CN2576310Y

CN2576310Y - Organic-solvent recovering apparatus

Info

Publication number: CN2576310Y
Application number: CN 02257555
Authority: CN
Inventors: 吴永清
Original assignee: Individual
Current assignee: Individual
Priority date: 2002-09-29
Filing date: 2002-09-29
Publication date: 2003-10-01
Anticipated expiration: 2012-09-29

Abstract

The utility model relates to an organic solvent recovering device which comprises a shell body, an evaporating tank, a fan cooler, a first recovering pipe, an ice water cooler, a second recovering pipe, a cooling water supplying device, a recovering tank and a storing tank. In the utility model, one side of the shell body is provided with a control panel; the evaporating tank is provided with a conveying pipe which is provided with a control valve; the fan cooler comprises a fan and a cooling pipe of which the one end is connected with the conveying pipe of the evaporating tank; one end of the first recovering pipe is connected with the output end of the cooling pipe, the lower end of the recovering pipe is connected with the recovering tank and is provided with a molecular sieve and a control valve; the inner part of the ice water cooler is provided with a spiral pipe passage of which the one end is connected with the upper end part of the first recovering pipe; one end of the second recovering pipe is connected with the output end of the spiral pipe passage, the lower end part of the second recovering pipe is connected with the recovering tank and is provided with a molecular sieve and a control valve, the upper end part of the second recovering pipe is provided with the control valve and a waste gas expelling pipe which is provided with a waste gas filter; the cooling water supplying device is connected with the ice water cooler. The utility model adopts a two-stage recovery method of fan temperature lowering and ice water cooling for reducing the load of the ice water cooler and enhancing the recovery ratio and the purity of recovered solvent.

Description

The organic solvent retracting device

Technical field

The utility model relates to device of condensation recovery, especially a kind of organic solvent retracting device.

Background technology

Semicon industry is residual attachment in wafer preparation processes, must clean and remove, and wherein a kind of organic solvent that is used for clean wafers is N-Propyl Bromide (C ₃H ₇Br),, therefore use it, must consider its recovery is re-used as cleaning agent because organic solvents such as N-Propyl Bromide cost an arm and a leg.But organic solvents such as N-Propyl Bromide are different from common solvent, and the mode condensation of its inapplicable employing Compressed Gas is reclaimed.It is early stage that semicon industry develops, because it is very high that product is made a profit, do not notice that N-Propyl Bromide reclaims the rate of recovery that re-uses, so relevant industries also few people design retracting device at the problem that re-uses of N-Propyl Bromide specially, therefore mostly carry out the recycling of N-Propyl Bromide with the common solvent retracting device, N-Propyl Bromide gas after also being about to evaporate will condense into liquid state by the heat radiation of the gaseous bromine propane in the pipeline with a cooler, be reclaimed use then.

Utilize the cooler condensation to reclaim N-Propyl Bromide or other organic solvents, because the formed N-Propyl Bromide organic solvent gas of evaporation mode is a low pressure, therefore no matter make and adopt straight pipe type cooler A shown in Figure 1, or swan-neck cooler B shown in Figure 2, be positioned at the gaseous bromine propane c of pipeline a or b, its gaseous molecular can't fully collide and condense into liquid state, cause its rate of recovery only below 75%, yet, the semiconductor practitioner reduction of making a profit in recent years, therefore urgent hope can make the rate of recovery of N-Propyl Bromide reach more than 85%, thereby the reduction product cost increases competitiveness, for this reason, someone attempts strengthening the tonnage of cooler, with the raising rate of recovery, but effect is clear, moreover the tonnage of increase cooler certainly will increase power consumption, and take up room and also increase, lose more than gain so on the contrary.

Summary of the invention

Reclaim the problem that exists in the organic solvent in the existing preparation of product in order to overcome, the utility model provides a kind of organic solvent retracting device, it adopts two stage ways of recycling of fan for cooling, frozen water cooling, reduce the load of frozen water cooler, and,, the gaseous state organic solvent is fully collided in pipeline with spiral pipeline at the frozen water cooling stage, increase contact, and then improve the rate of recovery; The liquid organic solvent of its recovery is through the hydrone of institute's cracking in the organic solvent recovery of molecular sieve (Zeolite) absorption, to improve the purity that reclaims solvent.

The technical scheme that its technical problem that solves the utility model adopts is:

A kind of organic solvent retracting device, it is characterized in that, comprise housing, evaporator tank, fan cooler, first recovery tube, frozen water cooler, second recovery tube, chilled(cooling) water supply (CWS) device and accumulator tank and accumulator tank, wherein evaporator tank, fan cooler, first recovery tube, frozen water cooler, second recovery tube and chilled(cooling) water supply (CWS) device are located in the housing, and this housing one side is provided with control panel; Be equipped with carrier pipe on the evaporator tank, carrier pipe is provided with control valve; Fan cooler comprises fan and cooling tube, and cooling tube one end is connected with the carrier pipe of evaporator tank; First recovery tube, one end is connected with the output of fan cooler cooling tube, and its lower end is connected with accumulator tank, and is provided with first molecular sieve and a control valve near the pipeline above the accumulator tank; Be provided with the spiral pipeline in the frozen water cooler, spiral pipeline one end is connected with the first recovery tube upper end; Second recovery tube, one end is connected with the output of spiral pipeline, its bottom is connected with accumulator tank, and be provided with second molecular sieve and a control valve near the pipeline above the accumulator tank, its upper end is connected with a control valve and an exhaust pipe, and exhaust pipe is provided with waste gas filter; The chilled(cooling) water supply (CWS) device is connected with the frozen water cooler.

Aforesaid organic solvent retracting device, wherein evaporator tank comprises that an organic solvent storage tank and a ring are located at the water liquid heating tank of storage tank, water liquid heating tank bottom is provided with heater, the storage tank bottom is provided with exhaust pipe and suction motor, storage tank top is provided with safety valve, and this safety valve top is connected with exhaust pipe by pipeline, by the heater that is located at the bottom of the water liquid heating tank trough inner water liquid is heated, and then make the organic solvent evaporation in the storage tank become gaseous state, send by carrier pipe again.

Aforesaid organic solvent retracting device, wherein the accumulator tank top is provided with a discharge pipe that is connected with exhaust pipe, accumulator tank one side joint is provided with an aspiration, be connected with accumulator tank by this aspiration, and be equipped with motor on the aspiration, by aspiration and motor, the liquid organic solvent that accumulator tank reclaims is delivered in the accumulator tank.

Aforesaid organic solvent retracting device, a group of above fan cooler and frozen water cooler wherein is connected in parallel between accumulator tank and the evaporator tank.

Aforesaid organic solvent retracting device, wherein the total length of spiral pipeline is more than 15 meters.

The beneficial effects of the utility model are that it adopts two stage ways of recycling of fan for cooling, frozen water cooling, the load of reduction frozen water cooler, and,, the gaseous state organic solvent is fully collided in pipeline with spiral pipeline at the frozen water cooling stage, increase contact, and then improve the rate of recovery; The liquid organic solvent of its recovery is through the hydrone of institute's cracking in the organic solvent recovery of molecular sieve (Zeolite) absorption, to improve the purity that reclaims solvent.

Description of drawings

Below in conjunction with drawings and Examples the utility model is further specified.

Fig. 1 is that existing straight pipe type cooler construction is cutd open and shown schematic diagram.

Fig. 2 is that existing bent-tube boiler cooler construction is cutd open and shown schematic diagram.

Fig. 3 is the utility model embodiment schematic appearance.

Fig. 4 is the utility model retracting device structural representation.

Fig. 5 is the utility model frozen water cooler construction schematic diagram.

Fig. 6 is that I-I section structure shown in Figure 5 cuts open and shows schematic diagram.

Number in the figure explanation: 1 housing, 11 control panels, 2 evaporator tanks, 21 storage tanks, 22 organic solvents, 23 carrier pipes, 24 water liquid heaters, 25 heaters, 26 exhaust pipes, 27 suction motor, 28 safety valves, 29 pipelines, the V1 control valve, 3 fan coolers, 31 fans, 32 cooling tubes, 4 first recovery tubes, 41 first molecular sieves, the V2 control valve, 5 accumulator tanks, 51 exhaust pipes, 52 aspiration, 53 motors, 6 frozen water coolers, 61 spiral pipelines, 7 second recovery tubes, 71 second molecular sieves, the V3 control valve, the V4 control valve, 72 exhaust pipes, 73 waste gas filters, 8 cooling water supply units, 81 refrigerators, 82 cold rinse banks, 83 motors, 84 cool-heat-exchangers, 9 accumulator tanks.

The specific embodiment

Consult Fig. 3, shown in Figure 4, the utility model organic solvent retracting device, it comprises housing 1, evaporator tank 2, fan cooler 3, first recovery tube 4, frozen water cooler 6, second recovery tube 7, chilled(cooling) water supply (CWS) device 8 and accumulator tank 5 and accumulator tank 9, and its middle shell 1 one sides are provided with control panel 11; Be equipped with carrier pipe 23 on the evaporator tank 2, carrier pipe 23 is provided with control valve V1, and evaporator tank 2 is used for the liquid organic solvent 22 in the storage tank 21 is flashed to gaseous state, sends through carrier pipe 23 again, and organic solvent 22 is cleaning solvents such as N-Propyl Bromide; Fan cooler 3 comprises fan 31 and cooling tube 32, and cooling tube 32 1 ends are connected with the carrier pipe 23 of evaporator tank 2, and it utilizes 31 pairs of organic solvent gas by cooling tube 32 of fan to carry out the phase I cooling; First recovery tube, 4 one ends are connected with the output of fan cooler 3 cooling tubes 32, and its lower end is connected with accumulator tank 5, and are provided with first molecular sieve 41 and a control valve V2 near the pipeline above the accumulator tank 5; Be provided with spiral pipeline 61 in the frozen water cooler 6, spiral pipeline 61 1 ends are connected with first recovery tube, 4 upper ends, make the residue gaseous state organic solvent intrinsic spiral pipeline 61 of cooler of flowing through, and these spiral pipeline 61 total lengths are more than 15 meters; Second recovery tube, 7 one ends are connected with the output of spiral pipeline 61, its bottom is connected with accumulator tank 5, and near the pipeline above the accumulator tank 5, be provided with second molecular sieve 71 and a control valve V3, its upper end is connected with a control valve V4 and an exhaust pipe 72, and exhaust pipe 72 is provided with waste gas filter 73; Chilled(cooling) water supply (CWS) device 8 is connected with frozen water cooler 6, to supply with frozen water cooler 6 needed circulation frozen water.

The utility model organic solvent retracting device, wherein evaporator tank 2 comprises that the storage tank 21 and of depositing used organic solvent 22 encircles the water liquid heating tank 24 that is located at storage tank 21, water liquid heating tank 24 bottom lands are provided with heater 25, heater 25 by bottom land heats the water liquid in the groove, and then make the organic solvent 22 in the storage tank 21 flash to gaseous state, send by carrier pipe 23 then, in addition, storage tank 21 bottoms are provided with an exhaust pipe 26 and suction motor 27, storage tank 21 tops are provided with safety valve 28, these safety valve 28 tops are connected with exhaust pipe 72 by pipeline 29, discharge through waste gas filter 73; Accumulator tank 5 tops are provided with a discharge pipe 51 that is connected with exhaust pipe 72, accumulator tank 5 one side joints are provided with an aspiration 52, be connected with accumulator tank 9 by this aspiration 52, and be equipped with motor 53 on the aspiration 52, by aspiration 52 and motor 53, the liquid bromine propane solvent that accumulator tank 5 reclaims is delivered in the accumulator tank 9, and this accumulator tank 9 is the equipment of the needed cleaning solvent of accommodating wafer cleaning machine (not shown); Chilled(cooling) water supply (CWS) device 8 comprises a refrigerator 81, cold rinse bank 82, motor 83 and cool-heat-exchanger 84, utilizes it to supply with frozen water cooler 6 needed circulation frozen water, and it is a prior art, so repeat no more.

The utility model organic solvent retracting device, when it uses, at first utilize evaporator tank 2 that the organic solvent 22 that reclaims is heated in the distillation mode, make organic solvent 22 be evaporated to gaseous state, deliver to fan cooler 3 then, organic solvent 22 through cooling tube 32, its temperature can reduce by 35 ℃ by 75 ℃, so make 65% to 70% gas change liquid into, reclaimed and deliver to accumulator tank 5 by first recovery tube, 4 belows, remain 30% to 35% gaseous state organic solvent in addition and then deliver to frozen water cooler 6 by first recovery tube, 4 upper ends, at this moment organic solvent only deposits 30% to 35%, so can reduce the load of frozen water cooler 6 inside, this is one of principal character of the present utility model; As Fig. 5, shown in Figure 6, frozen water cooler 6 inside are provided with spiral pipeline 61, remove like this and length overall can be reduced at the pipeline height more than 15 meters, outside taking up room with minimizing, the more important thing is, can make gaseous molecular constantly upset collision in spiral pipeline 61 of organic solvent 22, organic solvent 22 gas molecules of low-temp low-pressure can fully be contacted, and then condense into water droplet, this length of 15 meters, be the necessary length that behind experiment test repeatedly, obtains, if total length is less than 15 meters, then can't make organic solvent composition condensation by contact, this is the characteristic that organic solvents such as N-Propyl Bromide are different from common solvent, the utility model is after updating, the overall recovery of being added second recovery tube 7 by first recovery tube 4 can reach more than 90%, its repeatedly institute's survey time yield numerical value between 92% to 95%, meet practitioner desired 85% the rate of recovery, and reduce the power consumption of refrigeration system, satisfactory for result after on probation.

On first recovery tube 4 of the present utility model and second recovery tube, 7 belows the pipeline near accumulator tank 5, be respectively equipped with a

molecular sieve

41,71, molecular sieve has another name called and is artificial zeolite (Zeolite), its main component is a silicon, the crystallization that aluminium dioxide and metal ion are formed, the hole (pore) that has fixed size in each molecular crystalline, can adsorb the molecule littler than hole, the molecule that eliminating is bigger than hole, utilize molecular sieve to have the performance of efficient absorption, the moisture of institute's cracking removes in organic solvents such as N-Propyl Bromide can being reclaimed, therefore the organic solvents such as N-Propyl Bromide that reclaimed of accumulator tank 5 have higher purity.

Consult shown in Figure 4 again, fan cooler 3 of the present utility model and frozen water cooler 6 are that series connection is used, when if the amount of the gaseous bromine propane that evaporator tank 2 is evaporated is bigger, can be in parallel again between evaporator tank 2 and the accumulator tank 5 one group of above fan cooler 3 ' and frozen water cooler 6 ', and it is respectively by first recovery tube 4 ' and second recovery tube 7 ', the liquid organic solvent that reclaims is delivered to accumulator tank 5, reach the purpose of an amount of recovery.

Each parts of the present utility model and pipeline are to be captured in body shown in Figure 31 housing, and utilize the unlatching of control panel 11 each parts of control and pipeline.

Consult shown in Figure 4; evaporator tank 2 of the present utility model, accumulator tank 5 and second recovery tube 7 are equipped with the pipeline that is connected with exhaust pipe 72; discharging again after waste gas can being filtered through waste gas filter 73; described waste gas filter 73 is activated carbon or other equivalent filtering materials; make the gas of discharging reduce peculiar smell, reach the effect of safety and protection environment.

The above, it only is preferred embodiment of the present utility model, be not that the utility model is done any pro forma restriction, every foundation technical spirit of the present utility model all still belongs in the scope of technical solutions of the utility model any simple modification, equivalent variations and modification that above embodiment did.

Claims

1, a kind of organic solvent retracting device, it is characterized in that, comprise housing, evaporator tank, fan cooler, first recovery tube, frozen water cooler, second recovery tube, chilled(cooling) water supply (CWS) device and accumulator tank and accumulator tank, wherein evaporator tank, fan cooler, first recovery tube, frozen water cooler, second recovery tube and chilled(cooling) water supply (CWS) device are located in the housing, and this housing one side is provided with control panel; Be equipped with carrier pipe on the evaporator tank, carrier pipe is provided with control valve; Fan cooler comprises fan and cooling tube, and cooling tube one end is connected with the carrier pipe of evaporator tank; First recovery tube, one end is connected with the output of fan cooler cooling tube, and its lower end is connected with accumulator tank, and is provided with first molecular sieve and a control valve near the pipeline above the accumulator tank; Be provided with the spiral pipeline in the frozen water cooler, spiral pipeline one end is connected with the first recovery tube upper end; Second recovery tube, one end is connected with the output of spiral pipeline, its bottom is connected with accumulator tank, and be provided with second molecular sieve and a control valve near the pipeline above the accumulator tank, its upper end is connected with a control valve and an exhaust pipe, and exhaust pipe is provided with waste gas filter; The chilled(cooling) water supply (CWS) device is connected with the frozen water cooler.

2, organic solvent retracting device according to claim 1, it is characterized in that, described evaporator tank comprises that an organic solvent storage tank and a ring are located at the water liquid heating tank of storage tank, water liquid heating tank bottom is provided with heater, the storage tank bottom is provided with exhaust pipe and suction motor, the storage tank top is provided with safety valve, and this safety valve top is connected with exhaust pipe by pipeline.

3, organic solvent retracting device according to claim 1, it is characterized in that described accumulator tank top is provided with a discharge pipe that is connected with exhaust pipe, accumulator tank one side joint is provided with an aspiration, be connected with accumulator tank by this aspiration, and be equipped with motor on the aspiration.

4, organic solvent retracting device according to claim 1 is characterized in that, a group of above fan cooler and frozen water cooler again is connected in parallel between described accumulator tank and the evaporator tank.

5, organic solvent retracting device according to claim 1 is characterized in that, described spiral pipeline total length is more than 15 meters.