CN2708498Y - Radiator abnormity precaution device for semiconductor device - Google Patents
Radiator abnormity precaution device for semiconductor device Download PDFInfo
- Publication number
- CN2708498Y CN2708498Y CN 200420007950 CN200420007950U CN2708498Y CN 2708498 Y CN2708498 Y CN 2708498Y CN 200420007950 CN200420007950 CN 200420007950 CN 200420007950 U CN200420007950 U CN 200420007950U CN 2708498 Y CN2708498 Y CN 2708498Y
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- CN
- China
- Prior art keywords
- radiator
- semiconductor equipment
- touch induction
- early warning
- alarm
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model provides a radiator abnormity precaution device for semiconductor devices. The precaution device passes through a light flake, and can flutter following with the heat-exhausting air flow; the heat-exhausting air flow can blow the light flake when the radiator is operated normally, and the light flake can be contacted with a contacting and sensing device; the light flake can not be contacted with the contacting and sensing device when the radiator can not be operated normally, and the precaution device can send forth the precaution signal. When the radiator generates abnormity, the corresponding personnel can be given the notice through the precaution signal and can proceed processing through the precaution device, and the personnel can carry out processing for the whole semiconductor device dispensing with waiting until generating the great loss caused by overheating.
Description
Technical field
The utility model relates to about the unusual precaution device of a kind of radiator, particularly about a kind of abnormity early warning device that is used for the radiator of semiconductor equipment.
Background technology
Along with the progress of semiconductor fabrication process technology, produce various powerful " small-sized " wafer, changed human life, allow as seen include the electronic product of wafer everywhere in the life, help people to handle various problem.
In semiconductor equipment, high temperature furnace pipe is to carry out oxidation, diffusion, chemical gaseous phase Shen is long-pending, and during semiconductor fabrication process such as heat treatment, indispensable manufacturing process equipment, generally speaking, several boiler tubes can be installed in together, form a boiler tube group, conveniently to use and to manage, normally tetrad is installed in together, the boiler tube group also is provided with control device and various gas input and output pipeline, and boiler tube is the equipment of a high temperature manufacturing process, between its operating period, the height that the boiler tube environment temperature is also suitable, cause the damage of peripheral device for fear of the high temperature of boiler tube, be that the installing radiator is helped the heat radiation of boiler tube group board, and more be equiped with temperature-sensitive sticker in the boiler tube group board, it is to set a predetermined temperature, when boiler tube group board temperature is too high when surpassing the temperature set, promptly stop the running of whole boiler tube group automatically, avoid causing danger, and boiler tube group board temperature can be too high, normally helps the unusual institute of radiator of heat radiation to cause.
Except above-mentioned boiler tube group board; many semiconductor equipments also are equiped with radiator; yet there are some shortcomings in the design of general semiconductor equipment; promptly; when the radiator of semiconductor equipment will cause temperature too high unusually; must wait until that temperature is higher than predetermined caution temperature, and semiconductor equipment has been when being forced to shut down, the maintainer just knows; and this moment; not only to shut down maintenance, just carry out the lots of wafers of semiconductor fabrication process, also will scrap thereupon; and cause tremendous loss; so, design a better prevention mechanism, be main purpose of the present utility model to prevent above-mentioned situation that this takes place.
The utility model content
Main purpose of the present utility model is that a kind of radiator abnormity early warning device that is used for semiconductor equipment is being provided, unusual with detecting semiconductor equipment radiator, and send early warning signal.
Another purpose of the present utility model is that a kind of radiator abnormity early warning device that is used for semiconductor equipment is being provided, and is too high and decommission to avoid semiconductor equipment Yin Wendu, and causes in the manufacturing process lots of wafers to scrap.
For achieving the above object, the utility model proposes a kind of radiator abnormity early warning device that is used for semiconductor equipment, it is to be installed on the semiconductor equipment with radiator, and this precaution device is to comprise:
One touch induction device;
One is light laminated, and the one end is can be along with radiating airflow waves, when this radiator runs well, radiating airflow blows that this is light laminated, it is contacted with this touch induction device, and when this radiator did not run well, this is light laminated can not to contact with this touch induction device;
One alarm device, it is to be connected with this touch induction device, when this is light laminated when not contacting with this touch induction device, this alarm device then sends an alarm signal.
Described precaution device, it is installed in has at least on the semiconductor equipment with radiator that a fan forms.
Described precaution device, wherein this alarm signal is a sound signal.
Described precaution device, wherein this alarm signal is a flashing light.
Described precaution device, wherein this alarm device is the control desk line with this semiconductor equipment.
Described precaution device, it is each this light laminated and this touch induction device of air outlet place installing in this radiator, all these touch induction devices is connected on the same alarm device again.
For achieving the above object, the utility model proposes the radiator abnormity early warning device that another kind is used for semiconductor equipment, it is to be installed on the semiconductor equipment with radiator, and this precaution device is to comprise:
One touch induction device;
One is light laminated, and the one end is can be along with radiating airflow waves, when this radiator does not run well, this light laminated meeting contacts with this touch induction device, when this radiator ran well, radiating airflow blew that this is light laminated, it is not produced with this touch induction device contact;
One alarm device, it is to be connected with this touch induction device, when this light laminated and this touch induction device produce when contacting, this alarm device then sends an alarm signal.
Described precaution device, it is installed in has at least on the semiconductor equipment with radiator that a fan forms.
Described precaution device, wherein this alarm signal is a sound signal.
Described precaution device, wherein this alarm signal is a flashing light.
Described precaution device, wherein this alarm device is the control desk line with this semiconductor equipment.
Described precaution device, it is each this light laminated and this touch induction device of air outlet place installing in this radiator, all these touch induction devices is connected on the same alarm device again.
Description of drawings
Fig. 1 is the basic framework schematic diagram of the utility model precaution device.
Embodiment
By cooperate appended graphic explanation in detail by specific embodiment, when the effect that is easier to understand the purpose of this utility model, technology contents, characteristics and is reached.
Unusually cause in the board temperature too high in order to solve known semiconductor equipment because of radiator; and the protection function of startup board; automatically board is shut down; and then make the shortcoming that the ongoing wafer of manufacturing process is scrapped by the gross on the production line; the utility model proposes a radiator abnormity early warning device; in order to the unusual situation of detecting radiator, when avoiding that by the time board is shut down maintenance, know that just radiator is unusual.
The basic framework of precaution device 10 of the present utility model as shown in Figure 1, its be by one can with radiating airflow wave light laminated 12, one can detect the touch induction device 14 of the situation that contacts with light laminated 12, and an alarm device 16 that can give the alarm signal constitutes.This precaution device 10 is installed near semiconductor equipment radiator 18 air outlets; and radiating airflow is blown towards light laminated 12 directions of this precaution device; this end of light laminated 12 is can be along with radiating airflow waves; the other end then is positioned at a fixed position; in the semiconductor equipment running; when radiator 18 runs well; radiating airflow blow this light laminated 12; its that end that waves can contacted constantly with touch induction device 14; and when radiator takes place to rotate unusually and not; when radiating airflow stops to blow, get back to original position for light laminated 12, can cause this light laminated 12 not contact with touch induction device 14; at this moment; touch induction device 14 just triggers alarm device 16 and sends an alarm signal, overhauls radiator 18 to notify the related personnel, avoids waiting until that whole board is overheated and start the protection mechanism that shuts down.
Radiator in the general semiconductor equipment is made up of a plurality of fans, so when fan group wherein during a fan failure, promptly can influence the radiating effect of radiator integral, therefore, in the preferred embodiment of the utility model precaution device, can be in the air outlet place of each fan of fan group, all install a light laminated and touch induction device corresponding with it, again all touch induction devices are connected on the same alarm device, when having fan to take place to rotate unusually and not in the fan group, alarm device can send an alarm signal, all keeps the state that runs well to guarantee each fan, helps the semiconductor equipment heat radiation.And the alarm device of this precaution device can with control this semiconductor equipment the control desk line, when radiator takes place when unusual, precaution device can send an alarm signal to control desk, allows the control personnel can grasp this message, and does the most timely and handle, in addition, the alarm signal of alarm device also can be an alarm audio of sounding, or the alarm flash of light, basically, as long as can reach the mechanism of reminding the control personnel, all can be as the alarm signal of this alarm device output.
Implement in the design of aspect at another of the utility model precaution device, light laminated when not blown by radiating airflow, the sustainable generation with touch induction device contacts, and radiating airflow is when blowing, can separate with touch induction device light laminated, and alarm device is connected with touch induction device, when light laminated and touch induction device produce when contacting, this alarm device can produce an alarm signal, therefore, when radiator does not run well, because of not producing radiating airflow, contact and make light laminated and touch induction device produce, and then the triggering alarm device signal that gives the alarm.
In sum; the radiator abnormity early warning device that the utility model proposes; can take place to detect out when unusual in the semiconductor equipment radiator at once; and send alarm signal; remind the related personnel to overhaul; avoid semiconductor equipment of a specified duration excessively because of the radiator fault; cause temperature to surpass default safe temperature; and shut down automatically; therefore; precaution device of the present utility model can be avoided the too high and autostop of semiconductor equipment Yin Wendu effectively, with avoid causing manufacturing process carry out in the lots of wafers huge loss of scrapping.
