The utility model content
The purpose of this utility model provides a kind of reflective silicon single crystal liquid crystal, and it has splendid reflectivity.
A purpose more of the present utility model provides a kind of developing apparatus, and it has the character of high brightness and high contrast.
The utility model proposes a kind of reflective silicon single liquid crystal (LCOS) panel, it comprises a silicon substrate, an absorption layer, a colored mirror (color mirror), a transparency carrier and a liquid crystal layer.Disposed a pel array on this silicon substrate.Absorption layer is to be disposed on the pel array, and colored mirror is to be disposed on the absorption layer, and wherein this colored mirror can reflect the light of at least one particular range of wavelengths, and can be absorbed by the absorption layer by the light of colored mirror reflection.Transparency carrier is the subtend that is disposed at silicon substrate, and comprises on the transparency carrier and dispose a transparency electrode.Liquid crystal layer is to be configured between the colored mirror and the transparency electrode on the transparency carrier on the silicon substrate.
According to a preferred embodiment of the present utility model, above-mentioned absorption layer comprises a black light-absorbing material, and it for example is a metal level.In a preferred embodiment, the material of this absorption layer comprises titanium nitride, tungsten, chromium or molybdenum.
According to a preferred embodiment of the present utility model, above-mentioned colored mirror is a sandwich construction.In one embodiment, sandwich construction comprises at least one high refractive index layer and at least one low-index film.And the material of each layer of sandwich construction for example is to be selected from tantalum oxide, titanium dioxide or monox.
According to a preferred embodiment of the present utility model, above-mentioned colored mirror meeting reflect red (red), blue light (blue), green glow (green), dark green light (cyan), gold-tinted (yellow) and wherein a kind of coloured light of tangerine light (magenta).
According to a preferred embodiment of the present utility model, above-mentioned colored mirror comprises two kinds of colour reflective structures, thereby understands wherein two kinds of coloured light of reflect red, blue light, green glow, dark green light, gold-tinted and tangerine light.
According to a preferred embodiment of the present utility model, above-mentioned colored mirror comprises three kinds of colour reflective structures, thereby understands wherein three kinds of coloured light of reflect red, blue light, green glow, dark green light, gold-tinted and tangerine light.
According to a preferred embodiment of the present utility model, above-mentioned colored mirror comprises four kinds or above colour reflective structure, thereby understands reflect red, blue light, green glow, dark green light, gold-tinted and tangerine light wherein four kinds or above coloured light.
According to a preferred embodiment of the present utility model, above-mentioned colored mirror can reflects infrared light.
According to a preferred embodiment of the present utility model, above-mentioned pel array comprises a plurality of active components and a plurality of pixel electrodes that electrically connect with active component.
The utility model also proposes a kind of projection arrangement, and it comprises a light-source system, at least one polarization light-dividing device and at least one reflective silicon single crystal liquid crystal.Light-source system is in order to provide a white light beam.At least one polarization light-dividing device is to be disposed on the bang path of white light beam.At least one reflective silicon single crystal liquid crystal promptly is aforesaid reflective silicon single crystal liquid crystal, and this reflective silicon single crystal liquid crystal is to be disposed on the polarization light-dividing device white light beam bang path afterwards.
According to a preferred embodiment of the present utility model, above-mentioned at least one reflective silicon single crystal liquid crystal is a single reflective silicon single crystal liquid crystal.
According to a preferred embodiment of the present utility model, above-mentioned at least one reflective silicon single crystal liquid crystal comprises two reflective silicon single crystal liquid crystals.
According to a preferred embodiment of the present utility model, above-mentioned at least one reflective silicon single crystal liquid crystal comprises three reflective silicon single crystal liquid crystals.
According to a preferred embodiment of the present utility model, above-mentioned at least one reflective silicon single crystal liquid crystal comprises four or four above reflective silicon single crystal liquid crystals.
According to a preferred embodiment of the present utility model, above-mentioned light-source system comprises a light source and at least one blooming piece.Light source for example is an arc lamp (arc lamp), an EHP (ultra-highperformance, UHP) lamp, a Halogen lamp LED (halogen lamp) or a metal halide lamp (metalhalide lamp).
The utility model can reflect and make the light that is not reflected to be absorbed because of colored mirror set in reflective silicon single crystal liquid crystal can make the light of specific wavelength, therefore the reflectivity of reflective silicon single crystal liquid crystal is significantly promoted.And if this kind reflective silicon single crystal liquid crystal is applied in the projector equipment, not only need not use spectroscope and can improve display brightness and contrast.
For above-mentioned and other purposes, feature and advantage of the present utility model can be become apparent, preferred embodiment cited below particularly, and conjunction with figs. are described in detail below.
Embodiment
Fig. 1 is the diagrammatic cross-section according to the reflective silicon single crystal liquid crystal of the utility model one preferred embodiment.As shown in Figure 1, reflective silicon single crystal liquid crystal 100 comprises silicon substrate 102, pel array 101, absorption layer 106, colored mirror 108, liquid crystal layer 112 and transparency carrier 114.Pel array 101 is disposed on the silicon substrate 102, and absorption layer 106 is disposed on the pel array 101, and colored mirror 108 is disposed on the absorption layer 106.Transparency carrier 114 is positioned at the subtend of silicon substrate 102, and comprises on the transparency carrier 114 and dispose a transparency electrode 116, and the material of transparency electrode 116 for example is tin indium oxide or indium zinc oxide.Liquid crystal layer 112 then is between the transparency electrode 116 and the colored mirror 108 on the silicon substrate 102 that is disposed on the transparency carrier 114.In a preferred embodiment, this reflective silicon single crystal liquid crystal 100 also comprises alignment film 110,118, and it is respectively between colored mirror 108 and the liquid crystal layer 112 and between transparency electrode 116 and the liquid crystal layer 112.
In a preferred embodiment, be formed with a plurality of active components (not showing) on the silicon substrate 102, it is to utilize the sub-micrometer semiconductor technology to form.In addition, dispose a plurality of pixel electrodes 104 that electrically connect with active component on silicon substrate 102, the material of pixel electrode 104 for example is a metallic aluminium.Each active component and each pixel electrode 104 then constitute a pixel cell 130, and these pixel cells 130 then constitute so-called pel array 101.In addition, the transparency carrier 114 that is disposed at the subtend of silicon substrate 102 for example is a glass substrate.In addition, the liquid crystal layer 112 between transparency carrier 114 and silicon substrate 102 can be any known and be applicable to the liquid crystal material of reflective silicon single crystal liquid crystal.
Particularly, absorption layer 106 can cover pixel electrode 104, and colored mirror 108 is disposed on the absorption layer 106.And this colored mirror 108 can not absorb the light reflection of at least one particular range of wavelengths and can be positioned at beneath absorption layer 106 by the light of colored mirror 108 reflections.In other words, after light 120 entered colored mirror 108, the light 120a of specific wavelength can be reflected by colored mirror 108, and the light 120b that other are not reflected will absorb by absorbed layer 106.In one embodiment, pixel electrode 104 configurations of corresponding each pixel cell 130 of colored mirror 108 meetings, and comprise also that between the colored mirror 108 of pixel cell 130 disposing one deceives matrix (black matrix) 108a.Absorption layer 106 comprises a black light-absorbing material, and it for example is a metal level.In a preferred embodiment, the material of this metal level comprises titanium nitride, tungsten, chromium or molybdenum.In addition, colored mirror 108 for example is a sandwich construction.In one embodiment, this sandwich construction comprises at least one high refractive index layer and at least one low-index film, and high refractive index layer and low-index film overlap each other.Selection and collocation by high refractive index layer and low-index film material, thickness, can be so that the colored mirror 108 of this sandwich construction can reflect the light (for example being ruddiness, blue light, green glow, dark green light, gold-tinted or tangerine light) of specific wavelength, other light that are not reflected then can penetrate colored mirror 108 and arrive beneath absorption layer 106.In a preferred embodiment, the material of each layer of above-mentioned sandwich construction is to be selected from tantalum oxide, titanium dioxide or monox.In the present embodiment, because of colored mirror 108 is that sandwich construction by inorganic is constituted, it has the advantage of the light source of anti-high-energy irradiation.
This colored mirror 108 can be single colour reflective structure, thus its can reflect red, blue light, green glow, dark green light, gold-tinted and wherein a kind of coloured light of tangerine light.Shown in Fig. 2 A, it is the top view of colored mirror 108.In one embodiment, the colored mirror 108 on each pixel cell 130 is all reflect red (R).Certainly, its colored mirror 108 that also can be designed on each pixel cell 130 is all reflect green light, blue light, dark green light, gold-tinted or tangerine light (not showing).
In another embodiment, this colored mirror 108 comprises two kinds of colour reflective structures, thus its can reflect red, blue light, green glow, dark green light, gold-tinted or tangerine light two kinds of coloured light wherein.For example, shown in Fig. 2 B, but two kinds of colour reflective structure respective pixel unit 130 of reflect green light (G) and blue light (B) and being staggered.Certainly, the utility model does not limit its arrangement mode.In addition, above-mentioned two kinds of colour reflective structures can be any two the combinations of ruddiness, blue light, green glow, dark green light, gold-tinted and tangerine light.
In another preferred embodiment, this colored mirror 108 comprises three kinds of colour reflective structures, but thereby its reflect red, blue light, green glow, dark green light, gold-tinted and tangerine light three kinds of coloured light wherein.For example, shown in Fig. 2 C, but its reflect red (R), green glow (G) and blue light (B), and these three kinds of colour reflective structures are series arrangement with RGB at first row, secondary series is the series arrangement with BRG.Same, the utility model does not limit it and puts in order.The utility model does not limit its arrangement mode yet.
According to other embodiment, but colored mirror 108 of the present utility model also can be designed to reflects infrared light.Or, colored mirror 108 can be designed to have four or more colour reflective structure, but thereby reflect red, blue light, green glow, dark green light, gold-tinted and tangerine light wherein four kinds or above coloured light (not showing).
Reflective silicon single crystal liquid crystal of the present utility model is to adopt colored mirror to reflect the coloured light of being wanted, and sees through the light absorption that absorption layer will not be reflected, and this kind reflective silicon single crystal liquid crystal has splendid reflectivity.That is to say that reflective silicon single crystal liquid crystal of the present utility model uses metallic aluminium to have preferable reflectivity merely as the reflective silicon single crystal liquid crystal in reflection horizon compared to tradition.
And reflective silicon single crystal liquid crystal of the present utility model can be applied to the projector equipment, four of projector equipment, the three-chip type liquid crystal panel of projector equipment, the double-disk liquid crystal panel of one chip liquid crystal panel or the projector equipment of multi-disc liquid crystal panel more, and it is described in detail as follows.
Fig. 3 is the synoptic diagram according to the projector equipment of a kind of one chip liquid crystal panel of preferred embodiment of the present utility model.Please refer to Fig. 3, this projector equipment 300 comprises a light-source system 301, a polarization light-dividing device 306 and a reflective silicon single crystal liquid crystal 100.In a preferred embodiment, this projector equipment 300 also comprises a projecting lens 308.
Light-source system 301 is in order to provide a white light beam W1.Light-source system 301 comprises a light source 302 and at least one blooming piece 304.Light source 301 for example is an arc lamp (arc lamp), an EHP (ultra-high performance, UHP) lamp, a Halogen lamp LED (halogen lamp) or a metal halide lamp (metal halide lamp).Blooming piece 304 comprises the optical filter of PS polarization converter, filtering ultraviolet light or infrared light, long-pending mating plate, condenser or its combination or the like.
Polarization light-dividing device 306 is disposed on the bang path of white light beam W1.Reflective silicon single crystal liquid crystal 100 is disposed on the bang path by the white light beam W2 after the polarization light-dividing device 306.And this reflective silicon single crystal liquid crystal 100 promptly is a liquid crystal panel shown in Figure 1, but and colored mirror reflect red R, blue light B, green glow G, dark green light C, gold-tinted Y and tangerine light M in this reflective silicon single crystal liquid crystal 100 three kinds of coloured light wherein, be to be that example illustrates at this with R, G, three kinds of coloured light of B.In other words, the colored mirror that is used in the monocrystalline silicon LCD panel 100 has three kinds of colour reflective structures (shown in Fig. 2 C).
After white light beam W1 that light-source system 301 is provided was incident upon polarization light-dividing device 306, the P polarization of white light beam W1 or S polarization can be formed white light beam W2 by 306 reflections of polarization light-dividing device.Then, after white light beam W2 injects reflective silicon single crystal liquid crystal 100, will reflect red, green, blue (R, G, B) light beam.Red, green, blue (R, G, B) can reflex to projection lens 308 again via polarization light-dividing device 306 afterwards, and is projected on the screen (not illustrating), to demonstrate image on screen.
Fig. 4 is the synoptic diagram according to the projector equipment of a kind of two-piece type liquid crystal panel of preferred embodiment of the present utility model.Please refer to Fig. 4, this projector equipment 400 comprises a light-source system 301, a polarization light-dividing device 306 and two reflective silicon single crystal liquid crystal 100a, 100b.In a preferred embodiment, this projector equipment 400 also comprises a projecting lens 308.
Represent with identical label with the projector equipment 300 same or analogous composition members of above-mentioned one chip liquid crystal panel in the projector equipment 400 of this two-piece type liquid crystal panel, and do not repeat them here.In the projector equipment 400 of this two-piece type liquid crystal panel, wherein dispose reflective silicon single crystal liquid crystal 100a, 100b respectively in both sides at polarization light-dividing device 306.In a preferred embodiment, reflective silicon single crystal liquid crystal 100a can reflect a kind of coloured light, and it for example is ruddiness (R), so the top view of the colored mirror of monocrystalline silicon LCD panel 100a is shown in Fig. 2 A.And reflective silicon single crystal liquid crystal 100b can reflect two kinds of coloured light, and it for example is green glow (G) and blue light (B), so the top view of the colored mirror of monocrystalline silicon LCD panel 100b is shown in Fig. 2 B.Certainly, also can be designed to reflective silicon single crystal liquid crystal 100a and can reflect other kinds coloured light, and reflective silicon single crystal liquid crystal 100b can reflect other two kinds of coloured light.
At this, be to reflect ruddiness (R), and reflective silicon single crystal liquid crystal 100b can reflect green glow (G) and blue light (B) elaborates for example with reflective silicon single crystal liquid crystal 100a.After white light beam W1 that light-source system 301 is provided was incident upon polarization light-dividing device 306, the P polarization of white light beam W1 or S polarization can penetrate polarization light-dividing device 306 and form white light beam W2.The S polarization of white light beam W1 or P polarization can be formed white light beam W3 by 306 reflections of polarization light-dividing device.Then, after white light beam W2 injects reflective silicon single crystal liquid crystal 100a, will reflect red light beam (R).And red light beam (R) will reflex to projection lens 308 via polarization light-dividing device 306.In addition, white light beam W3 injects after the reflective silicon single crystal liquid crystal 100b, will reflect green, blue (G, B) light beam.Afterwards, green, blue light (G, B) can penetrate polarization light-dividing device 306 and inject projection lens 308.So, red, green, blue (R, G, B) can be projected on the screen (not illustrating) via projection lens 308, to demonstrate image on screen.
Fig. 5 is the synoptic diagram according to the projector equipment of a kind of three-chip type liquid crystal panel of preferred embodiment of the present utility model.Please refer to Fig. 5, this projector equipment 500 comprises a light-source system 301, polarization light-dividing device 306a, 306b, 306c and three reflective silicon single crystal liquid crystal 100a, 100b, 100c.In a preferred embodiment, this projector equipment 500 also comprises catoptron 310,312, spectroscope 314,316, a converging module 318 and a projecting lens 308.Same, member identical with previous one chip projector equipment in this projector equipment 500 is represented with identical label, and is not repeated them here.
In one embodiment, the projector equipment 500 employed reflective silicon single crystal liquid crystal 100a of this three-chip type liquid crystal panel, 100b, 100c can reflect single kind of coloured light respectively, at this is to be that example illustrates with red, green, blue (R, G, B) light beam, so the colored mirror of each reflective silicon single crystal liquid crystal 100a, 100b, 100c is single colour reflective structure (for example being shown in Fig. 2 A).
And the white light beam W1 that light-source system 301 produced at first can change its direct of travel via catoptron 310.The white light W3 that can make white light beam W1 be divided into reflected white light W2 and penetrate by spectroscope 314.
Aspect white light W3, can change its direct of travel earlier via catoptron 312.Afterwards, white light W3 can inject polarization light-dividing device 306c.Then, the P polarization of white light W3 or S polarization can be delivered to reflective silicon single crystal liquid crystal 100c via polarization light-dividing device 306c reflection.And then, reflective silicon single crystal liquid crystal 100c can reflect blue light (B), and blue light B can penetrate polarization light-dividing device 306c.
Aspect white light W2, can be via spectroscope 316 be divided into again and penetrating and reflected white light W4, W5.White light W4 can and be passed to polarization light-dividing device 306a by spectroscope 316.Then, the P polarization of white light W4 or S polarization can be delivered to reflective silicon single crystal liquid crystal 100a via polarization light-dividing device 306a reflection.And then, reflective silicon single crystal liquid crystal 100a can reflect ruddiness (R), and ruddiness R can penetrate polarization light-dividing device 306a.Similarly, white light W5 can be reflexed to polarization light-dividing device 306b by spectroscope 316.Then, the P polarization of white light W5 or S polarization can be delivered to reflective silicon single crystal liquid crystal 100b via polarization light-dividing device 306b reflection.And then, reflective silicon single crystal liquid crystal 100b can reflect green glow G, and green glow G can penetrate polarization light-dividing device 306b.
At last, ruddiness R, green glow G and blue light B can be incident to converging module 318.Converging module 318 for example comprises a two-way prism at least.Ruddiness R, green glow G and blue light B are being projected on the screen (not illustrating) by projection lens 308 through after closing light, to demonstrate image on screen.
As known from the above, reflective silicon single crystal liquid crystal of the present utility model can be applied to the projector equipment of one chip, double-disk or three-chip type liquid crystal panel.Certainly, also can be applied to the projector equipment of four or four above liquid crystal panels.Particularly, because reflective silicon single crystal liquid crystal of the present utility model has high reflectance, therefore be applied to improve its brightness and contrast in the projector equipment.And, because of projector equipment of the present utility model need not use dichronic mirror, therefore can reduce manufacturing cost and make light path design simplification in the projector equipment.
Particularly, if reflective silicon single crystal liquid crystal of the present utility model is applied to the projector equipment of one chip or double-disk liquid crystal panel, but also have the ray machine volume of reduced projection equipment and the advantage that can streamline any further the projector equipment light path design.
Though the utility model discloses as above with preferred embodiment; right its is not in order to limit the utility model; any those skilled in the art; under the prerequisite that does not break away from spirit and scope of the present utility model; can do a little change and retouching, therefore protection domain of the present utility model is as the criterion when looking the claims person of defining.