CN2226754Y - Inflatable volume indicator for vacuum miniature regulating valve - Google Patents
Inflatable volume indicator for vacuum miniature regulating valve Download PDFInfo
- Publication number
- CN2226754Y CN2226754Y CN95239173U CN95239173U CN2226754Y CN 2226754 Y CN2226754 Y CN 2226754Y CN 95239173 U CN95239173 U CN 95239173U CN 95239173 U CN95239173 U CN 95239173U CN 2226754 Y CN2226754 Y CN 2226754Y
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- CN
- China
- Prior art keywords
- vacuum
- cavity
- fine tuning
- aeration quantity
- restrictor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Measuring Fluid Pressure (AREA)
Abstract
The utility model relates to an aerated quantity indicator for a vacuum fine adjustment valve gate, which can be used for aerated quantity indication and can be directly arranged between original vacuum fine adjustment valve gate and connecting flanges of vacuum equipment. The utility model is composed of a cavity body, a current limiter and a vacuometer, wherein, the both ends of the cavity body are provided with the connecting flanges, and the side face of the cavity body is provided with a vacuometer interface. Wafers opened with stomas, or a cylinder structure with openings, tubules or enclosed porous plugs can be used as the current limiter, and a thermocouple vacuum gauge, an electric resistance vacuometer or a U-shaped oil column vacuometer can be used as the vacuometer. The utility model has the advantages of wide ranges of indication aerated quantity, high sensitivity, low price, simple structure, etc. and is suitable for aeration indication for various vacuum equipment, especially suitable for laboratory use.
Description
The utility model is a kind of device that is used to indicate vacuum fine tuning valve aeration quantity, belongs to the vacuum measurement technical field.
In many vacuum equipments, for example vacuum coating equipment etc. need charge into one or more reacting gas, and requires to keep the mutual proportioning between several gases.Three kinds of inflation methods are arranged at present, the one, adopt the inflation of manual vacuum fine tuning valve, because the rotation scale and the gas flow of this valve do not have corresponding relation, there is not good repeatability, so can't guarantee the accurate proportioning of all gases in the work yet; The 2nd, adopt the inflation of piezoelectricity valve, it adopts the feedback signal of the vacuum meter of vacuum equipment as the fill gas scale of construction, automatically regulate the open amount of piezoelectricity valve, constant with the gaseous tension of keeping aeration quantity or vacuum equipment, because being general pressure, measures by this sky meter, only be fit to the inflation of control pure gas, and the proportioning of uncontrollable multiple gases.The 3rd, adopt the flowmeter inflation, every kind of gas is equipped with a flowmeter, because flowmeter costs an arm and a leg, every flowmeter needs nearly ten thousand yuan, and sensitivity is lower, thereby is not suitable for using in the general vacuum system, usable range is restricted.
The purpose of this utility model is at the deficiencies in the prior art, and a kind of aeration quantity indicator of manual vacuum fine tuning valve is provided, and it can indicate aeration quantity when adopting the inflation of manual vacuum fine tuning valve, so that can guarantee the proportioning of all gases.
The utility model is made up of cavity, restrictor and vacuum meter, the two ends that are characterized in cavity are joint flange, so that be connected with vacuum system with the vacuum fine tuning valve, restrictor is fixed in the cavity, and vacuum meter is connected to the cavity position between the vacuum fine tuning valve joint flange end with restrictor.Restrictor can be fixed in the cavity by rubber sealing ring, perhaps adopts with the close-fitting structure of housing surface to be fixed in the cavity.Restrictor can be made out the disk of aperture, perhaps is the cylindrical structure that has aperture, tubule road or enclose a porous plug.For easy for installation, the flange at cavity two ends is identical with the joint flange of former manual vacuum fine tuning valve, so that can directly insert between former manual vacuum fine tuning valve and the former connecting tube flange.Vacuum meter can adopt all kinds of vacuum meters in principle, considers the price of vacuum meter, generally can adopt thermocouple vacuum gauge or resistance vacuum gauge.Because the danger that hot-cathode ionization gauge exists hot filament to be burnt, thereby generally should not adopt.
The utility model compared with prior art, it can control the proportioning of all gases when adopting the inflation of manual vacuum fine tuning valve, it is high to have simple in structure, use and easy for installation, with low cost, indication aeration quantity wide ranges and sensitivity, inflation indication applicable to various vacuum equipments is particularly suitable for the laboratory and uses.
Fig. 1 is the synoptic diagram of connected mode in principle of work of the present utility model and the system; Fig. 2 is the structural representation of the aeration quantity indicator of employing U-shaped oil column vacuum meter; Fig. 3 is the structural representation of the aeration quantity indicator of employing resistance vacuum gauge.
The utility model can adopt scheme shown in the drawings to realize.Gas in the gas source among Fig. 1 (1) enters the cavity (3) of aeration quantity indicator through vacuum fine tuning valve (2), metering hole through restrictor (4) enters the vacuum system (5) that needs inflation, (6) be the system vacuum meter, (8) be the vacuum meter of aeration quantity indicator, (7) and (9) are the inlet flange and the discharge flange of cavity (3).After vacuum fine tuning valve (2) is opened, when gas flows into vacuum system (5) through cavity (3), because the metering hole throttling of restrictor (4) causes the pressure difference of both sides, hole.Vacuum meter (8) by indicator records the pressure P of cavity (3)
1, the pressure P of vacuum system (5)
2Can measure by system vacuum meter (6).If the conductance of metering hole is C, then can tries to achieve aeration quantity Q and be: Q=C (P
1-P
2), because of P generally speaking
1＞＞P
2So: Q=CP
1, promptly read P
1Value just can be tried to achieve aeration quantity Q.Under the viscous flow state, the conductance C=16d of metering hole
2(liter/second), the balance pressure that requires gas is 1 * 10
-1Handkerchief, the gas flow Q=100 handkerchief liter/second that then need charge into, if select metering hole diameter d=0.25cm for use, can be regarded as conductance C=1 liter/second, so cavity indicated pressure P
1=100 handkerchiefs.When tolerance is sent in the fine tuning valve change, the pressure P in the cavity (3)
1Need could stablize again through the general time, the big young pathbreaker of the conductance C of metering hole influences cavity internal pressure P
1Stabilization time.If the cumulative volume of cavity (3) and vacuum meter (8) is V, timeconstant=V/C (second) then.When the V=0.1 liter, C=1 liter/second, aeration quantity changes at 10% o'clock, P
199% required time that reaches new stationary value is t=2.3 τ=0.23 second.For fear of regulating overlong time, the minimum value of conductance C should not be lower than 0.1 liter/second.Vacuum equipment is in the actual process flow process, basically all be fixed in the specific aeration quantity scope and use, in order to make vacuum meter (8) can be in the optimum measurement range, so that improve the pointing accuracy of aeration quantity, usually the metering hole of restrictor (4) is made the changeable type structure, adopt the metering hole that adapts for different gas inflated amounts.For the vacuum equipment of some big aeration quantitys, comprise the pumping speed determinator of vacuum pump etc., pressure P in the cavity
1Can be up to more than the hundreds of handkerchief, can adopt scheme shown in Figure 2 this moment, and that the vacuum meter of indicator can adopt is simple in structure, the U-shaped oil column vacuum meter of low price and dependable performance; The size of flange among the figure (10) and (13) can match with the product G W-J30T and the GW-J200T vacuum fine tuning valve of Shanghai valve three factories; O-ring seal (11) is arranged around the narrow meshed cylindric restrictor (12), and O-ring seal (11) plays fixation with the friction force of cavity inner wall; Cavity has two interfaces, be connected with measuring tube (20) with the pressure reference tube (18) of U-shaped oil column vacuum meter respectively, be omitted among the other parts figure of U-shaped oil column vacuum meter, (14) be rubber sealing ring, (15) be joint, (16) are gland nut, and (17) are compressing tablet, (19) be O-ring seal, cylindric restrictor (12) can be replaced with corresponding size according to the size of aeration quantity.The upright position that this aeration quantity indicator should keep oil column when installing.Adopt the aeration quantity indicator of resistance vacuum gauge can adopt structure shown in Figure 3, the middle part of cavity has the interface that is connected with resistance vacuum gauge; Flange (21) is connected with vacuum system with fine tuning valve respectively with (24), and its size can match with GW-J30T and GW-J200T fine tuning valve; (22) be the resistance vacuum gauge heated filament, (23) are the resistance vacuum gauge stem stem; Narrow meshed disk shape restrictor (26) is fixing by gland nut (25), and (27) are rubber sealing ring.When the vacuum fine tuning valve was closed, resistance vacuum gauge formula aeration quantity indicator also can be used as the vacuum measurement indication of vacuum equipment.The scale value of aeration quantity indicator can the marked gas flow, but the aeration quantity of many vacuum equipments is to be the monitoring benchmark of technological process with the vacuum meter reading on this equipment, the aeration quantity indicator of this moment is only indicated usefulness relatively, and does not require the correctness of absolute value of the vacuum meter reading of the conductance of its restrictor and indicator.
Claims (5)
1, a kind of vacuum fine tuning valve aeration quantity indicator that is used to indicate vacuum fine tuning valve aeration quantity, form by cavity, restrictor and vacuum meter, the two ends that it is characterized in that cavity are joint flange, restrictor is fixed in the cavity, and vacuum meter is connected to the cavity position between the vacuum fine tuning valve joint flange end with restrictor.
2, vacuum fine tuning valve aeration quantity indicator according to claim 1 is characterized in that restrictor is fixed in the cavity by rubber sealing ring, or employing and the close-fitting structure of housing surface are fixed in the cavity.
3, vacuum fine tuning valve aeration quantity indicator according to claim 1 is characterized in that vacuum meter adopts thermocouple vacuum gauge, resistance vacuum gauge or U-shaped oil column vacuum meter.
4, vacuum fine tuning valve aeration quantity indicator according to claim 1 and 2 is characterized in that restrictor is out the disk of aperture, or is the cylindrical structure that has aperture, tubule road or enclose a porous plug.
5, vacuum fine tuning valve aeration quantity indicator according to claim 4 is characterized in that restrictor is to make interchangeable structure by traffic requirement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN95239173U CN2226754Y (en) | 1995-02-05 | 1995-02-05 | Inflatable volume indicator for vacuum miniature regulating valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN95239173U CN2226754Y (en) | 1995-02-05 | 1995-02-05 | Inflatable volume indicator for vacuum miniature regulating valve |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2226754Y true CN2226754Y (en) | 1996-05-08 |
Family
ID=33881022
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN95239173U Expired - Fee Related CN2226754Y (en) | 1995-02-05 | 1995-02-05 | Inflatable volume indicator for vacuum miniature regulating valve |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2226754Y (en) |
-
1995
- 1995-02-05 CN CN95239173U patent/CN2226754Y/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |