CN2566298Y - Electrooptical modulator - Google Patents
Electrooptical modulator Download PDFInfo
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- CN2566298Y CN2566298Y CN 02232757 CN02232757U CN2566298Y CN 2566298 Y CN2566298 Y CN 2566298Y CN 02232757 CN02232757 CN 02232757 CN 02232757 U CN02232757 U CN 02232757U CN 2566298 Y CN2566298 Y CN 2566298Y
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Abstract
The utility model relates to a high-speed lithium-niobate electro-optical modulator with an electrode structure, which comprises a multilayer inner-medium replacing type electrode (1), an optical waveguide (2) and an underlay (3), wherein, the multilayer inner-medium replacing type electrode (1) is formed by that one or a plurality of unit inner-medium replacing type electrodes are combined in a horizontal direction and/or a vertical direction, and each unit inner-medium replacing type electrode is composed of a metal frame (4) and a medium (5). The structure of the utility model can provide a low-loss microwave and traveling-wave electrode, can also easily realize the speed matching of microwaves and light waves, and simultaneously, provides an impedance matched with a driving source, so electro-optic modulation at a high speed can be realized. The high-speed modulator can be used in the technical field of optical communication, optical fiber sensing, precise instrument, etc.
Description
Technical field
The utility model relates to a kind of electrooptic modulator, more specifically, relates to a kind of electrode structure high speed lithium niobate electrooptic modulator.It mainly comprises the novel multi-layer traveling wave electrode, optical waveguide and lithium niobate electric light backing material.The novel multi-layer electrode is made up of metal and dielectric material.
Background technology
Electrooptic modulator is widely used in fields such as optical communication, Fibre Optical Sensor and exact instrument.The basic demand of high-speed row wave mode electrooptic modulator is:
1. the microwave equivalent refractive index of traveling wave electrode will equate with the light wave refractive index, in the hope of reaching the speeds match of electric wave and light wave;
2. the lossy microwave of traveling wave electrode must be as far as possible little, in the hope of improving modulation band-width;
3. modulator input impedance is as far as possible near 50, in the hope of with the drive source impedance matching, thereby reduce driving power;
4. the half-wave voltage of modulator is low, to improve modulation band-width and to reduce driving power.
But these requirements usually are contradiction, adopt the long electrode structure as reducing half-wave voltage, and long electrode structure lossy microwave are big, thereby have limited modulation band-width.
The normal method that adopts of high-speed modulator is thick electrode structure or ridged waveguide structure in the world.The former thickness of electrode reaches 30um, and width generally adopts electro-plating method to make less than 10um, and technology difficulty is higher; The latter needs special etching apparatus to make ridge waveguide, has increased cost.
Summary of the invention
The electrode structure high speed lithium niobate electrooptic modulator that the utility model proposed can provide the low-loss microwave traveling wave electrode, can realize microwave and light wave rate-matched easily, and the impedance matching with drive source is provided simultaneously, therefore can realize electrooptical modulation at a high speed.
According to the utility model, a kind of electrode structure high speed lithium niobate electrooptic modulator is provided, comprise that medium substitutes the formula electrode in the multilayer, optical waveguide, and substrate, it is characterized in that the alternative formula electrode of medium is combined in level and/or vertical direction by the alternative formula electrode of medium in the single or multiple unit in the described multilayer, the alternative formula electrode of medium is made of metal edge frame and medium in the described unit.
According to an embodiment of the present utility model, electrode substitutes the formula combination of electrodes by medium in a plurality of unit and forms, and the metal edge frame of the alternative formula electrode of medium can adopt identical materials in each unit, also can adopt different materials; Medium can adopt identical materials, also can adopt different materials.In each unit medium substitute the formula electrode metal edge frame width with highly can identical respectively/difference, the width of medium with highly also can identical respectively/difference.
According to the utility model, the width of metal edge frame is generally less than 1 μ m; The thickness of metal edge frame is generally also less than 1 μ m.
According to the utility model, the material of medium can be vacuum or arbitrary gas and combination thereof.
Description of drawings
Below in conjunction with accompanying drawing, describe the utility model in detail, wherein:
Fig. 1 is the synoptic diagram of electroplax structure high-speed lithium niobate electrooptic modulator of the present utility model;
Fig. 2 is the structural representation of multi-layered electrode unit.
Embodiment
Basic thought of the present utility model is the skin effect that utilizes under the high frequency.Because under the high frequency, electric current only is confined to the very thin one deck in metal surface---in the skin layer that becomes, the thickness of this layer reduces with the rising of frequency, and is as shown in table 1, and to gold electrode, when the 40GHz frequency, the skin layer thickness that becomes is less than 0.4um.Therefore lossy microwave increases greatly.It is actual that what work is the girth rather than the electrode area size of electrode.
Referring to accompanying drawing, electrode structure high speed lithium niobate electrooptic modulator of the present utility model comprises that mainly medium substitutes formula electrode 1, optical waveguide 2, and substrate 3 in the multilayer.In the multilayer medium substitute formula electrode 1 by medium in the single or multiple unit substitute the formula electrode level or (with) vertical direction combines.Medium substitutes formula electrode package metal edge frame 4 and medium 5 formations in the unit.
If electrode 1 substitutes the formula combination of electrodes by medium in a plurality of unit and forms, then the metal edge frame 4 of the alternative formula electrode of medium can adopt different materials in each unit, and medium 5 also can adopt different materials.If electrode 1 substitutes the formula combination of electrodes by medium in a plurality of unit and forms, then the metal edge frame 4 width W e-Wd of the alternative formula electrode of medium can be different with height H e-Hd in each unit, and the width W d of medium 5 and height H d also can be different.
Adopt the utility model, the width W e-Wd of metal edge frame and thickness He-Hd can design and become below the skin thickness.If only adopt one deck electrode, as long as electrode height He reaches the height of normal thick electrode, its lossy microwave does not have significant change; If adopt sandwich construction, and the medium very thin (as less than 1um) in every layer of electrode, then with the same height of normal thick electrode under owing to comprise the very thin electrode of multilayer, the total girth of its electrode will be several times of ordinary electrode, therefore can reduce lossy microwave greatly.As shown in Figure 2, the width of metal edge frame 4 is We-Wd, and it is generally less than 1 μ m; The thickness of metal edge frame 4 is He-Hd, and it is generally also less than 1 μ m.
The skin depth δ of gold electrode under the table 1 different frequency f
| F(GHz) | 1 | 10 | 20 | 40 | 50 | 100 |
| δ(um) | 2.49 | 0.786 | 0.558 | 0.393 | 0.352 | 0.249 |
For multi-layer electrode structure, can adopt different media in every layer, even air, therefore can to reach impedance and speeds match, improve bandwidth of a device by changing impedance and the equivalent microwave refractometer rate that medium in the different electrode layers improves entire electrode.In the utility model, medium 5 can be vacuum or arbitrary gas and combination.Because the major part of electrode is substituted by medium, and the electrode manufacturing materials generally adopts noble metal Au (gold), therefore can reduce device cost greatly.
In addition,, therefore reduced the difficulty of electroplating technology, even do not needed to electroplate owing to do not need to electroplate very thick electrode.
This structure of the present utility model can provide loss microwave traveling wave electrode, can realize microwave and light wave rate-matched easily, and the impedance matching with drive source is provided simultaneously, therefore can realize electrooptical modulation at a high speed.This high-speed modulator can be widely used in fields such as optical communication, Fibre Optical Sensor and exact instrument.
Claims (5)
1. electrode structure high speed lithium niobate electrooptic modulator, comprise that medium substitutes formula electrode (1) in the multilayer, optical waveguide (2), and substrate (3), it is characterized in that, the alternative formula electrode (1) of medium is combined in level and/or vertical direction by the alternative formula electrode of medium in the single or multiple unit in the described multilayer, and medium substitutes the formula electrode by metal edge frame (4) and medium (5) formation in the described unit.
2. modulator according to claim 1, it is characterized in that, electrode (1) substitutes the formula combination of electrodes by medium in a plurality of unit and forms, and the metal edge frame (4) of the alternative formula electrode of medium can adopt identical/different material in each unit, and medium (5) also can adopt identical/different material.
3. modulator according to claim 1 and 2 is characterized in that, the width of metal edge frame (4) is generally less than 1 μ m; The thickness of metal edge frame 4 is generally also less than 1 μ m.
4. modulator according to claim 1 and 2 is characterized in that, in each unit medium substitute the formula electrode metal edge frame (4) width with highly can identical respectively/difference, the width of medium (5) with highly also can identical respectively/difference.
5. modulator according to claim 1 and 2 is characterized in that, medium (5) can be vacuum or arbitrary gas and combination thereof.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02232757 CN2566298Y (en) | 2002-04-22 | 2002-04-22 | Electrooptical modulator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02232757 CN2566298Y (en) | 2002-04-22 | 2002-04-22 | Electrooptical modulator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2566298Y true CN2566298Y (en) | 2003-08-13 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 02232757 Expired - Fee Related CN2566298Y (en) | 2002-04-22 | 2002-04-22 | Electrooptical modulator |
Country Status (1)
| Country | Link |
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| CN (1) | CN2566298Y (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101238405B (en) * | 2005-07-07 | 2011-01-12 | 安立股份有限公司 | Optical modulator |
| CN102043260B (en) * | 2005-11-02 | 2013-10-16 | 住友大阪水泥股份有限公司 | Optical modulator |
| CN104516127A (en) * | 2014-12-30 | 2015-04-15 | 武汉邮电科学研究院 | Integrated device and traveling-wave electrode impedance matching method thereof |
| CN109844472A (en) * | 2016-07-15 | 2019-06-04 | 米科斯工程有限公司 | For executing the waveguide spectrometer of integrated interference pattern scanning |
-
2002
- 2002-04-22 CN CN 02232757 patent/CN2566298Y/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101238405B (en) * | 2005-07-07 | 2011-01-12 | 安立股份有限公司 | Optical modulator |
| CN102043260B (en) * | 2005-11-02 | 2013-10-16 | 住友大阪水泥股份有限公司 | Optical modulator |
| CN104516127A (en) * | 2014-12-30 | 2015-04-15 | 武汉邮电科学研究院 | Integrated device and traveling-wave electrode impedance matching method thereof |
| CN109844472A (en) * | 2016-07-15 | 2019-06-04 | 米科斯工程有限公司 | For executing the waveguide spectrometer of integrated interference pattern scanning |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |