CN2760614Y - Optical mask chrome mask laser micro-repair powder sending device - Google Patents
Optical mask chrome mask laser micro-repair powder sending device Download PDFInfo
- Publication number
- CN2760614Y CN2760614Y CNU2004201202996U CN200420120299U CN2760614Y CN 2760614 Y CN2760614 Y CN 2760614Y CN U2004201202996 U CNU2004201202996 U CN U2004201202996U CN 200420120299 U CN200420120299 U CN 200420120299U CN 2760614 Y CN2760614 Y CN 2760614Y
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- powder
- cavity
- optical mask
- temperature controller
- chromium plate
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- Expired - Fee Related
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- Preparing Plates And Mask In Photomechanical Process (AREA)
Abstract
The utility model relates to an optical mask chrome mask laser micro-repair powder sending device which is composed of a powder cavity, a balancing cavity, an air pressure cavity and a temperature controller, wherein the powder cavity and the air pressure cavity are connected by the balancing cavity. The powder cavity and the temperature controller are connected as an integral body by transmission lines. The working process is that after the powder cavity is vacuumed, shielding gas is injected into the powder cavity and the air pressure cavity to adjust the cavity pressure; then the shielding gas is closed and the temperature controller is adjusted to heat chromium carbonyl powder which is placed at the bottom of the powder cavity. The chromium carbonyl powder is uniformly distributed in the shielding gas after heated and sublimated. A temperature sensor detects degrees of the temperature field in the powder cavity, and controls current sizes of a heating device by adjusting the temperature controller to adjust sublimating quantity and sublimating speed of the chromium carbonyl powder. Simultaneously, the chromium carbonyl powder can be delivered in the form of gas mixture which is uniformly mixed by reinjecting the shielding gas into the powder cavity and opening a powder output valve. The utility model has the characteristics of simple structure, reliable operation, etc. The device is completely suitable for the demand of the optical mask chrome mask laser micro repair.
Description
Technical field
The utility model relates to the little repairing dust feeder of a kind of optical mask chromium plate laser, belongs to technical field of laser processing.
Background technology
Along with the continuous progress of microelectric technique, the especially extensive and manufacturing develop rapidly of VLSI (very large scale integrated circuit), the photomask chromium plate is used wide day by day in microelectronic industry.
Optical mask chromium plate is high-purity quartz or the glass that a kind of surface coverage that comprises high precision integrated circuit or chip has the chromium layer, generally is to form by photoetching making.Because technological process is comparatively complicated, the optical mask chromium plate price is comparatively expensive at present; Its produce and use in owing to the quality of photoresist, environment, people's influence with and serviceable life etc. factor, very easily cause the optical mask chromium plate graphic defects.Therefore the repairing to optical mask chromium plate is a very important job.
Utilizing laser that the defective of optical mask chromium plate is repaired is a kind of quick, reliable method.The little method for repairing and mending of optical mask chromium plate laser is to utilize characteristics such as laser high strength, focal beam spot is little; in protection compression ring border; with chromium carbonyl (Cr (CO) 6) powder in the laser radiation deposit at the optical mask chromium plate fault location, thereby reach the purpose of optical mask chromium plate defect mending.
Chromium carbonyl (Cr (CO) 6) powder is the poisonous crystal of a kind of white, 150 ℃ of fusing points, and crystallization at normal temperatures is the bulky grain state, promptly produces distillation near the fusing point.In the little mending course of optical mask chromium plate laser, the powder particle of require carrying is little and be uniformly dispersed, and the powder transportation concentration is stable.Being used for the Laser Processing powder conveying device at present generally is to be used for the metal powder conveying that laser applies, and all is not suitable for the conveying of chromium carbonyl powder, therefore can not satisfy the technological requirement of the little repairing of optical mask chromium plate laser.
Summary of the invention
The purpose of this utility model is to provide a kind of dust feeder that is used for the little repairing of optical mask chromium plate laser, can evenly carry the concentration stabilize that keeps powder to carry to the used powder of the little repairing of laser continuously.
The little repairing dust feeder of a kind of optical mask chromium plate laser of the present utility model is pressed the described technical design scheme implementation of Fig. 1.This device is characterised in that: this device is made up of with temperature controller 9 four parts powder chambers 14, counter balance pocket 5, atmospheric pressure cavity 1; Wherein: the both sides of powder chambers 14 are respectively arranged with and are connecting the protection gas transfer valve 13 of protecting gas input pipe 12 and the powder delivery valve 6 that is being connected powder delivery pipe 7, and the top of powder chambers 14 is provided with vacuum pumping hole 15; The outer wall of atmospheric pressure cavity 1 is provided with gas admittance valve 2 and rain glass 3; Powder chambers 14 is connected by counter balance pocket 5 perforations with atmospheric pressure cavity 1, and powder chambers 14 connects and composes this device integral body with temperature controller 9 by electrical signal transmission line.This installs and all adopts conventional interconnection technique between each parts.
The little repairing dust feeder of described a kind of optical mask chromium plate laser is provided with a piston that can move freely up and down 4 in the counter balance pocket 5.
The little repairing dust feeder of described a kind of optical mask chromium plate laser, a side inwall of powder chambers 14 is provided with a temperature sensor 8.
The little repairing dust feeder of described a kind of optical mask chromium plate laser, the bottom of powder chambers 14 are provided with an enclosed heating arrangement 10 that is used for heating powder.
The course of work of the little repairing dust feeder of a kind of optical mask chromium plate laser of the present utility model is as described below: the chromium carbonyl powder that is used to repair is placed on the bottom of powder chambers 14, and air obtains vacuum environment by the vaccum-pumping equipment eliminating in the powder chambers.Close powder delivery valve 6, open protection gas transfer valve 13, pass through gas admittance valve 2 simultaneously, observe the variation of rain glass 3 readings and piston 4 positions, regulate powder chambers protection air pressure and atmospheric pressure cavity air pressure to proper level to atmospheric pressure cavity 1 injecting gas.Close the protection gas transfer valve of powder chambers and the gas admittance valve of atmospheric pressure cavity then, regulate temperature controller 9, heating arrangement 10 heating are placed on the chromium carbonyl powder 11 of powder chambers bottom, and crystalline particle is evenly distributed in the protection gas by heat sublimation gradually; Be installed in the temperature sensor 8 on the powder chambers inwall, detect temperature field height in the powder chambers, and feedback is presented on the temperature controller, controls the heating arrangement size of current by regulating temperature controller, promptly can regulate the distillation amount and the rate of sublimation thereof of chromium carbonyl powder; Open powder chambers protection gas transfer valve and powder delivery valve simultaneously, the chromium carbonyl powder that can be used in the little repairing of optical mask chromium plate laser promptly transfers out with the combination gas form that mixes.In addition, small air pressure change can be regulated voluntarily by the piston in the counter balance pocket in the powder chambers, makes the powder concn that disperses in the powder chambers maintain a metastable concentration.This process can make it the chromium carbonyl powder distillation of crystallization bulky grain shape be dispersed in the protection gas, and powder transfers out from the powder delivery pipe with the form of combination gas.
The little repairing dust feeder of a kind of optical mask chromium plate laser of the present utility model has characteristics such as simple in structure, reliable operation, is fit to the needs of the little repairing of optical mask chromium plate laser fully.
Description of drawings
The little repairing dust feeder of Fig. 1 the utility model optical mask chromium plate laser structural representation.
Wherein: 1, atmospheric pressure cavity; 2, gas admittance valve; 3, rain glass; 4, piston;
5, counter balance pocket; 6, delivery valve; 7, powder delivery pipe; 8, sensor;
9, temperature controller; 10, heating arrangement; 11, chromium carbonyl powder;
12, protection gas input pipe; 13, protection gas transfer valve; 14, powder chambers;
15, aspirating hole.
