CN2443366Y - Receiver for scanning electron microscope - Google Patents
Receiver for scanning electron microscope Download PDFInfo
- Publication number
- CN2443366Y CN2443366Y CN 00257222 CN00257222U CN2443366Y CN 2443366 Y CN2443366 Y CN 2443366Y CN 00257222 CN00257222 CN 00257222 CN 00257222 U CN00257222 U CN 00257222U CN 2443366 Y CN2443366 Y CN 2443366Y
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- electron microscope
- scanning electron
- scanning
- cylinder body
- outer cylinder
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- Expired - Lifetime
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Abstract
The utility model relates to a receiver for a backscatter diffraction image, which belongs to an electronic optical instrument and is mainly composed of an electro-optical converter, an X-ray protective device, a camera, a camera control unit, an electron beam scanning control unit and a computer. The utility model is characterized in that the electro-optical converter, the X-ray protective device and the camera are fixedly arranged on a window of a scanning electron microscope by a connecting device; the camera control unit and the electron beam scanning control unit are composed of a gathering card and a scanning card, and inserted in the computer; the camera is connected with the computer by a connection line. The utility model has the advantages that the structure is reasonable, the working range of the electron microscope can be enlarged; the utility model is favorable to the improvement of the existing electron microscope.
Description
The utility model relates to a kind of Electron Back-Scattered Diffraction image received device that is mainly used in scanning electron microscope, belongs to a kind of electronic optical instrument.
Scanning electron microscope is the large-sized analytic instrument that is widely used now, is widely used in various fields such as material science, life science, microelectronics, agricultural, environment, Di Kuang, medical science, public security, is the important means of carrying out microexamination and constituent analysis.The scanning electron microscope electron back scattering diffraction device is crystallography information such as the crystal structure that is used for obtaining bulk sample all size crystal grain, intercrystalline orientation relationship.The range of application of scanning electron microscope has been expanded in the exploitation of this technology and development, makes scanning electron microscope carry out morphology observation and constituent analysis to material, and can carry out the analysis of crystallographic features such as crystal structure, grain orientation to material.Tissue, composition and the orientation of crystalline material are mapped one by one, the composition and the structure of research material organically connected on scanning electron microscope.But because scanning electron microscope electron back scattering diffraction device and corresponding software price costliness, the demestic user is difficult to purchase in a large number and generally uses.
The purpose of this utility model is the receiving trap of a kind of scanning electron microscope of design, and it is rational in infrastructure, can with existing Electronic Speculum connection, receive the Electron Back-Scattered Diffraction image, reduce cost, enlarge the working range of scanning electron microscope, improve the scanning electron microscope work quality.
The receiving trap of the scanning electron microscope that the utility model is designed, mainly by electrical to optical converter, the x ray protection device, video camera, camera control unit, electron beam scanning control module and computing machine constitute, electrical to optical converter, the x ray protection device, it is the window place that spectrometer is reserved that video camera is fixedly installed in scanning electron microscope by coupling arrangement, camera control unit and electron beam scanning control module are made of capture card and scanning card, and be plugged in the main frame, video camera is connected with computer interface by connecting line, and the control signal of computing machine is connected with electronic signal output in the scanning electron microscope by connecting line.
Photoelectric commutator in the receiving trap of the scanning electron microscope that the utility model is designed comprises that back scattering diffraction probe and video screen probe are installed on the video screen front end.
Coupling arrangement in the receiving trap of the scanning electron microscope that the utility model is designed is mainly by scanning electron microscope vacuum cover plate, outer cylinder body, carrying cylinder, go into image tube, protection cylinder, move handle, screw mandrel, handwheel constitutes, scanning electron microscope vacuum cover plate and outer cylinder body are structure as a whole, scanning electron microscope vacuum cover plate and outer cylinder body have center pit, protection cylinder is installed in the center pit, can move vertically, the protection cylinder front end is positioned at outside the cavity of scanning electron microscope vacuum cover plate and outer cylinder body formation, fixed installation backscattered electron probe on it, video screen is installed in the front end outer cylinder body center pit, the rear end of outer cylinder body is equipped with the x ray protection window successively, condenser, video camera is fixedly installed in the carrying cylinder, carrying cylinder is installed together with mobile, moving handle cooperates with wire rod thread, on the one end scanning constant Electronic Speculum vacuum cover plate of screw mandrel, by roller bearings, the other end is by the bearings in the bearing seat, bearing seat and outer cylinder body connection, bearing in the bearing seat is pressed in the bearing seat by bearing gland, the screw mandrel end is equipped with handwheel, and handwheel can drive screw mandrel and rotate.
Guarantee that for making video camera moves vertically, on the outer cylinder body of the coupling arrangement of the receiving trap of the scanning electron microscope that the utility model is designed feather key is installed, in carrying cylinder, have the gathering sill that cooperates with it; Outer cylinder body also has gathering sill to matching part with mobile, is used for the video camera axial location.
Video camera in the receiving trap of the scanning electron microscope that the utility model is designed adopts the CCD video camera.
X ray protection window in the receiving trap of the scanning electron microscope that the utility model is designed is a lead glass.
The receiving trap of the scanning electron microscope that the utility model is designed is when using, it is spectrometer reserved window place that the scanning electron microscope vacuum cover plate of coupling arrangement is installed in scanning electron microscope, make an end of band backscattered electron probe enter into the corresponding position of Electronic Speculum, this position can be adjusted by mobile wheel.Video camera is connected with computing machine by lead.In this device, video camera, capture card, scanning card and computing machine are existing outsourcing piece.The principle of work of this receiving trap is: receive electron backscattered signal (Kikuchi style) by the backscattered electron probe, formed Kikuchi style is presented on video screen, the conversion of realization electric light, by importing in the computing machine by camera record scanning and with image again after the condenser focusing, by collection, the accumulation of the capture card control chart picture in the computing machine, by computer storage and demonstration.Electron beam scanning in the scanning card control Electronic Speculum in the computing machine receives the secondary electron and the back reflection electronic image of Electronic Speculum simultaneously, and finishes collection, accumulation, demonstration, storage, printing to above two kinds of images.
The advantage of the receiving trap of the scanning electron microscope that the utility model is designed is:
1. electron gain back scattering diffraction style promptly, and the Electron Back-Scattered Diffraction style carried out online treatment and analysis;
2. use common CCD to penetrate camera as picture receiver, the Kikuchi style quality of collection is near external device, but cost reduces greatly;
3. realized that all information all can directly show on computer display screen on the scanning electron microscope, all images and data form digital information, and can store, and help graphical analysis, demarcation, printout, preservation etc.;
4. shortened the analysis nominal time, original scanning electron microscope is analyzed to demarcate from taking a picture, washing and is finished the two day time of about need, demarcate, can obtain analysis result in the short time, improved work efficiency greatly and utilize this device to be implemented in line analysis the Electron Back-Scattered Diffraction style;
5. this apparatus structure compactness connects, easy to operate, safe and reliable, Electron Back-Scattered Diffraction style and do not influence other function of scanning electron microscope.
Fig. 1 is connection side's block diagram of the receiving trap of the designed scanning electron microscope of the utility model.
Fig. 2 is the coupling arrangement structural representation in the receiving trap of the designed scanning electron microscope of the utility model.
Fig. 3 is an alternative coupling arrangement structural representation in the receiving trap of the designed scanning electron microscope of the utility model.
In conjunction with specific embodiments the structure and the embodiment of the receiving trap of the designed scanning electron microscope of the utility model is described further with reference to the accompanying drawings below.
