CN221455512U - Monocrystalline silicon double-sided polishing machine with dust hood - Google Patents

Abstract

The utility model relates to the technical field of double-sided polishing machines, and discloses a monocrystalline silicon double-sided polishing machine with a dust hood, which comprises a bedplate, wherein support plates are arranged on the left side and the right side of the bottom of the bedplate, a placing seat is arranged at the top of the bedplate, and two fixing plates which are respectively positioned on the left side and the right side of the placing seat are arranged at the top of the bedplate. This take suction hood monocrystalline silicon double-sided polisher drives the suction hood through starting biax servo motor and moves down to the top laminating of suction hood and platen to this is detained the suction hood in the outside of polishing operation region, when producing monocrystalline silicon dust in the suction hood of polishing operation, alright start two air exhauster and come to draw in the inside that contains the dust in the suction hood to purifying the box, and then filter the air that contains the dust through the filter screen, so collect monocrystalline silicon dust that produces the polishing operation, thereby realized can handle the purpose of dust.

Description

Monocrystalline silicon double-sided polishing machine with dust hood

Technical Field

The utility model relates to the technical field of double-sided polishing machines, in particular to a monocrystalline silicon double-sided polishing machine with a dust hood.

Background

Monocrystalline silicon is an important component of a crystal material and is in the front of new material development, the monocrystalline silicon is mainly used as a semiconductor material and utilizes solar photovoltaic power generation, heat supply and the like, solar energy has the advantages of cleanness, environment protection, convenience and the like, solar energy utilization technology is rapidly developed in research and development, commercial production and market development in the last three decades, and is one of the emerging industries of rapid and stable development in the world, in the production and processing process of the monocrystalline silicon, polishing operation is often required to be carried out on the monocrystalline silicon through a monocrystalline silicon polishing machine, but most of the existing monocrystalline silicon double-sided polishing machines do not have the function of treating polishing dust in the use process, the monocrystalline silicon dust is directly diffused, environmental pollution is caused, and meanwhile, the health of operators is damaged, so the monocrystalline silicon double-sided polishing machine with the dust suction hood is provided.

Disclosure of utility model

(One) solving the technical problems

Aiming at the defects of the prior art, the monocrystalline silicon double-sided polishing machine with the dust hood has the advantages of being capable of processing dust and the like, and solves the problems that most of existing monocrystalline silicon double-sided polishing machines do not have the function of processing polished dust in the use process, the monocrystalline silicon dust is directly diffused to pollute the environment and damage the health of operators.

(II) technical scheme

In order to achieve the aim of treating dust, the utility model provides the following technical scheme: the utility model provides a single crystal silicon double-sided polisher with suction hood, includes the platen, the bottom left and right sides of platen all is provided with the backup pad, the top of platen is provided with places the seat, the top of platen is provided with the quantity and is two and is located the fixed plate of placing the seat left and right sides respectively the upper and lower both ends of fixed plate opposite side all are provided with first pneumatic cylinder, and the left and right sides the output of first pneumatic cylinder all extends to the opposite side of two fixed plates, and the top is two the output of first pneumatic cylinder all is provided with the connecting plate of one end respectively with two first pneumatic cylinder output fixed connection in the bottom, two the inside of fixed plate all is provided with the through-hole between the first pneumatic cylinder of upper and lower both sides, and two the opposite sides of connecting plate all are provided with the polishing subassembly that one end extends to its opposite side, and two the other end of polishing subassembly respectively pass two through-holes and extend to the opposite sides of two fixed plates, the top left and right sides of platen all is provided with the movable plate that one end extends to its bottom, and the left and right sides the movable plate is provided with the movable plate and the left and the movable plate and the side are provided with the connecting plate between the two pneumatic cylinder both sides and the two fixed plate both sides, the top is provided with the two pneumatic cylinder both ends that are connected with the two fixed cylinder both sides, and the top is provided with the two lateral plate, and the side of the movable plate is provided with the bottom end, and the cylinder end that is provided with the end to be connected with the bottom and the side, the two outside of threaded rod all is provided with one end respectively with two backup pads opposite side swing joint and the other end respectively with two movable plate opposite side fixed connection's traction block, the bottom of platen is provided with drive assembly, drive assembly's left and right sides both ends extend respectively to the opposite side of two backup pads and respectively with the outside fixed connection of two threaded rods, the top left and right sides of diaphragm all is provided with one end and extends to the inside purification module of dust collecting cover.

Preferably, the polishing assembly comprises a housing, two housings with one ends penetrating through the two through holes and extending to the opposite sides of the two fixing plates respectively are fixedly mounted on opposite sides of the two connecting plates, driving motors located inside the two housings are fixedly mounted on opposite sides of the two connecting plates respectively, and polishing wheels are fixedly mounted on output shafts of the two driving motors extending to opposite sides of the two connecting plates.

Preferably, the driving assembly comprises a double-shaft servo motor, the bottom of the bedplate is fixedly provided with the double-shaft servo motor positioned between the two supporting plates, the output shafts on the left side and the right side of the double-shaft servo motor are fixedly provided with rotating shafts, one ends of the rotating shafts extend to the opposite sides of the two supporting plates respectively, the opposite sides of the rotating shafts are fixedly provided with driving bevel gears, and the outer sides of the threaded shafts are fixedly provided with driven bevel gears which are positioned above the traction block and are meshed with the two driving bevel gears respectively.

Preferably, the purification assembly comprises a purification box, the purification box is all fixedly installed on the left and right sides of the top of diaphragm, two the equal fixedly installed mounting panel of the opposite sides of purification box, two the inside of purification box is all fixedly installed with the filter screen, the top fixed mounting of diaphragm has the quantity to be two and all is located the air exhauster of two opposite sides of purification box, two the equal fixedly installed of air inlet end of air exhauster has one end to extend respectively to the connecting pipe inside two purification boxes, two the equal fixedly installed of opposite sides of mounting panel has one end to extend to the suction hood inside and the other end extends to the exhaust tube inside two purification boxes respectively.

Preferably, bearings are fixedly arranged on the left side and the right side of the bottom of the bedplate and the top of the two fixing blocks, and the threaded rods are respectively and rotatably connected with the bedplate and the fixing blocks through the bearings.

Preferably, threaded holes respectively matched with the two threaded rods are formed in the traction blocks, and mounting holes matched with the rotating shafts are formed in the tops of the opposite sides of the two support plates.

(III) beneficial effects

Compared with the prior art, the monocrystalline silicon double-sided polishing machine with the dust hood provided by the utility model has the following beneficial effects:

This take suction hood monocrystalline silicon double-sided polisher drives two pivots and two drive bevel gears through starting biax servo motor and rotates, and then drive two threaded rods through two driven bevel gears and rotate, and two threaded rods can drive two traction blocks at rotatory in-process and move down, and then drive two movable plates and the whole downhill movement of suction hood, until the top laminating of suction hood and platen, thereby detain the suction hood in the outside of polishing operation region, when carrying out polishing operation suction hood and producing monocrystalline silicon dust, can start two air exhauster and draw in the inside of purifying the box with the air that contains the dust in the suction hood, and then filter the air that contains the dust through the filter screen, thereby collect the monocrystalline silicon dust that the polishing operation produced, finally realized can handle the dust, thereby prevent to pollute the environment, also avoid damaging operating personnel's healthy simultaneously.

Drawings

FIG. 1 is a schematic diagram of the structure of the present utility model;

FIG. 2 is an enlarged view of the utility model at A in FIG. 1;

FIG. 3 is an enlarged view of the utility model at B in FIG. 1;

FIG. 4 is a schematic view of a part of the left side purifying component of the present utility model.

In the figure: the polishing device comprises a platen, a 2 supporting plate, a 3 placing seat, a 4 fixing plate, a5 first hydraulic cylinder, a6 connecting plate, a 7 through hole, an 8 polishing component, an 81 housing, a 82 driving motor, an 83 polishing wheel, a 9 moving plate, a 10 transverse plate, an 11 dust suction hood, a 12 second hydraulic cylinder, a 13 clamping plate, a 14 fixing block, a 15 threaded rod, a 16 traction block, a 17 driving component, a 171 double-shaft servo motor, a 172 rotating shaft, a 173 driving bevel gear, a 174 driven bevel gear, an 18 purifying component, a 181 purifying box, a 182 mounting plate, a 183 filter screen, a 184 exhaust fan, a 185 connecting pipe and a 186 exhaust pipe.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Referring to fig. 1-4, the present utility model provides a technical solution: the utility model provides a take suction hood monocrystalline silicon double-sided polisher, including platen 1, the bottom left and right sides of platen 1 is all fixed mounting has backup pad 2, the top fixed mounting of platen 1 has places seat 3, the top fixed mounting of platen 1 has quantity to be two and is located respectively and place the fixed plate 4 of seat 3 left and right sides, the upper and lower both ends of two fixed plates 4 opposite sides are all fixed mounting has first pneumatic cylinder 5, the model of first pneumatic cylinder 5 is HSGF01-90, the output of left and right sides first pneumatic cylinder 5 all extends to the opposite side of two fixed plates 4, the output of top two first pneumatic cylinder 5 all fixed mounting have one end respectively with the connecting plate 6 of bottom two first pneumatic cylinder 5 output fixed connection, through-hole 7 between the first pneumatic cylinder 5 of upper and lower both sides has all been seted up to the inside of two fixed plates 4.

The polishing components 8 with one ends extending to opposite sides of the two connecting plates 6 are fixedly installed on opposite sides of the two connecting plates 6, the other ends of the two polishing components 8 penetrate through the two through holes 7 respectively and extend to opposite sides of the two fixing plates 4 respectively, the polishing components 8 comprise covers 81, the covers 81 with one ends penetrating through the two through holes 7 respectively and extending to opposite sides of the two fixing plates 4 respectively are fixedly installed on opposite sides of the two connecting plates 6 respectively, driving motors 82 located in the two covers 81 are fixedly installed on opposite sides of the two connecting plates 6 respectively, the model number of each driving motor 82 is Y355, output shafts of the two driving motors 82 extend to opposite sides of the two connecting plates 6 and are fixedly installed with polishing wheels 83, and output shafts of the two driving motors 82 are connected with the two connecting plates 6 in a rotating mode respectively.

The movable plates 9 with one ends extending to the bottoms of the movable plates are movably arranged on the left side and the right side of the top of the bedplate 1, the transverse plates 10 with one ends fixedly connected with the tops of the right side movable plates 9 are fixedly arranged on the tops of the left side and the right side movable plates 9, the dust hood 11 with one ends fixedly connected with the bottoms of the transverse plates 10 is fixedly arranged between the two movable plates 9, the dust hood 11 can be made of glass materials, so that the inside of the dust hood is conveniently observed, the second hydraulic cylinders 12 are fixedly arranged on the left side and the right side of the top of the transverse plates 10, the model number of the second hydraulic cylinders 12 is 140L, the output ends of the two second hydraulic cylinders 12 extend to the inside of the dust hood 11, and the clamping plates 13 with one ends fixedly connected with the output ends of the right side second hydraulic cylinders 12 are fixedly arranged at the output ends of the left side second hydraulic cylinders 12.

The fixed block 14 is fixedly installed at the bottoms of the opposite sides of the two support plates 2, the threaded rods 15 with one ends movably connected with the bottoms of the table plates 1 are movably installed at the tops of the two fixed blocks 14, bearings are fixedly installed at the left and right sides of the bottoms of the table plates 1 and the tops of the two fixed blocks 14, the threaded rods 15 are respectively rotatably connected with the table plates 1 and the fixed blocks 14 through the bearings, the outer sides of the two threaded rods 15 are respectively in threaded connection with the traction blocks 16 with one ends movably connected with the opposite sides of the two support plates 2 and the other ends fixedly connected with the opposite sides of the two movable plates 9, and threaded holes respectively matched with the two threaded rods 15 are respectively formed in the two traction blocks 16.

The bottom fixed mounting of platen 1 has drive assembly 17, drive assembly 17 left and right sides both ends extend respectively to the opposite sides of two backup pads 2 and respectively with the outside fixed connection of two threaded rods 15, drive assembly 17 includes biax servo motor 171, the bottom fixed mounting of platen 1 has the biax servo motor 171 that is located between two backup pads 2, the model of biax servo motor 171 is HDMF2089050, the pivot 172 that one end extends respectively to the opposite sides of two backup pads 2 is all fixed mounting to the left and right sides output shaft of biax servo motor 171, the mounting hole with pivot 172 looks adaptation is all offered at the opposite side top of two backup pads 2, the opposite sides of two pivot 172 all fixed mounting has drive bevel gears 173, the outside of two threaded rods 15 all fixed mounting is located traction block 16 top and one end respectively with the driven bevel gears 174 of two drive bevel gears 173 meshing.