Concrete real mode
As shown in Figure 1, with processing or commercially available component-assembled powdered chamber 14, counter balance pocket 5, atmospheric pressure cavity 1 and temperature controller 9 four parts, overall package becomes the little repairing dust feeder of a kind of optical mask chromium plate laser of the present utility model then.Wherein, protection gas transfer valve 13 and powder delivery valve 6 are model of the same race, by electronic switch, can open simultaneously and close.Powder delivery pipe 7 avoids mixed gas partial condensation in course of conveying to reduce the powder transportation concentration for having the flexible heat-insulating flexible pipe of heat insulation and preservation effect.Counter balance pocket 5 two ends are provided with baffle ring, can avoid piston 4 to skid off counter balance pocket.Temperature sensor 8 is arranged on powder chambers inside, can detect powder chambers internal temperature size, and detected temperature value feedback is presented on the display screen of temperature controller 9.Heating arrangement 10 is arranged on the bottom of powder chambers, adopts known resistance wire type of heating heating powder 11.This installs and all adopts conventional interconnection technique between each parts.
Claims (4)
1, the little repairing dust feeder of a kind of optical mask chromium plate laser is characterized in that: this device is made up of with temperature controller (9) four parts powder chambers (14), counter balance pocket (5), atmospheric pressure cavity (1); Wherein: the both sides of powder chambers (14) are respectively arranged with protection gas transfer valve (13) that is connecting protection gas input pipe (12) and the powder delivery valve (6) that is being connected powder delivery pipe (7), and the top of powder chambers (14) is provided with vacuum pumping hole (15); The outer wall of atmospheric pressure cavity (1) is provided with gas admittance valve (2) and rain glass (3); Powder chambers (14) is connected by counter balance pocket (5) perforation with atmospheric pressure cavity (1), and powder chambers (14) connects and composes this device integral body with temperature controller (9) by electrical signal transmission line; This installs and all adopts conventional interconnection technique between each parts.
2, the little repairing dust feeder of a kind of optical mask chromium plate laser according to claim 1 is characterized in that: be provided with a piston that can move freely up and down (4) in the counter balance pocket (5).
3, the little repairing dust feeder of a kind of optical mask chromium plate laser according to claim 1, it is characterized in that: a side inwall of powder chambers (14) is provided with a temperature sensor (8).
4, the little repairing dust feeder of a kind of optical mask chromium plate laser according to claim 1 is characterized in that: the bottom of powder chambers (14) is provided with an enclosed heating arrangement (10) that is used for heating powder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2004201202996U CN2760614Y (en) | 2004-12-23 | 2004-12-23 | Optical mask chrome mask laser micro-repair powder sending device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2004201202996U CN2760614Y (en) | 2004-12-23 | 2004-12-23 | Optical mask chrome mask laser micro-repair powder sending device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2760614Y true CN2760614Y (en) | 2006-02-22 |
Family
ID=36082817
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2004201202996U Expired - Fee Related CN2760614Y (en) | 2004-12-23 | 2004-12-23 | Optical mask chrome mask laser micro-repair powder sending device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2760614Y (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102169285A (en) * | 2011-04-21 | 2011-08-31 | 深圳市科利德光电材料股份有限公司 | Method for repairing redundant chromium points of chromium plate |
| CN101344718B (en) * | 2008-08-15 | 2012-04-18 | 深圳市路维电子有限公司 | Light shield mending method |
| CN107030384A (en) * | 2016-02-03 | 2017-08-11 | 通用电气公司 | The original place gas turbine developed via the crack growth of laser welding is prevented |
-
2004
- 2004-12-23 CN CNU2004201202996U patent/CN2760614Y/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101344718B (en) * | 2008-08-15 | 2012-04-18 | 深圳市路维电子有限公司 | Light shield mending method |
| CN102169285A (en) * | 2011-04-21 | 2011-08-31 | 深圳市科利德光电材料股份有限公司 | Method for repairing redundant chromium points of chromium plate |
| CN102169285B (en) * | 2011-04-21 | 2013-01-09 | 深圳市科利德光电材料股份有限公司 | Method for repairing redundant chromium points of chromium plate |
| CN107030384A (en) * | 2016-02-03 | 2017-08-11 | 通用电气公司 | The original place gas turbine developed via the crack growth of laser welding is prevented |
| US10443385B2 (en) | 2016-02-03 | 2019-10-15 | General Electric Company | In situ gas turbine prevention of crack growth progression via laser welding |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |