CN221344689U

CN221344689U - Vacuum coating device

Info

Publication number: CN221344689U
Application number: CN202323128348.2U
Authority: CN
Inventors: 左国军; 侯岳明; 朱海剑; 芦伟; 戴宇星
Original assignee: Changzhou Jiejiachuang Precision Machinery Co Ltd
Current assignee: Changzhou Jiejiachuang Precision Machinery Co Ltd
Priority date: 2023-11-20
Filing date: 2023-11-20
Publication date: 2024-07-16
Anticipated expiration: 2033-11-20

Abstract

The utility model discloses a vacuum coating device which comprises a vacuum chamber and a transmission device for transmitting workpieces in the vacuum chamber, wherein the transmission device comprises a transmission shaft arranged along a transmission direction, one end of the transmission shaft penetrates through the other end of the transmission shaft, which is positioned in the vacuum chamber, and penetrates out of the vacuum chamber, and the transmission shaft is controlled by a driving device to synchronously rotate. The utility model utilizes a row of transmission shafts which synchronously rotate to drive, the contact area of the transmission shafts which synchronously rotate with the carrier plate is larger, and the transmission shafts can be controlled to synchronously rotate only by one side, thereby saving a magnetic fluid sealing transmission device on one side, simplifying the structure and reducing the cost.

Description

Vacuum coating device

Technical Field

The utility model relates to the technical field of vacuum coating, in particular to a vacuum coating device.

Background

The perovskite solar cell is a solar cell using perovskite structural materials as light absorption materials, belongs to the representation of third-generation high-efficiency thin film batteries, and has the advantages of high efficiency, low cost, high flexibility and the like. The vacuum coating is one of important processes in the perovskite battery production process, a battery piece is carried by a carrier plate, and the battery piece enters and exits a vacuum coating cavity under the driving of roller transmission to carry out a coating process.

The existing roller transmission in the market is generally to arrange magnetic fluid sealing transmission devices on two sides of a cavity, the magnetic fluid sealing transmission devices are fixedly connected with rollers in the cavity, two driving motors are adopted to drive the magnetic fluid sealing transmission devices respectively, the rollers bear and drive a carrier plate to move, and the two sets of magnetic fluid sealing transmission devices are used, so that cost reduction and efficiency improvement are not facilitated due to the fact that the contact area between the carrier plate and the rollers is small, and the transmission is unstable.

Disclosure of utility model

In order to solve the problems of unstable carrier plate transmission and high driving cost on two sides, the utility model provides a magnetic fluid sealing transmission device on one side, which utilizes a row of transmission shafts which synchronously rotate to transmit, the contact area between the transmission shafts which synchronously rotate and the carrier plate is larger, and the transmission shafts can be controlled to synchronously rotate only on one side, thereby saving the magnetic fluid sealing transmission device on one side and being beneficial to reducing the cost and enhancing the efficiency.

The technical scheme includes that the vacuum coating device comprises a vacuum chamber and a transmission device for transmitting workpieces in the vacuum chamber, wherein the transmission device comprises a transmission shaft arranged along a transmission direction, one end of the transmission shaft penetrates through the other end of the transmission shaft, which is positioned in the vacuum chamber, and penetrates out of the vacuum chamber, and the transmission shaft is controlled by a driving device to synchronously rotate.

In some embodiments, the drive shaft is sleeved with axially spaced bearing rollers for supporting a workpiece.

In some embodiments, a plurality of installation positions of the bearing rollers are arranged along the transmission shaft, the installation positions comprise clamping grooves positioned on two sides of the bearing rollers, the clamping grooves are used for clamping check rings positioned on two sides of the bearing rollers, pin holes are formed between the two clamping grooves, and the bearing rollers are matched with the pin holes through positioning pins to realize circumferential positioning relative to the transmission shaft.

In certain embodiments, the bearing roller is a polyetheretherketone material.

In certain embodiments, the drive shaft is controlled to rotate with the external drive device via a magnetic fluid seal transmission.

In some embodiments, the magnetic fluid seal transmission device comprises a rotating shaft, one end of the rotating shaft is connected with the end of the transmission shaft through a coupling, and the other end of the rotating shaft is positioned outside the vacuum chamber and controlled to rotate by a driving device.

In some embodiments, a belt wheel is arranged on the rotating shaft outside the vacuum chamber, and the driving device comprises a driving belt matched with the belt wheel and a motor for driving the driving belt to rotate.

In some embodiments, each rotating shaft comprises an inner belt pulley and an outer belt pulley which are arranged in an axial direction, the same side belt pulleys of two adjacent rotating shafts are connected through an independent transmission belt, and one rotating shaft is driven to rotate by a motor.

In some embodiments, a motor pulley is provided on the shaft of the motor, and the motor pulley is connected with a pulley arranged on the rotating shaft at the end part through a transmission belt.

In some embodiments, the drive shaft is rotatably supported within the vacuum chamber by a bearing housing.

Compared with the prior art, the utility model has the following beneficial effects:

The utility model utilizes a row of transmission shafts which synchronously rotate to drive, the contact area of the transmission shafts which synchronously rotate with the carrier plate is larger, and the transmission shafts can be controlled to synchronously rotate only by one side, thereby saving a magnetic fluid sealing transmission device on one side, simplifying the structure and reducing the cost. Through with the different installation positions of carrying roller setting in axial can make carrying roller axial adjustable, need not change the part, can compatible satisfy the conveying of multi-size base plate.

Drawings

The present utility model will now be described in detail with reference to specific embodiments and drawings, which are not necessarily to scale, emphasis instead being placed upon illustrating the principles of the utility model. The drawings illustrate generally, by way of example and not limitation, embodiments discussed herein. Wherein:

Fig. 1 is a schematic view of a vacuum chamber.

Fig. 2 is a right-side view schematic diagram of fig. 1.

Fig. 3 is a schematic view of section A-A of fig. 1.

Fig. 4 is a schematic diagram at the mounting position D in fig. 3.

Fig. 5 is a schematic view of a drive shaft.

Fig. 6 is a schematic diagram at B in fig. 5.

Fig. 7 is a schematic diagram at C in fig. 5.

Fig. 8 is a schematic view of a ceramic vertical type seated bearing.

Fig. 9 is a schematic view of a fixed block.

In the figure, 1, a vacuum chamber; 101. an inlet; 2. a vacuum pumping port; 3. a gas homogenizing plate; 4. a transmission shaft; 401. a clamping groove; 402. a pin hole; 5. a bearing seat; 501. ceramic vertical type bearing with seat; 502. a fixed block; 6. a carrying roller; 7. a retainer ring; 8. magnetic fluid seal transmission device; 801. a rotating shaft; 9. an inner pulley; 10. an outer pulley; 11. a transmission belt; 12. a motor; 13. a tensioning wheel; 14. perovskite solar cell; 15. a coupling.

Detailed Description

The following are specific examples of the present utility model and the technical solutions of the present utility model will be further described with reference to the accompanying drawings, but the present utility model is not limited to these examples, and the following embodiments do not limit the utility models according to the claims. Furthermore, all combinations of features described in the embodiments are not necessarily essential to the inventive solution.

The principles and structures of the present utility model are described in detail below with reference to the drawings and the examples.

Examples

As shown in fig. 1, 2 and 3, a vacuum coating device comprises a vacuum chamber 1 and a conveying device for conveying workpieces in the vacuum chamber 1, wherein a vacuum suction port 2 and a gas homogenizing plate 3 are arranged at the bottom of the vacuum chamber 1, and an inlet 101 and an outlet are arranged at two opposite end sides of the vacuum chamber 1.

The workpiece in this embodiment is a perovskite solar cell 14, the transmission device includes a transmission shaft 4 arranged along a transmission direction, the transmission direction is a direction from an inlet 101 to an outlet of the vacuum chamber 1, one end of the transmission shaft 4 passes through the other end in the vacuum chamber 1 and passes out of the vacuum chamber 1, and the transmission shaft is controlled by a driving device to rotate synchronously. In use, the perovskite solar cell 14 is located on the transmission shaft 4, and the transmission of the perovskite solar cell 14 in the vacuum chamber 1 is realized by the rotation of the transmission shaft 4.

As shown in fig. 8 and 9, the transmission shaft 4 is rotatably supported in the vacuum chamber 1 through a bearing seat 5, and in this embodiment, a ceramic vertical type bearing with a seat 501 is adopted, the bearing is fixedly supported on a fixed block 502, the fixed block 502 is fixed at the bottom of the vacuum chamber 1, and the perovskite solar cell 14 is supported by ensuring stable rotation of the transmission shaft.

The transmission shaft 4 is sleeved with bearing rollers 6 which are used for supporting workpieces at intervals in the axial direction. The bearing roller 6 is made of polyether-ether-ketone (or equivalent performance), has the properties of no damage to a base material, high temperature resistance and wear resistance, has good friction force, can increase friction between the transmission shaft 4 and the perovskite solar cell 14, increases the number of contact surfaces with the perovskite solar cell 14, improves transmission stability, and is suitable for a transmission mode of tray-free direct glass or base material.

As shown in fig. 4, a plurality of installation positions of the bearing roller 6 are arranged along the transmission shaft, the installation positions comprise clamping grooves 401 positioned at two sides of the bearing roller 6, the clamping grooves 401 are used for clamping check rings 7 positioned at two sides of the bearing roller 6, the check rings 7 prevent the bearing roller 6 from moving relative to the axial direction of the transmission shaft 4, pin holes 402 are formed between the two clamping grooves 401, and the bearing roller 6 is matched with the pin holes 402 through positioning pins to realize circumferential positioning relative to the transmission shaft 4, so that circumferential rotation of the bearing roller 6 relative to the transmission shaft 4 is prevented. The bearing roller 6 can be axially adjustable by arranging the bearing roller 6 at different mounting positions in the axial direction, parts do not need to be replaced, and the conveying of substrates with multiple sizes can be compatibly met.

As shown in fig. 5 and 7, the transmission shaft 4 controls rotation with the external driving device through the magnetic fluid sealing transmission device 8, namely, the magnetic fluid sealing shaft is adopted to realize rotation transmission between the inside and the outside of the vacuum chamber 1, so that the sealing of the vacuum chamber 1 is ensured. The magnetic fluid sealing transmission device 8 comprises a rotating shaft 801, one end of the rotating shaft 801 is connected with the end of the transmission shaft 4 through a coupler 15, the other end of the rotating shaft is located outside the vacuum chamber 1 and controlled to rotate by a driving device, a belt wheel is arranged on the rotating shaft 801 located outside the vacuum chamber 1, the driving device comprises a transmission belt 11 matched with the belt wheel and a motor 12 for driving the transmission belt 11 to rotate, and the transmission shaft 4 is enabled to synchronously rotate through a belt wheel transmission mechanism.

As shown in fig. 6, each rotating shaft 801 includes an inner pulley 9 and an outer pulley 10 which are arranged in an axial direction, the same side pulleys of two adjacent rotating shafts 801 are connected through an independent transmission belt 11, that is, the inner pulley 9 on one rotating shaft 801 is connected with the inner pulley 9 on the adjacent rotating shaft 801 on one side thereof through one transmission belt 11, and the outer pulley on the outer side of the rotating shaft 801 is connected with the outer pulley 10 on the adjacent rotating shaft 801 on the other side thereof through another transmission belt 11, so that all the rotating shafts 801 of the magnetic fluid sealing transmission device 8 are connected together, and therefore, by driving one rotating shaft 801 to rotate through a motor 12, all the rotating shafts 801 can be synchronously rotated, and all the transmission shafts 4 are synchronously rotated.

The motor 12 is provided with a motor 12 belt wheel on the shaft of the motor 12, the motor 12 belt wheel is connected with a belt wheel arranged on the rotating shaft 801 at the end part through a driving belt 11, and the motor further comprises a tensioning wheel 13 for adjusting the tensioning force of the driving belt 11 between the motor 12 and the rotating shaft 801.

When the battery piece finishes the previous procedure and needs to be coated, the driving motor 12 is started, the transmission shaft 4 rotates in the cavity through the linkage of the parts, and when the carrier plate contacts with the bearing roller 6, the carrier plate can stably enter or leave the cavity under the rotation driving of the transmission shaft 4 due to friction force and multiple point contact.

Although the utility model has been described above with reference to some embodiments, various modifications may be made and equivalents may be substituted for elements thereof without departing from the scope of the utility model. In particular, the features of the various embodiments disclosed herein may be combined with each other in any manner so long as there is no structural conflict, and the exhaustive description of these combinations is not given in this specification merely for the sake of brevity and resource saving. Therefore, it is intended that the utility model not be limited to the particular embodiment disclosed, but that the utility model will include all embodiments falling within the scope of the appended claims.

Although some terms are used more herein, the possibility of using other terms is not excluded. These terms are used merely for convenience in describing and explaining the nature of the utility model; they are to be interpreted as any additional limitation that is not inconsistent with the spirit of the present utility model. The order of execution of the operations, steps, and the like in the apparatuses and methods shown in the specification and the drawings may be any order as long as the order is not particularly limited, and the output of the preceding process is not used in the following process. The use of similar ordinal terms (e.g., "first," "then," "second," "again," "then," etc.) for convenience of description does not necessarily imply that they are necessarily performed in such order.

It will be appreciated by those of ordinary skill in the art that all directional references (e.g., above, below, upward, downward, top, bottom, left, right, vertical, horizontal, etc.) are descriptive of the drawings to aid the reader in understanding, and do not denote (e.g., position, orientation, use, etc.) limitation of the scope of the utility model defined by the appended claims, but rather are intended to facilitate describing the utility model and simplifying the description, the orientation words do not indicate and imply that the device or element being referred to must have a particular orientation or be constructed and operated in a particular orientation, the orientation words "inside and outside" referring to the inside and outside of the profile of the components themselves, unless otherwise indicated.

Spatially relative terms, such as "above … …," "above … …," "upper surface on … …," "above," and the like, may be used herein for ease of description to describe one device or feature's spatial location relative to another device or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, devices described as "above" or "over" other devices or structures would then be oriented "below" or "beneath" the other devices or structures. Thus, the exemplary term "above … …" may include both orientations "above … …" and "below … …". The device may also be positioned in other different ways (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.

Additionally, some ambiguous terms (e.g., substantially, certain, generally, etc.) may refer to slight imprecision or slight deviation of conditions, amounts, values, or dimensions, etc., some of which are within manufacturing tolerances or tolerances. It should be noted that, the terms "first," "second," and the like are used for defining the components, and are merely for convenience in distinguishing the corresponding components, and the terms have no special meaning unless otherwise stated, so they should not be construed as limiting the scope of the present application.

The specific embodiments described herein are offered by way of example only to illustrate the spirit of the utility model. Those skilled in the art may make various modifications or additions to the described embodiments or substitutions thereof without departing from the spirit of the utility model or exceeding the scope of the utility model as defined in the accompanying claims.

Claims

1. The vacuum coating device comprises a vacuum chamber and a transmission device for transmitting workpieces in the vacuum chamber, and is characterized in that the transmission device comprises transmission shafts arranged along the transmission direction, one ends of the transmission shafts penetrate through the other ends of the transmission shafts, which are positioned in the vacuum chamber, and penetrate out of the vacuum chamber, and the transmission shafts are controlled by a driving device to synchronously rotate.

2. The vacuum coating apparatus according to claim 1, wherein the drive shaft is sleeved with bearing rollers spaced apart in an axial direction for supporting a workpiece.

3. The vacuum coating apparatus according to claim 2, wherein a plurality of mounting positions of the carrying roller are provided along the transmission shaft, the mounting positions include clamping grooves on both sides of the carrying roller, the clamping grooves are used for clamping check rings on both sides of the carrying roller, pin holes are provided between the two clamping grooves, and the carrying roller is matched with the pin holes through positioning pins to realize circumferential positioning relative to the transmission shaft.

4. The vacuum coating apparatus of claim 2, wherein the carrier roller is a polyetheretherketone material.

5. The vacuum coating apparatus according to claim 1, wherein the transmission shaft is controlled to rotate with the external driving device through a magnetic fluid seal transmission device.

6. The vacuum coating apparatus according to claim 5, wherein the magnetic fluid seal transmission device comprises a rotating shaft, one end of the rotating shaft is connected with the end of the transmission shaft through a coupling, and the other end of the rotating shaft is positioned outside the vacuum chamber and controlled to rotate by a driving device.

7. The vacuum coating apparatus according to claim 6, wherein a pulley is provided on the rotation shaft outside the vacuum chamber, and the driving means comprises a belt engaged with the pulley and a motor for driving the belt to rotate.

8. The vacuum coating apparatus according to claim 7, wherein each of the rotating shafts comprises an inner belt pulley and an outer belt pulley arranged in an axial direction, the same belt pulleys of two adjacent rotating shafts are connected by an independent transmission belt, and one of the rotating shafts is driven to rotate by a motor.

9. The vacuum coating apparatus according to claim 8, wherein a motor pulley is provided on a shaft of the motor, and the motor pulley is connected to a pulley arranged on the rotating shaft of the end portion by a belt.

10. The vacuum coating apparatus according to any one of claims 1 to 9, wherein the transmission shaft is rotatably supported in the vacuum chamber through a bearing housing.