder 42-web member holder 43-manhole
5-web member 51-goes up screw 52, screw 55 under the screw 54-of a 53-left side, the right screw of 56-
Embodiment
See also Fig. 1 and Fig. 2 earlier, Fig. 1 is the stereo appearance figure of the utility model glass chip clamp embodiment 1, Fig. 2 is the schematic exploded perspective view of embodiment 1, as seen from the figure, embodiment 1 is a kind of glass chip clamp that adopts dismountable bolt connecting mode combination, it is by lifting rod 1, first clamp sheet 2, second clamp sheet 3 and anchor clamps holder 4 combine by a connection piece 5, described first clamp sheet 2, second clamp sheet 3 respectively is a rectangular block, relative with two ends, described web member 5 left and right sides and be connected abreast, described anchor clamps holder 4 is connected with the bottom surface of described web member 5, described lifting rod 1 is connected with described web member 5 end faces, described first clamp sheet 2, the opposite face of second clamp sheet 3 digs the groove 23 of the relative one by one up/down perforation that plugs for glass substrate that is provided with two pairs or more, 2N, 33,3N, the glass substrate holder 41 of described anchor clamps holder 4,44 end face is prismatic or circular arc, described first clamp sheet 2, the bottom surface of second clamp sheet 3 and anchor clamps holder 4 is in same plane.
Described groove is a rectangular recess.
Anchor clamps of the present utility model, lifting rod 1 can adopt the stainless material preparation, and the stainless material quality is hard, and is not yielding; First clamp sheet 2, second clamp sheet 3 and anchor clamps holder 4 and web member 5 adopt the duralumin material preparation, and the duralumin material is holed, recessing is easy and convenient, and can not react with fused salt.Lifting rod 1 lower end external threading 11 is twisted the jail with the last screw 51 of web member 5; By left screw 52,53 on manhole 21,22,31,32 and the web member 5 and right screw 55,56 first clamp sheet 2, second clamp sheet 3 are linked together with web member 5 respectively with bolt; Anchor clamps holder 4 and web member 5 are linked together by the manhole 43 of anchor clamps holder 4 and the following screw 54 of web member 5 with bolt.Rectangle conduction through concave trough 23 on first clamp sheet 2 and second clamp sheet 3,2N, 33,3N is corresponding one by one, is used to place the glass substrate that carries out ion-exchange.
Glass substrate holder 41,44 first half cross sections of described anchor clamps holder 4 are triangular in shape, and web member holder 42 upper surfaces in the anchor clamps holder 4 are rectangle plane, and manhole 43 is positioned at the central authorities of rectangle plane.These anchor clamps have two pairs of grooves 23,2N, and 33,3N can place two sheet glass substrates and carry out ion-exchange simultaneously.When carrying out ion-exchange, the crucible that fills fused salt is put into the exchange furnace chamber together with the anchor clamps that are placed with glass substrate, the pre-heating stage anchor clamps are in the lifting state, make glass substrate be in the fused salt top; Treat temperature reach the exchange temperature and stable after, fall anchor clamps, glass substrate is immersed in the fused salt carries out ion-exchange; Lifting clamp after exchange finishes, glass substrate takes out from fused salt, carries out anneal.Because glass substrate is vertical placement, top fused salt is because action of gravity flows down the glass substrate holder 41 in the anchor clamps holder 4 simultaneously automatically, 44 top cross section is a trilateral, fused salt can flow down fully, can not remain in the bottom of glass substrate, has guaranteed the cleaning of glass substrate.In whole preheating, exchange, annealing process, need not to open furnace chamber, only need lifting or decline anchor clamps to get final product, thereby guaranteed the stability of temperature.
Embodiment 2
The logarithm that Fig. 3 has provided the rectangular recess on first clamp sheet 2 and second clamp sheet 3 expands to 8 pairs, and glass substrate holder 41, the 44 top cross sections in the anchor clamps holder 4 are semicircle.These anchor clamps can be placed 8 sheet glass substrates simultaneously and carry out ion-exchange, have improved the efficient of ion-exchange, and the rectangular recess of the different numbers of Design and Machining is right according to actual needs in process of production, to carry out batch jobs.

Claims (3)

1, a kind ofly be used for the glass chip clamp that ion exchange method prepares waveguide, be characterised in that it is by lifting rod (1), first clamp sheet (2), second clamp sheet (3) and anchor clamps holder (4) combine by a connection piece (5), described first clamp sheet (2), second clamp sheet (3) respectively is a rectangular block, place described web member (5) two ends, the left and right sides to be connected relatively and abreast with described web member (5), described anchor clamps holder (4) is connected with the bottom surface of described web member (5), described lifting rod (1) is connected with described web member (5) end face, described first clamp sheet (2), the opposite face of second clamp sheet (3) digs the groove (23 of the relative one by one up/down perforation that plugs for glass substrate that is provided with two pairs or more, 2N, 33,3N), the glass substrate holder (41 of described anchor clamps holder (4), 44) end face is prismatic or circular arc, described first clamp sheet (2), the bottom surface of second clamp sheet (3) and anchor clamps holder (4) is in same plane.
2, glass chip clamp according to claim 1, it is characterized in that described groove (23,2N, 33, cross section 3N) is rectangle or trilateral or semicircle.
3, glass chip clamp according to claim 1 is characterized in that described being connected to is threaded.
CN 200520046277 2005-11-04 2005-11-04 Waveguide glass substrate clamp by ion exchanging method Expired - Lifetime CN2871529Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 200520046277 CN2871529Y (en) 2005-11-04 2005-11-04 Waveguide glass substrate clamp by ion exchanging method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 200520046277 CN2871529Y (en) 2005-11-04 2005-11-04 Waveguide glass substrate clamp by ion exchanging method

Publications (1)

Publication Number Publication Date
CN2871529Y true CN2871529Y (en) 2007-02-21

Family

ID=37739875

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 200520046277 Expired - Lifetime CN2871529Y (en) 2005-11-04 2005-11-04 Waveguide glass substrate clamp by ion exchanging method

Country Status (1)

Country Link
CN (1) CN2871529Y (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100364912C (en) * 2005-11-04 2008-01-30 中国科学院上海光学精密机械研究所 Preparing waveguided glass chip clamp by ion exchanging process
CN102149649A (en) * 2008-08-08 2011-08-10 康宁股份有限公司 Strengthened glass articles and methods of making

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100364912C (en) * 2005-11-04 2008-01-30 中国科学院上海光学精密机械研究所 Preparing waveguided glass chip clamp by ion exchanging process
CN102149649A (en) * 2008-08-08 2011-08-10 康宁股份有限公司 Strengthened glass articles and methods of making
CN103043900A (en) * 2008-08-08 2013-04-17 康宁股份有限公司 Strengthened glass articles and methods of making

Similar Documents

Publication Publication Date Title
KR101329633B1 (en) Method for producing glass substrate
EP0973050B1 (en) Method for manufacturing planar waveguide structures
KR102173670B1 (en) Laminated Glass Article with Ceramic Phase and Method of Making the Article
US20100215862A1 (en) Method for forming an opal glass
CN1136466C (en) Optical fibre correction device using correction platform
TW201718258A (en) Laminated glass article with determined modulus contrast and method for forming the same
CN102944911B (en) A kind of fiber waveguide and preparation method thereof
CN2871529Y (en) Waveguide glass substrate clamp by ion exchanging method
JP2014196238A (en) Highly refractive thin glass
JP4534282B2 (en) Glass for liquid crystal display substrates
EP1824794A2 (en) Methods and process of tapering waveguides and of forming optimized waveguide structures
KR20130111958A (en) Sheet glass, sheet-glass polishing method, sheet-glass manufacturing method, and sheet-glass manufacturing device
WO2013138147A1 (en) Methods for reducing zirconia defects in glass sheets
CN114650972A (en) Transparent hexagonal-filled beta-quartz glass ceramic articles with large grain size
TW201831410A (en) Apparatus and methods for producing glass comprising crystal zirconia
US20200363583A1 (en) Methods of singulating optical waveguide sheets to form optical waveguide substrates
CN100364912C (en) Preparing waveguided glass chip clamp by ion exchanging process
CN110785388A (en) Method for controlling compaction
Cui et al. Tunable band-stop plasmonic filter based on symmetrical tooth-shaped waveguide couples
CN106291816B (en) A method of improving glass based optical waveguide chip uniformity
Pambianchi et al. Corning incorporated: Designing a new future with glass and optics
Liu et al. Theoretical simulation of a polarization splitter based on dual-core soft glass PCF with micron-scale gold wire
Noutsios et al. Characterization and modeling of planar surface and buried glass waveguides made by field-assisted K+ ion exchange
WO2019143644A1 (en) LOW-LOSS WAVEGUIDES FORMED IN HIGH-TRANSMISSION GLASS USING Ag-Na ION EXCHANGE
CN104950385B (en) Square-cylinder-type-square-lattice-photonic-crystal-based high-refractive-index dual-compensation-scattering-cylinder right-angle waveguide

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
AV01 Patent right actively abandoned

Effective date of abandoning: 20080130

AV01 Patent right actively abandoned

Effective date of abandoning: 20080130

C25 Abandonment of patent right or utility model to avoid double patenting