CN221300554U

CN221300554U - Vacuum process exhaust pipe

Info

Publication number: CN221300554U
Application number: CN202323496071.9U
Authority: CN
Inventors: 苏俊颖
Original assignee: Shanghai Dajia Pipeline Equipment Engineering Co ltd
Current assignee: Shanghai Dajia Pipeline Equipment Engineering Co ltd
Filing date: 2023-12-21
Publication date: 2024-07-09
Anticipated expiration: 2033-12-21

Abstract

The utility model relates to the field of exhaust pipes, in particular to an exhaust pipe for a vacuum process. Including two body, two the equal fixedly connected with ring flange of one end that the body kept away from each other, the inner wall of body is equipped with adjusting structure, adjusting structure includes the linking ring, the outer wall of linking ring is connected with the inner wall rotation of body, one side fixedly connected with two baffles of linking ring, the depression bar is worn to be equipped with by the side screw thread of baffle, a plurality of slotted hole has been seted up to one side that the linking ring is close to the baffle, the inner wall sliding connection of slotted hole has the projection. The vacuum process exhaust pipe provided by the utility model has the advantages that a person can filter the large-particle matters in the exhaust gas discharged from the pipe body by using the filter screen, so that the large-particle matters in the residual harmful matters in the exhaust gas are prevented from being directly discharged into the air, the pollution to the surrounding environment is reduced, and the person can conveniently replace the filter screen after the filter screen is worn.

Description

Vacuum process exhaust pipe

Technical Field

The utility model relates to the field of exhaust pipes, in particular to an exhaust pipe for a vacuum process.

Background

The exhaust system of the process is mainly an exhaust system in which various exhaust gases generated by the process machine are treated and then exhausted to the atmosphere, and in the exhaust system of the process, the exhaust pipe is an indispensable structure.

The utility model discloses an exhaust system of a semiconductor manufacturing shop, the technical scheme of which is as follows: the filter comprises a machine table, the machine table is connected with a main exhaust pipeline through an exhaust pipeline, the exhaust pipeline is fixedly connected with a filter device, the filter device comprises a motor, a filter mechanism and a cleaning mechanism, an output shaft of the motor is fixedly connected with the filter mechanism, the filter mechanism is in meshed connection with the cleaning mechanism through a transmission piece, and the filter device is provided with a collecting chamber. The utility model has simple structure, convenient operation and scientific and reasonable design, and effectively avoids dust generated in the working process of the machine from spreading over the whole exhaust system by arranging the special filtering device on the exhaust pipeline between the machine and the main exhaust pipeline, reduces the difficulty of cleaning the exhaust system by workers, reduces the blockage of the exhaust pipeline, improves the continuous working capacity of equipment, improves the working efficiency of the semiconductor manufacturing process and increases the economic benefit.

With respect to the above-mentioned matters, the inventors consider that the following technical drawbacks exist: after the waste gas is treated, the waste gas contains a small amount of large particle residues, and if the residues are directly discharged into the atmosphere, the pollution of the surrounding environment is aggravated to a certain extent.

Therefore, it is necessary to provide a new vacuum process exhaust pipe to solve the above-mentioned problems.

Disclosure of Invention

The utility model aims to solve the defects in the prior art and provides an exhaust pipe for a vacuum process.

In order to solve the above technical problems, the present utility model provides a vacuum process exhaust pipe, comprising: the pipe comprises two pipe bodies, wherein two pipe bodies are fixedly connected with flange plates at one ends, far away from each other, of the pipe bodies, an adjusting structure is arranged on the inner wall of each pipe body and comprises a connecting ring, the outer wall of each connecting ring is rotationally connected with the inner wall of each pipe body, two partition plates are fixedly connected with one side of each connecting ring, a compression rod is arranged on the side threads of each partition plate in a penetrating mode, a plurality of slotted holes are formed in one side, close to each partition plate, of each connecting ring, protruding columns are connected with the inner walls of the slotted holes in a sliding mode, the cross section of each protruding column is L-shaped, a limiting ring is attached to one side, close to each partition plate, of each limiting ring, a filter screen is fixedly connected with the inner wall of each limiting ring, and a plurality of round holes are formed in the outer wall of each limiting ring and are matched with the size of each protruding column.

The effects achieved by the components are as follows: through setting up adjusting structure, personnel can filter the big particulate matter in the internal exhaust gas of pipeline by the filter screen, and then avoid the big particulate matter in the remaining harmful substance of waste gas to directly discharge to the air in to reduced the pollution to surrounding environment, and after the filter screen use wearing and tearing, personnel can conveniently change the filter screen.