Embodiment 1
The receiving trap of scanning electron microscope as shown in Figure 1 mainly is made of coupling arrangement, video camera, camera control unit, electron beam scanning control module, computing machine, electrical to optical converter, x ray protection device.The x ray protection device comprises x ray protection window and protection cylinder.Video camera, camera control unit, computing machine are outsourcing piece, and the control module of video camera comprises capture card, and the electron beam scanning control module comprises scanning card, inserts on the computer motherboard respectively.Video camera is connected with capture card interface in the computing machine by transmitting lead, thereby carries out the signal transmission with wherein capture card.The electron beam scanning control module is the electron beam scanning by scanning card gated sweep Electronic Speculum, finishes the image collection to sample surfaces.And video camera, electrical to optical converter, and x ray protection device etc. all cooperates installation by coupling arrangement with scanning electron microscope, its mounting structure as shown in Figure 2, mainly by scanning electron microscope vacuum cover plate 10, outer cylinder body 02, carrying cylinder 22, go into image tube 2, protection cylinder 7, move 01, screw mandrel 32 and handwheel 26 constitute, it is spectrometer reserved window place that scanning electron microscope vacuum cover plate 10 is lifted on the scanning electron microscope lens barrel, scanning electron microscope vacuum cover plate 10 is structure as a whole with outer cylinder body 02, outer cylinder body 02 has center pit with scanning electron microscope vacuum cover plate 10, video camera 21 is installed in outer cylinder body 02 center pit by carrying cylinder 22, going into image tube 2 is connected with the front end of carrying cylinder 22, going into image tube 2 is supported by scanning electron microscope vacuum cover plate 10, its front end is positioned at scanning electron microscope vacuum cover plate 10 and forms whole outer end with outer cylinder body 02, the front end of going into image tube 2 is equipped with electrical to optical converter, it is video screen 3, video screen 3 is fixing by video screen seat 4, in going into image tube 2, have protection cylinder 7, the front end that is positioned at video camera 21 in going into image tube 2 is equipped with x ray protection window and condenser 14 successively, the x ray protection window is a lead glass, to stop the X-radiation leakage.Backscattered electron looses and 5 to be fixed in upper end into image tube 2 by backward scattering probe bearing.The screw mandrel 32 that is used for mobile camera 21 is positioned at outside the outer cylinder body 02, one end and 10 connections of scanning electron microscope vacuum cover plate, the other end is by supporting with the fixing bearing seat 30 of outer cylinder body 02, two ends are mated by bearing and make screw mandrel 32 rotatable, and the axis of screw mandrel 32 parallels with the axis of outer cylinder body 02.Move and to fixedly mount 01 with the carrying cylinder 22 of video camera 21, move and be threaded the hole to 01, move and cooperate 01 with screw mandrel 32 by screw thread, have stopper slot 40 on the outer cylinder body 02, move and to cooperate with stopper slot 40, the length restriction of stopper slot 40 displacement of video camera 21, feather key 17 is installed above outer cylinder body 02, feather key 17 cooperates with gathering sill on the carrying cylinder 22, is used for spacing and guiding.Video camera 21 is connected with computing machine by lead.
The principle of work of the receiving trap of this scanning electron microscope is: scanning electron microscope vacuum cover plate 10 is used for fixing with scanning electron microscope, the backscattered electron of receiving trap front end probe 5 is stretched in the scanning electron microscope, to receive the electron scanning signal.Video screen 3 is converted into light signal with the back scattering diffraction electric signal, receive by video camera 21 and deliver in the computing machine, by the collector cards in the computing machine and scanning card to image handle, analyze, demarcate, show, storage, printing etc.Find out by this receiving trap by above-mentioned, can carry out on-line analysis, increase work efficiency, and can preserve for a long time image.
The receiving trap of this scanning electron microscope can be transformed existing scanning electron microscope, enlarge usable range, and cost is low, and analysis is accurate, efficient is high, researchs and analyses level for raising reliable assurance is provided.
Embodiment 2
In the receiving trap of scanning electron microscope, can also take coupling arrangement as shown in Figure 3, its structure is similar substantially to the coupling arrangement among the embodiment 1, mainly by scanning electron microscope vacuum cover plate 10, outer cylinder body 02, go into image tube 2, protection cylinder 7, screw mandrel 32 and handwheel 26 and constitute, the both sides of different is outer cylinder body 02 are threaded hole 33 respectively, and screw mandrel 32 has two, and screw mandrel 32 cooperates with threaded hole 33 respectively, the end of screw mandrel 32 has gear 34, and handwheel 26 cooperates with screw mandrel 32 by gear 35.Handwheel 26 rotates and can drive screw mandrel 32 rotations, because screw mandrel 32 and outer cylinder body 02 threaded engagement, therefore when screw mandrel 32 rotated, outer cylinder body 02 moved along the axis direction of screw mandrel 32, is installed on the distance of the video camera 21 of outer cylinder body 02 inside with adjusting.
This coupling arrangement is applicable in the receiving trap of the scanning electron microscope of not being with cooling structure.Simple in structure, there is not inner carrying cylinder, video camera 21 is directly installed in the outer cylinder body 02, and easy for installation, cost is lower.
Claims (7)
1. the receiving trap of a scanning electron microscope, it is characterized in that: mainly by electrical to optical converter, the x ray protection device, video camera, camera control unit, electron beam scanning control module and computing machine constitute, photoelectric commutator, the x ray protection device, it is the window place that spectrometer is reserved that video camera is fixedly installed in scanning electron microscope by coupling arrangement, camera control unit and electron beam scanning control module are made of capture card and scanning card, it is plugged on the computer motherboard, video camera is connected with capture card interface in the computing machine by connecting line, and the control signal of computing machine is by the scanning of electron beam in scanning card and the connecting line gated sweep Electronic Speculum.
2. the receiving trap of scanning electron microscope according to claim 1, its feature also is: electrical to optical converter is a video screen, the backscattered electron probe is installed in fluoroscopic upper end.
3. the receiving trap of scanning electron microscope according to claim 1, its feature also is: the x ray protection device comprises x ray protection window and protection cylinder.
4. the receiving trap of scanning electron microscope according to claim 1, its feature also is: coupling arrangement is mainly by scanning electron microscope vacuum cover plate, outer cylinder body, carrying cylinder, go into image tube, protection cylinder, move handle, screw mandrel, handwheel constitutes, scanning electron microscope vacuum cover plate and outer cylinder body are structure as a whole, scanning electron microscope vacuum cover plate and outer cylinder body have center pit, protection cylinder is installed in the center pit, can move vertically, the protection cylinder front end is positioned at outside the cavity of scanning electron microscope vacuum cover plate and outer cylinder body formation, fixed installation backscattered electron probe on it, video screen is installed in the front end outer cylinder body center pit, the rear end of outer cylinder body is equipped with the x ray protection window successively, condenser, video camera is fixedly installed in the carrying cylinder, carrying cylinder is installed together with mobile, moving handle cooperates with wire rod thread, on the one end scanning constant Electronic Speculum vacuum cover plate of screw mandrel, by roller bearings, the other end is by the bearings in the bearing seat, bearing seat and outer cylinder body connection, bearing in the bearing seat is pressed in the bearing seat by bearing gland, the screw mandrel end is equipped with handwheel, and handwheel can drive screw mandrel and rotate.
5. the receiving trap of scanning electron microscope according to claim 1, its feature also is: on the outer cylinder body of coupling arrangement feather key is installed, has the gathering sill that cooperates with it in carrying cylinder; Outer cylinder body also has gathering sill to matching part with mobile.
6. the receiving trap of scanning electron microscope according to claim 1, its feature also is: video camera adopts the CCD video camera.
7. the receiving trap of scanning electron microscope according to claim 1, its feature also is: the x ray protection window is a lead glass.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 00257222 CN2443366Y (en) | 2000-10-12 | 2000-10-12 | Receiver for scanning electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 00257222 CN2443366Y (en) | 2000-10-12 | 2000-10-12 | Receiver for scanning electron microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2443366Y true CN2443366Y (en) | 2001-08-15 |
Family
ID=33613784
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 00257222 Expired - Lifetime CN2443366Y (en) | 2000-10-12 | 2000-10-12 | Receiver for scanning electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2443366Y (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105651792A (en) * | 2015-12-30 | 2016-06-08 | 中国科学院上海硅酸盐研究所 | SEM transmission electron Kikuchi diffraction apparatus and analytical method |
| CN112304992A (en) * | 2019-07-26 | 2021-02-02 | 布鲁克纳米有限责任公司 | Chrysanthemum cell diffraction detector |
| CN113851365A (en) * | 2021-09-10 | 2021-12-28 | 中国科学院物理研究所 | Transmission electron microscope sample chamber laser introducing device capable of shielding X-rays and using method thereof |
-
2000
- 2000-10-12 CN CN 00257222 patent/CN2443366Y/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105651792A (en) * | 2015-12-30 | 2016-06-08 | 中国科学院上海硅酸盐研究所 | SEM transmission electron Kikuchi diffraction apparatus and analytical method |
| CN112304992A (en) * | 2019-07-26 | 2021-02-02 | 布鲁克纳米有限责任公司 | Chrysanthemum cell diffraction detector |
| CN112304992B (en) * | 2019-07-26 | 2024-03-26 | 布鲁克纳米有限责任公司 | Chrysanthemum Chi Yanshe detector |
| CN113851365A (en) * | 2021-09-10 | 2021-12-28 | 中国科学院物理研究所 | Transmission electron microscope sample chamber laser introducing device capable of shielding X-rays and using method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CX01 | Expiry of patent term |
Expiration termination date: 20101012 Granted publication date: 20010815 |