CN2634405Y - Multiple staton parallel vacuum cintering furnace - Google Patents
Multiple staton parallel vacuum cintering furnace Download PDFInfo
- Publication number
- CN2634405Y CN2634405Y CN 03269052 CN03269052U CN2634405Y CN 2634405 Y CN2634405 Y CN 2634405Y CN 03269052 CN03269052 CN 03269052 CN 03269052 U CN03269052 U CN 03269052U CN 2634405 Y CN2634405 Y CN 2634405Y
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- Prior art keywords
- vacuum
- sintering furnace
- vacuum chamber
- platform
- vacuum sintering
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- Expired - Fee Related
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- 238000005245 sintering Methods 0.000 claims abstract description 40
- 238000001816 cooling Methods 0.000 claims abstract description 29
- 238000010438 heat treatment Methods 0.000 abstract description 25
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 16
- 238000012545 processing Methods 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- 238000013461 design Methods 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 229910052573 porcelain Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000740 bleeding effect Effects 0.000 description 1
- 230000037237 body shape Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000001291 vacuum drying Methods 0.000 description 1
- 230000003245 working effect Effects 0.000 description 1
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- Tunnel Furnaces (AREA)
- Furnace Details (AREA)
Abstract
The utility model relates to a multi-station parallel vacuum sintering furnace, mainly comprising a platform frame, vacuum chambers and an external heater. A reciprocating slide track which forms a rectangular profile by crossed longitudinal and transversal tracks is arranged on the platform frame. The external heater can perform the longitudinal and transversal movement forward, backward, leftward and rightward. A plurality of vacuum chambers are fixed and arranged in parallel at one end of the platform frame. With the combined internal and external heating device, water cooling, fan cooling and reciprocating surface moving slide track, the multi-station parallel vacuum sintering furnace has a reasonable vacuum sintering circuit and can improve production efficiency and product quality.
Description
Technical field
The utility model relates to a kind of vacuum sintering furnace, specifically fully utilizes vacuum and high temperature and heats the sintering furnace of handling.
Background technology
Present domestic semiconductor and power electronics industry generally all need be fused or softening the processing in handling the electronic device process, and employed sintering furnace has chain (band) formula sintering furnace or vacuum sintering furnace etc.
Chain (band) formula sintering furnace, the product of institute's sintering after non-oxidized gas protection by preheating zone, high-temperature region, come out of the stove after the cooling processing again.In the entire process process, the product of institute's sintering is surrounded by non-oxidized gas (being generally nitrogen), easily produces bubble and the removal of non-easy cleaning in product inside when cooling, therefore has influence on the service life and the yield rate of electronic device.
Also have now and adopt vacuum sintering furnace, body of heater is vacuumized after in sintering furnace, putting into product, carry out sintering processes by the high temperature heating again.Though this kind vacuum drying oven can partly solve the problem of the generation bubble of continuous tunnel furnace, the treatable product quantity of each institute is less, production efficiency is low, and production cost also comparatively improves.
Along with the development of China's electronics industry,,, will be related to the industrial competition and the technological innovation height of product how by raising the efficiency, be lowered into original raising yield rate for electronics special equipment manufacturer.Thereby the existing problem of above-mentioned existing equipment, be manufacturer the problem content that urgently will solve.
Summary of the invention
Multistation described in the utility model vacuum sintering furnace arranged side by side, its design aims to provide a kind of block form sintering furnace that utilizes the critical path method appropriate design, by disposing the operating platform of multistation crossing operation, comprehensively improve production efficiency and quality that vacuum high-temperature is handled.Structure is simple and easy relatively, can solve aforesaid problem and shortage.
Multistation described in the utility model vacuum sintering furnace arranged side by side mainly includes platform-type frame, vacuum chamber, outer formula heater.
Platform-type frame is provided with reciprocating type slide rail, and reciprocating type slide rail is by vertical, cross track cross arrangement and become rectangular profile.Outer formula heater can finish forward on reciprocating type slide rail, backward, left, to the right vertically, lateral displacement.
The end on the platform-type frame is fixed, is arranged in to several vacuum chambers side by side.Each vacuum chamber is the body that end sealing, the other end are provided with charging aperture.
Be provided with the vacuum seal door at the charging aperture place, its locking device can be with the charging aperture sealing and fixing.
The vacuum extractor that is made of vavuum pump, pressure gauge, charge valve and vent valve etc. is set near charging aperture.
Vacuum chamber inner chamber longitudinally length direction is provided with the carriage of being with pulley, and carriage and charging aperture hermatic door place are at grade.When opening hermatic door, with handled product along the carriage ecto-entad, utilize pulley on carriage, to slide in the vacuum chamber.Successively handled product is slipped in the vacuum chamber, till vacuum chamber is filled completely.In fact, handled product is promptly finished heat-agglomerating on the carriage in vacuum chamber.When product be sintered dispose after, also be by the carriage in the vacuum chamber, finished product is removed successively from inside to outside.
Be provided with water-cooling apparatus at the vacuum chamber inner chamber near the hermatic door place.
One end of platform-type frame is provided with at least 2 vacuum chambers, can be provided with a cooling fan housing in the upper fixed of each vacuum chamber.
Be provided with air outlet in cooling fan housing upper end.Below the cooling fan housing, platform-type upper rack is provided with air inlet and blower fan.
Outer formula heater is the sleeve type structure of hollow, carries out radiation heating so that vacuum chamber is set in the centre.
Outer formula heater can be hollow circular cylinder, hollow prism or hollow box body shape.
Outer formula heater one end is connected with power supply, is provided with several pulleys in its bottom, makes that outer formula heater can set up, slide on the slide rail of platform-type frame.
Multistation described in the utility model vacuum sintering furnace arranged side by side for improving the progress of sintering processes product, can be provided with inner heating device further in vacuum chamber.
Inner heating device is auxilliary to be located at the interior carriage below of vacuum chamber, and is connected with external power source.
Especially, in the cooling procedure after sintering processes finishes,, need when cooling, control rate of temperature fall for preventing too fastly to cause glassy layer contained in the product to break because of lowering the temperature.
More than be exactly the master-plan design of multistation described in the utility model vacuum sintering furnace arranged side by side.
Multistation described in the utility model vacuum sintering furnace arranged side by side, owing to have heater, water cooling and the blower fan cooling and the reciprocating type in-plane displancement slide rail of combination of inner and outside mode, just it is reasonable to get the vacuum-sintering procedure arrangement, effectively improved production efficiency and product quality, had the following advantages and beneficial effect.
1, reciprocating type in-plane displancement slide rail, the multistation operating platform can be provided, and the preparatory process in the further shortening process makes an outer formula heater can supply many vacuum chamber forked workings, thereby can rationally arrange technological process, reduce operator's quantity, reduce production costs.
2, use heating in vacuum mode, external and internal type heater the time, make handled product under vacuum state, heat up rapidly, and progressively cooling controllably, guaranteed that product inside does not produce bubble, make product quality be guaranteed, improve yield rate.
Description of drawings
Fig. 1 is the structural representation of multistation described in the utility model vacuum sintering furnace arranged side by side;
Fig. 2 is the anterior schematic diagram of multistation vacuum sintering furnace arranged side by side.
Below in conjunction with accompanying drawing the utility model structure is further described:
Multistation described in the utility model vacuum sintering furnace arranged side by side includes platform-type frame 1, cooling fan housing 2, vacuum chamber 3, outer formula heater 4.
Platform-type frame 1 includes reciprocating type slide rail 11 (as can be seen from Figure 2 slide rail 11 has the track of vertical and horizontal), forwardly has operation display panel 12.
Be provided with air outlet 21 in cooling fan housing 2 upper ends, below the cooling fan housing, platform-type upper rack is provided with blower fan.
Wherein vacuum chamber 3 includes vacuum seal door 31, by the vacuum extractor that vavuum pump, pressure gauge 32 etc. constitutes, and the carriage 33 of band pulley, inner heating device 34.
Outer formula heater 4 is the sleeve type structure of hollow, can slide displacement forward, backward, left, to the right on platform-type frame 1.
Embodiment
Implement 1, in conjunction with content illustrated in figures 1 and 2, a kind of multistation vacuum sintering furnace arranged side by side includes a platform-type frame 1, cooling fan housing 2, vacuum chamber 3, one outer formula heater 4.
2 vacuum chambers 3 are fixed on an end of platform-type frame 1 side by side, and a cooling fan housing 2 is set above each vacuum chamber 3.
Each vacuum chamber 3 is hollow tubes that end sealing, the other end are provided with charging aperture.
Be provided with vacuum seal door 31 at the charging aperture place, near charging aperture, be provided with the vacuum extractor that constitutes by vavuum pump, pressure gauge 32 etc.
Be provided with the carriage 33 of band pulley along the longitudinal direction at vacuum chamber 3 inner chambers.
Assist below vacuum chamber 3 inner chamber carriages 33 and be provided with an inner heating device 34, inner heating device 34 is porcelain tubes of inner hollow, and inside is embedded with electrical heating wire.
Be provided with water-cooling apparatus at the vacuum chamber inner chamber near the hermatic door place.
Be provided with air outlet 21 in cooling fan housing 2 upper ends.Below the cooling fan housing, platform-type upper rack is provided with blower fan.
Outer formula heater 4 is the sleeve type structure of hollow, and an end is connected with power supply, is provided with 6 pulleys in its bottom, makes that outer formula heater can set up, slide on the slide rail of platform-type frame.
Use the operating process of multistation described in the utility model vacuum sintering furnace arranged side by side as follows:
One end of the platform-type frame of multistation vacuum sintering furnace arranged side by side is fixedly connected with 2 vacuum chambers side by side, when using a vacuum chamber to carry out high temperature sintering, can carry out air-cooled cooling and carry out the product that cooled product is collected or filling needs processing again another vacuum chamber.
When the product load to need handled, the vacuum seal door at vacuum chamber charging aperture place is changed, when with handled product along the carriage that the band pulley is arranged, utilize pulley to be pushed into successively in the vacuum chamber ecto-entad, until vacuum chamber be filled expire till.
Utilize hermatic door locking device good seal again, then vacuum chamber is carried out vacuum pumping.Near the charging aperture of vacuum chamber, be provided with bleeding point, and install and to dispose the vacuum extractor that vavuum pump, pressure gauge, charge valve and vent valve etc. constitute.
With the outer formula heater that is provided with on the platform-type frame, overlap the vacuum chamber outside of packing into along reciprocating type slide rail propelling, vacuum chamber is set in the centre carries out radiation heating.
Simultaneously, the inner heating device in vacuum chamber is assisted heating below the carriage in vacuum chamber.Heat form also is a radiation heating.
Inner heating device is an inner hollow, is embedded with the plank frame of electrical heating wire, overcoat porcelain tube that when outer formula heater carried out the heating of high heat, inner heating device was directly carrying out radiation heating to the product on the carriage below the carriage.This has just accelerated the heating process flow process greatly.
After finishing heating steps, at first outer formula heater is separated from vacuum chamber, and slides to another vacuum chamber outside along reciprocating type track, carry out heating operation to carrying out another vacuum chamber.
When another vacuum chamber is heated,, adopt water cooling simultaneously and open blower fan system, promptly be arranged on the blower fan system of platform-type upper rack, in the cooling fan housing, produce the convection current air for this has heated the vacuum chamber that finishes at present.Fully utilize the above-mentioned type of cooling, take away the heat that the work in the vacuum chamber produces.
But simultaneously, inner heating device is still in running order, makes that the temperature in the vacuum chamber progressively descends, and then heats the glassy layer or the silicon layer that are dissolved and condenses with regard to covering the electronic device surface equably.
Meanwhile, the charge valve by vacuum extractor charges into air in vacuum chamber, and operating personnel can operate by operation display panel, whether replys original level by the air pressure in the pressure gauge measuring and calculating vacuum chamber simultaneously.
After treating that aforesaid operations finishes, after just temperature in the vacuum chamber and air pressure recover normal value, open the vacuum seal door and take out the product that disposes along slide rail successively.
Repeat above operating process, can handle the electronic device product to be sintered of another batch once more.
And multistation described in the utility model vacuum sintering furnace arranged side by side, the technological process of being adopted is exactly that a vacuum chamber is loaded, heat treated, another vacuum chamber cooling, the staggered form processing mode of collecting finished product use an outer formula heater to satisfy the demand of a plurality of vacuum chamber treatment product simultaneously with this.
And realize that outer formula heater be the technological means that a plurality of vacuum chambers heat simultaneously, platform-type exactly frame is provided with reciprocating type slide rail, by vertical, the feasible outer formula heater of cross track can be finished forward, backward, left, move right.
Inner heating device is to select the parts controlled.When needing to use, make inner heating device produce heat by connecting external power source.Or when need not to use, also switch can cut out.
Claims (8)
1, a kind of multistation vacuum sintering furnace arranged side by side includes frame, vacuum chamber, outer formula heater, and it is characterized in that: frame is platform-type structure, is arranged with the cross track of vertical and horizontal at platform-type upper rack.
2, multistation according to claim 1 vacuum sintering furnace arranged side by side is characterized in that: be arranged with at least 2 vacuum chambers side by side at platform-type frame one end.
3, multistation according to claim 2 vacuum sintering furnace arranged side by side is characterized in that: formula heater in the vacuum chamber inner chamber is provided with.
4, multistation according to claim 3 vacuum sintering furnace arranged side by side is characterized in that: the inner chamber of vacuum chamber, along the longitudinal direction be provided with the band pulley carriage.
5, multistation according to claim 4 vacuum sintering furnace arranged side by side is characterized in that: interior formula heater is assisted the carriage below that is located at vacuum chamber, and is connected with external power source.
6, multistation according to claim 5 vacuum sintering furnace arranged side by side is characterized in that: be provided with water-cooling apparatus at the vacuum chamber inner chamber near the hermatic door place.
7, according to claim 2,3 or 5 described multistation vacuum sintering furnace arranged side by side, it is characterized in that: be provided with a cooling fan housing on the platform-type frame, above each vacuum chamber, be provided with air outlet in cooling fan housing upper end, in platform-type frame, be provided with blower fan.
8, multistation according to claim 7 vacuum sintering furnace arranged side by side is characterized in that: outer formula heater is the sleeve type structure of hollow, and it is shaped as hollow circular cylinder, hollow prism or hollow box body, and its bottom is provided with pulley.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03269052 CN2634405Y (en) | 2003-07-16 | 2003-07-16 | Multiple staton parallel vacuum cintering furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03269052 CN2634405Y (en) | 2003-07-16 | 2003-07-16 | Multiple staton parallel vacuum cintering furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2634405Y true CN2634405Y (en) | 2004-08-18 |
Family
ID=34299750
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 03269052 Expired - Fee Related CN2634405Y (en) | 2003-07-16 | 2003-07-16 | Multiple staton parallel vacuum cintering furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2634405Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101109601B (en) * | 2007-07-05 | 2010-05-19 | 林茂昌 | Internal controlling vacuum brazing stove |
| CN107289769A (en) * | 2017-07-17 | 2017-10-24 | 深圳市镭煜科技有限公司 | Continuous tunnel furnace |
-
2003
- 2003-07-16 CN CN 03269052 patent/CN2634405Y/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101109601B (en) * | 2007-07-05 | 2010-05-19 | 林茂昌 | Internal controlling vacuum brazing stove |
| CN107289769A (en) * | 2017-07-17 | 2017-10-24 | 深圳市镭煜科技有限公司 | Continuous tunnel furnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: WANG ZHIDUN Free format text: FORMER OWNER: WANG ZHONGLI Effective date: 20041231 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20041231 Address after: 266031 No. 47, Yiyang Road, Sifang District, Shandong, Qingdao Patentee after: Wang Zhidun Address before: 266041, No. nine, No. 238 East water road, Licang District, Shandong, Qingdao Patentee before: Wang Zhongli |
|
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |