CN2512788Y - Screw thread jointing type hard and fragile alloy target - Google Patents

Screw thread jointing type hard and fragile alloy target Download PDF

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Publication number
CN2512788Y
CN2512788Y CN 01257291 CN01257291U CN2512788Y CN 2512788 Y CN2512788 Y CN 2512788Y CN 01257291 CN01257291 CN 01257291 CN 01257291 U CN01257291 U CN 01257291U CN 2512788 Y CN2512788 Y CN 2512788Y
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China
Prior art keywords
alloy target
target
good
fragile alloy
pure metal
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Expired - Fee Related
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CN 01257291
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Chinese (zh)
Inventor
陈力学
顾雨青
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Individual
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Individual
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Priority to CN 01257291 priority Critical patent/CN2512788Y/en
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Publication of CN2512788Y publication Critical patent/CN2512788Y/en
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Abstract

The utility model relates to a screw thread jointing type hard and fragile alloy target, consisting of a fragile alloy target base and a pure metal hydroelectric power connector which are connected integrally by a bonding layer. The utility model is characterized in that the target has a perfect service performance; the pure metal hydroelectric power connector can be processed with fine screws, so as to make the connector closely contact with the connection of the water jacket to have a good electric conductivity, heat transmission, radiating and airproofing performances; and the fragile alloy target base can guarantee the cladding has a good functions of high hardness, hard wearing, corrosion resistance and resistance to high temperature oxidation, new advancement of the PVD industries can be greatly promoted, the plating is reduced and even to be replaced, which is good for environment protection. The development of the relative industries of cutters, moulds, and internal combustion engine accessories are accelerated.

Description

The hard crisp alloys target of thread connection formula
Technical field: the utility model relates to a kind of process for treating surface articles for use, particularly vacuum ion membrane plating technique articles.
Prior art: the target that vacuum ion membrane plating industry prior art is used, Ti, Ni, Cr pure metal target and TiAl, TiCr, NiCrAlY alloys target two classes are arranged, but carry out the coating that vacuum ion membrane plating obtained with the alloy palladium, much higher at aspect of performances such as hardness, wear resistance, corrosion-resistant, resistance to high temperature oxidation more than the plated film of pure metal target.Therefore adopting alloys target is the development trend of vacuum ion membrane plating industry.
But existing alloys target, its material are all hard crisp metallic compound or the very low alloy of plasticity.The metal very poor in processability.
Yet, the target that the vacuum ion plating membrane technique adopts, but require the good metal processing characteristics, this is because an end of target places in the high coating chamber of good seal, vacuum tightness, the other end of target must link with water-chilling plant and power transmission device nationality water jacket again, therefore, require this end of target and the connection combination of water jacket must guarantee that conduction is good, good and good seal conduct heat.Usually, nested connection and thread connection dual mode are adopted in the connection of target and water jacket, but because the influence of expanding with heat and contract with cold, the conduction of thread connection, heat transfer and sealing property are more than nested connection well.And the target end machining screw that the thread connection requirement connects with water jacket, existing alloys target is because material is crisp firmly, be difficult to processing, even target end machining screw, also quite coarse, normal defectiveness, cause alloys target and water jacket to connect in conjunction with bad, have a strong impact on the use properties of alloys target: as cause heat transfer, conduct electricity bad, it is bad that target is loose, temperature raises, resistance strengthens, and it is bad to dispel the heat, resistance increases can further increase heating again, so each other influence, vicious cycle, steady lonely electric current strengthens in the time of will causing plated film, the alligatoring of coatings structure, the nanometer composition reduces, the hardness of coatings, wear-resisting, resistance to high temperature oxidation, over-all properties such as corrosion-resistant reduces, in addition, the local casting flaw of target causes sealing bad, even produce and to leak, cause destroying the plated film vacuum.Above-mentioned defective is to hinder a great problem that existing vacuum ion plating membrane technique is used alloys target.
Summary of the invention: the purpose of this utility model is to design a kind of alloys target, its structure can have the good metal processibility, make it with water jacket can nationality thread connection combine well, guaranteed again simultaneously alloys target use after the coating of acquisition can keep premium propertiess such as hardness height, wear resistance are good, corrosion-resistant, resistance to high temperature oxidation.
Technical solution of the present utility model is the hard crisp alloys target of a kind of thread connection formula, and it is to be connected to be combined into one with pure metal water power coupling head nationality tack coat by hard crisp alloys target base to constitute.
Hard crisp alloy material as the target base has TiAl, TICr, NiCrAlY etc.Pure metal material as the water power coupling head has Cu, Al, Ti, Ni, Nb etc.Metallic substance as tack coat has Al, Cu etc., and its fusing point is lower than the fusing point of alloys target sill and water power coupling head pure metal.Tack coat at high temperature melts coupling head of pure metal water power and alloys target base bonding in aggregates.
Description of drawings:
Accompanying drawing 1 is that the hard crisp alloys target structure of thread connection formula is cutd open and shown synoptic diagram
Accompanying drawing 2 is the hard crisp alloys target structural representations of thread connection formula
Embodiment: the utility model further specifies as follows in conjunction with specific embodiments referring to accompanying drawing.
Embodiment 1, is a kind of thread connection formula titanium-aluminum alloy target, and it is to connect the formation that is combined into one by TiAl alloys target base [3] with water power coupling head [1] the nationality Al tack coat [2] of pure metal Ti.TiAl alloys target base [3] is the cylinder cake of a thick 40mm of diameter phi 90mm, the pit that a dark 2mm of diameter phi 70mm is arranged on one flank side surface, there is the round pool of a dark 2mm of diameter phi 60mm center, the other side side, the circular aluminium flake that embeds the thick 0.5mm of diameter phi 60mm in the round pool is made tack coat [2], water power coupling head [1] is the cylinder cake of a thick 12mm of diameter phi 60mm, the center aligns and is adjacent to adhered layer [2] placement, place vacuum to be heated to 700 ℃, be incubated half an hour, take out the cooling back, the three has bondd and has become one, and one section outside screw of processing in the water power coupling head promptly becomes thread connection formula titanium-aluminum alloy target then.
Embodiment 2, are a kind of thread connection formula Ni base alloys target, and it is to connect be combined into by Ni base alloys target base with pure metal Ni water power coupling head nationality Cu tack coat.Target base, water power coupling head, tack coat three's shape, size are corresponding identical with embodiment 1, but take out cooling after in vacuum oven, being heated to 1100 ℃ of insulation half an hour, the three bondd connect in aggregates, one section outside screw of processing in its water power coupling head promptly becomes thread connection formula Ni base alloys target then.
If the water jacket termination that the hard crisp alloys target of thread connection formula connects is an outside screw, then there are a shrinkage pool that sinks to matching, machining internal thread on the internal diameter of hole in the water power coupling head outer end of the hard crisp alloys target of thread connection formula.
The utility model has the advantages that: the hard crisp alloys target of thread connection type is because employing target base and water power connector are bonding multiple Close structure, so that it can keep the coating hardness height, wear-resisting, anti-of hard crisp alloy TiAl, TiCr, NiCrAlY target The burn into resistance to high temperature oxidation is treated premium properties, can guarantee that again it and water jacket nationality thread connection are tight, have good conduction, Heat transfer, cooling function, and because simple metal water power connector can adopt the simple metal forging material, can thoroughly shut out Because the percolating water that the local casting flaw of target may cause destroys the hidden danger of plated film vacuum, guarantee hard crisp alloys target usefulness absolutely Reliability in the vacuum ion plating membrane technology. The utility model can promote free of contamination vacuum ion membrane plating industry greatly Flourishing. It can reduce even replace plating, the favorable environment protection. To promote simultaneously cutter, mould, internal combustion engine to join The development of the relevant industries such as part.

Claims (2)

1, the hard crisp alloys target of a kind of thread connection formula is characterized in that it is to be connected to be combined into one with pure metal water power connecting joint nationality tack coat by hard crisp alloys target base to constitute.
2, the hard crisp alloys target of thread connection formula according to claim 1 is characterized in that outside screw or internal thread are arranged on the water power connecting joint.
CN 01257291 2001-11-06 2001-11-06 Screw thread jointing type hard and fragile alloy target Expired - Fee Related CN2512788Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 01257291 CN2512788Y (en) 2001-11-06 2001-11-06 Screw thread jointing type hard and fragile alloy target

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 01257291 CN2512788Y (en) 2001-11-06 2001-11-06 Screw thread jointing type hard and fragile alloy target

Publications (1)

Publication Number Publication Date
CN2512788Y true CN2512788Y (en) 2002-09-25

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN 01257291 Expired - Fee Related CN2512788Y (en) 2001-11-06 2001-11-06 Screw thread jointing type hard and fragile alloy target

Country Status (1)

Country Link
CN (1) CN2512788Y (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104087901A (en) * 2014-07-25 2014-10-08 浙江博海金属制品科技有限公司 Target connector for vacuum ion titanizing furnace

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104087901A (en) * 2014-07-25 2014-10-08 浙江博海金属制品科技有限公司 Target connector for vacuum ion titanizing furnace

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