CN2340120Y - Nanometer-grade linear electric motor - Google Patents

Nanometer-grade linear electric motor Download PDF

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Publication number
CN2340120Y
CN2340120Y CN 98216753 CN98216753U CN2340120Y CN 2340120 Y CN2340120 Y CN 2340120Y CN 98216753 CN98216753 CN 98216753 CN 98216753 U CN98216753 U CN 98216753U CN 2340120 Y CN2340120 Y CN 2340120Y
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China
Prior art keywords
screw
motor
nut
gear
drive mechanism
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Expired - Fee Related
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CN 98216753
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Chinese (zh)
Inventor
郑炜
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Xiamen University
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Xiamen University
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Priority to CN 98216753 priority Critical patent/CN2340120Y/en
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Publication of CN2340120Y publication Critical patent/CN2340120Y/en
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Expired - Fee Related legal-status Critical Current

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Abstract

The utility model relates to a nanometer-grade linear electric motor, which is composed of a main machine and a control circuit. The main machine is composed of a motor, a diaphragm coupling, a harmonic gear drive mechanism, a screw drive mechanism, a flexible mechanism, etc. The motor is connected with the left coupling; a wave generator is connected with the right coupling and drives a flexible gear to rotate; the flexible gear is engaged with a hard gear; the flexible gear is connected with a screw which is in the bolted connection with the inner screw of a slide nut; roller balls are positioned at the central position between the slide nut and the screw cap. The control circuit is composed of a power, an A/D converting circuit and a selective switch. The utility model has the advantages of linear displacement, and nano level subdivision; the driving torque is bigger than and equal to 100N; the utility model has no return difference and vibration while in the positive rotation and the reverse rotation.

Description

The nanoscale linear motor
The utility model relates to a kind of linear motor.
The micron order linear motor is called linear motor (Line Motor) again.A tree name report (Lu Renzhou.The linear motor product line is succeeded in developing in Taiwan.Electromechanical integration, 1997,3 (2): 29), Taiwan research institution has succeeded in developing commercial linear motor, and it utilizes " magnetic floating " principle of two magnet homopolar-repulsions, two contact-making surfaces of kinematic pair are reduced even eliminates friction.Linear motor has only rotor and two parts of stator, without bearing.Existing motor only segments at micron order, in the nanoscale segmentation, can not drive the load of 10g, be that its driving moment is much smaller than 100Nm, and subdivide technology adopts the PWM sub-circuit of Z80 single board computer or the control of 8031 single board computers, and adopts conventional spring coupling and slider-crank mechanism to realize that straight line moves.
The purpose of this utility model aims to provide a kind of straight-line displacement, at nanoscale segmentation, driving moment 〉=100Nm, minimum step pitch 0.01nm, maximum step pitch 10nm, stepping accuracy ± 0.001nm, the nanoscale linear motor of step pitch scope 0.01nm~10mm.
The utility model comprises main frame and control circuit.Main frame is made up of motor and fixed mount, diaphragm coupling, harmonic gear drive mechanism, screw-drive mechanism, elastic mechanism and frame, and motor is fixed on the fixed mount, and the axle of motor is connected by screw with the left half a coupler of diaphragm coupling; Harmonic gear drive mechanism is made up of wave producer, firm wheel, flexbile gear, and wave producer is connected by screw with right half a coupler, and just wheel being fixed on the frame, the rotation of wave producer drive flexbile gear, flexbile gear and wheel composition inside engaged gear transmission just; Screw-drive mechanism is made up of screw rod and slip nut, and the axle of flexbile gear is connected by screw with screw rod, and the right bar of screw rod and the internal thread of slip nut are spirally connected; Elastic mechanism is made up of slip nut, nut and ball, and fixed by nut is on slip nut, and ball is positioned at the center between slip nut and nut.
Control circuit is made up of power supply, A/D change-over circuit, selector switch, the input end of analog signal of A/D change-over circuit, ALE end, startup termination power, CLK holds external pulse signal source, and switch is selected in the data output end selecting, and selector switch is connected with the input of motor again.
During work, motor drives diaphragm coupling and rotates, and diaphragm coupling drives wave producer and flexbile gear motion, and just wheel is fixed on the frame and does not move, and this Harmonic Gears is than being i HR=1000, slip nut can only move and can not rotate, and slip nut promotes ball and moves, and screw-drive mechanism single thread pitch is 0.5mm, 1 step pitch of revolution, it is 0.5/102.4 * 1000 * (3/12)=0.005nm that nut promotes ball amount of movement (being straight line displacement).Nut has been eliminated the return difference of slip nut and screw rod, when protecting positive positive and negative rotation of motor, does not have hysterisis error.Compare with existing motor, existing motor is to rotate output mostly, there is not straight-line displacement, only segment at micron order, in the nanoscale segmentation, can not drive the load of 10g, be its driving moment much smaller than 100Nm, the subdivide technology of application is the PWM sub-circuit with single board computer control, adopts conventional spring coupling and slider-crank mechanism or differential screw mechanism on the scheme realizing that straight line moves.And the utility model has straight-line displacement, not to rotate output, segment at nanoscale, driving moment 〉=100Nm, adopt outer pulse and A/D change-over circuit to realize the nanoscale segmentation, compact conformation, reliable operation, and adopt new and high technology diaphragm coupling and single-wire helix mechanism to realize the nanometer straight-line displacement, there is not return difference during rotating, not vibration.
Fig. 1 is the structure chart of the utility model main frame.
Fig. 2 is the vertical view of Fig. 1.
Fig. 3 is a control circuit schematic diagram of the present utility model.
As Fig. 1, shown in 2, main frame is by motor 1 (H3B14V/B7 * 12B) form with fixed mount 2, diaphragm coupling, harmonic gear drive mechanism, screw-drive mechanism, elastic mechanism and frame 13 etc.Motor 1 is fixed on the fixed mount 2, and the axle of motor 1 is connected by screw 18 with the left half a coupler 3 of diaphragm coupling, and left half a coupler 3 is connected by screw 17 with diaphragm 4, right half a coupler 5.Harmonic gear drive mechanism by wave producer 6, just take turns 7, flexbile gear 8 forms, the thin axle head 61 of wave producer 6 is connected by screw 16 with right half a coupler 5, just wheel 7 centers are established through hole 71 and are fixed on the frame 13, the thick axle head 62 of wave producer 6 is interspersed in the through hole 71 of firm wheel 7, the external tooth of the flared end 81 of flexbile gear 8 and the internal tooth bridle joint of just taking turns 7, the flared end 81 of flexbile gear 8 is between the disc bar end 63 of the internal tooth of just wheel 7 and wave producer 6, wave producer 6 drives flexbile gear 8 and rotates, and flexbile gear 8 is formed the inside engaged gear transmission mechanism with firm wheel 7.Screw-drive mechanism is made up of screw rod 9 and slip nut 10, right-hand member axle 82 covers of flexbile gear 8 insert in the left axis hole of screw rod 9, and be fastenedly connected by screw 14, the right bar 91 of screw rod 9 is spirally connected with the internal thread of slip nut 10, screw rod 9 rotates, slip nut 10 moves (can not rotate, can only move, so be called slip nut).Elastic mechanism is made up of slip nut 10, nut 11 and ball 12, and slip nut 10 promotes ball 12 and moves, and nut 11 is fixed on the slip nut 10, screws nut 11, can eliminate the return difference of slip nut 10 and screw rod 9.
As shown in Figure 3, the power supply E of control circuit is 5~14V, and the A/D change-over circuit adopts ADC0809 integrated circuit (IC) chip U, the input end of analog signal IN of chip U O, V CCEnd, ALE end, START end are connected with power supply E, CLK end and outer clock (f=200HZ~500KHZ) be connected, the data output end D of chip U of chip U 0~D 7With 8 selector switch K 0~K 7Connect, at every turn can only a switch closure, through selector switch K 0~K 7Data output signal be connected with the input of motor M.K 0~K 7Closed respectively, input motor voltage is respectively (E/2)/2 0, (E/2)/2 1..., (E/2)/2 7, have 8 kinds of segmentation voltages, i.e. E/2, E/4 ..., E/256V.If E=12V, then segmenting voltage is 6V, 3V ..., 3/64V.If outer pulse f=500KHZ, then motor segmentation number is 1024.

Claims (3)

1. the nanoscale linear motor is characterized in that comprising main frame and control circuit,
1) main frame is made up of motor fixed mount, diaphragm coupling, harmonic gear drive mechanism, screw-drive mechanism, elastic mechanism and frame, and motor is fixed on the fixed mount, and the axle of motor is connected by screw with the left half a coupler of diaphragm coupling; Harmonic gear drive mechanism is made up of wave producer, firm wheel, flexbile gear, and wave producer is connected by screw with right half a coupler, and just wheel being fixed on the frame, the rotation of wave producer drive flexbile gear, flexbile gear and wheel composition inside engaged gear transmission just; Screw-drive mechanism is made up of screw rod and slip nut, and the axle of flexbile gear is connected by screw with screw rod, and the right bar of screw rod and the internal thread of slip nut are spirally connected; Elastic mechanism is made up of slip nut, nut and ball, and fixed by nut is on slip nut, and ball is positioned at the center between slip nut and nut;
2) control circuit is made up of power supply, A/D change-over circuit, selector switch, the input end of analog signal of A/D change-over circuit, ALE end, startup termination power, CLK holds external pulse signal source, and switch is selected in the data output end selecting, and selector switch is connected with the input of motor again.
2. nanoscale linear motor as claimed in claim 1, the thin axle head that it is characterized in that said wave producer is connected by screw with right half a coupler, just through hole is established at the wheel center, the thick axle head of wave producer is interspersed in the through hole of firm wheel, the external tooth of the flared end of flexbile gear and the internal tooth bridle joint of just having taken turns, the flared end of flexbile gear is between the disc bar end of internal tooth of just having taken turns and wave producer.
3. nanoscale linear motor as claimed in claim 1 is characterized in that power supply is 5~14V, and the A/D change-over circuit adopts ADC0809 integrated circuit (IC) chip, the input end of analog signal IN of chip D, V CCEnd, ALE end, START end are connected the data output end D of chip with power supply E 0~D 7Be connected with 8 selector switches.
CN 98216753 1998-07-14 1998-07-14 Nanometer-grade linear electric motor Expired - Fee Related CN2340120Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 98216753 CN2340120Y (en) 1998-07-14 1998-07-14 Nanometer-grade linear electric motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 98216753 CN2340120Y (en) 1998-07-14 1998-07-14 Nanometer-grade linear electric motor

Publications (1)

Publication Number Publication Date
CN2340120Y true CN2340120Y (en) 1999-09-22

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CN 98216753 Expired - Fee Related CN2340120Y (en) 1998-07-14 1998-07-14 Nanometer-grade linear electric motor

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CN (1) CN2340120Y (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101709770B (en) * 2009-07-01 2011-06-15 中国科学院光电研究院 Transmission mechanism
CN102591368A (en) * 2012-03-15 2012-07-18 无锡瑞迪声科技有限公司 Anti-interference accurate nanometer displacement trigger
CN109831058A (en) * 2019-01-24 2019-05-31 中国科学院长春光学精密机械与物理研究所 A kind of displacement actuator

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101709770B (en) * 2009-07-01 2011-06-15 中国科学院光电研究院 Transmission mechanism
CN102591368A (en) * 2012-03-15 2012-07-18 无锡瑞迪声科技有限公司 Anti-interference accurate nanometer displacement trigger
CN109831058A (en) * 2019-01-24 2019-05-31 中国科学院长春光学精密机械与物理研究所 A kind of displacement actuator

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