CN2725567Y - High vacuum machine set - Google Patents
High vacuum machine set Download PDFInfo
- Publication number
- CN2725567Y CN2725567Y CN 200420070562 CN200420070562U CN2725567Y CN 2725567 Y CN2725567 Y CN 2725567Y CN 200420070562 CN200420070562 CN 200420070562 CN 200420070562 U CN200420070562 U CN 200420070562U CN 2725567 Y CN2725567 Y CN 2725567Y
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- Prior art keywords
- valve
- vacuum
- high vacuum
- pipeline
- coil
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- Expired - Fee Related
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- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
The utility model relates to a high vacuum machine set, relating to equipment whose main pump is an oil diffusion pump and which makes evacuation device obtain high vacuum. Composed with relevant accessories, the utility model can have vacuum evaporation and sputter, vacuum heat treatment, vacuum sintering and diffusion, still being capable of being applied to laboratory and other industrial production. The utility model is characterized in that a coil is arranged on a high vacuum valve body. A core bar is arranged inside the coil. A pin hole is arranged on handwheel. One end of the core bar is inserted inside the pin hole of the handwheel. The coil is connected to relay inside control box with conducting wire. A pre-pumping valve and a pull rod of a preset valve are connected together to form a linked pull away valve. An ionization vacuum gauge is arranged on the pipeline of the high vacuum valve body and the pull away valve. A pre-pumping thermal couple vacuum gauge is arranged on the pipeline of the pull away valve and a bleed valve. A preset thermal couple vacuum gauge is arranged on the pipeline of the pull away valve and a vacuum cylinder. The purpose of the utility model is that the high vacuum machine set resolves the problem existing in the aspect of working media that the machine set can not work when pumped vacuum device leaks gas so that the high vacuum machine set must be disassembled, be cleaned and replace diffusion pump.
Description
One, technical field: the utility model relate to a kind of be main pump with the oil diffusion pump, make the equipment that device obtains high vacuum that is evacuated, can carry out vacuum evaporation and sputter, vacuum heat treatment, vacuum sintering and diffusion with relevant annex formation, also can be used in laboratory and other industrial production.
Two, background technique: general vacuum unit is in operation, in case vacuum device gas leakage (as solar energy heat collection pipe), just cause oily oxidized in the oil diffusion pump, unit can not be worked, the working medium (diffusion pump oil is oxidized, can not use) that must dismantle, clean, change diffusion pump re-assemblies, and finds time in advance, after debugging reaches proper functioning, could put into production again.So not only incured loss through delay and produced but also wasted manpower, goods and materials, the user feels inconvenience deeply.
Three, summary of the invention:
1, goal of the invention: the utility model provides a kind of high vacuum unit, and unit can not be worked when its purpose was to solve vacuum device gas leakage, must dismantle, clean, change the problem of aspects such as the working medium existence of diffusion pump.
2, technological scheme:
A kind of high vacuum unit, it includes mechanical pump, with its solenoid valve that links to each other by pipeline, dish valve, take out valve and foreline valve, bleed valve, vacuum reservoir, high vacuum valve body and water-cooled baffle and oil diffusion pump in advance, it is characterized in that: on the high vacuum valve body, be provided with coil, be provided with core bar in coil; Handwheel is provided with pin-and-hole, and an end of core bar can be plugged in the pin-and-hole of handwheel; Coil is connected with relay in the control box by lead.
The pull bar of taking out valve and foreline valve in advance connects together and forms the valve that draws of interlock.
Be provided with ionization [vacuum at the high vacuum valve body with drawing on the pipeline of valve, on the pipeline that draws valve and bleed valve, be provided with and take out thermocouple vacuum gage in advance, on the pipeline that draws valve and vacuum reservoir, be provided with preposition thermocouple vacuum gage.
3, advantage and effect:
Unit has vacuum suction, and vacuum measurement and electrical control function can be implemented vacuum suction independently.This unit has been set up the automatic control of degree of vacuum and has been closed the high vacuum valve device on the function of conventional manual operation, can protect oil diffusion pump effectively automatically when the sudden and violent atmosphere of system.Electric control equipment is the special electric control box that unit powered operation circuit, vacuum measurement circuit, vacuum control and display circuit is integrated, its compact structure, and volume is little, and is easy to operate.Automatically control degree of vacuum value can regulate at the scene, set.This unit can be widely used on the large-scale enclosed production line that mobile vacuum bleeds.
Four, description of drawings: accompanying drawing 1 is a main structure schematic representation of the present utility model;
Accompanying drawing 2 is the main structure schematic representation of the utility model high vacuum valve body.
Five, embodiment:
The utility model mainly is by on the basis of the manual control of routine; set up degree of vacuum and controlled closing structure automatically; when the sudden and violent atmosphere of system, can protect Medium Diffusion in the oil diffusion pump effectively in each pipeline, thereby protect the normal operation of vacuum unit effectively.
As shown in Figure 1, this system mainly comprises 2X-4 type mechanical pump 1, vacuum reservoir 2, K-150 type oil diffusion pump 3, water-cooled baffle 4, high vacuum valve body 5, draws valve 6, bleed valve 8, butterfly valve 10, solenoid valve 12, ionization [vacuum 7, takes out compositions such as thermocouple vacuum gage 9, preposition thermocouple vacuum gage 11, electric control box 13 and pipeline in advance.Vacuum device is connected on the pipeline at solenoid valve 12 places, by bleed valve 8 exhausting airs.
The structure of high vacuum valve body 5 is made up of a manually-operated gate and a cover automatic safety device as shown in Figure 2.On high vacuum valve body 5, be provided with coil 15, in coil 15, be provided with core bar 16; Handwheel 17 is provided with pin-and-hole, and an end of core bar 16 can be plugged in the pin-and-hole of handwheel 17; Coil 15 is connected with relay in the control box 13 by lead.When the sudden and violent atmosphere of system, handwheel 17 can not in time cut out high vacuum valve body 5.When system pressure is higher than setting pressure, the relay closes in the control box 13, coil power supply, electromagnetic force pulling core bar 16 makes its pin-and-hole that withdraws from handwheel 17, and handwheel 17 automatic clockwise directions rotate, and close high vacuum valve body 5.If certain the degree of vacuum value in the time of will protecting degree of vacuum to be set at the sudden and violent atmosphere of system just can be closed high vacuum valve effectively automatically, in the protection diffusion pump working medium one by one diffusion pump oil avoid oxidation.
Draw valve 6 for to take out the interlock valve that valve and foreline valve are designed to one in advance, as shown in Figure 1.With the one handle operation, make unlatching, the closed condition of taking out valve and foreline valve in advance reciprocal, foreline valve is closed when promptly taking out opening of valves in advance, takes out valve in advance when foreline valve is opened and closes.Therefore, this valve arrangement compactness, the misoperation that two valves are opened simultaneously takes place in reliable performance till the ass ascends the ladder.For taking out state (take out opening of valves in advance, foreline valve is closed) in advance, be initial status (foreline valve is opened, and takes out valve in advance and closes) when drawing the handle of valve to depress when drawing the handle of valve to roll up the position.
Electric control box 13 volumes are little, compact structure.Unit powered operation circuit, vacuum measurement and element circuits such as control circuit, demonstration and warning circuit wherein have been installed.Electric control box 13 front panels partly are made up of the demonstration of degree of vacuum numeral, tutorial light and warning light, operating button etc.The electric control box rear board is made up of socket, vacuum measuring instrument power switch and the unit power switch of various cables, electric wire.After opening the vacuum measuring instrument power switch, degree of vacuum promptly statistics have shown.Because the vacuum measuring instrument measuring range is 1000pa～3 * 10
-4Pa is so when system pressure during greater than 1000pa, degree of vacuum is shown as 1.0E+3 (promptly 1.0 * 10
3Pa).Press certain push-button switch, corresponding tutorial light bright (green).When system pressure is protected pressure automatically greater than degree of vacuum, leakage alarm lamp bright (redness), the lamp (going out) of smoking in advance in the tutorial light part shows and does not allow to open high vacuum valve body 5.When system pressure is taken out the pressure of lamp in advance less than control, take out lamp bright (green) in advance, end is taken out in expression in advance, can open high vacuum valve body 5, and 3 pairs of systems bleed with diffusion pump.The pilot pressure that this unit is taken out lamp in advance is set at 9pa (this value scene can reset).Phase failure lamp is the warning light that shows the outage of diffusion pump electric furnace.If electric furnace heating wire blows, then this lamp bright (redness) is reported to the police, buzzer call.
Preposition thermocouple vacuum gage 11 uses when starting or debug oil diffusion pump 3.The function of taking out thermocouple vacuum gage 9 in advance has three: indication forvacuum degree, demonstration can open the degree of vacuum of high vacuum valve body 5 and degree of vacuum is controlled automatically and protection is exported.Ionization [vacuum 7 test system working vacuum degree.The indicating value of thermocouple vacuum gage and ionization [vacuum is shown by a digital display screen, and changes the degree of vacuum signal of two kinds of vacuum gauges automatically.
Claims (3)
1, a kind of high vacuum unit, it includes mechanical pump (1), with its solenoid valve that links to each other by pipeline (12), dish valve (10), take out valve and foreline valve, bleed valve (8), vacuum reservoir (2), high vacuum valve body (5) and water-cooled baffle (4) and oil diffusion pump (3) in advance, it is characterized in that: on high vacuum valve body (5), be provided with coil (15), in coil (15), be provided with core bar (16); Handwheel (17) is provided with pin-and-hole, and an end of core bar (16) can be plugged in the pin-and-hole of handwheel (17); Coil (15) is connected with relay in the control box (13) by lead.
2, high vacuum unit according to claim 1 is characterized in that: the pull bar of taking out valve and foreline valve in advance connect together form interlock draw valve (6).
3, high vacuum unit according to claim 1, it is characterized in that: be provided with ionization [vacuum (7) with drawing on the pipeline of valve (6) at high vacuum valve body (5), on the pipeline that draws valve (6) and bleed valve (8), be provided with and take out thermocouple vacuum gage (9) in advance, on the pipeline that draws valve (6) and vacuum reservoir (2), be provided with preposition thermocouple vacuum gage (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200420070562 CN2725567Y (en) | 2004-09-07 | 2004-09-07 | High vacuum machine set |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200420070562 CN2725567Y (en) | 2004-09-07 | 2004-09-07 | High vacuum machine set |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2725567Y true CN2725567Y (en) | 2005-09-14 |
Family
ID=35040286
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200420070562 Expired - Fee Related CN2725567Y (en) | 2004-09-07 | 2004-09-07 | High vacuum machine set |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2725567Y (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101922437A (en) * | 2010-08-05 | 2010-12-22 | 友达光电股份有限公司 | Vacuum device |
| CN102116280A (en) * | 2010-10-26 | 2011-07-06 | 陈千荣 | Pneumatic vacuum generator |
| CN101776063B (en) * | 2010-01-21 | 2012-01-04 | 储继国 | Large high-vacuum air pumping set |
| CN102829004A (en) * | 2012-09-05 | 2012-12-19 | 常州大成绿色镀膜科技有限公司 | Anti-explosion oil diffusion pump vacuum system and anti-explosion control method thereof |
| CN103790808A (en) * | 2012-11-02 | 2014-05-14 | 深圳市文川实业有限公司 | Movable vacuum high vacuum unit |
| CN105422454A (en) * | 2015-12-09 | 2016-03-23 | 攀枝花钢城集团瑞钢工业有限公司 | Vacuum pumping system and vacuum pumping method |
-
2004
- 2004-09-07 CN CN 200420070562 patent/CN2725567Y/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101776063B (en) * | 2010-01-21 | 2012-01-04 | 储继国 | Large high-vacuum air pumping set |
| CN101922437A (en) * | 2010-08-05 | 2010-12-22 | 友达光电股份有限公司 | Vacuum device |
| CN101922437B (en) * | 2010-08-05 | 2012-05-23 | 友达光电股份有限公司 | Vacuum device |
| CN102116280A (en) * | 2010-10-26 | 2011-07-06 | 陈千荣 | Pneumatic vacuum generator |
| CN102116280B (en) * | 2010-10-26 | 2013-02-13 | 陈千荣 | Pneumatic vacuum generator |
| CN102829004A (en) * | 2012-09-05 | 2012-12-19 | 常州大成绿色镀膜科技有限公司 | Anti-explosion oil diffusion pump vacuum system and anti-explosion control method thereof |
| CN103790808A (en) * | 2012-11-02 | 2014-05-14 | 深圳市文川实业有限公司 | Movable vacuum high vacuum unit |
| CN105422454A (en) * | 2015-12-09 | 2016-03-23 | 攀枝花钢城集团瑞钢工业有限公司 | Vacuum pumping system and vacuum pumping method |
| CN105422454B (en) * | 2015-12-09 | 2017-12-19 | 攀枝花钢城集团瑞钢工业有限公司 | Vacuum-pumping system and vacuum suction method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |