CN221303227U - Gas sampling and filtering device for polysilicon gas chromatograph - Google Patents
Gas sampling and filtering device for polysilicon gas chromatograph Download PDFInfo
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- CN221303227U CN221303227U CN202323200719.3U CN202323200719U CN221303227U CN 221303227 U CN221303227 U CN 221303227U CN 202323200719 U CN202323200719 U CN 202323200719U CN 221303227 U CN221303227 U CN 221303227U
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- upper cylinder
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- 238000005070 sampling Methods 0.000 title claims abstract description 44
- 238000001914 filtration Methods 0.000 title claims abstract description 33
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 18
- 229920005591 polysilicon Polymers 0.000 title claims abstract description 17
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 33
- 239000012528 membrane Substances 0.000 claims abstract description 28
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 18
- 239000000741 silica gel Substances 0.000 claims abstract description 18
- 229910002027 silica gel Inorganic materials 0.000 claims abstract description 18
- 229920003023 plastic Polymers 0.000 claims description 3
- 229920005830 Polyurethane Foam Polymers 0.000 claims 1
- 239000011496 polyurethane foam Substances 0.000 claims 1
- 239000012535 impurity Substances 0.000 abstract description 13
- 238000004519 manufacturing process Methods 0.000 abstract description 11
- 238000002347 injection Methods 0.000 abstract description 6
- 239000007924 injection Substances 0.000 abstract description 6
- 238000012856 packing Methods 0.000 abstract description 4
- 239000013618 particulate matter Substances 0.000 abstract description 4
- 229910052799 carbon Inorganic materials 0.000 abstract description 3
- 238000009434 installation Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 60
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000005046 Chlorosilane Substances 0.000 description 3
- 239000002585 base Substances 0.000 description 3
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000004445 quantitative analysis Methods 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 239000006260 foam Substances 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 2
- 238000005984 hydrogenation reaction Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 229920002635 polyurethane Polymers 0.000 description 2
- 239000004814 polyurethane Substances 0.000 description 2
- 238000004451 qualitative analysis Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 2
- 239000005052 trichlorosilane Substances 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 238000003843 chloralkali process Methods 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000004817 gas chromatography Methods 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 1
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000003208 petroleum Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000011946 reduction process Methods 0.000 description 1
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 description 1
- 239000011863 silicon-based powder Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Abstract
The utility model discloses a gas sampling and filtering device for a polysilicon gas chromatograph, which relates to the technical field of polysilicon production and comprises a sucker fixing seat, a lower cylinder and an upper cylinder; the lower part barrel is installed on the sucking disc fixing base, and upper portion barrel demountable installation is on the lower part barrel, and the inside cavity intercommunication of lower part barrel and upper portion barrel all is provided with filtration membrane, and the inside active carbon layer that fills of lower part barrel is provided with gaseous sampling tube, and the inside packing of upper portion barrel has the silica gel layer that discolours, and the lateral wall is provided with the gaseous sampling tube that is connected to gas chromatograph sample inlet. The sucker fixing seat is used for fixing the lower cylinder and the upper cylinder, so that the stability of the gas sampling and filtering device during sample injection is ensured; the cavity inside lower part barrel and upper portion barrel communicates and all is provided with filtration membrane, has the active carbon layer at the inside packing of lower part barrel, and the inside packing of upper portion barrel has the silica gel layer that discolours to filter the particulate matter impurity in the gas of advance, adsorb moisture.
Description
Technical Field
The utility model relates to the technical field of polysilicon production, in particular to a gas sampling and filtering device for a polysilicon gas chromatograph.
Background
Along with the wide application of the polysilicon in the fields of modern science and technology, national defense, industry and the like, the production of the polysilicon is rapidly developed, and the purposes of improving the product quality, reducing the production cost and expanding the production capacity become the competing and pursuing targets of various manufacturers. In the existing polysilicon production process, an improved Siemens method is mainly adopted, metal industrial silicon powder is used as a main raw material, trichlorosilane is produced through a cold hydrogenation process, and then a high-purity polysilicon product is produced through a purification reduction technology.
In the whole production process, a large amount of process materials are generated, and the liquid chlorosilane production process sample and the gas sample of the whole system are detected by a gas chromatograph. In the prior art, in the quality control of chlorosilane production process, chlor-alkali process, cold hydrogenation process and reduction process are taken as typical detection items, and the medium mainly comprises dichlorosilane, trichlorosilane, tetrachlorosilane, hydrogen chloride, hydrogen, nitrogen and some acid gases, and contains a large amount of toxic and harmful components.
The gas chromatograph has wide application in petroleum, chemical industry, biochemistry, medicine and health, food industry, environmental protection and the like, and can perform qualitative and quantitative analysis on gas. In gas chromatography, sample injection is one of the main sources of quantitative analysis errors. The principle, structure, material, sample temperature, sample amount, sample speed, sample tool, etc. of sample mode and sample system can directly affect the repeatability and accuracy of quantitative and qualitative analysis of gas chromatograph.
In the polycrystalline silicon industry, the existing sampling device for the gas chromatograph has poor effect of fixing the position on the gas chromatograph, so that the stability during sampling is difficult to ensure. And when the gas chromatograph detects gas, because the sources of various gas samples are different, some gas samples contain impurities, the impurities can block a sample injection pipeline, so that sample injection failure is caused, and a chromatographic column can be polluted when serious, so that the separation precision is reduced, and the service life of the chromatographic column is seriously influenced.
Disclosure of utility model
In order to overcome the defects in the prior art, the utility model aims to provide a gas sampling and filtering device for a polysilicon gas chromatograph, so as to solve the defects of poor position fixing effect, impurity blocking of a sample injection pipeline and the like in the prior art.
In order to achieve the above purpose, the present utility model adopts the technical scheme that:
A gas sampling and filtering device for a polysilicon gas chromatograph comprises a sucker fixing seat, a lower cylinder and an upper cylinder;
The lower cylinder is installed on the sucker fixing seat, the upper cylinder is detachably installed on the lower cylinder, cavities inside the lower cylinder and the upper cylinder are communicated and are all provided with filtering membranes, an activated carbon layer is filled inside the lower cylinder, a gas sampling pipe is arranged on the side wall, a color-changing silica gel layer is filled inside the upper cylinder, and a gas sampling pipe connected to a gas chromatograph sample inlet is arranged on the side wall.
Preferably, the gas sampling pipe and the gas sampling pipe are both provided with one-way valves.
Preferably, the activated carbon layer is filled in the lower part of the lower cylinder, a first cavity is reserved in the upper part of the lower cylinder, and a first filtering membrane is arranged between the first cavity and the activated carbon layer.
Preferably, the color-changing silica gel layer is filled in the lower part of the upper cylinder, a second cavity is reserved in the upper part of the upper cylinder, and a second filtering membrane is arranged between the second cavity and the color-changing silica gel layer.
Preferably, a knob exhaust valve is arranged at the top end of the upper cylinder body, and the knob exhaust valve is communicated into the second cavity.
Preferably, the first filter membrane and the second filter membrane are both 0.2 μm filter membranes.
Preferably, the lower cylinder is made of polyurethane soft foam.
Preferably, the upper cylinder is made of transparent plastic.
Preferably, the lower cylinder and the upper cylinder are detachably connected by threads.
The utility model has the beneficial effects that:
According to the gas sampling and filtering device for the polysilicon gas chromatograph, the sucker fixing seat is used for fixing the lower cylinder and the upper cylinder, so that the stability of the gas sampling and filtering device during sample injection is ensured; the inside cavity intercommunication of lower part barrel and upper portion barrel just all is provided with filtration membrane, is filled with the active carbon layer in lower part barrel inside, and upper portion barrel inside is filled with the silica gel layer that discolours to filter the particulate matter impurity in the gas of advance, adsorb moisture, filter the impurity in the gas of falling into the sample, prevent impurity from blockking up the sampling pipeline, cause advance the sample failure, also prevented impurity pollution chromatographic column, cause its separation accuracy to descend, influence its life.
Drawings
FIG. 1 is a schematic diagram of a gas sampling filtration apparatus of the present utility model;
reference numerals:
1. A sucker fixing seat; 2. a lower cylinder; 3. an upper cylinder; 4. an activated carbon layer; 5. a color-changing silica gel layer; 6. a one-way valve; 7. a first cavity; 8. a first filtration membrane; 9. a second cavity; 10. a second filtration membrane; 11. a knob exhaust valve.
Detailed Description
The conception, specific structure, and technical effects produced by the present utility model will be clearly and completely described below with reference to the embodiments and the drawings to fully understand the objects, features, and effects of the present utility model.
Example 1
The gas sampling and filtering device for the polysilicon gas chromatograph comprises a sucker fixing seat 1, a lower cylinder 2 and an upper cylinder 3 as shown in figure 1;
The lower cylinder 2 is installed on the sucker fixing seat 1, the upper cylinder 3 is detachably installed on the lower cylinder 2, cavities inside the lower cylinder 2 and the upper cylinder 3 are communicated and are all provided with filtering membranes, an activated carbon layer 4 is filled inside the lower cylinder 2, a gas sampling pipe is arranged on the side wall, a color-changing silica gel layer 5 is filled inside the upper cylinder 3, and a gas sampling pipe connected to a gas chromatograph sample inlet is arranged on the side wall.
In this embodiment, the gas introduced into the gas sampling tube is the gas in the polysilicon production process, and contains chlorosilane gas, hydrogen, nitrogen, carbon monoxide, carbon dioxide, moisture, particulate matters and other substances.
In this embodiment, the activated carbon layer 4 is used for adsorbing moisture; the color-changing silica gel layer 5 is used for observing whether the activated carbon layer 4 fully absorbs moisture, and if not fully absorbs moisture, the color-changing silica gel layer 5 changes color when the gas contains moisture; the filter membrane is used for filtering out particulate impurities in the gas.
In this embodiment, install lower part barrel 2 and upper portion barrel 3 on sucking disc fixing base 1, fix sucking disc fixing base 1 on experimental table again, utilize sucking disc fixing base 1 fixed lower part barrel 2 and upper portion barrel 3 to gas sampling filter equipment's stability when having guaranteed the introduction. The cavity intercommunication inside lower part barrel 2 and upper portion barrel 3 all is provided with filtration membrane, is equipped with activated carbon layer 4 at the inside packing of lower part barrel 2, and upper portion barrel 3 is inside to be equipped with the silica gel layer 5 that discolours to filter the particulate matter impurity in the gas of advance, adsorb moisture, filter the impurity in the gas of falling into the sample, prevent impurity from blockking up the sampling pipeline, cause the sampling failure, also prevented impurity pollution chromatographic column, cause its separation precision to descend, influence its life.
Example 2
The embodiment is further described on the basis of embodiment 1, as shown in fig. 1, the gas sampling tube and the gas sampling tube are both provided with one-way valves 6, so that the fluid can flow only in one direction, and the fluid is prevented from flowing back.
As shown in fig. 1, the activated carbon layer 4 is filled in the lower part of the lower cylinder 2, a first cavity 7 is reserved in the upper part of the lower cylinder 2, and a first filtering membrane 8 is arranged between the first cavity 7 and the activated carbon layer 4. The first chamber 7 serves as a gas buffer and the first filter membrane 8 serves as a filter for particulate matter.
As shown in fig. 1, the color-changing silica gel layer 5 is filled in the lower part of the upper cylinder 3, a second cavity 9 is reserved in the upper part of the upper cylinder 3, and a second filtering membrane 10 is arranged between the second cavity 9 and the color-changing silica gel layer 5. The second chamber 9 serves as a gas buffer and the second filter membrane 10 serves as a secondary particulate filter.
As shown in fig. 1, a knob exhaust valve 11 is disposed at the top end of the upper cylinder 3, the knob exhaust valve 11 is communicated to the second cavity 9, and the knob exhaust valve 11 is used for manually opening gas discharge to replace gas.
In this example, the first filter membrane 8 and the second filter membrane 10 are each a 0.2 μm filter membrane. The lower cylinder 2 is made of polyurethane soft foam. The upper cylinder 3 is made of transparent plastic, so that the internal condition of the upper cylinder can be conveniently observed. The lower cylinder 2 and the upper cylinder 3 are detachably connected through threads, so that the lower cylinder and the upper cylinder are convenient to assemble and disassemble.
For a better understanding of the present utility model, the following is a complete description of the principles of the utility model:
The gas in the production process of the polysilicon enters the activated carbon layer 4 in the lower cylinder 2 through the gas sampling tube and the check valve 6 on the gas sampling tube, the activated carbon layer 4 absorbs moisture in the gas, then the gas enters the first cavity 7 after the particulate matters are filtered through the first filtering membrane 8, then enters the color-changing silica gel layer 5 in the upper cylinder 3, if the moisture is not fully absorbed, the color-changing silica gel layer 5 changes color, and finally the gas enters the gas chromatograph through the check valve 6 on the gas sampling tube.
In this embodiment, the water and the fine particulate matters in the gas are filtered for multiple times by different filter materials and filter modes, so that the component content of the analysis object is not affected.
While the embodiments of the present utility model have been described in detail, the present utility model is not limited to the embodiments described above, and various equivalent modifications and substitutions can be made by those skilled in the art without departing from the spirit of the present utility model, and these are intended to be included in the scope of the present utility model as defined in the appended claims.
Claims (9)
1. The gas sampling and filtering device for the polysilicon gas chromatograph is characterized by comprising a sucker fixing seat (1), a lower cylinder (2) and an upper cylinder (3);
The lower cylinder (2) is installed on the sucking disc fixing seat (1), the upper cylinder (3) is detachably installed on the lower cylinder (2), cavities inside the lower cylinder (2) and the upper cylinder (3) are communicated and are all provided with a filtering membrane, an activated carbon layer (4) is filled inside the lower cylinder (2), a gas sampling pipe is arranged on the side wall, a color-changing silica gel layer (5) is filled inside the upper cylinder (3), and a gas sampling pipe connected to a gas chromatograph sample inlet is arranged on the side wall.
2. The gas sampling filter device according to claim 1, wherein the gas sampling tube and the gas sampling tube are provided with a one-way valve (6).
3. The gas sampling and filtering device according to claim 1, wherein the activated carbon layer (4) is filled in the lower part of the lower cylinder (2), a first cavity (7) is reserved in the upper part of the lower cylinder (2), and a first filtering membrane (8) is arranged between the first cavity (7) and the activated carbon layer (4).
4. A gas sampling filtration device according to claim 3, wherein the color-changing silica gel layer (5) is filled in the lower part of the upper cylinder (3), a second cavity (9) is reserved in the upper part of the upper cylinder (3), and a second filtration membrane (10) is arranged between the second cavity (9) and the color-changing silica gel layer (5).
5. The gas sampling filtration device according to claim 4, wherein a knob vent valve (11) is provided at the top end of the upper cylinder (3), the knob vent valve (11) being in communication with the second chamber (9).
6. The gas sampling filter device according to claim 4, wherein the first filter membrane (8) and the second filter membrane (10) are each 0.2 μm filter membranes.
7. A gas sampling filter according to claim 1, wherein the lower cylinder (2) is made of polyurethane foam.
8. A gas sampling filter according to claim 1, wherein the upper cylinder (3) is made of transparent plastic.
9. A gas sampling filtration device according to claim 1, wherein the lower cylinder (2) and the upper cylinder (3) are detachably connected by means of threads.
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221303227U true CN221303227U (en) | 2024-07-09 |
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| Date | Code | Title | Description |
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| GR01 | Patent grant |