CN2812352Y - Full-solid quasi-continuous wavelength tuning Titanium-doped sapphire -PPLN optical parametric oscillator - Google Patents
Full-solid quasi-continuous wavelength tuning Titanium-doped sapphire -PPLN optical parametric oscillator Download PDFInfo
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- 230000003287 optical effect Effects 0.000 title claims abstract description 40
- 229910052594 sapphire Inorganic materials 0.000 title claims abstract description 23
- 239000010980 sapphire Substances 0.000 title claims abstract description 23
- 239000007787 solid Substances 0.000 title 1
- 239000013078 crystal Substances 0.000 claims abstract description 41
- 230000008878 coupling Effects 0.000 claims abstract description 24
- 238000010168 coupling process Methods 0.000 claims abstract description 24
- 238000005859 coupling reaction Methods 0.000 claims abstract description 24
- 238000005086 pumping Methods 0.000 claims abstract description 20
- 230000010355 oscillation Effects 0.000 claims abstract description 7
- 239000010936 titanium Substances 0.000 claims description 27
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 16
- 229910052719 titanium Inorganic materials 0.000 claims description 16
- 238000002834 transmittance Methods 0.000 claims description 6
- 230000010287 polarization Effects 0.000 claims description 5
- 239000000498 cooling water Substances 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 description 9
- 238000000576 coating method Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 239000006117 anti-reflective coating Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000005350 fused silica glass Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
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Abstract
一种准连续运转波长调谐PPLN光学参量振荡器，包括一级泵浦源，一级耦合系统，二级泵浦源，二级耦合系统，光学参量振荡腔。一级泵浦源包括由第一平面镜M1和第二平面镜M2构成的平－平腔结构，在第一平面镜M1和第二平面镜M2之间自第一平面镜M1开始依次设有对基频光进行调制的开关器件Q、最初光学泵浦源、谐波反射镜和倍频晶体。二级泵浦源的谐振腔由第三平面镜M3和第四平面镜M4构成，在第一耦合透镜L1的焦点处设置钛宝石晶体，在第三平面镜M3和钛宝石晶体之间设有棱镜。光学参量振荡腔由后镜M5和输出镜M6构成，在位于两者之间的第二耦合透镜L2焦点附近设置PPLN晶体。本实用新型的光学参量振荡器是一种功率水平高、结构简单紧凑而体积小，还具有准相位匹配光学参量振荡器的宽带可调谐光源。
A quasi-continuous operation wavelength tuned PPLN optical parametric oscillator comprises a primary pump source, a primary coupling system, a secondary pump source, a secondary coupling system, and an optical parametric oscillator cavity. The first-stage pumping source includes a flat-flat cavity structure composed of a first plane mirror M1 and a second plane mirror M2. Between the first plane mirror M1 and the second plane mirror M2, there are sequentially arranged the fundamental frequency light from the first plane mirror M1. Modulated switching device Q, primary optical pump source, harmonic mirror and frequency doubling crystal. The resonant cavity of the secondary pump source is composed of a third plane mirror M3 and a fourth plane mirror M4, a Ti:Sapphire crystal is set at the focal point of the first coupling lens L1, and a prism is set between the third plane mirror M3 and the Ti:Sapphire crystal. The optical parametric oscillation cavity is composed of a rear mirror M5 and an output mirror M6, and a PPLN crystal is arranged near the focal point of the second coupling lens L2 between them. The optical parametric oscillator of the utility model is a broadband tunable light source with high power level, simple and compact structure, small volume and quasi-phase matching optical parametric oscillator.
Description
技术领域technical field
本实用新型涉及一种光学参量振荡器激光器，尤其涉及一种全固态准连续波长调谐钛宝石-PPLN光学参量振荡器。The utility model relates to an optical parameter oscillator laser, in particular to an all-solid-state quasi-continuous wavelength tuning titanium sapphire-PPLN optical parameter oscillator.
背景技术Background technique
目前，采用周期极化晶体实现准相位匹配光学参量振荡器，是实现可调谐光源的一种新型的重要手段和有效途径，利用全固态激光器波长泵浦周期极化晶体，通过调整相关参数，可以得到高输出功率、高效率、可调谐波长范围大、寿命长、结构紧凑而体积小的可调谐光源，是一种理想的调谐方式。At present, the use of periodically polarized crystals to realize quasi-phase-matched optical parametric oscillators is a new type of important means and effective way to realize tunable light sources. Using all-solid-state laser wavelengths to pump periodically polarized crystals, by adjusting related parameters, can It is an ideal tuning method to obtain a tunable light source with high output power, high efficiency, large tunable wavelength range, long life, compact structure and small volume.
发明内容Contents of the invention
本实用新型所要解决的技术问题是，提出一种功率水平高、结构简单紧凑而体积小，还具有准相位匹配光学参量振荡器的宽带可调谐光源。The technical problem to be solved by the utility model is to propose a broadband tunable light source with high power level, simple and compact structure, small volume and quasi-phase matching optical parametric oscillator.
本实用新型采用的技术方案是：一种准连续运转波长调谐PPLN光学参量振荡器，包括一级泵浦源，一级耦合系统，二级泵浦源，二级耦合系统，光学参量振荡腔。一级泵浦源包括由第一平面镜M1和第二平面镜M2构成的平-平腔结构，在第一平面镜M1和第二平面镜M2之间自第一平面镜M1开始依次设有对基频光进行调制的开关器件Q、最初光学泵浦源、谐波反射镜和倍频晶体。一级耦合系统包括第一耦合透镜L1，用以将一级泵浦源产生的泵浦光耦合进二级泵浦源的谐振腔。二级泵浦源的谐振腔由第三平面镜M3和第四平面镜M4构成，在第一耦合透镜L1的焦点处设置钛宝石晶体，在第三平面镜M3和钛宝石晶体之间设有棱镜。二级耦合系统包括第二耦合透镜L2，用以将二级泵浦源产生的泵浦光耦合进光学参量振荡腔。光学参量振荡腔由后镜M5和输出镜M6构成，在位于两者之间的第二耦合透镜L2焦点附近设置PPLN晶体。The technical solution adopted by the utility model is: a quasi-continuous operation wavelength-tuned PPLN optical parametric oscillator, including a primary pump source, a primary coupling system, a secondary pump source, a secondary coupling system, and an optical parametric oscillator cavity. The first-stage pumping source includes a flat-flat cavity structure composed of a first plane mirror M1 and a second plane mirror M2. Between the first plane mirror M1 and the second plane mirror M2, there are sequentially arranged a filter for the fundamental frequency light starting from the first plane mirror M1. Modulated switching device Q, primary optical pump source, harmonic mirror and frequency doubling crystal. The primary coupling system includes a first coupling lens L1 for coupling the pump light generated by the primary pumping source into the resonant cavity of the secondary pumping source. The resonant cavity of the secondary pump source is composed of a third plane mirror M3 and a fourth plane mirror M4, a Ti:Sapphire crystal is set at the focal point of the first coupling lens L1, and a prism is set between the third plane mirror M3 and the Ti:Sapphire crystal. The secondary coupling system includes a second coupling lens L2 for coupling the pump light generated by the secondary pumping source into the optical parametric oscillation cavity. The optical parametric oscillation cavity is composed of a rear mirror M5 and an output mirror M6, and a PPLN crystal is arranged near the focal point of the second coupling lens L2 between them.
其中，in,
最初光学泵浦源为按照等边三角形排列、采用侧向泵浦方式泵浦激光介质的激光二极管阵列，激光介质为Nd：YAG，尺寸为φ3×80mm，两端磨成平面，镀基频光的增透膜，由流动的冷却水对激光二极管阵列和激光介质提供冷却。Initially, the optical pumping source is a laser diode array arranged in an equilateral triangle and using side pumping to pump the laser medium. The laser medium is Nd:YAG with a size of φ3×80mm. Both ends are ground into planes and coated with fundamental frequency light. The anti-reflection coating is used to cool the laser diode array and laser medium by flowing cooling water.
倍频晶体为KTP晶体，采用II类相位匹配，切割角为θ＝90°，φ＝23.6°，尺寸为6×6×10mm，两面镀基频光和倍频光的增透膜。The frequency doubling crystal is KTP crystal, which adopts type II phase matching, the cutting angle is θ=90°, φ=23.6°, the size is 6×6×10mm, and the anti-reflection coating of the base frequency light and frequency doubling light is coated on both sides.
钛宝石晶体的中心轴线垂直于晶轴，具有两个以布儒斯特角切割的通光端面，且所述两个通光端面的法线均与晶轴处于同一平面内，在布儒斯特入射面内的泵浦光的偏振方向与晶轴一致。The central axis of the titanium sapphire crystal is perpendicular to the crystal axis, and has two clear end faces cut at Brewster's angle, and the normals of the two clear end faces are in the same plane as the crystal axis. The polarization direction of the pump light in the special incident plane is consistent with the crystal axis.
钛宝石晶体通光方向长度为15mm，截面是边长为5mm的正方形。The length of the titanium sapphire crystal in the light direction is 15 mm, and the cross section is a square with a side length of 5 mm.
构成二级泵浦源谐振腔的平面镜M3的空间位置可以调节。The spatial position of the plane mirror M3 constituting the resonant cavity of the secondary pumping source can be adjusted.
作为更进一步的优选方案，As a further preferred option,
第一平面镜(M1)镀1064nm高反膜；The first plane mirror (M1) is coated with 1064nm high reflection film;
开关器件(Q)镀1064nm增透膜；The switching device (Q) is coated with 1064nm anti-reflection coating;
谐波反射镜镀1064nm增透膜和532nm高反膜；The harmonic mirror is coated with 1064nm antireflection coating and 532nm high reflection coating;
构成谐振腔的第三平面镜(M3)镀750～850nm高反膜；The third plane mirror (M3) constituting the resonant cavity is coated with a 750-850nm high-reflection film;
构成谐振腔的第四平面镜(M4)镀532nm高反膜，镀750～850nm的半透膜，透过率为20％；The fourth plane mirror (M4) constituting the resonant cavity is coated with a 532nm high-reflection film and a 750-850nm semi-permeable film with a transmittance of 20%;
后镜(M5)镀750～850nm以及OPO输出波段的高反膜；The rear mirror (M5) is coated with high-reflection film of 750-850nm and OPO output band;
输出镜(M6)，曲率半径为60mm，镀750～850nm镀高反膜和OPO输出波段的半透膜，透过率约为15％。The output mirror (M6), with a curvature radius of 60mm, is coated with a 750-850nm high-reflection film and a semi-permeable film for the OPO output band, and the transmittance is about 15%.
OPO输出波段分为三个波段，分别是0.9～1.7um，1.7～2.5um，2.5～3.2um。The OPO output band is divided into three bands, namely 0.9-1.7um, 1.7-2.5um, and 2.5-3.2um.
本实用新型所带来的有益效果：The beneficial effects brought by the utility model:
(1)本实用新型全部采用全固态器件，其结构紧凑、牢固耐用、价格较低。(1) The utility model adopts all solid-state devices, which are compact in structure, firm and durable, and low in price.
(2)一级泵浦装置采用LD作为原始泵浦源，倍频晶体为KTP，用声光Q开关进行频率调制以实现高峰值功率的准连续运转。(2) The first-stage pumping device uses LD as the original pumping source, the frequency doubling crystal is KTP, and the frequency modulation is performed by an acousto-optic Q switch to achieve quasi-continuous operation with high peak power.
(3)二级泵浦装置所产生的钛宝石激光的脉宽与一级泵浦源所产生的泵浦光相比可降低一个数量级，极大地提高了峰值功率，是PPLN参量振荡器的理想泵浦源。(3) The pulse width of the titanium sapphire laser generated by the secondary pumping device can be reduced by an order of magnitude compared with the pumping light generated by the primary pumping source, which greatly improves the peak power. It is an ideal PPLN parametric oscillator pump source.
(4)采用周期极化晶体实现准相位匹配光学参量振荡器，通过调整相关参数，得到高输出功率、高效率、可调谐波长范围大、寿命长、结构紧凑而体积小的可调谐光源。(4) A quasi-phase-matched optical parametric oscillator is realized by using periodically polarized crystals. By adjusting relevant parameters, a tunable light source with high output power, high efficiency, large tunable wavelength range, long life, compact structure and small volume is obtained.
附图说明Description of drawings
图1为本实用新型的光学参量振荡器的整体结构图Fig. 1 is the overall structural diagram of the optical parametric oscillator of the present utility model
具体实施方式Detailed ways
下面结合附图对本发明做进一步的说明，本实用新型的整体结构图如图1所示。Below in conjunction with accompanying drawing, the present invention is further described, and the overall structure diagram of the present utility model is as shown in Figure 1.
M1是1064nm全反镜，M2是钛宝石激光器的532nm泵浦光输出镜，对1064nm光全反，对532nm光高透。M1，M2组成钛宝石激光器的绿光泵浦源，采用具有增益高、激光介质内部模体积大的传统直腔型平-平腔结构，整个谐振腔长定为330mm。采用中科院半导体所生产的高功率半导体阵列激光器作为最初光学泵浦源，为按照等边三角形排列、采用侧向泵浦方式泵浦激光介质的激光二极管阵列，四组三条激光二极管条对称地排列在YAG棒周围，能够均匀地泵浦激活介质YAG棒。每组二极管条由100个功率为200mW的二极管组成，二极管连续工作，总的最大泵浦功率为240W。整个泵浦组件(包括激光二极管和YAG棒)由流动的冷却水提供冷却。激光介质的尺寸为φ3×80mm，两端磨成平面，镀1064nm的增透膜。声光Q开关由英国GOOCH公司生产，其中晶体为φ8×10×50mm的熔石英，驱动功率为100W，工作频率为27MHz，衍射效率为20％，其调制频率为1～50kHz，有效通光口径15×15mm，镀1064nm增透膜。谐波反射镜对1064nm光高透，对532nm光高反，以提高倍频转换效率。KTP晶体采用II类相位匹配角切割(θ＝90°，φ＝23.6°)，尺寸为6×6×10mm，两面镀532nm和1064nm的增透膜。M1 is a 1064nm total reflection mirror, and M2 is a 532nm pump light output mirror of the Ti:Sapphire laser, which is fully reflective to 1064nm light and highly transparent to 532nm light. M1 and M2 form the green pumping source of the Ti:Sapphire laser. The traditional straight-cavity flat-flat cavity structure with high gain and large internal mode volume of the laser medium is adopted. The length of the entire resonant cavity is set at 330mm. The high-power semiconductor array laser produced by the semiconductor of the Chinese Academy of Sciences is used as the initial optical pumping source. It is a laser diode array arranged in an equilateral triangle and pumping the laser medium by side pumping. Four groups of three laser diode bars are arranged symmetrically. Around the YAG rod, the activation medium YAG rod can be evenly pumped. Each diode bar is composed of 100 diodes with a power of 200mW. The diodes work continuously, and the total maximum pumping power is 240W. The entire pump assembly (including laser diodes and YAG rods) is cooled by flowing cooling water. The size of the laser medium is φ3×80mm, the two ends are ground into a plane, and the anti-reflection coating of 1064nm is coated. The acousto-optic Q switch is produced by the British GOOCH company. The crystal is fused quartz of φ8×10×50mm, the driving power is 100W, the working frequency is 27MHz, the diffraction efficiency is 20%, the modulation frequency is 1-50kHz, and the effective light aperture is 15×15mm, coated with 1064nm AR coating. The harmonic reflector is highly transparent to 1064nm light and highly reflective to 532nm light to improve frequency doubling conversion efficiency. KTP crystal adopts type II phase matching angle cut (θ=90°, φ=23.6°), the size is 6×6×10mm, both sides are coated with 532nm and 1064nm anti-reflection coating.
为了使532nm泵浦光与钛宝石振荡光模式更好的匹配，获得更高的功率密度，使用一个焦距为150mm的聚焦透镜L1把泵浦光汇聚到钛宝石腔中，钛宝石晶体放在泵浦光光束的焦点处。钛宝石晶体通光方向长度为15mm，截面是边长为5mm的正方形。使钛宝石棒的中心轴线垂直于晶轴c，两通光端面以布儒斯特角切割，且使两通光表面的法线与晶轴c处于同一平面内。在布儒斯特入射面内的泵浦光的偏振方向与c轴一致。采用平平腔组成钛宝石激光的谐振腔，腔长约200mm，晶体大概放在腔的中心位置。M3全反镜对钛宝石运转波段750～850nm镀高反膜，输出镜M4对532nm镀高反膜，在750～850nm，透过率为20％。以棱镜作为波长调谐元件，使钛宝石输出光在780～820nm范围内连续可调。In order to better match the 532nm pump light with the Ti:Sapphire oscillation light mode and obtain higher power density, a focusing lens L1 with a focal length of 150mm is used to focus the pump light into the Ti:Sapphire cavity, and the Ti:Sapphire crystal is placed in the pump At the focus of the Puguang beam. The length of the titanium sapphire crystal in the light direction is 15 mm, and the cross section is a square with a side length of 5 mm. The central axis of the titanium sapphire rod is perpendicular to the crystal axis c, the two light-passing end faces are cut at Brewster's angle, and the normals of the two-pass light surfaces are in the same plane as the crystal axis c. The polarization direction of the pump light in the Brewster plane of incidence coincides with the c-axis. The resonant cavity of the Ti:Sapphire laser is composed of a flat cavity, the cavity length is about 200mm, and the crystal is placed in the center of the cavity. The M3 full-reflection mirror is coated with a high-reflection film for the titanium sapphire operating band 750-850nm, and the output mirror M4 is coated with a high-reflection film for 532nm, and the transmittance is 20% at 750-850nm. The prism is used as the wavelength tuning element, so that the output light of titanium sapphire can be continuously adjusted in the range of 780-820nm.
M和M’是钛宝石波段的全反镜，以减小整个实验装置的体积。L2是焦距100mm的聚焦透镜，以提高钛宝石泵浦光的功率密度。M5为OPO后镜，对钛宝石运转波段750～850nm和OPO输出波段镀高反膜。M6为OPO输出镜，曲率半径为60mm，对钛宝石波段镀高反膜，对OPO输出波段的透过率约为15％。整个光学参量振荡器腔长约为80mm。采用的PPLN晶体的极化周期为20.5um，固定在温控炉中，温控炉温度在常温到473K可以连续变化。PPLN晶体端面对泵浦光750～850nm和OPO输出波段镀增透膜。M and M' are all-reflective mirrors in the titanium sapphire band to reduce the volume of the entire experimental device. L2 is a focusing lens with a focal length of 100mm to increase the power density of the Ti:Sapphire pump light. M5 is an OPO rear mirror, which is coated with a high-reflection film for the titanium sapphire operating band 750-850nm and the OPO output band. M6 is an OPO output mirror with a radius of curvature of 60mm. It is coated with a high-reflection film for the titanium sapphire band, and the transmittance for the OPO output band is about 15%. The cavity length of the whole optical parametric oscillator is about 80mm. The polarization period of the PPLN crystal used is 20.5um, fixed in a temperature-controlled furnace, and the temperature of the temperature-controlled furnace can be continuously changed from room temperature to 473K. The end of the PPLN crystal is coated with an anti-reflective coating on the pump light 750-850nm and OPO output bands.
根据理论计算所得到的曲线为依据对OPO调谐波段进行腔镜镀膜选择。我们将其分为三个波段，分别是0.9～1.7um，1.7～2.5um，2.5～3.2um，实现OPO调谐输出1～3um的光谱范围。The curve obtained according to the theoretical calculation is used as the basis for the cavity mirror coating selection for the OPO tuning band. We divide it into three bands, namely 0.9-1.7um, 1.7-2.5um, and 2.5-3.2um, to realize the spectral range of OPO tuning output 1-3um.
需要说明的是，这里以本实用新型的实施例为中心展开了详细的说明，所描述的优选方式或某些特性的具体体现，应当理解为本说明书仅仅是通过给出实施例的方式来描述发明，实际上在组成、构造和使用的某些细节上会有所变化，包括部件的组合和组配，这些变形和应用都应该属于本实用新型的范围内。It should be noted that here the detailed description is centered on the embodiments of the present invention, and the described preferred modes or specific manifestations of certain characteristics should be understood as that this description is only described by way of giving embodiments The invention actually changes in some details of composition, construction and use, including the combination and assembly of parts, and these deformations and applications should all fall within the scope of the present utility model.
本实施例采用二极管激光器泵浦的全固态、准连续532nm倍频Nd：YAG激光器(一级装置)作为最初光学泵浦源，脉冲宽度小于80ns，重复频率5kHz，泵浦钛宝石晶体作为激光介质的谐振腔(二级装置)，采用棱镜作为调谐元件，构成全固态、准连续可调谐钛宝石激光器，重复频率5kHz，线宽2nm，激光脉冲宽度小于20ns。用可调谐钛宝石激光泵浦PPLN光学参量振荡器(三级装置)，采用改变泵浦波长的新型调谐方式，利用PPLN光学参量振荡器调谐曲线的ε型折回特性，得到1～3um宽调谐输出。不仅具有全固态激光器功率水平高、结构紧凑、价格便宜等优势，还具有准相位匹配光学参量振荡器的宽带可调谐，体积小的优点，在医学成像、环境监测、光纤通信、光谱分析、光电对抗及光传感等领域具有广大的科学研究价值和广阔的应用前景并且填补了该领域的技术空白。In this embodiment, a diode laser-pumped all-solid-state, quasi-continuous 532nm frequency-doubled Nd:YAG laser (a first-stage device) is used as the initial optical pump source, the pulse width is less than 80 ns, and the repetition rate is 5 kHz, and the pumped titanium sapphire crystal is used as the laser medium The resonant cavity (secondary device) uses a prism as a tuning element to form an all-solid-state, quasi-continuous tunable Ti:Sapphire laser with a repetition rate of 5kHz, a line width of 2nm, and a laser pulse width of less than 20ns. Pump the PPLN optical parametric oscillator (three-stage device) with a tunable Ti:Sapphire laser, adopt a new tuning method of changing the pump wavelength, and use the ε-type foldback characteristic of the tuning curve of the PPLN optical parametric oscillator to obtain a 1-3um wide tuning output . Not only has the advantages of high power level, compact structure, and cheap price of all solid-state lasers, but also has the advantages of broadband tunability and small size of quasi-phase-matched optical parametric oscillators. The fields of countermeasures and optical sensing have great scientific research value and broad application prospects, and fill the technical gap in this field.
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