CN2251459Y - Diffraction-refraction configuration composite laser beam conversion mirror - Google Patents
Diffraction-refraction configuration composite laser beam conversion mirror Download PDFInfo
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- CN2251459Y CN2251459Y CN 94248242 CN94248242U CN2251459Y CN 2251459 Y CN2251459 Y CN 2251459Y CN 94248242 CN94248242 CN 94248242 CN 94248242 U CN94248242 U CN 94248242U CN 2251459 Y CN2251459 Y CN 2251459Y
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- diffraction
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- 238000006243 chemical reaction Methods 0.000 title abstract description 7
- 239000002131 composite material Substances 0.000 title 1
- 230000009466 transformation Effects 0.000 claims abstract description 28
- 230000003287 optical effect Effects 0.000 claims description 18
- 238000005530 etching Methods 0.000 claims description 10
- 239000011521 glass Substances 0.000 claims description 10
- 239000000203 mixture Substances 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 5
- 230000008569 process Effects 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 238000012545 processing Methods 0.000 abstract description 3
- 230000001131 transforming effect Effects 0.000 abstract description 2
- 238000013329 compounding Methods 0.000 abstract 1
- 238000012994 industrial processing Methods 0.000 abstract 1
- 238000009826 distribution Methods 0.000 description 7
- 239000006185 dispersion Substances 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 238000004377 microelectronic Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 230000000295 complement effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000005482 strain hardening Methods 0.000 description 1
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Abstract
The utility model relates to a light beam transformation mirror in laser processing equipment is particularly useful for using multimode, unstable, high-power laser instrument to carry out the technical field of industrial processing. It is technically characterized by that it is formed from diffraction configuration portion (or component) and refraction configuration portion (or component) through a certain compounding process. The diffraction configuration part (or component) is used for accurately transforming the light beam, and the refraction configuration part (or component) is used for reducing the manufacturing difficulty of the diffraction configuration part and playing a role in compensating achromatism. The utility model discloses simple manufacture, cost are low, its light energy conversion efficiency is high.
Description
The utility model relates to the optical beam transformation mirror in a kind of laser process equipment, particularly is applicable to use multimode, non-steady, technical field that high power laser carries out industrial processes.
Normal multimode, non-steady, the high power laser of using in the Laser Processing, its output beam shape mostly is garden shape, and intensity distributions mostly is the weak accurate Gaussian of the strong periphery in center.Because different processing purpose, object and technology need be to the conversion of making amendment of the shape of above-mentioned light beam and intensity distributions, meet specific requirement after it is adjusted.
State in realization in the prior art of purpose, just like document: Lv Maoyu, optical element is made (cold working part),＜China Machine Press 〉, middle employing aspheric surface of introducing or shaped face shape mirror, make but such transformation glass is difficult, also be difficult for light beam is carried out accurately, complicated conversion: also just like document: " computing mechanism hologram " Tsing-Hua University publishes, 1984, employing hologram and computed hologram described in the P91-165, but such device transform light energy rate is not high enough: another kind is as document: Chen Yansong " physics ", 21, (1992), the binary optical device of introducing in 197, such device is made the stepped profile (rectangular or annular usually) of many depth level through etching on the surface of the optical sheet base of suitable (for example having certain transmitance) (one or two faces), thereby make a kind of converter of pure diffraction configuration, but this converter is when making, it is meticulous that step width in its regional area often requires, cause present etch process can't accomplish (present domestic minimum 2 μ m, external 0.2 μ m), it is restricted that this makes its accuracy and arbitrariness to optical beam transformation.
The purpose of this utility model is the weak point at above-mentioned pure diffraction-type configuration binary optical converter, in order to make transformation glass multimode, non-steady, powerful transforming laser forming shape and intensity distributions can be satisfied the light beam of particular requirement, and the step etching width in the diffraction configuration structure is reduced to the level that technology allows, and has achromatism performance preferably simultaneously, thereby providing a kind of is the mirror of refraction type configuration by a part, and another part is that diffraction-type configuration mirror is formed diffraction one refraction configuration combined type laser beam transformation mirror.
The purpose of this utility model is achieved in that
Select for use wavelength to have the material of good transmitance to do the optical sheet base for light beam to be transformed, the one side of substrate is worn into the sphere that curvature is R with the ordinary optical process technology, the another side of sheet base is made the rectangle stepped profile with 2-64 degree of depth grade with the microelectronics lithographic technique, degree of depth number of degrees the more, then diffraction efficiency is higher.These small steps make nature form numerous ladders, and the position of each ladder and shape also require and decide because they are highly different according to concrete optical beam transformation.
After the refraction and the diffraction of diffraction surfaces of light beam to be transformed by plane of refraction, promptly produce design position, desired corrugated and change mutually, form the predetermined target beam of shape and intensity distributions; When the steady light beam of light beam right and wrong to be transformed, the light spot shape electricity of the target beam after the conversion is relatively stable.
Below in conjunction with drawings and Examples the utility model is elaborated:
Fig. 1 carries out the used cover of the microelectronics etching schematic diagram of totally four (in order be Fig. 1 in 1,2,3,4) masks when being the diffraction configuration part of preparation diffraction-refraction configuration combined type laser beam transformation mirror;
Fig. 2 is diffraction-refraction configuration combined type laser beam transformation mirror along the cross section view on its XOZ plane (5 is ladders among the figure, the 6th, sphere, the 7th, step-like side);
Fig. 3 is diffraction-refraction configuration combined type laser beam transformation mirror along the cross section view on its YOZ plane (8 is ladders among the figure, the 9th, sphere, the 10th, step-like side);
Fig. 4 is the work schematic diagram of diffraction-refraction configuration combined type laser beam transformation mirror.
Fig. 5 is the structural representation of diffraction-second kind of embodiment of refraction configuration combined type laser beam transformation mirror.
Fig. 6 is the structural representation of diffraction-the third embodiment of refraction configuration combined type laser beam transformation mirror.
1, to becoming in the face of claiming to distribute by sheet base etched area center and orthogonal two planes (being above-mentioned XOZ, YOZ plane).
2, the step-like side of each ladder is all towards the plane of symmetry.
3, the position and the shape of ladder is inequality among Fig. 2 and Fig. 3.
Place this transformation glass by Fig. 4 position, light beam to be transformed (among the figure 13) is from a side incident, and through transformation glass (among the figure 11) conversion, outgoing obtains target beam (among the figure 12), and it is shaped as rectangle, and intensity distributions is that the mild periphery in middle part is strong.
Fig. 5 is the structural representation of second kind of embodiment.It is made up of two parts, a part is to use the germanium wafer base, one side is etched with the planar shaped thin slice that distributes as the ladder of Fig. 2 and position distribution depicted in figure 3 and structural feature (among the figure 14, wherein 16 is the surfaces that are etched with diffraction structure) be diffractive part, another part is a convexo-plane spherical lens, be in refractive component (among the figure 15) that two-part plane is glued together mutually, form diffraction-refraction configuration combined type laser beam transformation mirror.The benefit of this structure is that the planar shaped thin slice that is etched with step-like configuration can use duplicated film, thereby reduces cost; Refracted portion can make it have the chromatic dispersion opposite with diffractive part by the selection of material in addition, and after such two parts were compound, complementary offset (or the partial offset) of chromatic dispersion improved transformation glass achromatism performance, increases bandwidth of operation.
Fig. 6 is the structural representation of the third embodiment.It is characterized in that diffractive part (among the figure 17) and refractive component (among the figure 18) separate, on optical axis, place altogether during use, the benefit of this structure is removed diffractive part can use duplicated film, refractive component can be selected the inverse material that looses for use, refractive component also can adopt the biconvex spherical lens, distance variableization between other two parts has increased the flexibility when using, and also can further improve the applicability to the multimode light beam.
The utility model compared with prior art has the following advantages:
1, compare with the transformation glass with aspheric surface or shaped face face shape, described in the utility model Diffraction-the refraction configuration compound transformation glass is the meticulous optics of a kind of structure, (rank Ladder height and the same magnitude of optical wavelength), therefore can carry out accurately light beam, the intricately conversion: Make in addition also easier; When diffraction configuration parts adopt reproduction technology (for example mold pressing) to make, Can make device cheap.
2, compare change described in the utility model with the computed hologram quasi-converter with hologram Changing mirror is a kind of pure position phase inversion device, its light energy use efficiency height.
3, compare with pure diffraction type transformation device, transformation glass described in the utility model is easily made (maybe can make) after adding refraction action, can make the step width of diffraction configuration face become Wide, thus requirement to the etching fineness reduced, thus technically can etching; And reflect Configuration face face shape is sphere, and this also is not difficult to make, and reflecting in addition member can be by the choosing of material Select etc. to make it increase the chromatic dispersion opposite with the chromatic dispersion of diffraction member, like this ought two parts compound tenses, Complementary offset (or the partial offset) of chromatic dispersion improves device achromatism performance, increases its bandwidth of operation.
Claims (4)
1. diffraction-refraction laser beam the transformation glass that is included in an optical sheet base etching step is characterized in that: also be included in another piece optical sheet base and wear into the sphere that curvature is R, two parts plane composition glued together relatively.
2. by the described diffraction of claim 1 one refraction configuration combined type laser beam transformation mirror, it is characterized in that: one the another side of the optical sheet base of etching step to wear into curvature be that the sphere of R is made.
3. by the described diffraction of claim 1 one refraction configuration combined type laser beam transformation mirror, it is characterized in that: one optical sheet base and another piece of the good step of etching wear into the optical sheet base that curvature is R, the plane places on the same optical axis relatively altogether to be formed.
4. by claim 1,2,3 described diffraction one refraction configuration combined type laser beam transformation mirrors, it is characterized in that: the etching step is 2-64 on the optical sheet base.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 94248242 CN2251459Y (en) | 1994-12-26 | 1994-12-26 | Diffraction-refraction configuration composite laser beam conversion mirror |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 94248242 CN2251459Y (en) | 1994-12-26 | 1994-12-26 | Diffraction-refraction configuration composite laser beam conversion mirror |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2251459Y true CN2251459Y (en) | 1997-04-09 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 94248242 Expired - Fee Related CN2251459Y (en) | 1994-12-26 | 1994-12-26 | Diffraction-refraction configuration composite laser beam conversion mirror |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2251459Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104080422A (en) * | 2012-02-02 | 2014-10-01 | 诺华股份有限公司 | Apodized hybrid diffractive-refractive IOL for pseudo-accommodation |
| CN115469383A (en) * | 2022-09-19 | 2022-12-13 | 上海亨临光电科技有限公司 | Achromatic terahertz diffractive lens |
-
1994
- 1994-12-26 CN CN 94248242 patent/CN2251459Y/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104080422A (en) * | 2012-02-02 | 2014-10-01 | 诺华股份有限公司 | Apodized hybrid diffractive-refractive IOL for pseudo-accommodation |
| CN115469383A (en) * | 2022-09-19 | 2022-12-13 | 上海亨临光电科技有限公司 | Achromatic terahertz diffractive lens |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |