CN2768005Y - Metal naphthalocyanine ligand spin-coating film gas sensor element - Google Patents
Metal naphthalocyanine ligand spin-coating film gas sensor element Download PDFInfo
- Publication number
- CN2768005Y CN2768005Y CN200520020297.4U CN200520020297U CN2768005Y CN 2768005 Y CN2768005 Y CN 2768005Y CN 200520020297 U CN200520020297 U CN 200520020297U CN 2768005 Y CN2768005 Y CN 2768005Y
- Authority
- CN
- China
- Prior art keywords
- coating film
- spin
- ligand
- gas sensor
- vacuum evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 239000002184 metal Substances 0.000 title claims abstract description 20
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 20
- 238000004528 spin coating Methods 0.000 title claims abstract description 19
- 239000003446 ligand Substances 0.000 title abstract 4
- LKKPNUDVOYAOBB-UHFFFAOYSA-N naphthalocyanine Chemical compound N1C(N=C2C3=CC4=CC=CC=C4C=C3C(N=C3C4=CC5=CC=CC=C5C=C4C(=N4)N3)=N2)=C(C=C2C(C=CC=C2)=C2)C2=C1N=C1C2=CC3=CC=CC=C3C=C2C4=N1 LKKPNUDVOYAOBB-UHFFFAOYSA-N 0.000 title abstract 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 20
- 238000007738 vacuum evaporation Methods 0.000 claims abstract description 13
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 11
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 11
- 235000012239 silicon dioxide Nutrition 0.000 claims abstract description 10
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 6
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 6
- 239000010703 silicon Substances 0.000 claims abstract description 6
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 claims description 32
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 claims description 16
- 239000004411 aluminium Substances 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 230000035945 sensitivity Effects 0.000 abstract description 4
- 238000002360 preparation method Methods 0.000 abstract description 2
- 230000002349 favourable effect Effects 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 23
- 239000010408 film Substances 0.000 description 15
- 150000001298 alcohols Chemical class 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 230000002950 deficient Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 125000001997 phenyl group Chemical class [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
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- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
The utility model relates to a metal naphthalocyanine ligand spin-coating film air sensor element which relates to an air sensor work element. A silicon dioxide layer is fixedly arranged on a silicon substrate, paired vacuum evaporation planar interdigital aluminum electrodes are evenly distributed on the upper plane of the silicon dioxide layer. The metal naphthalocyanine ligand spin-coating film is integrally assembled above the paired vacuum evaporation planar interdigital aluminum electrodes which are covered and contained by the metal naphthalocyanine ligand spin-coating film. The element has the advantages of simple preparation method and low manufacture cost, the utility model is favorable to industrialized produce, the utility model has high sensitivity and good selectivity to the air.
Description
Technical field
The utility model relates to a kind of gas sensor operation element.
Background technology
Film is its important operation element in metal naphthalene phthalocyanine complex gas sensor.Because the defective that exists on its structural design, existing vacuum evaporation film gas transducer and Langmuir-Blodgett film (being called for short the LB film) gas sensor ubiquity thin-film component manufacture method complexity, the problem of technical conditions harshness, and system film instrument and equipment costs an arm and a leg, and is difficult to realize that industrialized mass production uses.In addition, the vacuum evaporation film gas transducer generally could be worked under the higher temperature conditions more than 200 ℃, and power consumption is big; The LB film gas transducer can be worked at ambient temperature, and to having better sensitivity as different components gases such as alcohols and ammonias, but relatively poor to the selectivity of gas.
Summary of the invention
The purpose of this utility model is exactly the problem and shortage that exists at above-mentioned prior art, design provides a kind of metal naphthalene phthalocyanine complex spin-coating film gas sensor element, reach increase substantially gas sensor to the selection performance of gas, reduce the manufacturing process cost, guarantee highly sensitive purpose.
Basic design of the present utility model is, on silicon base, install silicon dioxide layer, the interdigital aluminium electrode in the paired plane of vacuum evaporation of projection is distributed on the silicon dioxide layer on the plane, metal naphthalene phthalocyanine complex spin coating rete configured in one piece is above the interdigital aluminium electrode in the paired plane of vacuum evaporation, it is covered containing, so far constitute metal naphthalene phthalocyanine complex spin-coating film gas sensor element.
The utility model preparation method is simple, and manufacturing price is cheap, helps realizing suitability for industrialized production, to gas highly sensitive, selectivity good.
Description of drawings
Fig. 1 is a metal naphthalene phthalocyanine complex spin-coating film gas sensor element assembly structure synoptic diagram;
Fig. 2 is bowing to view of Fig. 1.
Piece number explanation among the figure:
1, silicon base, 2, silicon dioxide layer, 3, the interdigital aluminium electrode in the paired plane of vacuum evaporation, 4, metal naphthalene phthalocyanine complex spin coating rete.
Embodiment
Below in conjunction with accompanying drawing the utility model optimum implementation is described in detail.Metal naphthalene phthalocyanine complex spin-coating film gas sensor element, on silicon base 1, install silicon dioxide layer 2, the interdigital aluminium electrode 3 in the paired plane of vacuum evaporation of projection is distributed on the silicon dioxide layer 2 on the plane, metal naphthalene phthalocyanine complex spin coating rete 4 configured in one piece cover containing with it above the interdigital aluminium electrode 3 in the paired plane of vacuum evaporation.Silicon base 1 and silicon dioxide layer 2 also can directly be selected glass plate for use, and the interdigital aluminium electrode 3 in the paired plane of vacuum evaporation also can use metal materials such as metallic gold or nickel-chrome.
During operation, tested gas contacts and produces the physical chemistry effect with metal naphthalene phthalocyanine complex spin coating rete 4, metal naphthalene phthalocyanine complex spin coating rete 4 electric conductivity are changed, interdigital aluminium electrode 3 transmits this electric conductivity variable signal through the paired plane of vacuum evaporation, finishes gas sensor work.The utility model shows performance well in test detects.To detect NO
2Be example: under 100 ℃ of working temperatures, the minimum NO that can detect 0.5ppm of metal naphthalene phthalocyanine complex spin-coating film
2Gas, and in the 0.5-40ppm concentration range, show higher sensitivity and respond recovery capability well, to 20ppmNO
2The sensitivity of gas is 20, and response recovery time is respectively 30 and 900s.In addition, by to other gas of concentration such as NH
3, alcohols and benzene class detection, metal naphthalene phthalocyanine complex spin-coating film is to NO
2Gas meter reveals selectivity well.In addition, metal naphthalene phthalocyanine complex spin-coating film gas sensor can be reused good stability.
Claims (1)
- A kind of metal naphthalene phthalocyanine complex spin-coating film gas sensor element, it is characterized in that on silicon base (1), installing silicon dioxide layer (2), the interdigital aluminium electrode in the paired plane of vacuum evaporation (3) of projection is distributed on silicon dioxide layer (2) and goes up on the plane, metal naphthalene phthalocyanine complex spin coating rete (4) configured in one piece covers containing in the interdigital aluminium electrode in the paired plane of vacuum evaporation (3) top with it.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200520020297.4U CN2768005Y (en) | 2005-02-25 | 2005-02-25 | Metal naphthalocyanine ligand spin-coating film gas sensor element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200520020297.4U CN2768005Y (en) | 2005-02-25 | 2005-02-25 | Metal naphthalocyanine ligand spin-coating film gas sensor element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2768005Y true CN2768005Y (en) | 2006-03-29 |
Family
ID=36681873
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200520020297.4U Expired - Fee Related CN2768005Y (en) | 2005-02-25 | 2005-02-25 | Metal naphthalocyanine ligand spin-coating film gas sensor element |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2768005Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103336035A (en) * | 2013-05-30 | 2013-10-02 | 黑龙江大学 | Gas-sensitive element with graphene/phthalocyanine composite material as ammonia-sensitive material, and preparation method thereof |
| CN116773616A (en) * | 2023-08-25 | 2023-09-19 | 宁德时代新能源科技股份有限公司 | Gas sensor, battery, power consumption device, and gas concentration detection method |
-
2005
- 2005-02-25 CN CN200520020297.4U patent/CN2768005Y/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103336035A (en) * | 2013-05-30 | 2013-10-02 | 黑龙江大学 | Gas-sensitive element with graphene/phthalocyanine composite material as ammonia-sensitive material, and preparation method thereof |
| CN116773616A (en) * | 2023-08-25 | 2023-09-19 | 宁德时代新能源科技股份有限公司 | Gas sensor, battery, power consumption device, and gas concentration detection method |
| CN116773616B (en) * | 2023-08-25 | 2024-02-20 | 宁德时代新能源科技股份有限公司 | Gas sensor, battery, power consumption device, and gas concentration detection method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20060329 |