CN2423564Y - High-precision grating measuring device - Google Patents
High-precision grating measuring device Download PDFInfo
- Publication number
- CN2423564Y CN2423564Y CN00220656.0U CN00220656U CN2423564Y CN 2423564 Y CN2423564 Y CN 2423564Y CN 00220656 U CN00220656 U CN 00220656U CN 2423564 Y CN2423564 Y CN 2423564Y
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- circuit
- measuring device
- microcomputer
- analog
- grating
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- 238000006243 chemical reaction Methods 0.000 claims abstract description 12
- 238000006073 displacement reaction Methods 0.000 abstract description 7
- 230000008901 benefit Effects 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 8
- 238000005259 measurement Methods 0.000 description 6
- 230000011218 segmentation Effects 0.000 description 5
- 239000003990 capacitor Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000007792 addition Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000003062 neural network model Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000004801 process automation Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000003313 weakening effect Effects 0.000 description 1
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Abstract
The utility model relates to a high-precision grating measuring device that can measure the angles or the displacement of gratings. The high-precision grating measuring device is composed of a grating sensor circuit, a front end circuit, a multiway switch, an analog-digital conversion circuit and a microcomputer that are connected in series sequentially, wherein, the output terminals of the microcomputer is respectively connected with the multiway switch and the input terminals of the analog-digital conversion circuit. The utility model has the advantages of simple structure, convenient operation and high measuring precision.
Description
The utility model is a kind of can taking measurement of an angle or the grating measuring device of displacement, belongs to the technical field of automatic measurer.
Grating technology has been widely used in numerically controlled processing equipment and the measurement and control instrument, is used for automatic Displacement Measurement angle measurement, to realize process automation, to measure digitizing or the like.(resolution of general displacement is 10 μ m because the resolution of grating itself is lower, angle is 1 degree) in order to satisfy practical requirement, obtain higher resolution, classic method is with the hardware sub-circuit grating signal further to be segmented, but its segmentation number is done not high (accomplishing that 40 segmentation difficulty are just very big), circuit complexity, low, the easy introducing interference of frequency response, temperature is floated big and reliability is low etc., is difficult to realize high-acruracy survey.In recent years, also the someone has proposed the software close classification, but this method is with the method for tabling look-up, and to hardware accuracy requirement harshness, making form needs a large amount of samples, and difficulty is big and complicated, and precision is limited.In order to satisfy the needs of some high-acruracy surveys, the unit that abroad has has taked the method for intensive groove on grating, and this method needs high-precision, expensive groove equipment, and qualification rate is low, and cost is very high, its valuable product, and its application is limited.
Goal of the invention of the present utility model just provides a kind of simple in structure, easy to operate, the high precision grating measuring device that can realize precision measurement.
High precision grating measuring device of the present utility model is made up of grating sensor circuit, front end circuit, multi-way switch, analog to digital conversion circuit, microcomputer, this 5 partial circuit is connected in series in order successively, and the output terminal of microcomputer also joins with the input end of multi-way switch and analog to digital conversion circuit respectively.In operational amplifier A
5With A
6Be connected to a variable resistor W between the inverting input
1, in operational amplifier A
8With A
9Inverting input between be connected to a variable resistor W
2The output terminal of front end circuit is an operational amplifier A
7, A
10Output terminal be integrated circuit U with the input end of multi-way switch respectively
2" CH1, CH2 " end join.Two input ends in addition of multi-way switch are integrated circuit U
2" A
0, A
1" end, " the A corresponding with microcomputer
0, A
1" hold and join.
Advantage of the present utility model is that this apparatus structure is simple, and is easy to operate, the measuring accuracy height.If the displacement of only measuring grating by record Moire fringe number (periodicity of count output signal) in measuring process usually, its resolution only is the pitch of grating, has both made the grating that adopts 100 lines/mm, and its resolution also only is 10 μ m.This resolution can not satisfy most of application requirements.Therefore, in order to obtain the displacement littler than pitch, must measure the distance that Moire fringe moves past, just must segment output signal, usually adopt interpolation method to segment, promptly in the one-period that Moire fringe changes, provide N count pulse, with reduce pulse equivalency (be each pulse suitable displacement be reduced to original 1/N, then resolution improves N doubly), traditional divided method is to realize with pure hardware, have above-mentioned some shortcomings, therefore, segmentation measurement mechanism of the present utility model can be realized continuous segmentation, resolution is improved greatly, and hardware circuit simplifies greatly.Thereby reliability is improved greatly.
Fig. 1 is the circuit structure block diagram of the utility model signal processing.Grating sensor circuit 1, front end circuit 2, multi-way switch 3, analog to digital conversion circuit 4, microcomputer 5 are wherein arranged.
Fig. 2 is an electrical schematic diagram of the present utility model.
Embodiment of the present utility model is as follows:
Grating sensor circuit 1 comprises integrated circuit operational amplifier A
1～A
4, front end circuit 2 comprises integrated operational amplifier A
5～A
10, multi-way switch 3 comprises integrated multipath analog switching circuit U
2, its model is " AD7501 ", analog to digital conversion circuit 4 comprises the integrated analog digit converter circuit U
3, its model is " AD574 ", microcomputer 4 adopts single card microcomputer.
Photodiode D
1To D
4, operational amplifier A
1To A
4, capacitor C
1To C
4, resistance R
1To R
4Constitute four independently current-to-voltage converting circuits respectively, its effect is the voltage signal that light signal is converted to certain amplitude.Photodiode D wherein
1To D
4Be the light receiving element in the grating sensor, model can be 2DU series, also can be photoelectric cell, phototriode, infrared receiver device or light integrated receiver spare.Different sensors, the way difference of its output signal, therefore, light receiving element (D
1To D
4) can have only one or more (general two or four).Operational amplifier A
1To A
4Be the low drift of high impedance integrated operational amplifier, an available integrated four high guaily unit is realized, also available two two amplifiers or four single amplifiers (as using model LF353 etc.), resistance R
1To R
4Be feedback resistance.Capacitor C
1To C
4Be the weakening filter capacitor.
Operational amplifier A
5To A
7, resistance R
5To R
10, W
1Constitute the instrument differential amplifier, purpose is to remove direct current, suppresses drift, and its input signal should be selected two inversion signals, and its direct current signal and signals such as drift, noise are offset because of subtracting each other, two useful then additions of backward crossover flow component.Adjust variable resistor W
1Can change output amplitude, to satisfy analog-to-digital amplitude requirement.Generally should select R
5=R
6, R
7=R
8=R
9=R
10This circuit can constitute with integrated transporting discharging, also can select integrated differential amplifier for use.Operational amplifier A
8To A
10Constitute another differential amplifier, its principle is identical.
Integrated circuit U
2Be multiway analog switch, available integrated circuit constitutes (as model AD7501), and " CH1 and CH2 " is two input channels, and " A0 and A1 " is used for control and carries out channel selecting from microcomputer.When using multichannel analog to digital conversion (A/D) or when the input of one road signal is only arranged, integrated circuit U
2Can omit.U
3Be A/D (mould/number) converter (as model AD574), U
4Being microcomputer, can be Single Chip Microcomputer (SCM) system, PC system, STD industrial computer system, PC industrial computer system or other microcomputer.Analog to digital conversion becomes digital signal and is input in the microcomputer.In this example, analog to digital converter U
3In " D0-D11 " for the conversion after 12 position digital signals." S " is for starting the signal of conversion." A0-A3 " is control signals such as channel selecting and reading control.Wherein, but also working voltage/frequency (V/F) converter of A/D converter.
Sample the signal in the microcomputer, realize segmentation (selecting a kind of getting final product in the practicality) continuously by two kinds of neural network models of realizing with microcomputer.
It is pointed out that when using circular raster sensor that generally only export two paths of signals, and do not contain DC component, its circuit is simpler, differential circuit can omit, and current-to-voltage converting circuit also can save two-way.According to the above, just can realize the utility model.
Claims (4)
1. high precision grating measuring device, form by grating collecting part and signal processing part branch, the signal processing that it is characterized in that this device is made up of grating sensor circuit (1), front end circuit (2), multi-way switch (3), analog to digital conversion circuit (4), microcomputer (5), this 5 partial circuit is connected in series in order successively, and the output terminal of microcomputer (5) also joins with the input end of multi-way switch (3) and analog to digital conversion circuit (4) respectively.
2. high precision grating measuring device according to claim 1 is characterized in that in operational amplifier A
5With A
6Be connected to a variable resistor W between the inverting input
1, in operational amplifier A
8With A
9Inverting input between be connected to a variable resistor W
2
3. high precision grating measuring device according to claim 1 and 2 is characterized in that the output terminal of front end circuit (62) is an operational amplifier A
7, A
10Output terminal be integrated circuit U with the input end of multi-way switch (63) respectively
2" CH1, CH2 " end join.
4. high precision grating measuring device according to claim 3 is characterized in that two input ends in addition of multi-way switch (63) are integrated circuit U
2" A
0, A
1" end, with the corresponding " A of microcomputer (65)
0, A
1" hold and join.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN00220656.0U CN2423564Y (en) | 2000-06-13 | 2000-06-13 | High-precision grating measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN00220656.0U CN2423564Y (en) | 2000-06-13 | 2000-06-13 | High-precision grating measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2423564Y true CN2423564Y (en) | 2001-03-14 |
Family
ID=33585665
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN00220656.0U Expired - Fee Related CN2423564Y (en) | 2000-06-13 | 2000-06-13 | High-precision grating measuring device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2423564Y (en) |
-
2000
- 2000-06-13 CN CN00220656.0U patent/CN2423564Y/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |