CN221297051U - Double-chamber material transfer device for vacuum coating - Google Patents
Double-chamber material transfer device for vacuum coating Download PDFInfo
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- CN221297051U CN221297051U CN202420186349.8U CN202420186349U CN221297051U CN 221297051 U CN221297051 U CN 221297051U CN 202420186349 U CN202420186349 U CN 202420186349U CN 221297051 U CN221297051 U CN 221297051U
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- guide rod
- movable mounting
- transfer device
- chamber
- connecting plate
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- 239000000463 material Substances 0.000 title claims abstract description 41
- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 18
- 239000011248 coating agent Substances 0.000 claims abstract description 30
- 238000000576 coating method Methods 0.000 claims abstract description 30
- 230000007246 mechanism Effects 0.000 claims abstract description 9
- 239000007888 film coating Substances 0.000 claims description 5
- 238000009501 film coating Methods 0.000 claims description 5
- 238000007789 sealing Methods 0.000 claims description 4
- 230000008878 coupling Effects 0.000 claims description 2
- 238000010168 coupling process Methods 0.000 claims description 2
- 238000005859 coupling reaction Methods 0.000 claims description 2
- 238000001514 detection method Methods 0.000 claims description 2
- 230000005540 biological transmission Effects 0.000 abstract description 5
- YZCKVEUIGOORGS-OUBTZVSYSA-N Deuterium Chemical compound [2H] YZCKVEUIGOORGS-OUBTZVSYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
- 229910052805 deuterium Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
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- Physical Vapour Deposition (AREA)
Abstract
The utility model relates to a double-chamber material transfer device for vacuum coating, which comprises a transfer material rod, wherein the middle part of the transfer material rod is in sliding fit with the chamber wall of a coating chamber, the transfer material rod comprises an A rod section and a B rod section, the A rod section is positioned in the coating chamber, the end part of the A rod section is provided with a supporting component for supporting a workpiece, the B rod section is positioned outside the coating chamber, the end part of the B rod section is arranged on a movable mounting seat, a telescopic corrugated pipe is sleeved on the rod body of the B rod section between the movable mounting seat and the coating chamber, and the movable mounting seat is connected with an adjusting mechanism for adjusting the movable mounting seat to move along the length direction of the transfer material rod. According to the scheme provided by the utility model, the existing magnetic arm conveying power is replaced by the corrugated pipe structure, so that the limitation of magnetic transmission is solved, the large-sized workpiece is reliably transferred between coating chambers, and the transfer is more stable.
Description
Technical Field
The utility model relates to the field of vacuum coating, in particular to a double-chamber material transfer device for vacuum coating.
Background
Some workpieces need to be processed in a coating chamber and a deuterium penetrating chamber respectively, so that a feeding mechanism needs to be arranged to transfer the workpieces in the two chambers. At present, workpiece transfer usually depends on a magnetic arm so as to move the workpiece, and in the magnetic force constraint mode, not only is the effect single and stability poor, but also the provided power is small, so that the film coating of a large or heavy workpiece cannot be met, and the efficiency problem caused by the film coating is particularly obvious.
Disclosure of Invention
The utility model aims to provide a double-chamber material transfer device for vacuum coating, which can be used for solving the technical problems.
The technical scheme adopted by the utility model is as follows.
A double-chamber material transfer device for vacuum coating is characterized in that: including changeing the pay-off pole, the middle part of transferring the material pole and the chamber wall sliding fit of coating film cavity, it includes A pole section and B pole section to transfer the material pole, A pole section is located the coating film cavity and sets up the support that is used for carrying the work piece in the tip of A pole section and carry out the subassembly, B pole section is located the outside of coating film cavity, the tip of B pole section is installed on movable mounting seat, the pole body cover of B pole section between movable mounting seat and the coating film cavity is equipped with telescopic sealed tube, movable mounting seat is connected with the adjustment mechanism who adjusts it and carry out the removal along the length direction of transferring the material pole.
The specific scheme is as follows: the sealing tube is a corrugated tube.
The movable mounting frame is arranged outside the coating cavity, and the movable mounting seat is slidably arranged on the movable mounting frame along the length direction of the conveying rod.
The movable mounting frame comprises an A1 guide rod and an A2 guide rod which are arranged in parallel relatively, two ends of the A1 guide rod and two ends of the A2 guide rod are respectively and fixedly arranged on an A1 mounting plate and an A2 mounting plate, two ends of the movable mounting seat are respectively and slidably arranged on the A1 guide rod and the A2 guide rod through A linear bearings, the A1 mounting plate is fixedly arranged on the side wall of the film coating chamber through an A1 flange, and the A2 mounting plate is fixedly arranged on the base.
The adjusting mechanism comprises an adjusting cylinder, the adjusting cylinder is arranged on the adjusting mounting bracket, and a piston rod of the adjusting cylinder is connected with the movable mounting seat through a connecting assembly.
Still including connecting the installing support, coupling assembling's slidable mounting is on connecting the installing support.
The connecting assembly comprises an A1 connecting plate and an A2 connecting plate, wherein the A1 connecting plate and the A2 connecting plate are in L-shaped arrangement, the length direction of the A1 connecting plate and the length direction of the A1 guide rod are vertically arranged, the connecting mounting bracket comprises a B guide rod, the middle part of the A1 connecting plate is slidably mounted on the B guide rod through a B linear bearing, one end of the A1 connecting plate is assembled and connected with a piston rod of an adjusting cylinder, the other end of the A1 connecting plate is assembled and connected with one end of the A2 connecting plate, and the other end of the A2 connecting plate is assembled and connected with the middle part of a movable mounting seat.
One end of the B guide rod is fixedly connected with the side wall of the coating cavity through a B flange plate, and the other end of the B guide rod is fixedly arranged on the base through a B supporting seat.
The adjusting and mounting bracket comprises a B1 mounting plate and a B2 mounting plate, and two ends of a cylinder body of the adjusting cylinder are respectively and fixedly mounted on the B1 mounting plate and the B2 mounting plate.
The support and carry the subassembly and hold in the palm the material fork including curved, hold in the palm and be provided with the sensor that is used for carrying out the detection to the position that holds in the palm the material fork on the material fork.
According to the scheme provided by the utility model, the existing magnetic arm conveying power is replaced by the corrugated pipe structure, so that the limitation of magnetic transmission is solved, the large-sized workpiece is reliably transferred between coating chambers, and the transfer is more stable. The electric cylinder is adopted to provide transmission power, so that the material can be transferred more efficiently and accurately, and the coating efficiency is improved greatly.
Drawings
Fig. 1 is a schematic structural view of the present utility model.
Fig. 2 is a front view of fig. 1.
Reference numerals and component correspondence are as follows.
10-Rotating feeding rod, 11-supporting fork, 12-sensor, 20-movable mounting seat, 21-A1 mounting plate, 22-A2 mounting plate, 23-A1 flange, 24-A2 flange, 25-corrugated pipe, 26-A1 guide rod, 27-A2 guide rod, 30-connecting component, 31-B guide rod, 32-B flange, 33-B supporting seat, 40-adjusting cylinder, 41-B1 mounting plate, 42-B2 mounting plate, 50-base, 51-control device and 52-limiting piece.
Detailed Description
The present utility model will be specifically described with reference to examples below in order to make the objects and advantages of the present utility model more apparent. It should be understood that the following text is intended to describe only one or more specific embodiments of the utility model and does not limit the scope of the utility model strictly as claimed. As used herein, the terms "parallel" and "perpendicular" are not limited to their strict geometric definition, but include tolerances for machining or human error to be reasonable and inconsistent.
As shown in fig. 1 and 2, a dual-chamber material transfer device for vacuum coating comprises a transfer rod 10, wherein the middle part of the transfer rod 10 is in sliding fit with the wall of a coating chamber, the transfer rod 10 comprises an a rod section and a B rod section, the a rod section is positioned in the coating chamber, a supporting component for supporting a workpiece is arranged at the end part of the a rod section, the B rod section is positioned outside the coating chamber, the end part of the B rod section is arranged on a movable mounting seat 20, a telescopic sealing tube is sleeved on the rod body of the B rod section between the movable mounting seat 20 and the coating chamber, and the movable mounting seat 20 is connected with an adjusting mechanism for adjusting the movement of the movable mounting seat along the length direction of the transfer rod 10. A specific sealing tube is a bellows 25. According to the scheme provided by the utility model, the existing magnetic arm conveying power is replaced by the corrugated pipe 25 structure, so that the limitation of magnetic transmission is solved, the large-sized workpiece is reliably transferred between coating chambers, and the transfer is more stable.
The detailed scheme is as follows: the movable mounting frame is arranged outside the coating chamber, and the movable mounting seat 20 is slidably arranged on the movable mounting frame along the length direction of the material conveying rod 10. The movable mounting frame comprises an A1 guide rod 26 and an A2 guide rod 27 which are arranged in parallel relatively, two ends of the A1 guide rod 26 and the A2 guide rod 27 are respectively and fixedly mounted on an A1 mounting plate 21 and an A2 mounting plate 22, two ends of the movable mounting seat 20 are respectively and slidably mounted on the A1 guide rod 26 and the A2 guide rod 27 through an A linear bearing, the A1 mounting plate 21 is fixedly mounted on the side wall of the film coating chamber through an A1 flange 23, and the A2 mounting plate 22 is fixedly mounted on the base 50. An A2 flange 24 can be arranged on the A2 mounting plate 22, and the end part of the B pole section is fixedly arranged on the movable mounting seat 20 through the A2 flange 24. The adjusting mechanism comprises an adjusting cylinder 40, the adjusting cylinder 40 is arranged on an adjusting mounting bracket, and a piston rod of the adjusting cylinder 40 is connected with the movable mounting seat 20 through a connecting assembly 30. And further includes a connection mounting bracket on which the connection assembly 30 is slidably mounted. The connecting assembly 30 comprises an A1 connecting plate and an A2 connecting plate, wherein the A1 connecting plate and the A2 connecting plate are in L-shaped arrangement, the length direction of the A1 connecting plate and the length direction of the A1 guide rod 26 are vertically arranged, the connecting mounting bracket comprises a B guide rod 31, the middle part of the A1 connecting plate is slidably mounted on the B guide rod 31 through a B linear bearing, one end of the A1 connecting plate is assembled and connected with a piston rod of the adjusting cylinder 40, the other end of the A1 connecting plate is assembled and connected with one end of the A2 connecting plate, and the other end of the A2 connecting plate is assembled and connected with the middle part of the movable mounting seat 20. One end of the B guide rod 31 is fixedly connected with the side wall of the coating chamber through a B flange 32 disc, and the other end of the B guide rod 31 is fixedly arranged on the base 50 through a B supporting seat 33. The adjusting and mounting bracket comprises a B1 mounting plate 41 and a B2 mounting plate 42, and two ends of a cylinder body of the adjusting cylinder 40 are respectively and fixedly mounted on the B1 mounting plate 41 and the B2 mounting plate 42. The support and carry the subassembly and hold in the palm the material fork 11 including arc, hold in the palm and be provided with the sensor 12 that is used for carrying out the position that holds in the palm the material fork 11 on the material fork 11. The device also comprises a control device 51 and a limiting piece 52, wherein the limiting piece 52 is used for limiting the moving position of the movable mounting seat 20. The conditioning cylinder 40 may specifically be an electric cylinder. The control device 51 regulates the running state of the electric cylinder according to the sensor 12 by adopting signals. The material transfer device is reliable in transferring and stable in supporting the workpiece. The electric cylinder is adopted to provide transmission power, so that the material can be transferred more efficiently and accurately, and the coating efficiency is improved greatly.
According to the scheme provided by the utility model, the A1 flange 23 and the B flange 32 are respectively arranged on the outer side wall of the coating cavity, are screwed by bolts, and then the rotary feeding rod 10 passes through the corrugated pipe 25 and is fixedly assembled with the movable mounting seat 20 through the A2 flange 24. The movable mount 20 is assembled and connected by using the movable mount bracket. The movable mounting base 20 and the adjusting cylinder 40 are connected by the connecting component 30, and the connecting component 30 is assembled in a sliding way through the connecting mounting bracket. A pallet fork 11 is mounted to the end of the transfer bar 10 within the coating chamber. The control device 51 is started to control the adjusting cylinder 40 to work, and under the action of the adjusting cylinder 40, the material supporting fork 11 sequentially transfers workpieces needing to be coated in the double chambers, and the device is simple to operate and convenient to use.
The foregoing is merely a preferred embodiment of the present utility model and it should be noted that modifications and adaptations to those skilled in the art may be made without departing from the principles of the present utility model, which are intended to be comprehended within the scope of the present utility model. Structures, mechanisms, and methods of operation not specifically described and illustrated in the present utility model are implemented by conventional means in the art unless specifically described and limited.
Claims (10)
1. A double-chamber material transfer device for vacuum coating is characterized in that: including changeing the pay-off pole, the middle part of transferring the material pole and the chamber wall sliding fit of coating film cavity, it includes A pole section and B pole section to transfer the material pole, A pole section is located the coating film cavity and sets up the support that is used for carrying the work piece in the tip of A pole section and carry out the subassembly, B pole section is located the outside of coating film cavity, the tip of B pole section is installed on movable mounting seat, the pole body cover of B pole section between movable mounting seat and the coating film cavity is equipped with telescopic sealed tube, movable mounting seat is connected with the adjustment mechanism who adjusts it and carry out the removal along the length direction of transferring the material pole.
2. The dual-chamber material transfer device for vacuum coating according to claim 1, wherein: the sealing tube is a corrugated tube.
3. The dual-chamber material transfer device for vacuum coating according to claim 1 or 2, wherein: the movable mounting frame is arranged outside the coating cavity, and the movable mounting seat is slidably arranged on the movable mounting frame along the length direction of the conveying rod.
4. A dual-chamber material transfer device for vacuum coating according to claim 3, wherein: the movable mounting frame comprises an A1 guide rod and an A2 guide rod which are arranged in parallel relatively, two ends of the A1 guide rod and two ends of the A2 guide rod are respectively and fixedly arranged on an A1 mounting plate and an A2 mounting plate, two ends of the movable mounting seat are respectively and slidably arranged on the A1 guide rod and the A2 guide rod through A linear bearings, the A1 mounting plate is fixedly arranged on the side wall of the film coating chamber through an A1 flange, and the A2 mounting plate is fixedly arranged on the base.
5. The dual-chamber material transfer device for vacuum coating according to claim 4, wherein: the adjusting mechanism comprises an adjusting cylinder, the adjusting cylinder is arranged on the adjusting mounting bracket, and a piston rod of the adjusting cylinder is connected with the movable mounting seat through a connecting assembly.
6. The dual-chamber material transfer device for vacuum coating according to claim 5, wherein: still including connecting the installing support, coupling assembling's slidable mounting is on connecting the installing support.
7. The dual-chamber material transfer device for vacuum coating according to claim 6, wherein: the connecting assembly comprises an A1 connecting plate and an A2 connecting plate, wherein the A1 connecting plate and the A2 connecting plate are in L-shaped arrangement, the length direction of the A1 connecting plate and the length direction of the A1 guide rod are vertically arranged, the connecting mounting bracket comprises a B guide rod, the middle part of the A1 connecting plate is slidably mounted on the B guide rod through a B linear bearing, one end of the A1 connecting plate is assembled and connected with a piston rod of an adjusting cylinder, the other end of the A1 connecting plate is assembled and connected with one end of the A2 connecting plate, and the other end of the A2 connecting plate is assembled and connected with the middle part of a movable mounting seat.
8. The dual-chamber material transfer device for vacuum coating according to claim 7, wherein: one end of the B guide rod is fixedly connected with the side wall of the coating cavity through a B flange plate, and the other end of the B guide rod is fixedly arranged on the base through a B supporting seat.
9. The dual-chamber material transfer device for vacuum coating according to claim 8, wherein: the adjusting and mounting bracket comprises a B1 mounting plate and a B2 mounting plate, and two ends of a cylinder body of the adjusting cylinder are respectively and fixedly mounted on the B1 mounting plate and the B2 mounting plate.
10. The dual-chamber material transfer device for vacuum coating according to claim 9, wherein: the support and carry the subassembly and hold in the palm the material fork including curved, hold in the palm and be provided with the sensor that is used for carrying out the detection to the position that holds in the palm the material fork on the material fork.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202420186349.8U CN221297051U (en) | 2024-01-25 | 2024-01-25 | Double-chamber material transfer device for vacuum coating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202420186349.8U CN221297051U (en) | 2024-01-25 | 2024-01-25 | Double-chamber material transfer device for vacuum coating |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221297051U true CN221297051U (en) | 2024-07-09 |
Family
ID=91753432
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202420186349.8U Active CN221297051U (en) | 2024-01-25 | 2024-01-25 | Double-chamber material transfer device for vacuum coating |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221297051U (en) |
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2024
- 2024-01-25 CN CN202420186349.8U patent/CN221297051U/en active Active
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