CN2306570Y

CN2306570Y - Fixing mechanism for wafer

Info

Publication number: CN2306570Y
Application number: CN 97221047
Authority: CN
Inventors: 范宏光; 黄国洲; 李志中
Original assignee: Industrial Technology Research Institute ITRI
Current assignee: Industrial Technology Research Institute ITRI
Priority date: 1997-07-08
Filing date: 1997-07-08
Publication date: 1999-02-03
Anticipated expiration: 2007-07-08

Abstract

The utility model relates to a fixing mechanism for wafers, which comprises a wafer box cover, a fixing mechanism, a wafer vessel and a wafer box chassis, wherein the fixing mechanism is a die set of a link mechanism and is arranged on the inner side of the wafer box cover, and the link mechanism comprises a base rod, a sliding rod, a lower connecting rod, a front connecting rod and an upper connecting rod. When wafers are arranged in the wafer vessel, the wafer box cover is covered, and the sliding rod of the fixing mechanism in the wafer box contacts the wafer box chassis; under the action of the base rod, the lower connecting rod, the front connecting rod and the sliding rod, the connecting rods of the fixing mechanism are braced wholly, so the alignment of the wafers on the wafer vessel is accomplished and the wafers are positioned and fixed.

Description

The wafer fixed mechanism

The utility model is to be a kind of wafer fixed mechanism, in particular to a kind of linkage that utilizes, with to store, the wafer of collection does location and fixing, makes it to preserve perfect, cracky damages; The composition that it is main is to comprise a pair of wafer fixed mechanism, wafer lid, brilliant boat, wafer cassette chassis, by the collocation of said modules, can do appropriate collection and fixing to wafer, so that when taking out use, obtain a wafer as excellent as before, for use.

Progress along with integrated circuit technique, integrated level is more and more higher recently, and processing speed is also more and more faster, and function is also more and more many, especially along with integrated circuit is applied to all spectra gradually, electronic computer, communication tool, industrial instrumentation machine and be applied to consumer applications etc. such as; Make and the manufacturing industry of integrated circuit become the backbone industry the same with iron and steel.That is to say that integrated circuit has become all industry breath of lifes, obviously the importance of integrated circuit will more and more come into one's own from now on.

The manufacture method of integrated circuit is the same with transistorized manufacture method, be suitable for a large amount of productions, this is because adopt what is called processing mode by the gross, can be with most the basic wafers that constitute integrated circuit itself, be formed at a cause among the wafer simultaneously, number by a wafer that wafer obtained is got over for a long time, and its economy is also with regard to relative improve.

Wafer manufacturing technology now is considerably ripe, makes industrial application quite generally reach facility; , be an extremely important problem on the wafer application so with regard to the storage and the collection aspect of wafer; The purpose that wafer is fixing, complete in the collection of guaranteeing wafer, do not have situation damaged, fracture; The purpose of collection is to be to guarantee that wafer is not subjected to the pollution of dust.

Known processing wafer collection, the relevant creation that stores only briefly are described below:

Known 1. is that application case number is 83200533 patent case, this creation is to be one " wafer packaging protecting box ", the function of its creation is the collection protection box that is to provide a wafer, wafer is to put inner box inside, and the inner box outer rim has been cut several grooves, for the usefulness that installs and take out wafer; Inner box is placed in the outter box; there is a lid upper end; wafer is preserved, stored to pattern by its sealing; though this method is quite simple, the location after so inserting with regard to wafer reaches to fix not to be protected, though make wafer in the protection box effect that prevents outside dust pollution be arranged; but be easy to because of vibration, rock; cause the breakage of inner wafer, or because of the friction between wafer generates dust, so extremely undesirable.

Other has a known relevant creation, and known 2. is that application case number is 4815912 patent case, and this case is to be the mechanism of body frame structure with one or four connecting rods; This creation is the wafer that will be placed in the wafer cassette, to be arranged at the quadric chain in the wafer lid, with it location and fixing; Because this quadric chain is when wafer cassette housing lid wafer cassette chassis, passes out four connection rod set synchronously, and, pass not to the wafer of location, make wafer be able to device to the location and fixing with the face contact form by the panel of four connection rod set; But panel contacts with the wafer of protrusion, is the peak for the wafer outer rim, and the spacing of panel and wafer is less, and it is fashionable to be easy to the wafer cassette housing, and panel touches to the wafer that protrudes, and causes wafer scratch or damage, and is quite undesirable; Simultaneously, the two connecting rod bottoms that quadric chain contacts with the wafer cassette chassis, respectively be provided with a roller, to help the passing of connecting rod, roller slippage in response to the fixing demand of wafer when the connecting rod lower end is in the slipping, in the contact end, easily produce dust, will cause bad influence collecting fixing wafer.

The wafer fixed bin and the device of commonly seeing, the pattern that they are all kinds of, by following statement, still there is remarkable shortcoming so far in sequitur.

In view of this, the purpose of this utility model is, provides a kind of at above-mentioned shortcoming, and the wafer fixed mechanism is made a brand-new design improved, and improvement is used it with linkage, develops a novel wafer fixed mechanism.

The utility model wafer fixed mechanism, the purpose of its setting are that wafer in the wafer cassette is fixing not to be rocked in order to make, and this action is when closing on wafer cassette and wafer cassette chassis, and the while start is with fixing wafer; Except that must possessing the function that fixedly wafer does not rock, also must avoid producing dust, the wafer of collection in the polluting wafer box.

The utility model wafer fixed mechanism is in wafer lid inside, is provided with two symmetrical fixed mechanisms, and this fixed mechanism is the mechanism of First Five-Year Plan connecting rod; Close when wafer lid and wafer cassette chassis, when carrying out the preservation of wafer and collection, two symmetrical fixed mechanisms, promptly the architectural characteristic that is provided with of its five connecting rod of mat will be pushed the wafer on the brilliant boat, to locating and fixing it; When wafer cassette chassis and wafer lid, when lumping together, the wafer cassette chassis can promote slide bar in the fixed mechanism to rising, whole group five-bar mechanism is strutted, to finish the fixedly purpose of wafer.

In addition, fixed mechanism of the present utility model, be to be installed on the corner that the inboard two-phase adjacency pair of wafer lid claims, be to push to central authorities during its start by the corner, therefore the tolerable wafer protrudes the bigger distance of brilliant boat, in the time of will reducing by wafer lid and the combination of wafer cassette chassis, the situation that causes wafer to break, damage takes place, and wins bigger usage space.

The utility model wafer fixed mechanism, its structure mainly includes wafer lid, fixed mechanism, brilliant boat and wafer cassette chassis, it is characterized in that: fixed mechanism, and it is to be a linkage module, for the location and the fixing usefulness of wafer, be installed on the inboard of wafer lid; Linkage includes pedestal bar, slide bar, lower link, front rod, goes up the connecting rod formation; When the inside of brilliant boat, to insert wafer and store when collecting, close the wafer cassette housing this moment, the slide bar of the fixed mechanism in the wafer lid contacts with the wafer cassette chassis, and slide bar is upwards moved in the pedestal bar, passes out lower link, make the front rod lower end, be subjected to the start of lower link, and tilt to release; Contact with the wafer cassette chassis and stressed passing when slide bar and front rod are same, causes the connecting rod start, the upper end of front rod is passed, treat all to strut, promptly finish the wafer that crystalline substance coils and align to the connecting rod of fixed mechanism, and positioning and fixing it; Wherein wafer lid inside can be provided with two groups or more fixed mechanism application; The fixed mechanism that is provided with in the wafer lid is to be arranged on the corner of wafer lid inside; The front rod of fixed mechanism is to contact with wafer, and the disposable type cladding plate can be set on front rod, when spot is arranged replaceable it; Wherein in the pedestal bar spring can be set, making slide bar reply the action of initial position can be more stable.

In order to enable further to understand characteristics of the present utility model and technology contents, see also following relevant accompanying drawing of the present utility model and detailed description, yet appended graphic reference and the explanation usefulness of only providing not is to be used for the utility model is limited, wherein:

Fig. 1 implements preceding schematic diagram for the utility model

Fig. 2 is the schematic diagram of the utility model after implementing

Fig. 3 is fixed mechanism setting of the present utility model and the relevant schematic diagram of wafer interaction

Fig. 4 is the action schematic diagram of fixed mechanism of the present utility model

At desire collection wafer, must consider the fixing and dustproof problem of wafer earlier; See also Fig. 1 to shown in Figure 4, it is the action schematic diagram for enforcement schematic diagram of the present utility model and fixed mechanism; Wafer 60 is inserted collection in the brilliant boat 40, because order, angle that wafer 60 is put differ, will cause wafer 60 irregular arrangements; Close wafer lid 10 and wafer cassette chassis 50 covers this moment, the

fixed mechanism

20,30 in the wafer lid 10, and the characteristic of its five-bar mechanism of mat, special action pushes wafer 60 into location in the brilliant boat 40 and fixing gradually.

Fixed

mechanism

20,30 for more effectively utilizing its usage space, increases the allowable distance that wafer 60 protrudes brilliant boat 40, is to be arranged at two adjacent corners of wafer lid 10 inside; Because allowable distance strengthens, the status requirement that can make wafer 60 enter brilliant boat 40 reduces, and need not be subject to little space; In addition because the wafer lid 10 inner

fixed mechanisms

20,30 that are provided with, the position of its setting is on two corners, can avoid fashionable with wafer cassette chassis 50 covers, touch and protrude and do not put appropriate wafer 60, cause the damaged and fracture of wafer 60 at wafer lid 10.

See also shown in Fig. 4 a, Fig. 4 b, Fig. 4 c, it is the action schematic diagram for fixed mechanism five connection rod set of the present utility model; Fashionable with wafer cassette chassis 50 covers when wafer lid 10, the fixed mechanism in the wafer lid 10 contacts with wafer cassette chassis 50; It is fashionable to cover, slide bar 75 in the fixed mechanism contacts with wafer cassette chassis 50, make slide bar 75 in the inside of pedestal bar 70 to top offset, and the lower link 80 that will articulate is with it released forward, because of the start of lower link 80, order about the start that front rod 85 lower ends that engage with lower link 80 are subjected to lower link 80 and tilt to release; Treat to contact wafer cassette chassis 50 and stressed passing equally with front rod 85 to slide bar 75, cause connecting rod 90 starts, the upper end of front rod 85 is passed forward, treat all to strut to the connecting rod of fixed mechanism, promptly finish wafer 60 alignment on the brilliant boat 40, and positioning and fixing it.

Because on last connecting rod 90 and the lower link 80, its special motion limits design is arranged, make between each connecting rod, the opposed rotatable angle is restricted, therefore when mechanism action is finished, also reach the dead point of its rotational angle between each connecting rod, whole group fixing machine constitutes a rock-steady structure, can bear the power of all directions, and unlikely collapse.

Fixed

mechanism

20,30 is depended merely on gravity, and the mechanism that start is finished automatically replies original initial condition, but makes its action more stable as considering, can install returning spring 72 additional to use it.

In sum, the utility model is the shortcoming for the known relevant creation of a solution, and reaches the excellence creation of wafer collection, fixed function, and the function that it reached is as follows:

When 1, fixed mechanism contacts with wafer or wafer cassette, be the principle with relative motion, relative velocity therebetween can minimize; Therefore by the dust of the wafer that impacts in the start, also can minimize.

2, because fixed mechanism is the both sides of wafer of being placed in, thereby bigger the allowing of tolerable wafer protrude brilliant boat distance, and the wafer cassette housing is fashionable, and the operating characteristics of mat fixed mechanism is pushed the wafer that protrudes brilliant boat location, fixed.

From the above as can be known, the utility model is with the structural design of clever thought, improves the shortcoming that wafer is in the past fixed, collected, and can be with the application of a linkage, reach on the market collect, the fixedly requirement of wafer.

Above-mentioned specific embodiment is to be used for describing in detail the purpose of this utility model, feature and effect, for the personage who is familiar with this type of skill, according to the above description, may do partly change and modification to this specific embodiment, and not break away from spiritual category of the present utility model.

Claims

1. wafer fixed mechanism, its structure mainly includes wafer lid, fixed mechanism, brilliant boat and wafer cassette chassis, it is characterized in that: fixed mechanism, and it is to be a linkage module, for the location and the fixing usefulness of wafer, be installed on the inboard of wafer lid; Linkage includes pedestal bar, slide bar, lower link, front rod, goes up the connecting rod formation; When the inside of brilliant boat, to insert wafer and store when collecting, close the wafer cassette housing this moment, the slide bar of the fixed mechanism in the wafer lid contacts with the wafer cassette chassis, and slide bar is upwards moved in the pedestal bar, passes out lower link, make the front rod lower end, be subjected to the start of lower link, and tilt to release; Contact with the wafer cassette chassis and stressed passing when slide bar and front rod are same, causes the connecting rod start, the upper end of front rod is passed, treat all to strut, promptly finish the wafer that crystalline substance coils and align to the connecting rod of fixed mechanism, and positioning and fixing it.

2. by the described wafer fixed mechanism of claim 1, it is characterized in that wafer lid inside wherein can be provided with two groups or more fixed mechanism.

3. by the described wafer fixed mechanism of claim 1, it is characterized in that wherein the fixed mechanism that is provided with in the wafer lid is to be arranged on the corner of wafer lid inside.

4. by the described wafer fixed mechanism of claim 1, it is characterized in that wherein the front rod of fixed mechanism is to contact with wafer, and the disposable type cladding plate can be set on front rod, when spot is arranged replaceable it.

5. by the described wafer fixed mechanism of claim 1, it is characterized in that, wherein in the pedestal bar spring can be set, making slide bar reply the action of initial position can be more stable.