CN2366845Y - High performance optical probe of white light dust particle counter - Google Patents
High performance optical probe of white light dust particle counter Download PDFInfo
- Publication number
- CN2366845Y CN2366845Y CN 99225686 CN99225686U CN2366845Y CN 2366845 Y CN2366845 Y CN 2366845Y CN 99225686 CN99225686 CN 99225686 CN 99225686 U CN99225686 U CN 99225686U CN 2366845 Y CN2366845 Y CN 2366845Y
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- light
- sensitive area
- optic probe
- particle counter
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Abstract
The utility model relates to a high performance optical probe of white light dust particle counter, comprising two orthogonal illuminating light paths and scattered light collecting light paths. On the illuminating light paths, an illuminating lens group, a light sensitive area and a light trapping whose inner part is provided with a spherical reflector are orderly provided along the forward direction of the light beam G emitted by the light source of the incandescent lamp. The orthogonal intersecting point of the light axis O < 1 > O< 1 > and O< 2 > O< 2 > of the two light paths is the central point O of the sensitive area. The broad light acquisition light path is provided with a concave mirror, a collecting mirror, a field diaphragm and a photo detector element. Compared with prior art, the sensibility, the counting efficiency, the grain diameter concentration ratio as well as the signal intensity and the signal to noise ratio of this optic probe are highly increased.
Description
The utility model is the detecting instrument of clean environment cleanliness factor---a kind of efficient optic probe of white light airborne particle counter.
Prior art is the optic probe of homemade Y09-4 type white light airborne particle counter, as shown in Figure 1.This optic probe is collected by illumination path and scattered light mainly that light path is vertical mutually to be constituted.Light source 1 and illuminating lens group 2 are arranged on the illumination path wherein.Light source 1 is an incandescent lamp.Scattered light collect on the light path receiver lens group 5 is arranged and with end window photomultiplier as optical detection device 6; The center of light sensitive area 3 is the optical axis of light source 1 and illuminating lens group 2 and the intersection point that scattered light is collected the optical axis of light path; In addition, also has the light trapping 4 of eliminating illumination luminous energy in this optic probe.
There is following shortcoming in this optic probe:
1. light sensitive area 3 illumination are lower, and the efficiency of light energy utilization is low.In whole energy that light source 1 on this optic probe illumination path sends, have only very little a part of luminous energy can enter illuminating lens group 2 and light sensitive area 3.The aperture half-angle of its illuminating lens group 2 is 16 °, and the solid angle that light source 1 is opened is 0.077 π sterad (Srad).This has influenced the sensitivity of this optic probe, and its minimum detection particle diameter is 0.30 μ m.
2. light sensitive area 3 illumination uniformities are poor.In light sensitive area 3, the light distribution of light sensitive area 3 is consistent with the periodicity helical structure of light source 1 filament, so illumination uniformity is poor through 2 direct imagings of illuminating lens group for the light source 1 of this optic probe.This has influenced the counting efficiency and the particle diameter concentration degree of this optic probe.The counting efficiency of this optic probe and particle diameter concentration degree are less than 70%.In addition, more outstanding when the particle of surveying less than 0.30 μ m because this shortcoming, so this has also limited the sensitivity of this optic probe.
3. the collection efficiency on the scattered light collection light path is low.This optic probe can only be collected the scattered light of dust particle on perpendicular to a direction of the optical axis of illumination path, and the aperture half-angle of its receiver lens group is 16 °, and the solid angle that light sensitive area 3 is opened is 0.077 π sterad (Srad).Thereby a little less than the signal, signal to noise ratio (S/N ratio) is low, and this optic probe is lower than 3: 1 for the signal to noise ratio (S/N ratio) of 0.30 μ m particle.
4. in order to guarantee that this optic probe has certain performance, the end window photomultiplier that must adopt powerful light source 1 bulb (its power is 20W) and high-gain is as optical detection device.Thereby cause this optic probe to generate heat seriously, need radiator structure, then cause volume big, serious heating has also influenced the detection stability of this optic probe.
The purpose of this utility model is in order to overcome the deficiency of above-mentioned optic probe, to provide a kind of airborne particle counter of white light efficiently optic probe for cleanliness factor detects.To be that a kind of minimum is surveyed particle diameter less than 0.30 μ m, counting efficiency and particle diameter concentration degree be higher than 70%; And have the signal to noise ratio (S/N ratio) height, highly sensitive, good stability, volume is little, the optic probe of the characteristics such as lacking of generating heat.
Contain two orthogonal illumination paths and scattered light in the structure of the present utility model and collect light path.On illumination path, on the direction of advancing along the light source 1 emission light beam G of incandescent lamp, be equipped with illuminating lens group 2, light sensitive area 3 and light trapping 4 successively.In light trapping 4, be equipped with spherical reflector 8.The centre of sphere of spherical reflector 8 overlaps with the central point O of light sensitive area 3.
Scattered light is collected the optical axis O of light path
2O
2Optical axis O with illumination path
1O
1Orthogonal intersection point is the central point O of light sensitive area 3.On scattered light is collected light path, be equipped with optical detection device 6, between optical detection device 6 and light sensitive area 3, condenser 9 is arranged, between condenser 9 and the optical detection device 6, place on the focal plane of condenser 9 field stop 10 arranged.On scattered light is collected light path, concave mirror 7 is arranged across light sensitive area 3 and condenser 9 relative sides.The focus of concave mirror 7 overlaps with the central point O of light sensitive area 3.As shown in Figure 2.
The reflecting surface of the spherical reflector 8 in the utility model is coated with reflectivity greater than 90% optical thin film, it has two effects: the one, the illumination luminous energy that enters light trapping 4 is reflected back into light sensitive area 3, make tested dust particle be subjected to the irradiation of the luminous energy of both direction, and the light intensity of throwing light on double; The 2nd, can make the light source 1 filament picture at light sensitive area 3 places after spherical reflector 8 reflections, image in light sensitive area 3 again, and filament suitably stagger the illumination light intensity unevenness of light sensitive area 3 when having overcome the single direction illumination.
Concave mirror 7 in the utility model can be the concave mirror of sphere, or the concave mirror of the paraboloid of revolution, and its reflecting surface is coated with reflectivity greater than 90% optical thin film.
Condenser 9 in the utility model is the single group of two gummeds lens, or a slice simple lens.It both can converge to the dust particle scattered light that is come by concave mirror 7 reflection on the optical detection device 6, and also the scattered light of another direction that can directly send dust particle converges on the optical detection device 6.
The clear aperture of the field stop 10 in the utility model is a rectangle or square, and its effect has two: the one, and stop particle scattering light veiling glare in addition to enter optical detection device 6; The 2nd, make the pulse signal of optical detection device 6 outputs regular, guarantee that pulse signal obtains identical enlargement ratio by the follow-up processing of circuit of optical detection device 6 time, can improve the reliability of testing result like this.
Optical detection device 6 in the utility model not only can adopt the photomultiplier of end-window, also can adopt the photomultiplier of side window type, or photoelectric cell, or photodiode.
The course of work of the present utility model is: the light beam G that light source 1 sends by illuminating lens group 2 illumination light sensitizing ranges 3 after, enter light trapping 4, reflected back into light sensitive area 3 by wherein spherical reflector 8 again; Dust particle to be measured with certain speed perpendicular to optical axis O
1O
1With optical axis O
2O
2Produce scattered light when flowing through light sensitive area 3, with the optical axis O of illumination path
1O
1Scattered light in certain solid angle scope on the vertical both direction is collected and is assembled by concave mirror 7 and condenser 9, project on the optical detection device 6 by field stop 10, one of optical detection device 6 output and the big or small proportional electric signal of dust particle, this electric signal obtain corresponding particle diameter value after by the follow-up processing of circuit of optical detection device 6.
Advantage of the present utility model, compared with the prior art:
1. light sensitive area 3 illumination height, illumination uniformity is good.Because spherical reflector 8 doubles the illumination light intensity of light sensitive area 3 on the one hand, the shortcoming of light sensitive area 3 illumination uniformity differences when having overcome the single direction illumination on the other hand.Therefore, the sensitivity of this optic probe, counting efficiency and particle diameter concentration degree all greatly improve than prior art;
2. scattered light is collected the collection efficiency height of light path.Because concave mirror 7 and condenser 9 two-way, wide-angle receiving scattered lights are arranged.Scattered light on another direction that concave mirror 7 sends the dust particle that flows through light sensitive area 3 reflexes to condenser 9 again, and owing to the focus of concave mirror 7 overlaps with the central point O of light sensitive area 3, scattered light collection efficiency to dust particle can improve nearly 4 times, this all is improved signal intensity of this optic probe and signal to noise ratio (S/N ratio) than prior art, thus the sensitivity that has improved optic probe;
3. on the focal plane of condenser 9, be provided with a rectangle or a square field stop 10 that adapts with the track of dust particle by light sensitive area 3, reduced the ground unrest of system, the signal to noise ratio (S/N ratio) that makes system survey the particle diameter place in minimum can be higher than 4: 1, simultaneously make scattered light signal neat again, thereby the reliability of testing result is improved;
4. because the efficiency of light energy utilization height of this optic probe, so can adopt the side-on photomultiplier of low power light source 1 bulb and low gain or photoelectric tube or photodiode as optical detection device, thereby reduced thermal value and electric work loss, reduced the volume of optic probe again.
Description of drawings:
Fig. 1 is the structural representation of the efficient optic probe of the homemade Y09-4 type of prior art white light airborne particle counter.
Fig. 2 is the structural representation of white light airborne particle counter optic probe of the present utility model.
Embodiment:
Shown in the structure of Fig. 2.Light source 1 is special halogen tungsten lamp among the figure, and power is 10W; Illuminating lens group 2 by four lump cokes apart from be 30mm, the identical in structure cemented doublet is formed, these four cemented doublets are divided into two identical imaging systems, their enlargement ratio is equal to 1; The spherical radius of spherical reflector 8 is 25mm; The aperture half-angle of illuminating lens group 2 is 20 °, and it is 0.121 π sterad to light source 1 solid angle that bulb is opened.Because the effect of spherical reflector 8, total effectively solid angle that illumination path is opened light source 1 bulb is 0.242 π sterad.Light sensitive area 3 is of a size of 2mm * 2mm * 0.8mm; Concave mirror 7 is concave mirrors of a sphere, and its spherical radius is 20mm, and clear aperture is φ 14mm, and the distance of its summit and light sensitive area 3 central point O is 10mm; Condenser 9 is the single group of two gummeds lens, and its version is identical with cemented doublet in the illuminating lens group, and its first distance with light sensitive area 3 central point O is 15mm.It is 0.627 π sterad to the total effective collection solid angle of scattered light that scattered light is collected light path.Field stop 10 is that clear aperture is the rectangle of 6mm * 2.4mm, and its long side direction is perpendicular to the track of dust particle by light sensitive area 3.Optical detection device 6 is photomultipliers of side window type, is positioned at field stop 10 about 3mm place afterwards.Spherical reflector 7 and 8 reflecting surface all are coated with reflectivity greater than 90% aluminium film.
It is 0.22 μ m that the minimum of embodiment is surveyed particle diameter, and the minimum signal to noise ratio (S/N ratio) of surveying the particle diameter place is 4.5: 1, and counting efficiency and particle diameter concentration degree all can reach 85%, surpass the requirement of national metrological verification regulations JJG547-88; The air sampling flow is 2.83L/min, meets the requirement of u.s. federal standard 209E about sampling flow; The thermal value of this optic probe is few, and testing result is reliable and stable; Compact conformation, physical dimension are 170mm * 137mm * 90mm, less than half of prior art volume.
Claims (5)
1. the efficient optic probe of a white light airborne particle counter, contain:
＜1〉two orthogonal illumination paths and scattered light are collected light path, wherein on illumination path, on the direction of advancing with incandescent lamp as light source (1) emission light beam G, illuminating lens group (2), light sensitive area (3) and light trapping (4) are arranged successively, collect on the light path at scattered light and be equipped with optical detection device (6);
＜2〉the optical axis O of illumination path
1O
1Collect the optical axis O of light path with scattered light
2O
2Orthogonal intersection point is the central point O of light sensitive area (3);
It is characterized in that:
＜3〉place in the light trapping (4) spherical reflector (8) that has the centre of sphere to overlap with light sensitive area (3) central point O;
＜4〉on scattered light is collected light path, between light sensitive area (3) and optical detection device (6), condenser (9) is arranged, between optical detection device (6) and the condenser (9), place on the focal plane of condenser (9) field stop (10) arranged;
＜5〉on scattered light is collected light path, the concave mirror (7) that has focus to overlap across light sensitive area (a 3) side relative with light sensitive area (3) central point O with condenser (9).
2. according to the efficient optic probe of the white light airborne particle counter of claim 1, the reflecting surface that it is characterized in that spherical reflector (8) is coated with reflectivity greater than 90% optical thin film.
3. according to the efficient optic probe of the white light airborne particle counter of claim 1, it is characterized in that the clear aperture of field stop (10) is a rectangle, or square.
4. according to the efficient optic probe of the white light airborne particle counter of claim 1, it is characterized in that concave mirror (7) is the concave mirror of sphere, or the concave mirror of the paraboloid of revolution, reflecting surface is coated with reflectivity greater than 90% optical thin film.
5. according to the efficient optic probe of the white light airborne particle counter of claim 1, it is characterized in that condenser (9) is the single group of two gummeds lens, or a slice simple lens.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 99225686 CN2366845Y (en) | 1999-02-08 | 1999-02-08 | High performance optical probe of white light dust particle counter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 99225686 CN2366845Y (en) | 1999-02-08 | 1999-02-08 | High performance optical probe of white light dust particle counter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2366845Y true CN2366845Y (en) | 2000-03-01 |
Family
ID=34015509
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 99225686 Expired - Fee Related CN2366845Y (en) | 1999-02-08 | 1999-02-08 | High performance optical probe of white light dust particle counter |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2366845Y (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101162194B (en) * | 2007-11-16 | 2010-06-02 | 苏州华达仪器设备有限公司 | Optical senser of measuring dust particle |
| CN102331394A (en) * | 2010-07-12 | 2012-01-25 | 苏州工业园区鸿基洁净科技有限公司 | Photoelectric sensor of high flow airborne particle counter |
| CN102692366A (en) * | 2012-06-14 | 2012-09-26 | 苏州苏净仪器自控设备有限公司 | Instrument for monitoring microparticles in air |
| CN112630127A (en) * | 2021-03-10 | 2021-04-09 | 中国科学院上海高等研究院 | Vacuum particle counter |
-
1999
- 1999-02-08 CN CN 99225686 patent/CN2366845Y/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101162194B (en) * | 2007-11-16 | 2010-06-02 | 苏州华达仪器设备有限公司 | Optical senser of measuring dust particle |
| CN102331394A (en) * | 2010-07-12 | 2012-01-25 | 苏州工业园区鸿基洁净科技有限公司 | Photoelectric sensor of high flow airborne particle counter |
| CN102331394B (en) * | 2010-07-12 | 2014-04-16 | 苏州工业园区鸿基洁净科技有限公司 | Photoelectric sensor of high flow airborne particle counter |
| CN102692366A (en) * | 2012-06-14 | 2012-09-26 | 苏州苏净仪器自控设备有限公司 | Instrument for monitoring microparticles in air |
| CN112630127A (en) * | 2021-03-10 | 2021-04-09 | 中国科学院上海高等研究院 | Vacuum particle counter |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |