CN2821578Y - Probe sheet - Google Patents

Probe sheet Download PDF

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Publication number
CN2821578Y
CN2821578Y CNU2005200027528U CN200520002752U CN2821578Y CN 2821578 Y CN2821578 Y CN 2821578Y CN U2005200027528 U CNU2005200027528 U CN U2005200027528U CN 200520002752 U CN200520002752 U CN 200520002752U CN 2821578 Y CN2821578 Y CN 2821578Y
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China
Prior art keywords
substrate
detecting conductor
foil detector
regeneration
expression
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CNU2005200027528U
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Chinese (zh)
Inventor
泽田修一
吉野俊隆
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Yamaichi Electronics Co Ltd
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Yamaichi Electronics Co Ltd
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Abstract

The utility model relates to a vicious probe sheet, which can be produced by regeneration. The utility model comprises a base plate and a probe conductor which is assembled on the base plate and contacts an electrode of a detecting body.

Description

Foil detector
Technical field
The utility model relates to a kind of foil detector.
Background technology
In the past, the known foil detector that following structure is arranged: a plurality of probes of configuration are outstanding from substrate side by side, and its front end contacts with the electrode of detection bodies.In the foil detector that patent documentation 1 is put down in writing,, so on the electrode of a corpse or other object for laboratory examination and chemical testing, do not apply energetically, make the foil detector blasting, reliably a plurality of probes of conducting and a plurality of electrode because trickle probe is outstanding from substrate.
But, adhere to the impurity that can not remove at the front end of probe, or the generation of the front end of probe is damaged, when wearing away, owing to can not only replace probe, must integral body replace foil detector.
Patent documentation 1 spy opens flat 08-015318 communique
The utility model content
The purpose of this utility model is to make the regeneration of the foil detector that has produced defective to become possibility.
The utility model first aspect is a kind of renovation process of foil detector, and foil detector comprises: substrate; Detecting conductor, it is configured in and extends to the substrate end on the described substrate and have the contact site that contacts with the electrode of detection bodies.Its renovation process comprises: detect operation, it makes described contact site contact with the electrode of detection bodies, carries out the inspection of detection bodies; Remove operation, its front end and described substrate with described detecting conductor is together removed.
Of the present utility modelly provide a kind of foil detector on the other hand, it comprises: substrate; Detecting conductor, it is configured in and extends to the substrate end on the described substrate, has the contact site that contacts and check with the electrode of detection bodies.
The front end of the detecting conductor by removing wearing and tearing, damaged, contaminated and cisco unity malfunction forms new front end, and detection lug is regenerated.
Description of drawings
Fig. 1 (A), Fig. 1 (B), Fig. 1 (C) are planimetric map, front view (FV), the outboard profile of detection lug;
Fig. 2 (A), Fig. 2 (B), Fig. 2 (C) are planimetric map, front view (FV), the outboard profiles that expression is checked the detection bodies of having used detection lug;
Fig. 3 (A), Fig. 3 (B), Fig. 3 (C), Fig. 3 (D) are the schematic side views of the defective example of expression detection lug;
Fig. 4 (A), Fig. 4 (B), Fig. 4 (C), Fig. 4 (D) are the outboard profiles of expression detection lug regeneration;
Fig. 5 (A), Fig. 5 (B) are the outboard profiles of one of removal method example of the front end 8 of expression detecting conductor 6;
Fig. 6 (A), Fig. 6 (B), Fig. 6 (C) are the outboard profiles of expression detection lug regeneration;
Fig. 7 (A), Fig. 7 (B) are the detection combination of other modes of expression and the outboard profile of use-pattern thereof;
Fig. 8 (A), Fig. 8 (B), Fig. 8 (C) are the outboard profiles of the detection combination regeneration shown in presentation graphs 7 (A), Fig. 7 (B);
Fig. 9 (A), Fig. 9 (B) are the detection combination of other modes of expression and the outboard profile of use-pattern thereof;
Figure 10 (A), Figure 10 (B), Figure 10 (C), Figure 10 (D) are the outboard profiles of the detection combination regeneration shown in presentation graphs 9 (A), Fig. 9 (B);
Figure 11 (A), Figure 11 (B) are the planimetric maps of the detection lug of other modes of expression;
Figure 12 (A), Figure 12 (B) are the planimetric maps of the detection lug of other modes of expression;
Figure 13 (A), Figure 13 (B) are the planimetric maps of the detection lug of other modes of expression;
Figure 14 (A), Figure 14 (B), Figure 14 (C) are planimetric map, front view (FV), the outboard profiles of the detection lug of other modes of expression;
Figure 15 (A), Figure 15 (B) are outboard profile, the front view (FV)s of one of the use-pattern of expression detection lug shown in Figure 14 and the mode that defective takes place example;
Figure 16 (A), Figure 16 (B), Figure 16 (C), Figure 16 (D) are front view (FV), the outboard profiles of the detection combination regeneration shown in expression Figure 15 (A), Figure 15 (B);
Figure 17 (A), Figure 17 (B), Figure 17 (C) are planimetric map, front view (FV), the outboard profiles of the detection lug of other modes of expression;
Figure 18 (A), Figure 18 (B), Figure 18 (C) are planimetric map, front view (FV), the outboard profiles of the detection lug of other modes of expression;
Figure 19 (A), Figure 19 (B), Figure 19 (C), Figure 19 (D) are illustrated in the outboard profile that defective detection lug regeneration takes place on the substrate;
Figure 20 (A), Figure 20 (B), Figure 20 (C) are the outboard profiles of other modes of excision in the regeneration of expression detection lug;
Figure 21 (A), Figure 21 (B), Figure 21 (C) are the outboard profiles of other modes of excision in the regeneration of expression detection lug;
Figure 22 (A), Figure 22 (B) are the outboard profiles of other modes of excision in the regeneration of expression detection lug;
Figure 23 (A), Figure 23 (B) are the outboard profiles of other modes of excision in the regeneration of expression detection lug;
Figure 24 (A), Figure 24 (B) are the outboard profiles of other modes of grinding in the regeneration of expression detection lug;
Figure 25 is the planimetric map of other modes of expression detection lug;
Figure 26 (A), Figure 26 (B) are the planimetric map that makes use-case, the outboard profiles of expression detection lug shown in Figure 25;
Figure 27 (A), Figure 27 (B) are planimetric map, the outboard profiles of expression detection lug regeneration shown in Figure 25;
Figure 28 is the planimetric map of other modes of expression detection lug;
Figure 29 (A), Figure 29 (B) are planimetric map, the outboard profiles of the use-pattern of expression detection lug shown in Figure 28;
Figure 30 (A), Figure 30 (B) are planimetric map, the outboard profiles of the detecting unit regeneration shown in expression Figure 29 (A), Figure 29 (B).
Embodiment
Embodiment of the present utility model is described with reference to the accompanying drawings.The identical identical textural element of symbolic representation in each figure.
Planimetric map, front view (FV), the outboard profile of the detection lug of Fig. 1 (A), Fig. 1 (B), Fig. 1 (C) expression conduct regeneration object; Fig. 2 (A), Fig. 2 (B), Fig. 2 (C) are illustrated in configuration detection sheet on the detection bodies, the planimetric map of the state of checking, front view (FV), outboard profile.
Detection lug 1 is used to detect the electrical specification of detection bodies such as liquid crystal display.Detection lug 1 has flexual substrate 2 and forms in its surface and extend to the detecting conductor 6 of substrate end.Constitute contact site in this structure, it electrically contacts the end of a plurality of distribution shape detecting conductors that extend to the substrate end side by side and the electrode of detection bodies.A plurality of distributions generally perpendicularly dispose with respect to the substrate end.When substrate end and distribution all form the breach of certain width, can form and form identical detecting conductor end before the breach.
Substrate 2 is made of the inorganics of polymeric membranes such as pottery, glass ceramics, glass, silicon, the sheet metal with dielectric film, polyimide etc. or organism etc.As pottery, it is desirable to for example zirconia, the MACOR (SiO of zirconia, aluminium oxide, mullite, aluminium nitride, silicon nitride, interpolation aluminium oxide 2, MgO, Al 2O 3, K 2O) etc.Being more than or equal to 10 μ m and being less than or equal to 300 μ m of the ideal thickness of substrate 2.Use the parts that cover the surface of sheet metals such as stainless steel, hard steel, beryllium copper, brass by polymer insulating film as sheet metal with dielectric film.
As the material of detecting conductor 6, it is desirable to nickel, nickel-ferro alloy, nickel-cobalt alloy.The ideal thickness of detecting conductor 6 be 0.5 μ m~300 μ m.Detecting conductor 6 has the part that disposes corresponding to the spacing of the electrode 90 of detection bodies 80.
Shown in Fig. 2 (B), when detecting with foil detector 1 upturned state under, make front end 8 downward-sloping, be configured in the top of detection bodies 80, and the front end 8 of detecting conductor 6 contacted with the electrode 90 of detection bodies 80.The front end 8 of detecting conductor 6 extends to the front end face 102 of substrate 2, and is not outstanding from front end face 102.In addition, the unit number more than 100 is represented the end face of the numeral parts after 1.For example, the 102nd, the end face of substrate 2.
Detecting conductor 6 is formed on the surface of substrate 2 by thin film fabrication operations such as platings.For example, on the whole surface of substrate 2, form the plating basal layer.Plating basal layer corresponding to detecting conductor 6 parts that will form is exposed, and cover part outside it, implement metal-plated on the surface of the plating basal layer that has exposed by resist.At last, remove by the resist and the plating basal layer of part beyond the conducting film of plating.Also can utilize and form pattern by photic etching, and on substrate known pattern formation method such as printing conductive glue, on the pattern of detecting conductor, form the plating basal layer in advance, carry out metal-plated then.
Detecting conductor 6 is connected with the distribution 11 of flexible circuit board 10 at base end part.The distribution 11 of flexible circuit board 10 is connected with the printed board of checkout equipment body.In addition, the utility model has represented that detecting conductor 6 spreads all over the situation of total length configured in parallel, also can be in printed circuit board 10 side extended interval.
Shown in Fig. 2 (A), Fig. 2 (B), foil detector 1 is from the end face 112 outstanding specified lengths of stationary fixture 12, and the anchor clamps 12 that are fixed are fixing.The detecting conductor 6 of foil detector 1 is during by blasting and substrate 2 elastic deformation together.By part by stationary fixture restriction elastic deformation, can improve detecting conductor 6 and detection bodies 80 electrode 90 contact pressure.Therefore, when detecting, can be electrically connected detecting conductor 6 and electrode 90 reliably.Hereinafter foil detector 1 and stationary fixture 12 are collectively referred to as detection combination 201; To be called teat 204 from the detecting conductor 6 and the substrate 2 of the outstanding foil detector 1 of the end face 112 of stationary fixture 12.Stationary fixture 12 is fixed on the foil detector when detecting, but can take off from foil detector as required.
Fig. 3 (A), Fig. 3 (B), Fig. 3 (C), Fig. 3 (D) are the schematic side view of expression as the state of foil detector 1 cisco unity malfunction of regeneration object.
The front end 8 contaminated states of Fig. 3 (A) expression detecting conductor 6.Inexpungible impurity 200 such as particle attached on the front end 8 time, the electrode 90 of conducting front end 8 and detection bodies 80 reliably.
State after front end 8 wearing and tearing of Fig. 3 (B) expression detecting conductor 6.Detecting conductor 6 is by constituting than substrate 2 softer raw materials, so cause wearing and tearing with the friction of the electrode 90 of detection bodies 80.The electrode 90 of conducting front end 8 and detection bodies 80 reliably during front end 8 wearing and tearing.
State after front end 8 breakages of Fig. 3 (C) expression detecting conductor 6.
State after 2 wearing and tearing of Fig. 3 (D) expression substrate.When substrate 2 was damaged, detecting conductor 6 can not be with substrate 2 elastic deformations, thus the front end 8 of detecting conductor 6 can not with electrode 90 conducting reliably of detection body 80.
Fig. 4 (A), Fig. 4 (B), Fig. 4 (C), Fig. 4 (D) are the schematic side views that defective foil detector regeneration takes place in expression.
The detection combination 201 of Fig. 4 (A) expression cisco unity malfunction.Undesirable conditions such as wearing and tearing take place in the front end 8a of the detecting conductor 6 of foil detector 1, become the state with defective.
Shown in Fig. 4 (B), take off defective foil detector 1 from stationary fixture 12.
Shown in Fig. 4 (C), utilize with substrate 2 excisions or cutting and remove defective front end 8a.The end of remaining detecting conductor 6 is a normal condition.
One example of the concrete grammar of Fig. 5 (A), Fig. 5 (B) expression excision or cutting.For example, shown in Fig. 5 (A), contact with blade 202, excise defective front end 8a together with substrate 2 from substrate 2 sides.Thus, the front end 8b that removes behind the defective front end 8a is contacted with the electrode 90 of surveying body 80.Detecting conductor 6 distributes with uniform thickness and is formed on the one side of substrate 2, and when dieing except that front end 8a, even to detecting conductor 6 application of forces, detecting conductor 6 also is difficult to distortion.Shown in Fig. 5 (B), also can be from detecting conductor 6 side contacts blades 202, excision teat 204.Like this, blade 202 at first cuts off detecting conductor 6, then in cutting off the operation of substrate 2 not to detecting conductor 6 application of forces, so detecting conductor 6 is difficult to be out of shape and be difficult to peel off from substrate 2.
Shown in Fig. 4 (D), fixing foil detector 1 on stationary fixture 12.At this moment, it is desirable to that teat 204 becomes and regeneration before identical specified length, fixing foil detector 1 on stationary fixture 12.If the length of teat 204 is equal in the regeneration front and back, then the detecting conductor 6 of foil detector 1 takes place and the preceding elastic deformation of characteristic equally of regeneration.Therefore, need not after regeneration, to adjust blasting.
According to the regeneration of the foil detector of above explanation, can together remove defective front end 8a with substrate 2.And, when removing defective front end 8a, because together excise with substrate 2 or cut detecting conductor 6, so the detecting conductor 6 rare breakage or the distortion of wire.By the front end 8b that has removed behind the defective front end 8a is contacted with the electrode 90 of detection bodies 80, the conducting of the electrode 90 of front end 8b and detection bodies 80 is returned to normal condition.The detection lug 1 of promptly can regenerating.
Fig. 6 (A), Fig. 6 (B), Fig. 6 (C) are the sectional views of the variation of expression foil detector regeneration;
Fig. 6 (A) expression and the identical state of Fig. 5 (A), the state of defective takes place in the front end 8a that is illustrated in the detecting conductor 6 of foil detector 1.
Fig. 6 (B) is illustrated under the state that foil detector 1 is installed on the stationary fixture 12, removes defective front end 8a, forms the operation of new front end 8b.About the removal method of front end, for example similarly carry out with Fig. 5 (A).Keep using anchor clamps if use, then also can use the method for Fig. 5 (B).Also can replace cut-out and carry out grinding.
State after Fig. 6 (C) expression regeneration.In addition, installing on the stationary fixture 12 under the state of foil detector 1, by removing defective front end 8a, the length of the teat 204 after the regeneration is preceding shorter than regeneration.Like this, because the rigidity of the teat 204 after the regeneration is preceding higher than regeneration, so detecting conductor 6 may contact with the electrode 90 of detection bodies 80 with excessive contact pressure.But the length of the teat 204 of the length of the part of together removing with defective front end 8a before with respect to regeneration is short, need not carry out over excited adjustment and position adjustment etc.
Fig. 7 (A), Fig. 7 (B) are the constructed profiles of variation of the fixing means of expression foil detector 1.Fig. 7 (A) expression applies the state before the blasting, and Fig. 7 (B) expression applies the state after the blasting.
Shown in Fig. 7 (A), on the installed surface of stationary fixture 12, dispose elastic bodys such as synthetic rubber, spring 14 Jie and foil detector 1 is fixed on the stationary fixture 12 by playing junctor 14.
Shown in Fig. 7 (B), when applying blasting, teat 204 is with elastic body 14 elastic deformations.
Fig. 8 (A), Fig. 8 (B), Fig. 8 (C) are the sectional views of the foil detector regeneration of expression when using the fixing means of Fig. 7 (A), Fig. 7 (B);
Fig. 8 (A) expression and the identical state of Fig. 7 (A).Jie is fixed on foil detector 1 on the stationary fixture 12 by elastic body 14.
Shown in Fig. 8 (B), under foil detector 1 is installed on state on the stationary fixture 12, remove defective front end 8a, form new front end 8b.
Foil detector after Fig. 8 (C) expression regeneration.Under foil detector 1 is installed on state on the stationary fixture 12, remove defective front end 8a, the rigidity of the teat 204 after the regeneration is high before than regeneration.Yet teat 204 utilize blasting and elastic body 14 common elastic deformations, and the rigidity to elastic body 14 has effect on the major part of integral rigidity as mentioned above.Therefore, under the state that foil detector 1 is installed on the stationary fixture 12, even remove defective front end 8a, the detecting conductor 6 that causes therefrom contacts with the electrode 90 of detection bodies 80 with excessive contact pressure, and whole rigidity does not improve yet.Therefore even the length that comes along the part of removing together with defective front end 8a is elongated, the foil detector 1 of for example repeatedly regenerating, also can be as mentioned above regeneration foil detector 1 under the state that foil detector 1 is installed on the stationary fixture 12 like that.
Form foil detector on harder substrate, the elasticity of utilizing substrate is when probe applies contact pressure, and the substrate integral, flexible is out of shape, the elastic deformation of rare part.The detection bodies surface has when concavo-convex, and probe is difficult to contact with the electrode of recess.Even also be hopeful to have the situation of the foil detector that concavo-convex probe also can well contact on detection bodies surface.
Fig. 9 (A), Fig. 9 (B) expression is situated between and by elastic body detecting conductor 6 is fixed on the stationary fixture 12, does not give prominence to and the foil detector 1 of use from the end face 112 of stationary fixture 12.
Shown in Fig. 9 (A), foil detector 1 is fixed on the front end face 106 of detecting conductor 6 and end face 112 alignment of stationary fixture 12 on the stationary fixture 12.On the installed surface of the foil detector 1 of stationary fixture 12, dispose elastic bodys 14 such as resilient material, spring.Substrate 2 can be by the material with appropriate flexibility, and for example organic resin forms.
Shown in Fig. 9 (B), when applying blasting, detecting conductor 6 and elastic body 14 be elastic deformation together.Therefore, on the fluctuating of the assortment of the electrode 90 of detection bodies 80 and electrode 90 surfaces concavo-convex, can make separately front end 8 servo-actuateds.
Figure 10 (A), Figure 10 (B), Figure 10 (C), Figure 10 (D) expression has produced the sectional view of regeneration of the foil detector of defective.
The front end 8a that Figure 10 (A) is illustrated in detecting conductor 6 goes up the state that produces defective.
Shown in Figure 10 (B), take off foil detector 1 from stationary fixture 12.
Shown in Figure 10 (C), come along except that defective front end 8a with substrate 2, and form new front end 8b.
Shown in Figure 10 (D), the front end face 106 of detecting conductor 6 and the end face 112 of stationary fixture 12 are alignd, foil detector 1 is fixed on the stationary fixture 12.
According to the regeneration of above explanation, before and after regeneration, do not change the relative position of front end 8 and stationary fixture 12.Therefore, after regeneration, need not to adjust blasting.
The structure of foil detector can be carried out various changes.The variation of the structure of foil detector below is described.
Figure 11 (A), Figure 11 (B) are front view (FV), the outboard profile of foil detector 42.
Shown in Figure 11 (A), on foil detector 42, the detecting conductor 6 that is formed on the substrate 2 is imbedded dielectric film 16, has only the surface to expose from dielectric film 16.
Shown in 11 (B), also form dielectric film 16 in the outside, end of detecting conductor 6, detecting conductor 6 and dielectric film 16 form same surface.
Form dielectric film 16 by resin etc.On substrate 2, form after the detecting conductor 6, form dielectric film 16, remove top and make the surface of detecting conductor 6 expose just passable.Utilize the fixedly side of detecting conductor 6 of dielectric film 16, so in the operation of the front end 8 of removing detecting conductor 6, can suppress detecting conductor 6 distortion or peel off from substrate 2.
Figure 12 (A), Figure 12 (B) are front view (FV), the outboard profile of foil detector 40.
In the foil detector 40 shown in Figure 12 (A), Figure 12 (B), between substrate 2 and detecting conductor 6, have dielectric film 16.Can be shown in dotted line, at first on substrate 2, form the bottom of dielectric film 16, form detecting conductor 16 thereon, form the top of dielectric film 16 then.Also can change material in the upper and lower.Under the situation of the compactedness difference of substrate 2 and detecting conductor 6, can improve compactedness in the bottom of insulation course 16.Dielectric film 16 is formed by resin etc.Utilize dielectric film 16 fixing bases 2 and detecting conductor 6, so in the operation of the front end 8 of removing detecting conductor 6, can suppress detecting conductor 6 distortion or peel off from substrate 2.
Figure 13 (A), Figure 13 (B) are front view (FV), the outboard profile of foil detector 44.
In the foil detector 44 shown in Figure 13 (A), Figure 13 (B), be situated between by a plurality of lead relay 18 that connect substrate 2, detecting conductor 6 is led to substrate 2 back sides, be electrically connected with flexible circuit board 10 at substrate 2 back sides.There is not printed board in a side relative, can improves the degree of freedom of configuration with the detection bodies of foil detector.
Figure 14 (A), Figure 14 (B), Figure 14 (C) are planimetric map, front view (FV), the outboard profile of foil detector 46.
Shown in Figure 14 (A), Figure 14 (C), on the distribution 6b of foil detector 46, be formed with a plurality of electric conductivity teats 20 vertical arranged side by side with distribution 6b.Electric conductivity teat 20 forms the contact site that contacts with detection bodies.Distribution 6b and electric conductivity teat 20 form detecting conductor.
In Figure 14 (B), expression teat 20 has the situation with distribution 11 same thickness of tellite 10, and both thickness can be selected as required and arbitrarily.
Figure 15 (A), Figure 15 (B) are the use-pattern of the foil detector 46 shown in expression Figure 14 (A), Figure 14 (B), Figure 14 (C) and outboard profile and the front view (FV) that the mode of defective takes place;
Identical with the mode shown in Fig. 9 (A), Fig. 9 (B), by elastic body 14 foil detector 46 is combined with stationary fixture 12, and with their front end alignment.Because electric conductivity teat 20 is outstanding on distribution 6b, so even foil detector 46 does not tilt, or little inclination, also can electric conductivity teat 20 be crimped on the electrode 90 of detection bodies 80 selectively.
If electric conductivity teat 20 damages, then the teat 20a after the damage can not contact with the electrode 90 of detection bodies 80.Second electric conductivity teat 20 lacks to fall from the right side under the state of Figure 15 (B), can not contact.
Figure 16 (A), Figure 16 (B), Figure 16 (C), Figure 16 (D) are front view (FV), the outboard profiles of the order of expression regeneration foil detector.
Figure 16 (A) is illustrated in the state that defective takes place on the electric conductivity teat 20 shown in Figure 15 (A), Figure 15 (B).On electric conductivity teat 20a, produce defectiveness.20b is normal for the electric conductivity teat.
Shown in Figure 16 (B), Figure 16 (C), take off foil detector from stationary fixture 12, with distribution 6b.Substrate 2 is together removed the row electric conductivity teat with impaired electric conductivity teat 20.The electric conductivity teat 20 that a row electric conductivity teat back with impaired electric conductivity teat 20a is arranged in front-end configuration.
Shown in Figure 16 (D), on the foil detector of regeneration, install and fix anchor clamps 12 once more.
Because distribution 6b vertically on be formed with a plurality of electric conductivity teats 20, so even will produce a row electric conductivity teat of defective removes, also can make removal afterwards remaining electric conductivity teat 20 contact with the electrode 90 of detection bodies 80.
Foil detector with electric conductivity teat also can carry out various distortion.
Figure 17 (A), Figure 17 (B), Figure 17 (C) are planimetric map, front view (FV), the outboard profiles of distortion foil detector 48.
Shown in Figure 17 (B), Figure 17 (C), in foil detector 48, be formed with the dielectric film 16 of a part of the distribution 6b side of landfill distribution 6b and electric conductivity teat 20.Variation corresponding to Figure 11 (A), Figure 11 (B).The distribution 11 of distribution 6b and flexible circuit board 10 utilizes with the electric conductivity relay 18 of the same perforation dielectric film 16 of electric conductivity teat 20 and is electrically connected.Utilize dielectric film 16 fixing bases 2 and detecting conductor 6,, can suppress distribution 6b distortion or peel off from substrate 2 so have in the operation of front end of distribution 6b of electric conductivity teat 20 removing mounting.
Figure 18 (A), Figure 18 (B), Figure 18 (C) are planimetric map, front view (FV), the outboard profiles of distortion foil detector 50.
Shown in Figure 18 (B), in foil detector 50, on dielectric film 16, bury distribution 6b underground, on distribution 6b separately, be formed with the electric conductivity teat 20 of a plurality of perforation dielectric films 16.This point is with identical at the foil detector 48 shown in Figure 17 (A), Figure 17 (B), Figure 17 (C).In foil detector 50, also form the electric conductivity relay 18 that connects substrate 2, distribution 6b utilizes electric conductivity relay 18 to lead to substrate back.The distribution 11 of flexible circuit board 10 is electrically connected on electric conductivity relay 18 at the back side of substrate 2.Identical with the described foil detector of Figure 13 (A), Figure 13 (B) 44.
The situation that produces defective on the probe of foil detector more than has been described, but the foil detector of substrate 2 damages of also can similarly regenerating.
Figure 19 (A), Figure 19 (B), Figure 19 (C), Figure 19 (D) are expression regeneration produces the foil detector of defective on substrate outboard profiles.
The detection combination 201 of Figure 19 (A) expression cisco unity malfunction.Undesirable condition, probe cisco unity malfunction such as on the substrate 2 of foil detector 1, crack.
Shown in Figure 19 (B), take off defective foil detector 1 from stationary fixture 12.
Shown in Figure 19 (C), by together excising or cut the front end of removing defective substrate 2 with detecting conductor 6.Also can cut off or be cut to the position of the damaged portion that can remove substrate 2.Cutting process for example is the method shown in Fig. 5 (A), Fig. 5 (B).
Shown in Figure 19 (D), the foil detector 1 after fixing regeneration on the stationary fixture 12.
As described above, by together excising the detecting conductor of foil detector, the foil detector of can regenerating with substrate.The situation that is formed substrate by hard materials such as potteries is arranged, also when substrate cuts off, on distribution, apply excessive load sometimes.
Figure 20 (A), Figure 20 (B), Figure 20 (C) are the outboard profiles that an example that can alleviate the load that bears on the detecting conductor is removed in expression.
Shown in Figure 20 (A), from detecting conductor 6 side contacts blades 202.And cut off detecting conductor 6 fully.At this moment, under the state that does not as far as possible cut substrate 2, stop to cut off.The time of blade 202 work is short, and the load that is applied on the detecting conductor 6 is low.
Shown in Figure 20 (B), make the position of blade 202 move to the front of foil detector 1, cut off action again.Form opening 22 between the end of remaining detecting conductor 6 and blade 202, detecting conductor 6 does not contact with blade 202.On detecting conductor 6, do not apply load.Can reduce 6 distortion of the detecting conductor that causes by excessive load or peel off from substrate 2.
State after Figure 20 (C) expression is cut off.The upside of substrate 2 is outstanding a little, but if overhang reduces, does not then produce the problem in the practical application.
Figure 21 (A), Figure 21 (B), Figure 21 (C) are the outboard profiles of other cutting-off methods of expression.
Figure 21 (A) and Figure 20 (A) are same, and the operation of the detecting conductor 6 on the substrate 2 is cut off in expression by blade 202a.
Shown in Figure 21 (B), cut off substrate 2 from a side contacts blade 202b opposite with detecting conductor 6.Overlap with the cut-out groove 24 that cut-out operation by Figure 21 (A) forms.Cut off when overlapping with the cut-out groove for the second time and stop.If blade 202b is wideer than blade 202a, the top that equally also can introduce substrate easily with diagram then.Even use the most identical blade, also can realize identical shape.The mode of cutting off can be carried out various changes.For example, the operation of cutting off the operation of detecting conductor 6 or cutting off substrate 2 can be divided into a plurality of operations respectively implements.
Do not cut substrate 2 when cutting off detecting conductor 6, blade does not contact with detecting conductor 6 and removes the front end of foil detector 1 when cut-out substrate 2 as far as possible.Therefore, in the process of cutting off hard substrate 2, can reduce the load that detecting conductor 6 bears.Therefore, can reduce detecting conductor 6 distortion or the damage that causes by the load that in the process of cutting off hard substrate 2, produces.Form the distribution of electric conductivity teat for cut-out, also can obtain identical effect.
Figure 22 (A), Figure 22 (B) are expression foil detector regeneration other routine outboard profiles with cut-out.
Shown in Figure 22 (A), on substrate 2, form the protective seam 26 that covers detecting conductor 6.Protective seam 26 can pass through organic materials such as application of resin, wax and form, or the electroless plating of implementing to be caused by metals such as copper, iron, lead simultaneously applies or the electrolysis plating forms, perhaps by method such as organic material or metal melting notes type is formed.
Blade 202 contacts begin to cut foil detector 1 on protective seam 26 then.Tripping protection layer 26, detecting conductor 6, substrate 2 excise the front end 8a of defective detecting conductor 6 with substrate 2 and protective seam 26.
Shown in Figure 22 (B), also can be from substrate 2 side contacts blades 202 cutting foil detectors 1.In addition, protective seam 26 also can form the position that only covers by blade 202 cuttings.
Cut off the protective seam 26 on the back removal foil detector 1.Before the cutting of foil detector 1 begins, cover detecting conductor 6, peel off thereby can reduce by 6 distortion of the cutting detecting conductor that the application of force causes on detecting conductor 6 or from substrate 2 by protective seam 26.
Figure 23 (A), Figure 23 (B) are the outboard profiles of the foil detector of the cutting-off method behind the further enhanced protection of expression.
Shown in Figure 23 (A), on substrate 2 and detecting conductor 6, be installed with the support plate 28 that covers detecting conductor 6.Matrix for example forms fixed bed 38, fixed installation support plate 28 on substrate 2 and detecting conductor 6 by filling metals such as organic material such as sticker, wax or low-melting alloy between support plate 28 and substrate 2.
From detecting conductor 6 sides cutting foil detector 1, together cut off support plate 28, substrate 2 with detecting conductor 6.Like this, together excise defective front end 8a with substrate 2 and protective seam 26.
Shown in Figure 23 (B), also can be from substrate 2 sides cutting foil detector 1.
After the cut-out, by coating solvent or heating, fusing is filled in organic material and the metal between support plate 28 and the substrate 2, removes the support plate 28 that is fixed on the foil detector 1.
Cover detecting conductors 6 by support plate 28 before beginning by cutting, can reduce detecting conductor 6 distortion that the power on the detecting conductor 6 that is applied to by cutting causes or peel off from substrate 2 at foil detector 1.
Figure 24 (A), Figure 24 (B) are the outboard profile of expression by the method for grinding regeneration foil detector.
Shown in Figure 24 (A), identical with the situation of Figure 23 (A), Figure 23 (B), be situated between by utilizing the fixed bed 38 that forms by metals such as organic material such as bonding agent, wax and low-melting alloys that the support plates 28 of covering detecting conductors 6 are fixedly mounted on substrate 2 and the detecting conductor 6.
Shown in Figure 24 (B), from a direction when stressed, can with the face of detecting conductor 6 opposition sides of substrate 2 on fixed installation support plate 28.
Together cut the front end face 106 of detecting conductor 6 with the front end face 102 of substrate 2.For example, applying friction force to the direction (direction of arrow mark X) of substrate 2, grinding detecting conductor 6, fixed bed and substrate 2 by abrasive sheet, abrasive disk etc. from detecting conductor 6.Support plate 28 can suppress base plate deformation, can reduce detecting conductor 6 and problem such as peel off from substrate 2.
After the grinding, remove the support plate 28 that is fixed on the foil detector 1.
Together cut in the operation of front end face 106 of detecting conductor 6 at front end face 128,102, only on substrate 2, apply friction force in the direction of pushing detecting conductor 6 with support plate 28 and substrate 2.Can reduce detecting conductor 6 peels off from substrate 2.
It is desirable to more, seek excising the countermeasure of operation by the capable of regeneration detection substrate of excision front end.
Figure 25 is a planimetric map of seeking an example of the foil detector after the countermeasure of step for regeneration.On foil detector 52, be provided with and remove mark 30 (general names of 30a, 30b etc.) and mounting hole 32 (general names of 32a, 32b etc.).Form removal mark 30, mounting hole 32 with same intervals.
Figure 26 (A), Figure 26 (B) are planimetric map, the outboard profiles that expression is installed in stationary fixture 12 state on the foil detector 52.
In chimeric being used on the mounting hole 32 foil detector 1 is fixed on pin 34 on the stationary fixture 12.On nethermost mounting hole 32a, inserting pin 34 under the illustrated state.Interval from mounting hole 32a to next mounting hole 32b with equate from the lower end of substrate 2 to first distance of removing mark 30b.
Figure 27 (A), Figure 27 (B) are planimetric map, the outboard profiles of the state after the expression regeneration foil detector 52.Along removing mark 30b-30b, together excise substrate 2 with detecting conductor 6, use mounting hole 32b to install and fix anchor clamps 12.It is same before the relation of foil detector and stationary fixture remains and excises.Other removal mark, mounting hole also have identical relation.
By use removing mark 30, can remove the front end 8a of defective detecting conductor 6 so that on respect to the vertical vertical direction of detecting conductor 6 front end face 106 of a plurality of detecting conductors 6 of proper alignment.
In addition, a plurality of mounting holes 32 are set because overlap by the front end face of the foil detector 52 after the regeneration of removing mark 30 decisions, thus the foil detector 52 after the regeneration can be installed on the stationary fixture 12, so that the characteristic of foil detector 52 is preceding identical with regeneration.For example, outstanding at foil detector 52 and under the situation about using, the length of teat 204 can equate before and after regeneration exactly from the end face 112 of stationary fixture 12.In addition, when end face 112 alignment of the front end face 106 of foil detector 52 and stationary fixture 12 are used, even after regeneration, also can align the front end face 106 of foil detector 52 and the end face 112 of stationary fixture 12 exactly.
The excision of foil detector also can be carried out at an arbitrary position not only in determined position.
Figure 28 is the planimetric map of the foil detector 54 that can regenerate at an arbitrary position of expression.Foil detector 54 is provided with the slotted hole 36 along the longitudinal extension of detecting conductor 6.
As shown in figure 29, chimeric pin 34 on slotted hole 36, fixing foil detector 54 on stationary fixture 12.
Figure 30 is the mode chart that is used to illustrate 54 regeneration of expression foil detector.
By removing foil detector 54 at an arbitrary position, remove foil detector 54 defective front ends 154.
To move in the direction of the front end face 106 of foil detector 54, will sell 34 and be fastened on the slotted hole 36, the foil detector 54 after fixing regeneration on the stationary fixture 12 with the width equal widths relative fixed anchor clamps of removing by the operation of removing front end 154 12.
Because detecting conductor 6 vertically on be provided with long slotted hole 36, so the foil detector 54 after the regeneration can be installed on the stationary fixture 12, the characteristic of the foil detector 54 of regenerating so that be removed to the optional position with regenerate preceding identical.
In addition, with slotted hole, can form the removal mark and the pin adjustment notch of a determining deviation.
By above embodiment the utility model is described, but the utility model is not limited to this.For example, it is conspicuous can carrying out various distortion, improvement, conversion and combination etc. to those skilled in the art.
Characteristics of the present utility model below are described.
Can before removing operation, on substrate, form the protective seam of a part that covers detecting conductor at least.At this moment, in removing operation, can come along front end together with protective seam except that detecting conductor.By before removing operation, covering detecting conductor, can be reduced in to remove in the operation and detecting conductor is out of shape or from strippable substrate because of being applied to power on the detecting conductor by protective seam.
In addition, also can before removing operation, on substrate and detecting conductor, fixedly mount support plate.At this moment, in removing operation, can come along front end together with support plate except that detecting conductor.By fixed support plate before removing operation, can be reduced in to remove in the operation and detecting conductor is out of shape or from strippable substrate because of being applied to power on the detecting conductor.
In removing operation, can cut off detecting conductor together with substrate from conducting film side direction substrate-side.By cutting off detecting conductor together with substrate, can reduce detecting conductor from strippable substrate from conducting film side direction substrate-side.
Removing operation can comprise: first operation, and it does not cut off substrate but cuts off detecting conductor from the detecting conductor side; Second operation, its position at the base end side that does not cut off the detecting conductor that is cut off by first operation cuts off substrate.
When cutting off substrate, because do not contact with blade, so can be reduced in generation in the process of cutting off hard substrate and pass to the load of detecting conductor by the base end side of the detecting conductor of first operation cutting by second operation.Can reduce the detecting conductor distortion or the damage that cause owing to the load that in the process of cutting off hard substrate, produces.
In removing operation, can together cut the front end face of detecting conductor with the front end face of substrate, so that be applied on the detecting conductor from the friction force of conducting film to orientation substrate.
Together cut in the process of front end face of detecting conductor, at front end face because apply, so can reduce detecting conductor from strippable substrate with the friction force of detecting conductor by the direction that is pressed in substrate-side with substrate.
In removing operation, can when checking, will be fixed in parts on the described foil detector and be fixed under the state on the foil detector, remove the front end of detecting conductor.
For example, when after detecting conductor regeneration, need not to adjust the position of foil detector, can be under the parts that will be used to adjust the foil detector position be fixed on state on the foil detector, the front end of excision or cutting detecting conductor.
Foil detector can comprise: substrate; Be formed on the conducting film on the described substrate, it has and is positioned on the described substrate and the wire detecting conductor that contacts with the electrode of detection bodies; Mark, it is with the front end mute of described detecting conductor or be cut in the operation of assigned position, is used for specific described assigned position and is formed on described substrate.Form mark by the assigned position on substrate, remove the front end of detecting conductor and when regenerating foil detector by excision or cutting, can usage flag and the front end of judging the excision detecting conductor easily to where for well.
Substrate can have the location division, and it is positioned at respectively and leaves on the position of mutual equidistance on vertical base end side of described detecting conductor from the front end of described detecting conductor with by the specific described assigned position of described mark.When specific described assigned position leaves that the position of equidistance has the location division mutually on vertical base end side at described detecting conductor from the front end of detecting conductor with by mark respectively, if the front end of detecting conductor is removed to by the mark certain location, then distance from the front end of the detecting conductor before regenerating to the location division and the distance from the front end of the detecting conductor after the regeneration to the location division equate.Therefore, in that specific assigned position leaves on vertical base end side at detecting conductor mutually that the position of equidistance forms the location division from the front end of detecting conductor with by mark respectively, thereby, can make before and after the regeneration user mode of foil detector identical.
The described substrate of foil detector can have the vertical upwardly extending slotted hole at described detecting conductor.When using foil detector, can along insert on the slotted hole of detecting conductor longitudinal extension positioning element such as pin grade on the pick-up unit main body with the foil detector positioning and fixing.
Form slotted hole by locating the hole of using, can at random adjust the position of the foil detector after the regeneration according to the removal amount of detecting conductor along the detecting conductor longitudinal extension.

Claims (6)

1. foil detector, it comprises: substrate, be configured in the detecting conductor that extends to the substrate end on the described substrate, it is characterized in that, described detecting conductor has the contact site that contacts with the electrode of detection bodies and check.
2. foil detector as claimed in claim 1 is characterized in that, described detecting conductor has a plurality of distributions that are formed on side by side on the described substrate.
3. foil detector as claimed in claim 2 is characterized in that, described detecting conductor also has a plurality of teats that are respectively formed on described a plurality of distribution.
As right will be in 1~3 each described foil detector, it is characterized in that also having the mark that is formed on the described substrate, it is used for when the front end with described detecting conductor is removed to assigned position, the position of specific described regulation.
5. foil detector as claimed in claim 4 is characterized in that described substrate has the location division, and it is separated from each other out predetermined distance corresponding to the front end of described detecting conductor with by the specific described assigned position of described mark.
6. as each described foil detector in the claim 1~3, it is characterized in that described substrate has along the slotted hole of the longitudinal extension of described detecting conductor.
CNU2005200027528U 2004-03-03 2005-03-03 Probe sheet Expired - Fee Related CN2821578Y (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP058748/04 2004-03-03
JP2004058748 2004-03-03
JP341892/04 2004-11-26

Publications (1)

Publication Number Publication Date
CN2821578Y true CN2821578Y (en) 2006-09-27

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Country Link
CN (1) CN2821578Y (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101776701A (en) * 2010-02-11 2010-07-14 王云阶 Electronic and circuit board detection card
CN102565570A (en) * 2010-12-02 2012-07-11 Tdk株式会社 Method for performing burn-in test
CN103630712A (en) * 2012-08-23 2014-03-12 技鼎股份有限公司 Blade-shaped microprobe structure and manufacturing method thereof

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101776701A (en) * 2010-02-11 2010-07-14 王云阶 Electronic and circuit board detection card
CN102565570A (en) * 2010-12-02 2012-07-11 Tdk株式会社 Method for performing burn-in test
CN102565570B (en) * 2010-12-02 2015-02-11 Tdk株式会社 Method for performing burn-in test
US8957692B2 (en) 2010-12-02 2015-02-17 Tdk Corporation Method for performing burn-in test
CN103630712A (en) * 2012-08-23 2014-03-12 技鼎股份有限公司 Blade-shaped microprobe structure and manufacturing method thereof
CN103630712B (en) * 2012-08-23 2016-01-27 技鼎股份有限公司 Blade-like microprobe structure and preparation method thereof

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