CN2520609Y

CN2520609Y - HF high-voltage pulse inverter

Info

Publication number: CN2520609Y
Application number: CN 01279838
Authority: CN
Inventors: 樊印海
Original assignee: Individual
Current assignee: Individual
Priority date: 2001-12-31
Filing date: 2001-12-31
Publication date: 2002-11-13
Anticipated expiration: 2011-12-31

Abstract

A high-frequency high-voltage contravariant pulse power comprises a voltage-regulating circuit which can control silicon rectifying, a capacity filtering device, a contravariant circuit, a booster converter, a main machine working power, a pulse generator, and a driving circuit, which is characterized in that the contravariant circuit is a contravariant full bridge circuit which uses insulating fence bipolar transistor IGB as a contravariant component, and a current detecting circuit for detecting working and providing over-current protection is arranged between the output terminal of the capacity filtering device and the contravariant full bridge circuit. The utility model has the advantages that due to adopting IGBT as the contravariant component, working frequency reaches more 50 KH, and the leading edge time of the pulse is shortened to microsecond level.

Description

The high-frequency and high-voltage inversion pulse power

The utility model relates to power supply, more particularly relates to a kind of high-frequency and high-voltage inversion pulse power.

Inversion element great majority in the inverter bridge circuit of the existing high-frequency and high-voltage inversion pulse power adopt controllable silicon, and its reverse frequency only reaches KHZ, and controllable silicon is not the full-control type element.

The purpose of this utility model provides a kind of frequency up to the high-frequency and high-voltage inversion pulse power more than the 50KHZ.

The purpose of this utility model is achieved in that a kind of high-frequency and high-voltage inversion pulse power; it comprises: three-phase full-controlled bridge silicon controlled rectifier regulating circuit and the pulsating direct current of its output is become the capacitive filter of smooth direct current; with the dc inversion of capacitive filter output is the inverter circuit of impulse wave; the step-up transformer that the pulse voltage that inverter circuit is exported raises; and be the power supply of this machine work and control inverter circuit output pulse frequency pulse generator and drive circuit that the pulse signal of pulse generator output is carried out power amplification; it is characterized in that: said inverter circuit is the inversion full-bridge circuit that is made of as the inversion element insulated gate bipolar transistor IGBT, is provided with the current detection circuit that operating current is detected and provides overcurrent protection between said capacitive filter output and inversion full-bridge circuit.

Good effect of the present utility model:

1, owing to adopt novel insulated gate bipolar transistor IGBT as the inversion element, operating frequency is up to more than the 50KH, can be used widely in glow discharge nitriding and relevant industry that requires high-frequency and high-voltage and scientific research process.

2, because the raising of operating frequency, leading-edge pulse time is short to the microsecond level, can improve the efficient in the nonequilibrium plasma course of work.

Fig. 1 is a block diagram of the present utility model.

Fig. 2 is a schematic diagram of the present utility model.

Below in conjunction with accompanying drawing the utility model is described in further details as shown in Figure 1, the utility model is made up of 8 parts.Silicon controlled rectifier regulating circuit 1 is that the employing three-phase full-controlled bridge is the 380V50HZ rectification that 0～500V adjustable voltage is exported according to need of work at 0～50KV complete machine.Capacitive filter 2 becomes level and smooth direct current to Rectified alternating current.By the inversion full-bridge circuit 3 that two insulated gate bipolar transistor IGBTs are formed, be the inversion of 0～500V direct voltage the impulse wave of (10～35) KHZ.Step-up transformer 4 boosts to 0～50KV to the pulse voltage of the different frequency of IGBT inverter bridge output.Complete machine power supply 5 is for the utility model complete machine provides voltage.Pulse generator 6 produces the control impuls to the different frequency of insulated gate bipolar transistor IGBT.Current detection circuit 7.Monitor and provide the overcurrent protection signal to operating current.Drive circuit 8 amplifies 6 pulses that produced and electrical isolation, removes to drive insulated gate bipolar transistor IGBT then.

Among Fig. 2, rectifier bridge B3 is the 15V AC rectification direct current, supplies to supply with drive circuit U1 through regulator block U10 output 15V burning voltage again.Rectifier bridge B1, B2 are identical with the foregoing circuit principle.B2 provides 15V burning voltage for drive circuit U2.B3 provides 15V burning voltage for chip U6.Chip U6 and related resistors, electric capacity are formed pulse generator, and it produces the 15V pulse of (10～35) KHZ, arrives U1, U2 drive circuit then.The output pulses that U1, U2 produce drives IGBT pipe T1, T2, is elevated to 50KV by (10～35) KHZ pulse that they produced through step-up transformer 2B1.

U3:A, U4:A form overcurrent detection and protective circuit with U4:B and resistance, the electric capacity relevant with them.Resistance R 34, R35 are carried out dividing potential drop to detecting the voltage of electric current on R20, compare at operational amplifier U3:A input, if electric current greater than set point, positive pulse of U3:A output then, this positive pulse is delivered to trigger U4:A by diode D5.U4:A forms a binary counter with U4:B and resistance, the electric capacity relevant with them.When 2 overcurrent pulses, counter status is 10, and promptly the U4:B state is 1.At this moment optocoupler U5 conducting is sent positive electricity by CZ4 and is pressed onto triggering piece square 5, turn-offs the controllable silicon rectifying bridge of being made up of S1～S6, and making its output voltage is zero, thereby has protected whole power supply.

Manage T1, T2 and diode 2D1,2D2 and transformer 2B1 by IGBT and form inverter circuit.When T1, T2 conducting, produce a pulse 2B1 level, it is elementary that the pulse that inversion produced is added in step-up transformer 2B1, and level produces the 50KV pulse secondarily.When they turn-offed, electric current was by 2B1's ^*End flows out, and, through the elementary left end of electric capacity 2D1 to transformer 2B1, gives the power supply feedback energy, and has improved power work efficient from power cathode to positive source through 2D2.And when back-emf is lower than supply voltage, the fraction electric energy will be released on resistance 2R9.

Claims

1. high-frequency and high-voltage inversion pulse power; it comprises: three-phase full-controlled bridge silicon controlled rectifier regulating circuit and the pulsating direct current of its output is become the capacitive filter of smooth direct current; with the dc inversion of capacitive filter output is the inverter circuit of impulse wave; the step-up transformer that the pulse voltage that inverter circuit is exported raises; and be the power supply of this machine work and control inverter circuit output pulse frequency pulse generator and drive circuit that the pulse signal of pulse generator output is carried out power amplification; it is characterized in that: said inverter circuit is the inversion full-bridge circuit that is made of as the inversion element insulated gate bipolar transistor IGBT, is provided with the current detection circuit that operating current is detected and provides overcurrent protection between said capacitive filter output and inversion full-bridge circuit.