CN2674154Y - Straight claw rotator vacuum pump - Google Patents
Straight claw rotator vacuum pump Download PDFInfo
- Publication number
- CN2674154Y CN2674154Y CN 03260486 CN03260486U CN2674154Y CN 2674154 Y CN2674154 Y CN 2674154Y CN 03260486 CN03260486 CN 03260486 CN 03260486 U CN03260486 U CN 03260486U CN 2674154 Y CN2674154 Y CN 2674154Y
- Authority
- CN
- China
- Prior art keywords
- rotor
- vacuum pump
- pump
- straight
- shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Applications Or Details Of Rotary Compressors (AREA)
Abstract
A straight claw rotator vacuum pump of the utility model comprises a pump body, rotor pairs, a base, a driving shaft, a driven shaft, an electrical machine, a connector, a shaft connector, an air inlet device, etc. The utility model is characterized in that the peripheral models of the rotors are smoothly connected by seven right and wrong lines. The rotor pairs of all levels all have phase difference of 90 DEG Simultaneously, the reasonable arrangement of the suction and exhaust air in the chambers of the pumps of all levels are done, which enables the gas which is pumped to smoothly flow and the ultimate vacuum degrees of the pump to obtain 0.1 M PA to 3 M PA. The utility model is principally used for making chips in the semiconductor industry.
Description
Affiliated technical field
The utility model relates to a kind of rotor vacuum pump, exactly is a kind of straight pawl rotor vacuum pump.
Background technique
At present, domestic and international known pawl formula vacuum pump all adopts the rotor of paired full gerotor type, and the curvilinear structures of the uniqueness of dependence rotor itself is implemented in the whole process engagement when rotating in 360 degree garden weeks of pump chamber cavity.But there is a shortcoming in this claw rotor, that is: limit by its structure, and machining accuracy is difficult for guaranteeing.
Summary of the invention
The purpose of this utility model provides a kind of straight pawl rotor vacuum pump, and its straight pawl rotor processing difficulty reduces relatively, is easy to realize producing in enormous quantities.This straight pawl rotor vacuum pump is specifically designed to semi-conductor industry, and ultimate vacuum is the 0.1-3 handkerchief.
The utility model be achieved in that it comprise pedestal 2, pump chamber 3, rotor to 4, motor 16, motor 16 rotating shafts are connected through transmission device and driven shaft 6 with the driving shaft 5 that is installed in the pump housing, rotor is installed on driving shaft 5 and the driven shaft 6 by the keyway cooperation 4, and pump chamber 3 is installed in series on pedestal 2.
The utility model has the advantages that: straight pawl rotor, easy to process, control accuracy easily, rotors at different levels all have the phase differences of 90 degree when installing, and pumped gas flows smooth and easy, and the overcompression amount is little, makes the ultimate vacuum of this kind of pump can reach the 0.1-3 handkerchief.
Description of drawings
Fig. 1 is a structural representation of the present utility model
Fig. 2 is the B-B sectional view of Fig. 1
Fig. 3 is the A-A sectional view of Fig. 1
Specific embodiment
Below in conjunction with accompanying drawing embodiment is described in detail.
By Fig. 1-3 as can be known, the utility model is by level Four pump chamber 3, and biography that is positioned at pump chamber is to 4, pedestal 2, preceding fuel tank 19, driving shaft 5, driven shaft 6, gear-box 7, driving gear 9, driven gear 13, motor 16, link press span 15, shaft joint 14 compositions such as grade.Motor 16 rotatingshafts are connected by shaft joint 14 and driving shaft 5, driving shaft 5 is connected with driven shaft 6 through driven gear 13, rotor is serially connected on driving shaft 5 and the driven shaft 6 by the keyway cooperation 4, the phase difference of every grade of keyway is 90 degree, level Four pump chamber 3 is installed in series on pedestal 2, and air intake filter 18 is vertically mounted on the apical axis bearing 17, and exhaust noise silencing valve 20 is vertically mounted on the pedestal 2, motor 16 is connected with pedestal 2 right-hand members by link press span 15, and whole pump housing horizontal base drops on the base 1.
The peripheral type body of rotor is by straight line 23, garden arc 25, cycloid 24, garden arc 26, cycloid 27, envelope 28,29 7 sections curve-straight line smooth connections of garden arc.
Main bearing 8 is housed in the pedestal 2, primary seal body 11, pedestal 2 separates pump chamber 3 and gear-box 7, driving shaft 5 and driven shaft 6 are located by main bearing 8 (two places), in two axial ends driving gear 9 and driven gear 13 are installed, auxiliary bearing 10, auxiliary seal body 12 also are housed on gear-box 7.
The assembling interior cooling water channel 22 of regulator 21 and pump chamber of independently intaking is connected on the pump chambers 3 at different levels.Throttle valve, the aeration device 30 that one-way valve is formed are housed by stop valve on the pump chambers 3 at different levels.
Fig. 3 has also shown in pump chamber 3 by air aspiration cavity a that straight pawl separated and the exhaust cavity b of rotor to 4 projection, when rotor rotates by direction as shown 4 (be illustrated as exhaust will finish time position), air aspiration cavity constantly increases and air-breathing, exhaust cavity constantly dwindles and exhaust, goes round and begins again and finishes pumping process.
Claims (5)
1, a kind of straight pawl rotor vacuum pump, comprise that pedestal (2), pump chamber (3), rotor are to (4), motor (16), it is characterized in that: motor (16) rotating shaft is connected through transmission device and driven shaft (6) with the driving shaft (5) that is installed in the pump housing, rotor is installed on driving shaft (5) and the driven shaft (6) by the keyway cooperation (4), and pump chamber (3) is installed in series on pedestal (2).
2, straight pawl rotor vacuum pump according to claim 1 is characterized in that: the phase difference of every grade of key cooperation is 90 degree.
3, straight pawl rotor vacuum pump according to claim 1 is characterized in that: rotor to the peripheral type body of (4) by straight line (23), garden arc (25), cycloid (24), garden arc (26), cycloid (27), envelope (28), (29) seven sections curve-straight line smooth connections of garden arc.
4, straight pawl rotor vacuum pump according to claim 1 is characterized in that: the pump chambers at different levels assembling interior cooling water channel (22) of regulator (28) and pump chamber of independently intaking is connected.
5, straight pawl rotor vacuum pump according to claim 1, its feature also is to be equipped with on the pump chambers at different levels (3) the aeration device of being made up of stop valve, throttle valve, one-way valve (30).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03260486 CN2674154Y (en) | 2003-09-03 | 2003-09-03 | Straight claw rotator vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03260486 CN2674154Y (en) | 2003-09-03 | 2003-09-03 | Straight claw rotator vacuum pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2674154Y true CN2674154Y (en) | 2005-01-26 |
Family
ID=34473455
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 03260486 Expired - Fee Related CN2674154Y (en) | 2003-09-03 | 2003-09-03 | Straight claw rotator vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2674154Y (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102346798A (en) * | 2011-09-29 | 2012-02-08 | 王连智 | Design method of seven-segment type straight claw rotor |
| CN105888757A (en) * | 2016-06-23 | 2016-08-24 | 中国石油大学(华东) | Closed circulating power generation device |
| CN105952591A (en) * | 2016-06-23 | 2016-09-21 | 中国石油大学(华东) | Claw type engine generating device used for geothermal power generation |
| CN114593055A (en) * | 2020-12-07 | 2022-06-07 | 中国科学院沈阳科学仪器股份有限公司 | Multi-stage dry vacuum pump |
| CN117090775A (en) * | 2023-10-18 | 2023-11-21 | 山东亿宁环保科技有限公司 | Rotor cooling system and vacuum pump for chemical production |
-
2003
- 2003-09-03 CN CN 03260486 patent/CN2674154Y/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102346798A (en) * | 2011-09-29 | 2012-02-08 | 王连智 | Design method of seven-segment type straight claw rotor |
| CN102346798B (en) * | 2011-09-29 | 2013-07-17 | 王连智 | Design method of seven-segment type straight claw rotor |
| CN105888757A (en) * | 2016-06-23 | 2016-08-24 | 中国石油大学(华东) | Closed circulating power generation device |
| CN105952591A (en) * | 2016-06-23 | 2016-09-21 | 中国石油大学(华东) | Claw type engine generating device used for geothermal power generation |
| CN114593055A (en) * | 2020-12-07 | 2022-06-07 | 中国科学院沈阳科学仪器股份有限公司 | Multi-stage dry vacuum pump |
| CN117090775A (en) * | 2023-10-18 | 2023-11-21 | 山东亿宁环保科技有限公司 | Rotor cooling system and vacuum pump for chemical production |
| CN117090775B (en) * | 2023-10-18 | 2024-02-06 | 山东亿宁环保科技有限公司 | Rotor cooling system and vacuum pump for chemical production |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |