CN2504624Y - Electromagnetic drive type micro-stretching device - Google Patents
Electromagnetic drive type micro-stretching device Download PDFInfo
- Publication number
- CN2504624Y CN2504624Y CN 01263043 CN01263043U CN2504624Y CN 2504624 Y CN2504624 Y CN 2504624Y CN 01263043 CN01263043 CN 01263043 CN 01263043 U CN01263043 U CN 01263043U CN 2504624 Y CN2504624 Y CN 2504624Y
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- sample stage
- electromagnetic drive
- stretching
- drive type
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- 238000006073 displacement reaction Methods 0.000 claims abstract description 8
- 239000013307 optical fiber Substances 0.000 claims abstract description 5
- 230000003068 static effect Effects 0.000 abstract description 4
- 238000005259 measurement Methods 0.000 abstract description 3
- 239000004035 construction material Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000004377 microelectronic Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000005476 size effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
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- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
Abstract
The utility model relates to a measure machinery, refer in particular to an electromagnetic drive formula micro-stretching device, constitute by organism, tensile pole, sample platform, tensile pole upper portion is equipped with two leaf springs, is equipped with two relative permanent magnet of magnetic pole of cover on tensile pole between the two, around there being the coil on the tensile pole between two permanent magnet. The sample stage is composed of a movable sample stage and a static sample stage which are connected with one end of a stretching rod, an optical fiber displacement sensor is arranged on the static sample stage, a micrometer caliper is arranged at one end of the static sample stage, and a limiting block is arranged on the stretching rod. It has excellent linearity, low hysteresis, no friction and direct measurement and control.
Description
One, technical field
The utility model relates to measurement mechanical, refers in particular to a kind of electromagnetic drive type micro drafting device.
Two, background technology
Along with the microelectronic component of microminaturization enters mechanical field, make microelectronics and machinery further integrated.The bulk silicon process of employing standard can manufacture and design integrated, complicated micromachine robot system.On chip, produced various MEMS (micro electro mechanical system) (MEMS) device at present, but " failure mechanism of MEMS device and how to set up failure model " this problem is still failed effectively to solve.Research to the long-term reliability of various MEMS devices also needs a lot about the fatigue of little member and the basic data of fracture, adopt usual way to be difficult to obtain the exact value of little construction material characteristic, this just needs to test more accurately and evaluate the device of little construction material mechanical characteristic.
For overcoming the above problems, can accurately measure the elastic modulus of polysilicon and the pure extension method of Poisson's Ratio in recent years and be developed.In the micro drafting device that document is reported, Piezoelectric Driving is arranged, hydraulic-driven and static driven.The major defect of these devices is: the friction of moving jig can't be eliminated; Not coaxial displacement measurement can bring error; The reference spring rate of ergometry exists creep, hysteresis and non-linear greatly and in the Piezoelectric Driving.
Three, summary of the invention
The purpose of this utility model is that a kind of good linearity that has will be provided, and low hysteresis does not have friction, can carry out directly actuated electromagnetic drive type micro drafting device.
The purpose of this utility model is achieved in that
The electromagnetic drive type micro drafting device, form by body, stretching bar, sample stage, the bar top that it is characterized in that stretching is provided with two leaf springs, is provided with two blocks of permanent magnets that magnetic pole is relative that are enclosed within on the stretching bar between the two, is wound with coil on the stretching bar between two blocks of permanent magnets.
Sample stage is made up of the moving sample stage and the quiet sample stage that link to each other with an end of stretching bar, and quiet sample stage is provided with optical fibre displacement sensor, and an end of quiet sample stage is provided with micrometer caliper, and the stretching bar is provided with limited block.
The course of work for the electromagnetic field that produces by coil to the relative permanent magnet effect of two magnetic poles on the stretching bar that passes coil, produce pulling force, thereby place on the moving stretching bar that supports by two leaf springs to an end, the other end places the sample of silent flatform to carry out axial tension, adopts the fiber sensor measuring displacement then.
Advantage of the present utility model is to adopt the magnet-coil block of optimization, can obtain acting on the power of magnet and the linear relationship between the electric current, thereby can accurately control easily; Adopt the center of the stretching bar that leaf spring supports to regulate automatically by magnetic force, guarantee that it is positioned at the center, do not contact with object on every side; Moving stretching bar is retrained by two leaf springs, can guarantee that it produces motion vertically; Magnet in the coil has very little inertia with respect to mechanism, can realize automatic centering vertically at drop-down boom of magneticaction and magnet assemblies, thereby eliminates along horizontal power.
A stop means is set on the pull bar, produces plastic yield owing to pulling force is excessive to avoid leaf spring; One end of quiet sample stage is equipped with micrometer caliper, is used for adjusting.
The principle of work of utility model is provided by following examples and accompanying drawing thereof.
Three, description of drawings
Fig. 1 is the utility model structural representation.
Four, embodiment
Describe the concrete structure and the course of work in detail in conjunction with Fig. 1 according to the embodiment that the utility model proposes.
Whole device branch: the electromagnetism-solenoid force drive part that produces pulling force; The sample stage of fixed sample; Necessary adjustment stop means and body.Electromagnetism-solenoid force drive part is made up of stretching bar 1, leaf spring 2, coil 7, permanent magnet 3.Stretching bar 1 is by 2 constraints of two leaf springs, and leaf spring 2 is fixed on the body 4, and two blocks of Sa-Co permanent magnets 3 that magnetic pole is relative are arranged on the stretching bar.The center of each magnet lays respectively at two ends of the coil 7 in the stretcher.Sample stage is made up of with quiet sample stage 11 two parts moving sample stage 8, and an end of sample 9 places on the moving sample stage 8 of removable pull bar 1 end of being supported by leaf spring 2, and the other end places on the quiet sample stage 11.The magnetic field that coil 7 excitations of energising back produce applies pulling force, stretching sample 9 to 3 effects of the magnet on the pull bar 1.The displacement of sample 9 adopts optical fibre displacement sensor 10 to measure.Under constant temperature, its measuring accuracy is 50nm.Adjusting stop means is made up of limited block 6, micrometer caliper 12.On stretching bar 1, be provided with limited block 6, backing pin 5 has been installed on body 4,, avoid leaf spring 2 to produce plastic yield owing to pulling force is excessive to play spacing braking action.One end of quiet sample stage is equipped with micrometer caliper 12, is used to adjust to the active section of optical fibre displacement sensor 10.
The coil parameter that this device adopts after optimizing is: internal coil diameter 0.008m, the external diameter of coil is a times of internal diameter, the length of coil equates with external diameter, the pile factor of coil is 0.77, the number of turn of coil is 12800, and the power that acts on magnet that obtains and the linear relationship of electric current are Δ F/ Δ I=0.503 ± 0.01mN/mA.Because the influence of mechanical vibration is bigger, so need this device is placed on the vibrationproof platform when measuring.Utilize this stretching device, can study the influence of electricity, heat and air humidity little construction material mechanical property.During uniform temperature, the change in resistance under the ess-strain condition.Also can study the electricity of little member, the size effect of heat transfer characteristic.
Claims (5)
1, electromagnetic drive type micro drafting device, form by body (4), stretching bar (1), sample stage, bar (1) top that it is characterized in that stretching is provided with two leaf springs (2), be provided with the relative permanent magnet (3) of two magnetic poles that is enclosed within on the stretching bar (1) between the two, on the stretching bar (1) between two blocks of permanent magnets (3), be wound with coil (7).
2, electromagnetic drive type micro drafting device according to claim 1 is characterized in that the moving sample stage (8) that sample stage is linked to each other by the end with stretching bar (1) forms with quiet sample stage (11).
3, electromagnetic drive type micro drafting device according to claim 1 is characterized in that quiet sample stage (11) is provided with optical fibre displacement sensor (10).
4, electromagnetic drive type micro drafting device according to claim 1 is characterized in that an end of quiet sample stage (11) is provided with micrometer caliper (12).
5, electromagnetic drive type micro drafting device according to claim 1, the bar (1) that it is characterized in that stretching is provided with limited block (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01263043 CN2504624Y (en) | 2001-09-29 | 2001-09-29 | Electromagnetic drive type micro-stretching device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01263043 CN2504624Y (en) | 2001-09-29 | 2001-09-29 | Electromagnetic drive type micro-stretching device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2504624Y true CN2504624Y (en) | 2002-08-07 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 01263043 Expired - Fee Related CN2504624Y (en) | 2001-09-29 | 2001-09-29 | Electromagnetic drive type micro-stretching device |
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| CN (1) | CN2504624Y (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100489485C (en) * | 2004-09-24 | 2009-05-20 | 中国科学院力学研究所 | Micromechanics measurer and measuring method |
| CN102001617A (en) * | 2010-09-28 | 2011-04-06 | 清华大学 | Displacement loading device and method for flexible electronic device |
| CN102109436A (en) * | 2010-12-24 | 2011-06-29 | 江苏大学 | Electromagnetic impact dynamic tensile test method and device |
| CN102435520A (en) * | 2011-11-07 | 2012-05-02 | 济南益华摩擦学测试技术有限公司 | High-frequency reciprocating fretting friction and wear tester |
| CN108469379A (en) * | 2018-06-13 | 2018-08-31 | 三峡大学 | A kind of contactless Tensile Strength of Rock test device based on electromagnetic principle |
| CN109297808A (en) * | 2018-11-29 | 2019-02-01 | 西北工业大学 | Creep test device and its fixture based on optical fiber sensing technology |
| CN113833685A (en) * | 2021-11-26 | 2021-12-24 | 北京中科科仪股份有限公司 | Molecular pump spindle collecting amount measuring device and measuring method |
-
2001
- 2001-09-29 CN CN 01263043 patent/CN2504624Y/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100489485C (en) * | 2004-09-24 | 2009-05-20 | 中国科学院力学研究所 | Micromechanics measurer and measuring method |
| CN102001617A (en) * | 2010-09-28 | 2011-04-06 | 清华大学 | Displacement loading device and method for flexible electronic device |
| CN102001617B (en) * | 2010-09-28 | 2012-07-25 | 清华大学 | Displacement loading device and method for flexible electronic device |
| CN102109436A (en) * | 2010-12-24 | 2011-06-29 | 江苏大学 | Electromagnetic impact dynamic tensile test method and device |
| CN102109436B (en) * | 2010-12-24 | 2013-10-23 | 江苏大学 | Electromagnetic impact dynamic tensile test method and device |
| CN102435520A (en) * | 2011-11-07 | 2012-05-02 | 济南益华摩擦学测试技术有限公司 | High-frequency reciprocating fretting friction and wear tester |
| CN108469379A (en) * | 2018-06-13 | 2018-08-31 | 三峡大学 | A kind of contactless Tensile Strength of Rock test device based on electromagnetic principle |
| CN109297808A (en) * | 2018-11-29 | 2019-02-01 | 西北工业大学 | Creep test device and its fixture based on optical fiber sensing technology |
| CN113833685A (en) * | 2021-11-26 | 2021-12-24 | 北京中科科仪股份有限公司 | Molecular pump spindle collecting amount measuring device and measuring method |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |