CN221594817U

CN221594817U - Test sample platform and test equipment thereof

Info

Publication number: CN221594817U
Application number: CN202323241421.7U
Authority: CN
Inventors: 留灵锴; 侯小刚; 吴杰; 贾梦虹
Original assignee: Shanghai Microspectrum Testing Technology Group Co ltd; Yongjiang Laboratory Microspectrum Zhejiang Technical Service Co ltd; Yongjiang Laboratory
Current assignee: Shanghai Microspectrum Testing Technology Group Co ltd; Yongjiang Laboratory Microspectrum Zhejiang Technical Service Co ltd; Yongjiang Laboratory
Priority date: 2023-11-29
Filing date: 2023-11-29
Publication date: 2024-08-23
Anticipated expiration: 2033-11-29

Abstract

The utility model discloses a test sample table, which comprises a mounting seat and a sample seat, wherein the mounting seat is used for mounting the sample seat, the sample seat is used for bearing a test sample, the test sample table further comprises a base, a movable seat and a supporting seat, the mounting seat is connected with the base in a sliding manner, the lower end of the base is fixedly connected with the movable seat, the movable seat is connected with the supporting seat in a rotating manner through a rotating shaft, an adjusting knob is arranged on the side wall of the movable seat, and the lower end of the supporting seat is fixedly connected with an inserting rod. According to the utility model, after the FIB sample preparation is completed, the FIB test table can be directly arranged on the TKD test table to perform the next test without disassembling the sample, so that the operation difficulty and the test risk of staff are greatly reduced, a plurality of samples can be loaded at one time, the repeated sample loading process is saved, the working efficiency is greatly improved, and if the sample preparation is not ideal in the TKD test process, the sample needs to be reworked or added, the sample can be directly transferred back to the FIB test table, and the test repeatability is improved.

Description

Test sample platform and test equipment thereof

Technical Field

The utility model relates to the technical field of detection, in particular to a test sample table and test equipment thereof.

Background

FIB (Focused Ion beam) technology is a main method for preparing a transmission electron microscope sample, and TKD (Transmission Kikuchi Diffraction, transmission chrysanthemum Chi Yanshe) technology is a detection means for performing crystallographic analysis on a transmission sample by using a conventional EBSD (Electron Back Scatter Diffraction, back scattering electron diffraction) probe. In most cases, no EBSD probe is equipped in FIB focused ion beam microscopy. For FIB-TKD detection projects, the test of TKD requires transfer of the sample from the FIB to an EBSD equipped scanning electron microscope, so FIB sample preparation and TKD testing require two separate test sample stations. The sample size obtained by FIB is only a few micrometers, the thickness is only a few tens of nanometers, and the sample is welded on a copper wire. In the transferring process between the FIB and TKD test sample platforms, a tester needs to use tweezers to finish sampling and loading, and the process can cause the falling of a copper net and the accidental injury of the sample by the tweezers, so that the sample is easy to deform and fall off.

Disclosure of utility model

In order to solve the technical problems, the utility model provides a test sample table and test equipment thereof, so as to solve the problem of inconvenient sample transfer in the test process.

In a first aspect, the utility model provides a test sample stage comprising a mounting seat and a sample seat, wherein the mounting seat is used for mounting the sample seat, the sample seat is used for bearing a test sample, the test sample stage is characterized by also comprising a base, a movable seat and a supporting seat, the mounting seat is connected with the base in a sliding manner, the lower end of the base is fixedly connected with the movable seat, the movable seat is connected with the supporting seat in a rotating manner through a rotating shaft, the side wall of the movable seat is provided with an adjusting knob, and the lower end of the supporting seat is fixedly connected with an inserting rod.

Preferably, the movable seat is provided with a screw hole corresponding to the adjusting knob.

Preferably, the sample holder is provided with a plurality of sample grooves, a plurality of sample grooves extend along the length direction of the sample holder, and the side wall of the sample holder is provided with a groove.

Preferably, a clamping groove is formed in the front end of the mounting seat, and the clamping groove is used for inserting and fixing the sample seat.

Preferably, a screw is mounted on the side wall of the mounting seat, which is located at the clamping groove, and the screw is in threaded connection with the mounting seat.

Preferably, a supporting piece is arranged below the clamping groove on the mounting seat, the sample seat is placed in the clamping groove, and the supporting piece is used for supporting the bottom end of the sample seat.

Preferably, the lower extreme of mount pad is fixed with the draw runner, the mount pad is located the both sides department of draw runner installs the hexagon socket head cap screw, just the mount pad corresponds the screw that runs through is seted up to hexagon socket head cap screw.

Preferably, a sliding groove is formed at the upper end of the base corresponding to the sliding strip, and the sliding strip is connected with the sliding groove in a sliding manner.

In a second aspect, the utility model provides a test device, which comprises the test sample platform and further comprises an FIB test platform, wherein the test sample platform is matched with the FIB test platform for use, a first socket is arranged at the upper end of the FIB test platform, and a first jack is arranged corresponding to the inserted link.

In a third aspect, the utility model provides a test device, which comprises the test sample platform and further comprises a TKD test platform, wherein the test sample platform is matched with the TKD test platform for use, a second socket is arranged at the upper end of the TKD test platform, and a second jack is arranged on the second socket corresponding to the inserted link.

The utility model has the technical effects and advantages that:

according to the utility model, through the mounting seat, the base and the supporting seat, the test sample table can be directly arranged on other test tables after sample preparation is completed, so that the next test is performed, the sample is not required to be disassembled, the operation difficulty and the test risk of staff are greatly reduced, and the provided adjusting knob is convenient for adjusting the inclination angles of the base and the mounting seat and is convenient for test use.

Drawings

FIG. 1 is a schematic view of a test sample station according to a preferred embodiment of the present application;

FIG. 2 is a front view of a test specimen mount provided in a preferred embodiment of the present application;

FIG. 3 is a schematic view of the structure of a sample holder in a test sample station according to a preferred embodiment of the present application;

FIG. 4 is a schematic diagram of a test sample platform mounted on a FIB test platform according to a preferred embodiment of the present application;

Fig. 5 is a schematic structural view of a test specimen stage according to a preferred embodiment of the present application mounted on a TKD test stage.

In the figure: 1. a mounting base; 11. a clamping groove; 12. a screw; 13. an inner hexagon bolt; 14. a support sheet; 15. a slide bar; 2. a base; 21. a chute; 3. a movable seat; 4. a support base; 41. a rod; 5. an adjustment knob; 6. a FIB test station; 61. a first socket; 62. a first jack; 7. a TKD test stand; 71. a second socket; 72. a second jack; 8. a sample holder; 81. a sample tank; 82. a groove.

Detailed Description

The utility model will be described in further detail with reference to the drawings and the detailed description. The embodiments of the utility model have been presented for purposes of illustration and description, and are not intended to be exhaustive or limited to the utility model in the form disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiments were chosen and described in order to best explain the principles of the utility model and the practical application, and to enable others of ordinary skill in the art to understand the utility model for various embodiments with various modifications as are suited to the particular use contemplated.

Referring to fig. 1-2, in this embodiment, a test sample table is provided, including a mounting seat 1 and a sample seat 8, the mounting seat 1 is used for mounting the sample seat 8, the sample seat 8 is used for bearing a test sample, further including a base 2, a movable seat 3 and a supporting seat 4, the mounting seat 1 is slidably connected with the base 2, the lower end of the base 2 is fixedly connected with the movable seat 3, the movable seat 3 is rotationally connected with the supporting seat 4 through a rotating shaft, an adjusting knob 5 is mounted on a side wall of the movable seat 3, the adjusting knob 5 includes a knob and a screw, a screw hole is formed in the movable seat 3 corresponding to the adjusting knob 5, the movable seat 3 and the supporting seat 4 can be relatively fixed by screwing the adjusting knob 5, and then the inclination angle of the base 2 and the mounting seat 1 can be conveniently adjusted, and the inserting rod 41 is fixedly connected with the lower end of the supporting seat 4.

In this embodiment, the test sample stage is used in cooperation with the FIB test stage 6, and a first socket 61 is provided at the upper end of the FIB test stage 6, and the first socket 61 is provided with a jack corresponding to the plug rod 41.

The test sample platform cooperates TKD testboard 7 to use, and TKD testboard 7 upper end is provided with second socket 71, and second socket 71 is provided with the jack corresponding to inserted link 41.

The draw-in groove 11 has been seted up to mount pad 1 front end, the draw-in groove 11 is used for inserting sample holder 8, screw 12 is installed to the lateral wall that mount pad 1 is located draw-in groove 11 department, screw 12 threaded connection mount pad 1, mount pad 1 is located the below department of draw-in groove 11 and is provided with supporting plate 14, place sample holder 8 in draw-in groove 11, supporting plate 14 is used for supporting the bottom of sample holder 8, twist screw 12 get into recess 82, can fix sample holder 8 on mount pad 1, mount pad 1 lower extreme is fixed with slide 15, mount pad 1 is located the both sides department of slide 15 and installs hexagon socket head cap screw 13, and mount pad 1 corresponds hexagon socket head cap screw 13 and has seted up the screw that runs through.

In this embodiment, a sliding groove 21 is provided at the upper end of the base 2 corresponding to the sliding bar 15, the sliding bar 15 is slidably connected with the sliding groove 21, the sliding bar 15 slides along the sliding groove 21, the front-back position of the mounting seat 1 can be adjusted, the socket head cap bolts 13 are screwed, the bottom end of the socket head cap bolts abuts against the upper end face of the base 2, and the mounting seat 1 and the base 2 can be relatively fixed.

Referring to fig. 3, the sample holder 8 is provided with a plurality of sample grooves 81 for holding samples, the plurality of sample grooves 81 extend along the length direction of the sample holder 8, and the side wall of the sample holder 8 is provided with a groove 82.

In another embodiment, referring to fig. 4, the present utility model provides a test apparatus, which includes the above-mentioned test sample stage, and further includes a FIB test stage 6, where the test sample stage is used with the FIB test stage 6, a first socket 61 is disposed at an upper end of the FIB test stage 6, and a first jack 62 is disposed on the first socket 61 corresponding to the insert rod 41.

In another embodiment, referring to fig. 5, the present utility model provides a test apparatus, which includes the above-mentioned test sample stage, and further includes a TKD test stage 7, where the test sample stage is used with the TKD test stage 7, a second socket 71 is disposed at an upper end of the TKD test stage 7, and the second socket 71 is provided with a second jack 72 corresponding to the insert rod 41.

It will be appreciated that the test sample station of the present application includes, but is not limited to, the test stations described herein, and may be used with other test stations requiring sample preparation and test transfer.

The working principle of the utility model is as follows:

When the test sample bench is used, a test sample is placed on the FIB test bench 6 for sample preparation, after the sample preparation is completed, the base 2 is pulled upwards, the inserted link 41 is taken out from the first socket 61, then the inserted link 41 is inserted into the second socket 71 and placed on the TKD test bench 7, after the FIB sample preparation is completed, the FIB test bench 6 can be directly installed on the TKD test bench 7 for next test, the sample is not required to be disassembled, the operation difficulty and the test risk of staff are greatly reduced, a plurality of samples can be loaded at one time, the repeated sample loading process is saved, the working efficiency is greatly improved, if the sample preparation is not ideal in the test TKD process, the sample needs to be reworked or increased, the sample can be directly transferred back to the FIB test bench 6, and the test repeatability is improved.

It will be apparent that the described embodiments are only some, but not all, embodiments of the utility model. All other embodiments, which can be made by those skilled in the art and which are included in the embodiments of the present utility model without the inventive step, are intended to be within the scope of the present utility model. Structures, devices and methods of operation not specifically described and illustrated herein, unless otherwise indicated and limited, are implemented according to conventional means in the art.

Claims

1. The utility model provides a test sample platform, includes mount pad (1) and sample seat (8), mount pad (1) are used for the installation sample seat (8), sample seat (8) are used for bearing test sample, a serial communication port, still include base (2), movable seat (3) and supporting seat (4), mount pad (1) sliding connection base (2), the lower extreme fixed connection of base (2) movable seat (3), movable seat (3) are through pivot swivelling joint supporting seat (4), adjust knob (5) are installed to the lateral wall of movable seat (3), lower extreme fixedly connected with inserted bar (41) of supporting seat (4).

2. Test specimen stage according to claim 1, characterized in that the movable seat (3) is provided with a screw hole corresponding to the adjusting knob (5).

3. Test specimen mount according to claim 1, characterized in that the specimen mount (8) is provided with a plurality of specimen grooves (81), a plurality of specimen grooves (81) extending in the longitudinal direction of the specimen mount (8), the side walls of the specimen mount (8) being provided with grooves (82).

4. Test specimen mount according to claim 1, characterized in that the front end of the mount (1) is provided with a clamping groove (11), the clamping groove (11) being used for inserting and fixing the specimen mount (8).

5. The test specimen holder according to claim 4, characterized in that a screw (12) is mounted on a side wall of the mounting base (1) at the clamping groove (11), and the screw (12) is screwed with the mounting base (1).

6. Test specimen stage according to claim 5, characterized in that the mounting seat (1) is provided with a support piece (14) located below the clamping groove (11), the specimen seat (8) is placed in the clamping groove (11), and the support piece (14) is used for supporting the bottom end of the specimen seat (8).

7. The test specimen stage according to claim 6, characterized in that a slide bar (15) is fixed at the lower end of the mounting seat (1), hexagon socket bolts (13) are mounted at two sides of the slide bar (15) of the mounting seat (1), and penetrating screw holes are formed in the mounting seat (1) corresponding to the hexagon socket bolts (13).

8. The test specimen holder according to claim 7, characterized in that the upper end of the base (2) is provided with a slide groove (21) corresponding to the slide bar (15), and the slide bar (15) is slidably connected with the slide groove (21).

9. Test equipment, characterized by comprising a test sample stage according to any of claims 1-8, and further comprising a FIB test stage (6), said test sample stage being used in cooperation with said FIB test stage (6), a first socket (61) being provided at the upper end of said FIB test stage (6), said first socket (61) being provided with a first receptacle (62) corresponding to said plug bar (41).

10. A test device, characterized by comprising the test sample stage according to any one of claims 1-8, and further comprising a TKD test stage (7), the test sample stage being used in cooperation with the TKD test stage (7), a second socket (71) being provided at an upper end of the TKD test stage (7), the second socket (71) being provided with a second jack (72) corresponding to the insert rod (41).