The top left and right sides of diaphragm 10 all fixed mounting has one end to extend to the inside purification subassembly 18 of suction hood 11, purification subassembly 18 includes purification box 181, the top left and right sides of diaphragm 10 all fixed mounting has purification box 181, the equal fixed mounting of opposite sides of two purification boxes 181 has mounting panel 182, mounting panel 182 accessible bolt comes to fix with purification box 181, thereby conveniently come to dismantle the mounting panel 182 and come to clear up the inside of purification box 181, the equal fixed mounting in inside of two purification boxes 181 has filter screen 183, the top fixed mounting of diaphragm 10 has a number of exhaust fan 184 for two and all be located the exhaust fan 184 of two purification boxes 181 opposite sides, the model of exhaust fan 184 is OC011, the equal fixed mounting of air inlet end of two exhaust fan 184 has one end to extend to the connecting pipe 185 of two purification box 181 inside respectively, the equal fixed mounting of opposite sides of two mounting panels 182 has one end to extend to the inside of suction hood 11 and the other end extends to the inside of two purification box 181 respectively 186.

When the polishing device is used, monocrystalline silicon to be polished is placed at the top of the placement seat 3, then the double-shaft servo motor 171 is started through the external controller to drive the two rotating shafts 172 and the two driving bevel gears 173 to rotate, then the two driven bevel gears 174 are used for driving the two threaded rods 15 to rotate, the two threaded rods 15 can drive the two traction blocks 16 to move downwards in the rotating process, and then the two movable plates 9 and the dust hood 11 are driven to move downwards integrally until the dust hood 11 is attached to the top of the platen 1, so that the dust hood 11 is buckled on the outer side of a polishing operation area, then the two second hydraulic cylinders 12 can be started to drive the clamping plates 13 to move downwards to clamp and fix the monocrystalline silicon, then the two driving motors 82 can be started to drive the two polishing wheels 83 to rotate, the first hydraulic cylinders 5 on the left side and the right side are started to drive the two polishing wheels 83 to move relatively, so that the monocrystalline silicon can be polished on the left side and the right side simultaneously, meanwhile, the two exhaust fans 184 can be started to suck air containing dust in the dust hood 11 into the cleaning box 181 until the dust is attached to the top of the platen 1, then the dust can be filtered by the two exhaust fans 183, and the dust can be filtered, and the dust can be prevented from damaging the monocrystalline silicon, and the environment can be prevented from being polluted by the human body.

To sum up, this take suction hood monocrystalline silicon double-sided polisher drives two pivot 172 and two drive bevel gears 173 rotation through starting biax servo motor 171, and then drive two threaded rods 15 rotation through two driven bevel gears 174, and two threaded rods 15 then can drive two traction blocks 16 and remove down at rotatory in-process, and then drive two movable plates 9 and suction hood 11 whole and move down, until suction hood 11 laminating with the top of platen 1, so detain suction hood 11 in polishing operation area's outside, when carrying out polishing operation suction hood 11 in the production monocrystalline silicon dust, can start two air exhauster 184 and come to draw in the inside of purifying box 181 with the air that contains the dust in 11, and then filter the air that contains the dust through filter screen 183, so as to collect the monocrystalline silicon dust that produces the polishing operation, finally realized can handle the purpose to the dust, thereby prevent to cause the pollution to the environment, also avoid damaging the health of operating personnel simultaneously, the problem that the monocrystalline silicon double-sided polisher is in use, and the diffuse silicon dust is not possessed to handle greatly and can cause direct health problem of the monocrystalline silicon dust to the operating personnel.

It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.

Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims (6)

1. The utility model provides a take suction hood monocrystalline silicon double-sided polisher, includes platen (1), the bottom left and right sides of platen (1) all is provided with backup pad (2), the top of platen (1) is provided with places seat (3), the top of platen (1) is provided with quantity and is located fixed plate (4) of placing seat (3) left and right sides respectively, two the upper and lower both ends of fixed plate (4) opposite sides all are provided with first pneumatic cylinder (5), left and right sides the output of first pneumatic cylinder (5) all extends to the opposite side of two fixed plates (4), and the top is two the output of first pneumatic cylinder (5) all is provided with one end respectively with two first pneumatic cylinder (5) output fixed connection's of bottom connecting plate (6), two the inside of fixed plate (4) all is provided with through-hole (7) between first pneumatic cylinder (5) of upper and lower both sides, two the opposite sides of connecting plate (6) all are provided with one end and extend to the opposite side polishing subassembly (8), two other ends (8) and two the opposite sides (8) extend to the opposite side of the through-hole (7) respectively, and the other end (8) extend to the two through-hole (7) respectively and the fixed plate (4) of two opposite sides respectively: the utility model discloses a traction device, which is characterized in that a movable plate (9) with one end extending to the bottom is arranged on the left side and the right side of the top of a bedplate (1), a transverse plate (10) with one end fixedly connected with the top of the right movable plate (9) is arranged on the top of the movable plate (9), a dust hood (11) with one end fixedly connected with the bottom of the transverse plate (10) is arranged between the movable plates (9), a second hydraulic cylinder (12) is arranged on the left side and the right side of the top of the transverse plate (10), output ends of the second hydraulic cylinder (12) are extended to the inside of the dust hood (11), clamping plates (13) with one end fixedly connected with the output ends of the right second hydraulic cylinder (12) are arranged on the left side, fixed blocks (14) are arranged on the bottoms of the opposite sides of the two support plates (2), threaded rods (15) with one end movably connected with the bottom of the bedplate (1) are arranged on the tops of the two fixed blocks (14), two opposite sides of the two threaded rods (15) are respectively provided with two clamping plates (16) with two opposite sides of the movable blocks (16) which are respectively connected with the bottoms of the bedplate (1), the left and right ends of the driving assembly (17) respectively extend to the opposite sides of the two supporting plates (2) and are respectively fixedly connected with the outer sides of the two threaded rods (15), and the left and right sides of the top of the transverse plate (10) are respectively provided with a purifying assembly (18) with one end extending to the inside of the dust hood (11).

2. The monocrystalline silicon double-sided polisher with a dust hood as set forth in claim 1, wherein: the polishing assembly (8) comprises a housing (81), two housings (81) with one ends penetrating through two through holes (7) respectively and extending to the opposite sides of two fixing plates (4) respectively are fixedly arranged on opposite sides of the connecting plates (6), driving motors (82) located inside the two housings (81) respectively are fixedly arranged on opposite sides of the connecting plates (6), and output shafts of the driving motors (82) extend to opposite sides of the two connecting plates (6) respectively and are fixedly provided with polishing wheels (83).

3. The monocrystalline silicon double-sided polisher with a dust hood as set forth in claim 1, wherein: the driving assembly (17) comprises a double-shaft servo motor (171), the bottom of the bedplate (1) is fixedly provided with the double-shaft servo motor (171) which is positioned between the two supporting plates (2), the output shafts at the left side and the right side of the double-shaft servo motor (171) are fixedly provided with rotating shafts (172) with one ends respectively extending to the opposite sides of the two supporting plates (2), the opposite sides of the two rotating shafts (172) are fixedly provided with driving bevel gears (173), and the outer sides of the two threaded rods (15) are fixedly provided with driven bevel gears (174) which are positioned above the traction block (16) and are meshed with the two driving bevel gears (173) respectively.

4. The monocrystalline silicon double-sided polisher with a dust hood as set forth in claim 1, wherein: the purification assembly (18) comprises a purification box (181), the purification box (181) is fixedly installed on the left side and the right side of the top of the transverse plate (10), the two purification boxes (181) are fixedly installed on the opposite sides of the two purification boxes (181), the filter screen (183) is fixedly installed in the purification boxes (181), the exhaust fans (184) which are two in number and are located on the opposite sides of the two purification boxes (181) are fixedly installed on the top of the transverse plate (10), the connecting pipes (185) with one ends extending to the interiors of the two purification boxes (181) are fixedly installed on the air inlet ends of the two exhaust fans (184), and the exhaust pipes (186) with one ends extending to the interiors of the dust suction hoods (11) and the other ends extending to the interiors of the two purification boxes (181) are fixedly installed on the opposite sides of the two mounting plates (182).

5. The monocrystalline silicon double-sided polisher with a dust hood as set forth in claim 1, wherein: bearings are fixedly arranged on the left side and the right side of the bottom of the bedplate (1) and the tops of the two fixing blocks (14), and the threaded rod (15) is respectively and rotatably connected with the bedplate (1) and the fixing blocks (14) through the bearings.

6. A single crystal silicon double sided polisher with a dust hood according to claim 3 and characterized by: threaded holes which are respectively matched with the two threaded rods (15) are formed in the traction blocks (16), and mounting holes which are matched with the rotating shafts (172) are formed in the tops of the opposite sides of the two support plates (2).