But the above is preferred embodiment of the present utility model only, is not to be used for limiting practical range of the present utility model.So be that all equalizations of doing according to the described shape of the utility model claim, structure, characteristic and spirit change or modification, all should be included in the claim of the present utility model.
Claims (12)
1, a kind of radiator abnormity early warning device that is used for semiconductor equipment, it is to be installed on the semiconductor equipment with radiator, it is characterized in that, this precaution device is to comprise:
One touch induction device;
One is light laminated, and the one end is can be along with radiating airflow waves, when this radiator runs well, radiating airflow blows that this is light laminated, it is contacted with this touch induction device, and when this radiator did not run well, this is light laminated can not to contact with this touch induction device;
One alarm device, it is to be connected with this touch induction device, when this is light laminated when not contacting with this touch induction device, this alarm device then sends an alarm signal.
2, the radiator abnormity early warning device that is used for semiconductor equipment according to claim 1 is characterized in that, it is installed in has at least on the semiconductor equipment with radiator that a fan forms.
3, the radiator abnormity early warning device that is used for semiconductor equipment according to claim 1 is characterized in that, wherein this alarm signal is a sound signal.
4, the radiator abnormity early warning device that is used for semiconductor equipment according to claim 1 is characterized in that, wherein this alarm signal is a flashing light.
5, the radiator abnormity early warning device that is used for semiconductor equipment according to claim 1 is characterized in that, wherein this alarm device is the control desk line with this semiconductor equipment.
6, the radiator abnormity early warning device that is used for semiconductor equipment according to claim 1, it is characterized in that, it is each this light laminated and this touch induction device of air outlet place installing in this radiator, all these touch induction devices is connected on the same alarm device again.
7, a kind of radiator abnormity early warning device that is used for semiconductor equipment is characterized in that, it is to be installed on the semiconductor equipment with radiator, and this precaution device is to comprise:
One touch induction device;
One is light laminated, and the one end is can be along with radiating airflow waves, when this radiator does not run well, this light laminated meeting contacts with this touch induction device, when this radiator ran well, radiating airflow blew that this is light laminated, it is not produced with this touch induction device contact;
One alarm device, it is to be connected with this touch induction device, when this light laminated and this touch induction device produce when contacting, this alarm device then sends an alarm signal.
8, the radiator abnormity early warning device that is used for semiconductor equipment according to claim 7 is characterized in that, it is installed in has at least on the semiconductor equipment with radiator that a fan forms.
9, the radiator abnormity early warning device that is used for semiconductor equipment according to claim 7 is characterized in that, wherein this alarm signal is a sound signal.
10, the radiator abnormity early warning device that is used for semiconductor equipment according to claim 7 is characterized in that, wherein this alarm signal is a flashing light.
11, the radiator abnormity early warning device that is used for semiconductor equipment according to claim 7 is characterized in that, wherein this alarm device is the control desk line with this semiconductor equipment.
12, the radiator abnormity early warning device that is used for semiconductor equipment according to claim 7, it is characterized in that, it is each this light laminated and this touch induction device of air outlet place installing in this radiator, all these touch induction devices is connected on the same alarm device again.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200420007950 CN2708498Y (en) | 2004-03-24 | 2004-03-24 | Radiator abnormity precaution device for semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200420007950 CN2708498Y (en) | 2004-03-24 | 2004-03-24 | Radiator abnormity precaution device for semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2708498Y true CN2708498Y (en) | 2005-07-06 |
Family
ID=34848475
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200420007950 Expired - Fee Related CN2708498Y (en) | 2004-03-24 | 2004-03-24 | Radiator abnormity precaution device for semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2708498Y (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101206515B (en) * | 2006-12-19 | 2011-04-13 | 国际商业机器公司 | Detection of airflow anomalies in electronic equipment |
-
2004
- 2004-03-24 CN CN 200420007950 patent/CN2708498Y/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101206515B (en) * | 2006-12-19 | 2011-04-13 | 国际商业机器公司 | Detection of airflow anomalies in electronic equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee |
Owner name: DUNNAN TECHNOLOGY CO., LTD. Free format text: FORMER NAME OR ADDRESS: LISHENG SEMICONDUCTOR CO., LTD. |
|
| CP03 | Change of name, title or address |
Address after: Taipei County of Taiwan Province Patentee after: Dunnan Science and Tech. Co., Ltd. Address before: Hsinchu city of Taiwan Province Patentee before: Lisheng Semiconductor Co., Ltd. |
|
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |