Cabinet fast dehumidifies
Technical field
The utility model relates to a kind of dehumidifying cabinet that is used to store accurate devices such as microelectronics, semiconductor, particularly a kind ofly is used to leave in the quick dehumidifying cabinet that frequently picks and places material on the production line.
Background technology
In microelectronics industry is produced, the dehumidifying cabinet is widely used in deposits all kinds of responsive equipment, the dehumidifying cabinet of prior art mainly is static dehumidifying, promptly at an electronics dehumidifying of the inner installation of the cabinet that dehumidifies fast controller, when the humidity of dehumidifying in the cabinet during less than setting value, electronics dehumidifying controller is just started working and is reached requirement up to humidity.Such dehumidifying cabinet can also meet the demands when being used to store the device of long-term storage, but frequently picking and placeing material on the production line, frequently opening under the situation of cabinet door, electronics dehumidifying controller often has little time the humidity in the cabinet is dropped to setting value, the cabinet door is unlocked again, makes that the interior humidity of cabinet is high.Be unfavorable for the storage of equipment.
The utility model content
The technical problems to be solved in the utility model is, at the above-mentioned defective of prior art, even a kind of dehumidifying cabinet that the cabinet door also can not impact humidity in the cabinet of frequently opening is provided.
The technical scheme that its technical problem that solves the utility model adopts is: construct a kind of quick dehumidifying cabinet, comprise cabinet, cabinet door, be arranged on cabinet inside and be used for the electronics dehumidifying controller of static dehumidifying, also comprise one can be to cabinet delivered inside dry gas, be used for the dynamically jet treatment plant of dehumidifying.
In quick dehumidifying cabinet described in the utility model, described jet treatment plant comprises an air-flow control and regulation device that is used for regulating the ejection gas flow, and linking to each other with cabinet by appendix is used for the gas dry filter device of dry gas.
In quick dehumidifying cabinet described in the utility model, the air inlet of the dry filter of the gentle soma in gas outlet of described air-flow control and regulation device links to each other with two the tunnel with a road of two-position four-way valve respectively, three tunnel of described cabinet and two-position four-way valve links to each other with the gas outlet with the air inlet of check valve respectively, four tunnel of two-position four-way valve links to each other with blast pipe, also is connected with a safety valve between described cabinet and the outside.
In quick dehumidifying cabinet described in the utility model, the control end of described two-position four-way valve can be the moving joystick of manipulator.
In quick dehumidifying cabinet described in the utility model, the control end of described two-position four-way valve also can adopt circuit control, its control end is controlled by the JSI coil, the JSI coil links to each other with control circuit, in described control circuit, be used for manually control switch Q1 be used for the parallel with one another of control automatically near switch Q2, and the one end links to each other with the positive pole of power supply, the other end links to each other with the JSI coil; Being used to close delay time behind the door supplying time relay K 1 one ends and pulsed of cabinet links to each other with the JSI coil near the switch Q3 end that links to each other.
In quick dehumidifying cabinet described in the utility model, described air-flow control and regulation device is controlled by valve, and the openings of sizes of this valve can be regulated by knob, and its knob indicates the analog or digital scale that can show gas flow.
In quick dehumidifying cabinet described in the utility model, described gas dry filter device is the membrane filtration gas treatment equipment.
In quick dehumidifying cabinet described in the utility model, the air inlet of described air-flow control and regulation device is connected with a filter that is used for filtering dust.
The beneficial effects of the utility model are, because described cabinet has increased jet treatment plant, when each cabinet door is opened, jet treatment plant will spray treated dry gas, stop the outer humid air of cabinet to enter, humidity can not produce very big fluctuation in the cabinet, can not exert an influence to the equipment of depositing like this, reaches the effect of dynamic dehumidifying; Because the interior moisture fluctuation of cabinet is little, static dehydrating unit is that electronics dehumidifying controller can not consume too many energy yet, has saved cost greatly simultaneously.
Description of drawings
The utility model is described in further detail below in conjunction with drawings and Examples, in the accompanying drawing:
Fig. 1 is the structural representation that the quick dehumidifying cabinet of jet treatment plant is housed;
Fig. 2 is the circuit diagram that utilizes the quick dehumidifying cabinet that jet treatment plant is housed of electrical control;
Fig. 3 is the air-flow schematic diagram of the jet treatment plant of quick dehumidifying cabinet of the present utility model two-position four-way valve when carrying gas;
Fig. 4 is the air-flow schematic diagram of the jet treatment plant of quick dehumidifying cabinet of the present utility model two-position four-way valve when stopping to carry gas;
Fig. 5 is a moisture fluctuation curve synoptic diagram in the cabinet of the experiment of opening the door of the utility model cabinet of having air jet system;
Fig. 6 is a moisture fluctuation curve synoptic diagram in the cabinet of the experiment of opening the door of traditional cabinet.
The specific embodiment
The gas source of the jet treatment plant of quick dehumidifying cabinet described in the utility model is canned dry air or nitrogen, and the filter that is about to link to each other with air-flow control and regulation device links to each other with dry air tank or nitrogen pot.The by-pass valve control of described jet treatment plant can adopt machinery control and electrical control, as shown in Figure 1.
When adopting machinery control, when the control end of two-position four-way valve 2 is failure to actuate, the gas circuit of two-position four-way valve as shown in Figure 4, the one tunnel and three the tunnel to connect be air-flow control and regulation device and check valve connection, Compressed Gas leads to check valve 4, and is intercepted, not to the cabinet air feed; Before the cabinet door of opening the cabinet that dehumidifies fast, according to the knob on the time that will open the door and the angular adjustment air-flow that the opens the door control and regulation device 1, aim at corresponding scale, control the air-flow size of output, when gas is contracted in the cabinet voltage supply, the joystick of two-position four-way valve 2 is pressed, the gas circuit of two-position four-way valve as shown in Figure 3, one tunnel and two tunnel connections are that air-flow control and regulation device and gas dry filter device are connected, three tunnel and four tunnel connections are that check valve and blast pipe are connected, Compressed Gas leads to gas device for drying and filtering 3, after the special processing of drying through gas dry filter device 3, dry gas feeds cabinet, and original wet gas is discharged outside the cabinet by check valve 4 in the cabinet.Safety valve 5 plays safety effect when check valve 4 is out of order.Supplying gas the corresponding time manual-lock joystick to cabinet.
When adopting circuit control, its course of work is with manually control procedure is basic identical; Just two-position four-way valve is an electrically-controlled valve, and its gauge tap is by the control of JSI coil, and the JSI coil is to be controlled by the micro switch of device on cabinet: the JSI coil of described two-position four-way valve links to each other with control circuit.Be illustrated in figure 2 as control circuit figure, be used for manually control switch Q1 be used for the parallel with one another of control automatically near switch Q2, and the one end links to each other with the positive pole of power supply, the other end links to each other with the JSI coil; Being used to close delay time behind the door supplying time relay K 1 one ends and pulsed of cabinet links to each other with the JSI coil near the switch Q3 end that links to each other.Its working procedure is divided into manually and two kinds of patterns of automatic control:
1, manually control: switch Q1 is used for manually controlling the JS1 coil and gets input that dead electricity controls Compressed Gas then and stop.Q1 opens the JS1 coil electricity, and two-position four-way valve is in the state of Fig. 3, in the Compressed Gas input cabinet; Q1 closes the JS1 coil blackout, and two-position four-way valve is in the state of Fig. 4, Compressed Gas stop input.
2, control automatically: switch Q1, relay K 1 are in normally open.
After A, cabinet door were opened, near the normally opened contact closure of switch Q2, the JS1 energising was sent Compressed Gas to quick dehumidifying cabinet.
After B, cabinet door are closed, disconnect near switch Q2, pulsed is sent a pulse near switch Q3 and is given time relay K1, the moving together contact closure of the delayed start-up of K1, and the JS1 energising is to quick dehumidifying cabinet input Compressed Gas.
The quick dehumidifying cabinet that is illustrated in figure 5 as the band jet treatment plant was opened simple gate 10 seconds after 30 minutes, jet drying filters the schematic diagram of humidity in the compression gas cabinet in case simultaneously.Test environment: 20 ℃ of temperature, humidity 60%, cabinet internal volume 400L, two-door, zero load.Ordinate is a relative humidity, and abscissa is the time.The humidity that a point has just been started working in the cabinet for quick dehumidifying cabinet is 60%, move that humidity drops to the b1 point after 30 minutes, open simple gate this moment and close the Over-The-Counter door after 10 seconds, jet drying filters Compressed Gas in case simultaneously, humidity begins to rise in the cabinet, be up to the c1 point, the difference of c1 and b1 is less than 3%RH; Close the Over-The-Counter door after 30 minutes humidity drop to the b2 point, open simple gate for the second time and close the Over-The-Counter door after 10 seconds, jet drying filters Compressed Gas in case simultaneously, the interior humidity of cabinet begins to rise, and is up to the c2 point, the difference of c2 and b2 is less than 3%RH; Repeated above-mentioned experiment every 30 minutes, measure high humility data c3 in the back cabinet that at every turn opens the door, c4, c5, c6, c7 and corresponding with it open the door at every turn before minimum humidity b3, b4, b5, b6 in the cabinet.Comparing data as can be known, the soaring degree of humidity that at every turn opens the door in the cabinet is all very little, that maximum just is 3%RH, and the minimum point that at every turn can drop to is all in reduction.
Be illustrated in figure 6 as and be not with the quick dehumidifying cabinet of jet treatment plant after 90 minutes, to open simple gate 10 seconds, the schematic diagram of humidity in the cabinet.Test environment: 20 ℃ of temperature, humidity 60%, cabinet internal volume 400L, two-door, zero load.Ordinate is a relative humidity, and abscissa is the time.The humidity that the d point has just been started working in the cabinet for quick dehumidifying cabinet is 60%, move that humidity drops to the e1 point after 30 minutes, opens simple gate this moment and closes the Over-The-Counter door after 10 seconds, and the interior humidity of cabinet begins to rise, and is up to the f1 point, and the difference of e1 and f1 is greater than 5%RH; Close the Over-The-Counter door after 30 minutes humidity drop to the e2 point, open simple gate for the second time and close the Over-The-Counter door after 10 seconds, the interior humidity of cabinet begins to rise, and is up to the f2 point, the difference of f2 and e2 is greater than 5%RH; Repeated above-mentioned experiment every 30 minutes, measure high humility data f3 in the back cabinet that at every turn opens the door, f4, f5 and corresponding with it open the door at every turn before minimum humidity e3, e4, e5 in the cabinet.Comparing data as can be known, the soaring degree of humidity that at every turn opens the door in the cabinet is all very big, the maximum 10%RH that surpasses, and the minimum point that at every turn can drop to is all in rising.
Can illustrate that by above experiment the dehumidifying controller that has jet treatment plant can effectively stop the outer wet gas of cabinet to enter, and makes it can not produce a very large impact humidity in the cabinet.