Preferably, one side of the connecting ring, which is close to the partition board, is fixedly connected with a plurality of positioning plates, positioning rods are arranged on the side surfaces of the positioning plates in a sliding penetrating mode, and one ends of the positioning rods are fixedly connected with the arc surfaces of the convex columns.

The effects achieved by the components are as follows: in the process that the convex column moves along the inner wall of the slotted hole, the locating plate fixed on the adapter ring can move along the arc surface of the locating rod on the convex column, and then the convex column can be limited, so that the convex column is prevented from rotating and shifting in the moving process, and the convex column is more smoothly inserted into the circular hole.

Preferably, a sealing ring is fixedly connected to one side of the limiting ring, which is close to the engagement ring, and the outer wall of the sealing ring is attached to the inner wall of the engagement ring.

The effects achieved by the components are as follows: the sealing ring can block the gap between the connecting pipe and the connecting ring, thereby avoiding gas leakage from the gap.

Preferably, one side of the limiting ring away from the adapter ring is fixedly connected with a rotating rod, and the section of the rotating rod is L-shaped.

The effects achieved by the components are as follows: personnel can rotate the adapter ring by means of the rotating rod, and the effect of conveniently rotating the adapter ring is achieved.

Preferably, two the one end that the body is close to each other is equipped with auxiliary structure, auxiliary structure includes two go-between, two the go-between uses the centre of a circle of body to be symmetrical center, two one side and body fixed connection that the go-between kept away from each other, the outer wall fixedly connected with lug of go-between, the recess has been seted up to the outer wall of go-between, the recess and the size looks adaptation of lug, the screw rod has been worn to one side screw thread of lug, the screw has been seted up to the inner wall bottom of recess, the screw with the size looks adaptation of screw rod.

The effects achieved by the components are as follows: through setting up auxiliary structure, when the blast pipe that needs to use different length in different use places, can splice the body as required this moment to the application scope of body has been improved.

Preferably, one end of the screw rod, which is close to the screw hole, is in a conical structure.

The effects achieved by the components are as follows: through setting one end of screw rod to the toper structure, reached the effect that makes things convenient for screw rod and screw butt joint.

Preferably, the section of the screw rod is in a T shape, and the arc surface of the screw rod is fixedly connected with a swivel.

The effects achieved by the components are as follows: the rotating ring can drive the screw rod, so that the effect of conveniently rotating the screw rod is achieved.

Compared with the related art, the vacuum process exhaust pipe provided by the utility model has the following beneficial effects:

The utility model provides the vacuum process exhaust pipe, and by arranging the adjusting structure, a person can filter the large-particle substances in the exhaust gas discharged from the pipe body, so that the large-particle substances in the residual harmful substances in the exhaust gas are prevented from being directly discharged into the air, the pollution to the surrounding environment is reduced, and after the filter screen is worn, the person can conveniently replace the filter screen.

Through setting up auxiliary structure, when the blast pipe that needs to use different length in different use places, can splice the body as required this moment to the application scope of body has been improved.

Drawings

FIG. 1 is a schematic diagram of an exhaust pipe in a vacuum process according to the present utility model;

FIG. 2 is a schematic structural view of the adjustment structure shown in FIG. 1;

FIG. 3 is a schematic view of a part of the adjusting structure shown in FIG. 1;

FIG. 4 is a schematic structural view of the auxiliary structure shown in FIG. 1;

fig. 5 is a partially disassembled schematic view of the auxiliary structure shown in fig. 1.

Reference numerals in the drawings: 1. a tube body; 2. a flange plate; 3. an adjustment structure; 301. a linking ring; 302. a slot hole; 303. a convex column; 304. a partition plate; 305. a compression bar; 306. a limiting ring; 307. a filter screen; 308. a round hole; 309. a positioning plate; 310. a positioning rod; 311. a rotating rod; 312. a seal ring; 4. an auxiliary structure; 41. a connecting ring; 42. a bump; 43. a screw; 44. a groove; 45. a screw hole; 46. a swivel.

Detailed Description

The present utility model will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present utility model more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the utility model.

Specific implementations of the utility model are described in detail below in connection with specific embodiments.

Referring to fig. 1 to 5, a vacuum process exhaust pipe according to an embodiment of the utility model includes: the two pipe bodies 1, the equal fixedly connected with ring flange 2 of one end that two pipe bodies 1 keep away from each other, the inner wall of pipe body 1 is equipped with regulation structure 3, and the one end that two pipe bodies 1 are close to each other is equipped with auxiliary structure 4.

In the embodiment of the present utility model, referring to fig. 2 and 3, the adjusting structure 3 includes a connecting ring 301, an outer wall of the connecting ring 301 is rotatably connected with an inner wall of the pipe body 1, one side of the connecting ring 301 is fixedly connected with two partition boards 304, a compression bar 305 is threaded on a side surface of the partition boards 304, a plurality of slots 302 are formed on a side, close to the partition boards 304, of the connecting ring 301, a boss 303 is slidably connected with an inner wall of the slots 302, a section of the boss 303 is in an L shape, a limiting ring 306 is attached to a side, close to the partition boards 304, of the connecting ring 301, a filter screen 307 is fixedly connected with an inner wall of the limiting ring 306, a plurality of round holes 308 are formed on an outer wall of the limiting ring 306, and the round holes 308 are matched with the sizes of the bosses 303. Through setting up adjusting structure 3, personnel can filter the big particulate matter in the exhaust gas in the pipe body 1 by filter screen 307, and then avoid the direct emission of big particulate matter in the harmful substance of exhaust gas residue to in the air, thereby reduced the pollution to surrounding environment, and after filter screen 307 uses wearing and tearing, personnel can be convenient change filter screen 307, link up ring 301 and be close to one side fixedly connected with a plurality of locating plate 309 of baffle 304, locating plate 309's side slip wears to be equipped with locating lever 310, locating lever 310's one end and projection 303's arc surface fixed connection. In the process that the convex column 303 moves along the inner wall of the slot 302, the positioning plate 309 fixed on the adapter ring 301 moves along the arc surface of the positioning rod 310 on the convex column 303, so that the convex column 303 can be limited, the rotary offset in the moving process of the convex column 303 is avoided, the process that the convex column 303 is inserted into the circular hole 308 is smoother, the sealing ring 312 is fixedly connected to one side of the limiting ring 306, which is close to the adapter ring 301, and the outer wall of the sealing ring 312 is attached to the inner wall of the adapter ring 301. The sealing ring 312 can block the gap between the connecting pipe and the connecting ring 41, so that gas leakage from the gap is avoided, a rotating rod 311 is fixedly connected to one side of the limiting ring 306, which is far away from the connecting ring 301, and the cross section of the rotating rod 311 is L-shaped. Personnel can rotate the adapter ring 301 by means of the rotating rod 311, so that the effect of conveniently rotating the adapter ring 301 is achieved;

In the embodiment of the present utility model, referring to fig. 4 and 5, the auxiliary structure 4 includes two connection rings 41, the two connection rings 41 are symmetrical with respect to the center of the tube 1, one side of the two connection rings 41 away from each other is fixedly connected with the tube 1, the outer wall of the connection ring 41 is fixedly connected with a protrusion 42, the outer wall of the connection ring 41 is provided with a groove 44, the groove 44 is matched with the size of the protrusion 42, one side of the protrusion 42 is threaded with a screw 43, the bottom of the inner wall of the groove 44 is provided with a screw hole 45, and the screw hole 45 is matched with the size of the screw 43. Through setting up auxiliary structure 4, when needing to use the blast pipe of different length in different use places, can splice body 1 as required this moment to improved body 1's application scope, screw 43 is the toper structure near the one end of screw 45. Through setting one end of screw 43 to the toper structure, reached the effect of making things convenient for screw 43 and screw 45 butt joint, the cross-section of screw 43 is "T" shape, and the arc surface fixedly connected with swivel 46 of screw 43. The rotating ring 46 can drive the screw 43, so that the effect of conveniently rotating the screw 43 is achieved;

The working principle of the vacuum process exhaust pipe provided by the utility model is as follows: when the pipe body 1 is in butt joint with the process waste gas treatment equipment by means of the flange plate 2, when the pipe body 1 needs to be replaced after being used for a period of time, the press rod 305 is firstly rotated to be separated from the inner wall of the pipe body 1, then the rotating rod 311 drives the connecting ring 301 to rotate, the connecting ring 301 drives the convex rod 303 to move by means of the slotted hole 302, in the process that the convex rod 303 moves along the inner wall of the slotted hole 302, the positioning plate 309 fixed on the connecting ring 301 can move along the arc surface of the positioning rod 310 on the convex rod 303, the convex rod 303 can be further limited, the moving process of the convex rod 303 is prevented from generating rotary offset, the process that the convex rod 303 is inserted into the circular hole 308 is smoother, when the convex rod 303 is separated from the circular hole 308 on the limiting ring 306, the filter 307 can be detached, the limiting ring 306 is firstly moved to be attached to the connecting ring 301, then the rotating rod 311 drives the connecting ring 301 to drive the convex rod 303 by means of the slotted hole 302, in the process that the convex rod 303 moves along the inner wall of the slotted hole 302, the positioning rod 305 is abutted to the pipe body 1, the filter 307 can be installed, the connecting ring 312 can be used for directly discharging harmful substances from the periphery of the filter screen 307 by the filter screen, and the filter screen can be directly replaced by the surrounding particles by the filter body, and the filter medium can be prevented from being greatly polluted by the filter medium, and the surrounding the filter medium can be greatly arranged in the filter medium, and the environment can be prevented from being greatly polluted by the filter medium.

When the pipe body 1 needs to be spliced, the moving pipe body 1 drives the two connecting rings 41 to move towards the direction close to each other, when the protruding blocks 42 on the connecting rings 41 are attached to the inner walls of the grooves 44, the screw rods 43 are rotated by means of the rotating rings 46 to enable the screw rods 43 to be connected with the screw holes 45, the pipe body 1 can be spliced, when the pipe body 1 needs to be separated, the screw rods 43 are driven by the rotating rings 46 to be reversely rotated, the screw rods 43 are separated from the screw holes 45, the pipe body 1 can be separated by moving the connecting rings 41 to drive the protruding blocks 42 to be separated from the grooves 44, one end of the screw rods 43 is in a conical structure, the effect of conveniently butting the screw rods 43 with the screw holes 45 is achieved, and exhaust pipes with different lengths can be spliced according to requirements in different use places.

The circuits and control involved in the present utility model are all of the prior art, and are not described in detail herein.

The foregoing description is only illustrative of the present utility model and is not intended to limit the scope of the utility model, and all equivalent structures or equivalent processes or direct or indirect application in other related technical fields are included in the scope of the present utility model.

Claims

1. The vacuum process exhaust pipe is characterized by comprising: two body (1), two equal fixedly connected with ring flange (2) of one end that body (1) kept away from each other, the inner wall of body (1) is equipped with regulation structure (3), regulation structure (3) are including linking ring (301), the outer wall of linking ring (301) rotates with the inner wall of body (1) to be connected, one side fixedly connected with two baffle (304) of linking ring (301), depression bar (305) are worn to be equipped with by the side screw thread of baffle (304), a plurality of slotted hole (302) have been seted up to one side that linking ring (301) is close to baffle (304), the inner wall sliding connection of slotted hole (302) has projection (303), the cross-section of projection (303) is "L" shape, linking ring (301) is close to one side laminating of baffle (304) and is equipped with spacing ring (306), the inner wall fixedly connected with filter screen (307) of spacing ring (306), a plurality of round hole (308) and the size looks adaptation of projection (303).

2. The vacuum processing exhaust pipe according to claim 1, wherein one side of the adapter ring (301) close to the partition plate (304) is fixedly connected with a plurality of positioning plates (309), a positioning rod (310) is slidably arranged on the side surface of the positioning plate (309), and one end of the positioning rod (310) is fixedly connected with the arc surface of the convex column (303).

3. The vacuum processing exhaust pipe according to claim 1, wherein a sealing ring (312) is fixedly connected to one side of the limiting ring (306) close to the adapter ring (301), and an outer wall of the sealing ring (312) is attached to an inner wall of the adapter ring (301).

4. The vacuum processing exhaust pipe according to claim 1, wherein a rotating rod (311) is fixedly connected to one side of the limiting ring (306) away from the adapter ring (301), and the cross section of the rotating rod (311) is L-shaped.

5. The vacuum process exhaust pipe according to claim 1, wherein one end of each pipe body (1) close to each other is provided with an auxiliary structure (4), the auxiliary structure (4) comprises two connecting rings (41), the two connecting rings (41) are symmetrical with each other with the center of the pipe body (1) as a symmetry center, one side of each connecting ring (41) away from each other is fixedly connected with the pipe body (1), the outer wall of each connecting ring (41) is fixedly connected with a convex block (42), the outer wall of each connecting ring (41) is provided with a groove (44), the groove (44) is matched with the size of the convex block (42), one side of each convex block (42) is provided with a threaded rod (43) in a threaded way, the bottom of the inner wall of each groove (44) is provided with a threaded hole (45), and the threaded hole (45) is matched with the size of the threaded rod (43).

6. The vacuum processing exhaust pipe according to claim 5, wherein an end of the screw (43) adjacent to the screw hole (45) is tapered.

7. The vacuum processing exhaust pipe according to claim 5, wherein the cross section of the screw (43) is in a T shape, and a swivel (46) is fixedly connected to the arc surface of the screw (43).