CN2218627Y - Vacuum suction disc type porous sheet stacking machine - Google Patents
Vacuum suction disc type porous sheet stacking machine Download PDFInfo
- Publication number
- CN2218627Y CN2218627Y CN94238430U CN94238430U CN2218627Y CN 2218627 Y CN2218627 Y CN 2218627Y CN 94238430 U CN94238430 U CN 94238430U CN 94238430 U CN94238430 U CN 94238430U CN 2218627 Y CN2218627 Y CN 2218627Y
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- CN
- China
- Prior art keywords
- sucker
- sucking disc
- sheet
- vacuum
- panel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model relates to a vacuum suction disc type porous sheet stacking machine which is composed of a sheet feeding apparatus and a sheet sucking disc. The utility model is composed of a machine shell, a sheet feeding wheel, a positioning toothed rack, a sheet pipe, a push rod, a piston rod, a piston sleeve, a vacuum pump, an electric motor and an electric box. The sheet sucking disc is mainly composed of a hand lever, a panel, the sucking disc, a sealing sleeve and a vacuum tube. The utility model is adopted, and as the sheet feeding apparatus which is corresponding to a planet wheel of grinding equipment is adopted, and sheets are fed through the sheet sucking disc, an auxiliary apparatus of the grinding equipment, and the auxiliary apparatus has the advantages of convenient use, high sheet stacking efficiency and reasonable structure and design and can reduce the labour intensity greatly and shorten the processing time.
Description
The utility model relates to a kind of auxiliary equipment that is used for small-sized disk processing grinding equipment such as semiconductor chip, wafer, silicon chip, specifically refers to a kind of vacuum chuck typed porus code chip machine.
The processing of small-sized disks such as conventional semiconductor sheet, wafer, silicon chip, the general milling apparatus that adopts, when attrition process, generally there is not auxiliary equipment, artificial chip is all adopted in chip work in its process, cause that the process work efficiency is low, the time is long, labour intensity is big, can't be engaged in production in enormous quantities, as worked crystal sheet on four road grinders, need manually be that its chip time accounts for 2/3rds of whole process time in the film perforation of wafer sign indicating number on erratic star wheel of 1 millimeter of 8 millimeter, thickness less than with 900 diameters at every turn.
The purpose of this utility model just is to provide a kind of easy to use, chip efficient height, reasonable in design, can reduces labor intensity largely, shorten servicing unit---the vacuum chuck typed porus code chip machine of the milling apparatus of process time, thereby solve the existing in prior technology deficiency effectively.
The purpose of this utility model realizes in the following manner: a kind of vacuum chuck typed porus code chip machine of being made up of film feeding apparatus and clip-sucking disc, it is characterized in that film feeding apparatus is mainly by casing, chip-feeding wheel, the location tooth bar, the sheet pipe, push rod, piston rod, piston bush, vavuum pump, motor and electrical equipment box are formed, wherein chip-feeding wheel is provided with some heel piece pipes, the sheet pipe is arranged and is arranged corresponding with the film perforation of the erratic star wheel of corresponding milling apparatus, in every heel piece pipe all device spring and push rod are arranged, push rod be fixed on piston rod be connected as a single entity take over a business on, take over a business and also be provided with three uniform backstays on the periphery, piston rod matches with piston bush on being fixed on the casing dividing plate, around the panel of chip-feeding wheel, be provided with the location tooth bar, returning apparatus has the electrical equipment box to reach by motor-operated vavuum pump in film feeding apparatus, and link to each other with clip-sucking disc by exhaust tube, clip-sucking disc is mainly by handle, panel, sucker, sealing shroud and vacuum tube are formed, wherein be provided with vacuum chamber in the sucker, this chamber is connected with exhaust tube on the film feeding apparatus by vacuum tube, the panel that the surface is evenly equipped with some suction film perforations is fixed on the sucker by screw, relative fixed between vacuum tube and the handle, this Guan Zaiyu sucker connection disposes the sealing shroud that tape spool holds.
Adopt vacuum chuck typed porus code chip machine of the present utility model, owing to adopted and the corresponding film feeding apparatus of milling apparatus erratic star wheel, and take feed by clip-sucking disc, thereby a kind of easy to use, chip efficient height, reasonable in design are provided effectively, can have reduced labor intensity largely, shorten the servicing unit of the milling apparatus of process time, solve the existing in prior technology deficiency effectively.
Description of drawings:
Fig. 1 is the real structural representation of film feeding apparatus of the present utility model;
Fig. 2 is a clip-sucking disc structural representation of the present utility model;
Fig. 3 is a chip-feeding wheel structural representation of the present utility model;
Fig. 4 is a clip-sucking disc panel construction schematic diagram of the present utility model.
Wherein: 1-film feeding apparatus, 2-casing, 3-control knob, 4-chip-feeding wheel, 5-location tooth bar, 6-sheet pipe, 7-push rod, 8-take over a business, 9-piston rod, 10-piston bush, 11-vavuum pump, 12-motor, 13-electrical equipment box, 14-exhaust tube, 15-handle, 16-vacuum chamber, 17-panel, 18-sucker, 19-sealing shroud, 20-vacuum tube, 21-backstay, 22-spring, 23-suction film perforation.
The utility model is described in further detail below in conjunction with embodiment.
Accompanying drawing provides a kind of embodiment of vacuum chuck typed porus code chip machine.As shown in the figure, the utility model mainly is made up of film feeding apparatus (1) and clip-sucking disc, its film feeding apparatus (1) is mainly by casing (2), chip-feeding wheel (4), location tooth bar (5), sheet pipe (6), push rod (7), piston rod (9), piston bush (10), vavuum pump (11), motor (12) and electrical equipment box (13) are formed, wherein chip-feeding wheel (4) is made up of two parts up and down, upper panel is 4 or 5 annulus, its outer shroud is provided with three uniform positioning pipes, all be fixed with some heel piece pipes (6) on other rings, sheet pipe (6) is arranged and is arranged corresponding with the film perforation of the erratic star wheel of corresponding milling apparatus, in every heel piece pipe all device spring (22) and push rod (7) are arranged, push rod (7) be fixed on its underpart with taking over a business on (8) that piston rod (9) is connected as a single entity, take over a business also to be provided with on (8) periphery three uniform and the corresponding backstays of above-mentioned positioning pipe (21), so that take over a business and push rod moves up and down in fixing position, reach the purpose of sending sheet; Piston rod (9) matches with piston bush (10) on being fixed on casing (2) dividing plate, to form the power source of film feeding apparatus (1), around the panel of chip-feeding wheel (4), be provided with two sections location tooth bars (5), the gear ring of this tooth bar and clip-sucking disc matches, the vavuum pump (11) that returning apparatus has electrical equipment box (13) and driven by motor (12) in the casing of film feeding apparatus, this pump links to each other with clip-sucking disc by exhaust tube (14); Clip-sucking disc is mainly by handle (15), panel (17), sucker (18), sealing shroud (19) and vacuum tube (20) are formed, wherein be provided with vacuum chamber (16) in the sucker (18), this chamber is connected with exhaust tube (14) on the film feeding apparatus by vacuum tube (20), the panel (17) that the surface is evenly equipped with some suction film perforations (23) is fixed on the sucker (18) by screw, relative fixed between vacuum tube (20) and the handle (15), this Guan Zaiyu sucker connection disposes the sealing shroud (19) that tape spool holds, sucker (18) handle (15) rotation relatively, the sucker edge is provided with the gear ring that matches with corresponding milling apparatus.
Above-mentioned stacking machine in use, make the certain pull of vacuum of generation in the clip-sucking disc by vavuum pump, the wear down sheet for the treatment of in each sheet pipe is adsorbed on the sucker panel on chip-feeding wheel with installing in advance, then clip-sucking disc is moved on the erratic star wheel of grinder, since inhale on the clip-sucking disc film perforation arrange with erratic star wheel on the abrasive disc hole arrange identical, thereby can once the hole on the erratic star wheel be covered with (180, every grinder has five erratic star wheels), thereby significantly improve chip speed, reduce labor intensity, enhance productivity.
Claims (3)
1, a kind of vacuum chuck typed porus code chip machine of forming by film feeding apparatus (1) and clip-sucking disc, it is characterized in that film feeding apparatus (1) is mainly by casing (2), chip-feeding wheel (4), location tooth bar (5), sheet pipe (6), push rod (7), piston rod (9), piston bush (10), vavuum pump (11), motor (12) and electrical equipment box (13) are formed, wherein chip-feeding wheel (4) is provided with some heel piece pipes (6), sheet pipe (6) is arranged and is arranged corresponding with the film perforation of the erratic star wheel of corresponding milling apparatus, in every heel piece pipe all device spring (22) and push rod (7) are arranged, push rod (7) is fixed on and taking over a business on (8) that piston rod (9) is connected as a single entity, take over a business and also be provided with three uniform backstays (21) on (8) periphery, piston rod (9) cooperates with piston bush (10) on being fixed on casing (2) dividing plate, around the panel of chip-feeding wheel (4), be provided with location tooth bar (5), the vavuum pump (11) that returning apparatus has electrical equipment box (13) and driven by motor (12) in film feeding apparatus, and link to each other with clip-sucking disc by exhaust tube (14), this clip-sucking disc mainly is by handle (15), panel (17), sucker (18), sealing shroud (19) and vacuum tube (20) are formed, be provided with vacuum chamber (16) in its sucker, this chamber is connected with exhaust tube (14) on the film feeding apparatus by vacuum tube (20), the panel (17) that the surface is evenly equipped with some suction film perforations (23) is fixed on the sucker by screw, relative fixed between vacuum tube (20) and the handle (15), this Guan Zaiyu sucker connection disposes the sealing shroud (19) that tape spool holds.
2, vacuum chuck typed porus code chip machine according to claim 1, it is characterized in that chip-feeding wheel (4) is made up of two parts up and down, upper panel is 4 or 5 annulus, its outer shroud is provided with three uniform positioning pipes, all be fixed with some heel piece pipes (6) on other rings, sheet pipe (6) is arranged and is arranged corresponding with the film perforation of the erratic star wheel of corresponding milling apparatus, in every heel piece pipe all device spring (22) and push rod (7) are arranged, push rod (7) be fixed on its underpart with taking over a business on (8) that piston rod (9) is connected as a single entity, take over a business also to be provided with on (8) periphery three uniform and the corresponding backstays of above-mentioned positioning pipe (21).
3, vacuum chuck typed porus code chip machine according to claim 1, it is characterized in that clip-sucking disc is mainly by handle (15), panel (17), sucker (18), sealing shroud (19) and vacuum tube (20) are formed, wherein be provided with vacuum chamber (16) in the sucker (18), this vacuum chamber is connected with exhaust tube (14) on the film feeding apparatus by vacuum tube (20), the panel (17) that the surface is evenly equipped with some suction film perforations (23) is fixed on the sucker (18) by screw, relative fixed between vacuum tube and the handle (15), this Guan Zaiyu sucker connection disposes the sealing shroud (19) that tape spool holds, sucker (18) handle (15) rotation relatively, the sucker edge is provided with the gear ring that matches with corresponding milling apparatus.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN94238430U CN2218627Y (en) | 1994-10-19 | 1994-10-19 | Vacuum suction disc type porous sheet stacking machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN94238430U CN2218627Y (en) | 1994-10-19 | 1994-10-19 | Vacuum suction disc type porous sheet stacking machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2218627Y true CN2218627Y (en) | 1996-01-31 |
Family
ID=33845846
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN94238430U Expired - Fee Related CN2218627Y (en) | 1994-10-19 | 1994-10-19 | Vacuum suction disc type porous sheet stacking machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2218627Y (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100449726C (en) * | 2003-12-31 | 2009-01-07 | 英特尔公司 | Support system for semiconductor wafers and methods thereof |
| CN103426625A (en) * | 2013-07-19 | 2013-12-04 | 青岛云路新能源科技有限公司 | Automatic sheet stacking machine |
| CN103894924A (en) * | 2012-12-25 | 2014-07-02 | 株式会社迪思科 | Negative pressure generation device |
| CN110615623A (en) * | 2019-10-24 | 2019-12-27 | 湖南玉丰真空科学技术有限公司 | Getter feeding device for vacuum glass production line |
-
1994
- 1994-10-19 CN CN94238430U patent/CN2218627Y/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100449726C (en) * | 2003-12-31 | 2009-01-07 | 英特尔公司 | Support system for semiconductor wafers and methods thereof |
| US7757363B2 (en) | 2003-12-31 | 2010-07-20 | Intel Corporation | Support system for semiconductor wafers |
| CN103894924A (en) * | 2012-12-25 | 2014-07-02 | 株式会社迪思科 | Negative pressure generation device |
| CN103426625A (en) * | 2013-07-19 | 2013-12-04 | 青岛云路新能源科技有限公司 | Automatic sheet stacking machine |
| CN103426625B (en) * | 2013-07-19 | 2016-02-10 | 青岛云路新能源科技有限公司 | Pole automatic stacking-piece machine |
| CN110615623A (en) * | 2019-10-24 | 2019-12-27 | 湖南玉丰真空科学技术有限公司 | Getter feeding device for vacuum glass production line |
| CN110615623B (en) * | 2019-10-24 | 2023-12-29 | 湖南玉丰真空科学技术有限公司 | Getter supply device for vacuum glass production line |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |