CN221280439U - Reactor PENG vibration sensor based on multilayer PZT - Google Patents
Reactor PENG vibration sensor based on multilayer PZT Download PDFInfo
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- CN221280439U CN221280439U CN202323412273.0U CN202323412273U CN221280439U CN 221280439 U CN221280439 U CN 221280439U CN 202323412273 U CN202323412273 U CN 202323412273U CN 221280439 U CN221280439 U CN 221280439U
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- 101100136092 Drosophila melanogaster peng gene Proteins 0.000 title claims abstract description 15
- 238000000034 method Methods 0.000 claims abstract description 17
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims abstract description 13
- 239000000463 material Substances 0.000 claims abstract description 12
- 238000006243 chemical reaction Methods 0.000 claims abstract description 10
- 238000012545 processing Methods 0.000 claims abstract description 8
- 230000008569 process Effects 0.000 claims abstract description 7
- 239000002131 composite material Substances 0.000 claims abstract description 4
- 229910052451 lead zirconate titanate Inorganic materials 0.000 claims description 54
- 239000010408 film Substances 0.000 claims description 19
- 229920000139 polyethylene terephthalate Polymers 0.000 claims description 19
- 239000005020 polyethylene terephthalate Substances 0.000 claims description 19
- QNZFKUWECYSYPS-UHFFFAOYSA-N lead zirconium Chemical compound [Zr].[Pb] QNZFKUWECYSYPS-UHFFFAOYSA-N 0.000 claims description 16
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 claims description 15
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims description 12
- 230000006698 induction Effects 0.000 claims description 10
- -1 polyethylene terephthalate Polymers 0.000 claims description 10
- 229910052759 nickel Inorganic materials 0.000 claims description 8
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 8
- 238000013461 design Methods 0.000 claims description 6
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 claims description 5
- 239000012046 mixed solvent Substances 0.000 claims description 4
- 238000005191 phase separation Methods 0.000 claims description 4
- DGXKDBWJDQHNCI-UHFFFAOYSA-N dioxido(oxo)titanium nickel(2+) Chemical compound [Ni++].[O-][Ti]([O-])=O DGXKDBWJDQHNCI-UHFFFAOYSA-N 0.000 claims description 3
- 238000005516 engineering process Methods 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 239000010931 gold Substances 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims description 3
- 238000004528 spin coating Methods 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 3
- 238000005259 measurement Methods 0.000 abstract description 12
- 230000007613 environmental effect Effects 0.000 abstract description 7
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 230000035945 sensitivity Effects 0.000 abstract description 5
- 239000010410 layer Substances 0.000 description 65
- 238000010586 diagram Methods 0.000 description 5
- 238000011161 development Methods 0.000 description 3
- HEPLMSKRHVKCAQ-UHFFFAOYSA-N lead nickel Chemical compound [Ni].[Pb] HEPLMSKRHVKCAQ-UHFFFAOYSA-N 0.000 description 3
- 230000005684 electric field Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
Abstract
The utility model relates to a reactor PENG vibration sensor based on multilayer PZT, and belongs to the field of reactor vibration measurement. The device comprises a vibration sensing unit, an energy conversion unit and a signal processing unit. The vibration sensing unit acquires a vibration signal through sensing the vibration of the parallel reactor, converts the vibration signal into an electric energy signal through the energy conversion unit, and processes and analyzes the electric energy signal through the signal processing unit. The electret layer of the vibration sensing unit consists of a porous PZN-PZT, ITO, PET and a gold foil layer, and has a unique structure. The PZN-PZT is a composite piezoelectric material, and the porous PZN-PZT layer is prepared by adopting a specific method, and the surface of the PZN-PZT layer is designed with a porous structure. The utility model solves the technical problems of low sensitivity, power supply by an external power supply, high manufacturing cost, environmental influence and the like in the prior art for measuring the vibration signal of the reactor, and improves the accuracy, reliability and economy of measurement.
Description
Technical Field
The utility model belongs to the field of reactor vibration measurement, and relates to a reactor PENG vibration sensor based on multilayer PZT.
Background
The traditional method for measuring the vibration signal of the reactor mainly relies on a sensor and an external power supply to supply power. Although this method has been widely used, it still suffers from some significant drawbacks that affect the accuracy, reliability, cost effectiveness of the measurement and feasibility of the application.
1. Insufficient sensitivity
The sensitivity of conventional sensors is typically low and it is difficult to accurately capture minute vibration signals. This not only affects the accuracy of the measurement, but may also result in some important information being missed. In a power system, small vibrations of the reactor may be indicative of some potential problem or impending failure. If these signals are not detected timely and accurately, they may pose a threat to the stable operation of the power system.
2. Limitations of external power supply
Conventional sensors require an external power source to power, which not only increases the complexity of installation and maintenance, but may also limit the sensor in certain environments. For example, in remote areas or in harsh environments, providing a stable power source can be a significant challenge. In addition, the external power source may also introduce electromagnetic interference, affecting the accuracy of the measurement results.
3. High manufacturing cost
The manufacture of conventional sensors typically involves special materials and complex processes, resulting in higher manufacturing costs. This not only increases the cost of the application, but also limits its feasibility in certain scenarios. Particularly in some developing countries or regions, high sensor costs may be a major factor impeding its widespread use.
4. Environmental impact stability
Conventional sensors may be affected by factors such as temperature, humidity, etc. under different environmental conditions. These environmental factors may cause the sensor to change in performance, affecting its stability and reliability. For example, in a high temperature environment, the sensitivity of the sensor may decrease; in high humidity environments, the sensor may drift. These environmental problems not only affect the accuracy of the measurement, but also increase the difficulty and cost of maintenance.
Although the traditional method for measuring the vibration signal of the reactor still has a certain application value in some scenes, the defects of the traditional method also limit the wider application and development of the traditional method. To overcome these problems and challenges, there is a continuing need to explore and innovate, develop more advanced, reliable, and cost-effective measurement techniques and methods. This will help to improve the safety and stability of the power system, pushing the continued development and progress of the related industry.
Disclosure of utility model
In view of the above, the utility model aims to provide a reactor PENG vibration sensor based on multilayer PZT, which solves the technical problems of low sensitivity, need of external power supply, high manufacturing cost, environmental influence and the like in the measurement of reactor vibration signals, thereby improving the accuracy, reliability and economy of measurement.
In order to achieve the above purpose, the present utility model provides the following technical solutions:
The reactor PENG vibration sensor based on the multilayer PZT comprises a vibration induction unit, an energy conversion unit and a signal processing unit;
The vibration sensing unit is electrically connected with the parallel reactor and acquires a vibration signal through the vibration of the sensing reactor; the energy conversion unit is electrically connected with the vibration induction unit and converts vibration energy in the vibration signal acquired by the vibration induction unit into electric energy; the signal processing unit is electrically connected with the energy conversion unit, receives the converted electric energy signal, and processes and analyzes the electric energy signal;
The vibration induction unit is internally composed of electret layers and air layers which are alternately distributed, wherein the electret layers are uniformly distributed and coat each air layer into a closed cavity;
The electret layer consists of a porous lead zirconium nickel lead zirconium titanate lead zirconate titanate PZN-PZT layer, an indium tin oxide ITO layer, a polyethylene terephthalate PET layer and a gold foil layer;
Taking the electret layer at the uppermost layer as an upper electrode electret, and taking the electret layer at the lowermost layer as a lower electrode electret; the electret layer of the middle layer takes the gold foil layer as a symmetrical layer, and is sequentially provided with a polyethylene terephthalate PET layer, an indium tin oxide ITO layer and a porous lead zirconium nickel lead zirconium titanate lead zirconate titanate PZN-PZT layer from inside to outside; the upper electrode electret and the lower electrode electret are sequentially provided with a porous lead-zirconium nickel-zirconium-titanate-lead-zirconium-lead-titanate PZN-PZT layer, an indium tin oxide ITO layer, a polyethylene terephthalate PET layer and a gold foil layer from outside to inside;
Gold films are respectively arranged on the two outer side surfaces of the electret layer to serve as electrodes.
Further, lead zirconium nickel lead zirconate titanate is a composite piezoelectric material, and consists of lead zirconium lead titanate PZT and lead zirconium nickel titanate PZN.
Further, the porous lead zirconium nickel lead zirconium lead titanate PZN-PZT layer is a porous PZN-PZT film prepared by adopting a mixed solvent phase separation method, the prepared porous PZN-PZT film is assembled on the upper layer of a traditional PZN-PZT solid film, and a spin coating technology is adopted to design a porous structure on the surface of the prepared porous PZN-PZT film.
Furthermore, the surface of the PZN-PZT thin film with the holes has a plurality of regular trapezoid structures.
Furthermore, the indium tin oxide ITO is a transparent film, and has high transparency and good conductive performance.
The utility model has the beneficial effects that:
First, the utility model adopts the porous lead-zirconium-nickel-lead-zirconium-titanate-lead-zirconium-lead-zirconate-titanate PZN-PZT layer and a special multi-layer structure design, so that the vibration sensing capability of the sensor is improved, and the vibration signal can be sensed and acquired more accurately, thereby improving the measurement accuracy.
Second, the manufacturing process of the PENG self-energy-taking sensor is relatively simple, no special materials or complex processes are needed, the production cost is reduced, and the feasibility and the possibility of commercial development are improved.
Third, the self-vibration induction unit can induce the vibration of the shunt reactor and acquire a vibration signal, and an external power supply is not needed for supplying power. This reduces the energy consumption of the sensor and the dependence on external power supply, improving the autonomy and reliability of the sensor.
Fourth, the porous PZN-PZT layer in the present utility model is prepared by a mixed solvent phase separation method, and a porous structure is specially designed, so that the surface area and the sensing capability of the sensor are increased. The regular trapezoid structural design can bear larger force deformation, and the measuring range and stability of the sensor are improved. The sensor can work normally under various environmental conditions and is not influenced by external environment, such as temperature, humidity and other factors. This increases the stability and reliability of the sensor, ensuring a long-term stable measurement performance.
Fifth, the sensor of the present utility model has a simple structure and design, and is easy to install and use. The signal processing circuit of the sensor can convert the electric energy signal into an electric signal which can be measured and analyzed, and a user can transmit data to remote equipment or a cloud platform in a wireless or wired mode to realize real-time monitoring and remote control.
Additional advantages, objects, and features of the utility model will be set forth in part in the description which follows and in part will become apparent to those having ordinary skill in the art upon examination of the following or may be learned from practice of the utility model. The objects and other advantages of the utility model may be realized and obtained by means of the instrumentalities and combinations particularly pointed out in the specification.
Drawings
For the purpose of making the objects, technical solutions and advantages of the present utility model more apparent, the present utility model will be described in the following preferred detail with reference to the accompanying drawings, in which:
FIG. 1 is a diagram showing an internal structure of a vibration sensing unit;
FIG. 2 is an internal block diagram of an electret;
FIG. 3 is an equivalent circuit diagram;
FIG. 4 is a technical roadmap;
FIG. 5 is a diagram of an experimental platform constructed;
FIG. 6 is a graph of voltage signals and output spectra for different operating conditions; FIG. 6 (a) is a graph of voltage signals for different conditions; FIG. 6 (b) is a graph of output spectra for different conditions;
FIG. 7 is a schematic diagram of the principle of operation;
Reference numerals: 1-porous lead zirconium nickel lead zirconium titanate lead titanate layer, 2-indium tin oxide layer, 3-polyethylene terephthalate layer, 4-gold foil layer, a-upper electrode electret, b-air layer, c-middle electret layer, d-lower electrode electret.
Detailed Description
Other advantages and effects of the present utility model will become apparent to those skilled in the art from the following disclosure, which describes the embodiments of the present utility model with reference to specific examples. The utility model may be practiced or carried out in other embodiments that depart from the specific details, and the details of the present description may be modified or varied from the spirit and scope of the present utility model. It should be noted that the illustrations provided in the following embodiments merely illustrate the basic idea of the present utility model by way of illustration, and the following embodiments and features in the embodiments may be combined with each other without conflict.
Wherein the drawings are for illustrative purposes only and are shown in schematic, non-physical, and not intended to limit the utility model; for the purpose of better illustrating embodiments of the utility model, certain elements of the drawings may be omitted, enlarged or reduced and do not represent the size of the actual product; it will be appreciated by those skilled in the art that certain well-known structures in the drawings and descriptions thereof may be omitted.
The same or similar reference numbers in the drawings of embodiments of the utility model correspond to the same or similar components; in the description of the present utility model, it should be understood that, if there are terms such as "upper", "lower", "left", "right", "front", "rear", etc., that indicate an azimuth or a positional relationship based on the azimuth or the positional relationship shown in the drawings, it is only for convenience of describing the present utility model and simplifying the description, but not for indicating or suggesting that the referred device or element must have a specific azimuth, be constructed and operated in a specific azimuth, so that the terms describing the positional relationship in the drawings are merely for exemplary illustration and should not be construed as limiting the present utility model, and that the specific meaning of the above terms may be understood by those of ordinary skill in the art according to the specific circumstances.
Referring to fig. 1-7, a reactor PENG vibration sensor based on multilayer PZT is shown.
A multilayer PZT based reactor PENG vibration sensor comprising the following:
As shown in fig. 1 and 2, the vibration sensing unit: the inside of the device consists of electret layers and gas layers which are alternately distributed. The electret layers are uniformly distributed and coat each air layer 2 into a closed cavity. Each electret layer consists of a porous lead nickel lead zirconium titanate lead zirconate titanate layer 5, an indium tin oxide layer 6, a polyethylene terephthalate layer 7 and a gold foil layer 8. The uppermost electret layer is the upper electrode electret 1, and the lowermost electret layer is the lower electrode electret 4. The electret layer 3 of the middle layer takes a gold foil layer as a symmetrical layer, and is sequentially provided with a polyethylene terephthalate layer 7, an indium tin oxide layer 6 and a porous lead-zirconium-nickel-lead-zirconium-titanium-acid-lead layer 5 from inside to outside. The upper electrode electret and the lower electrode electret are sequentially provided with a porous lead-zirconium nickel-titanate lead-zirconium lead titanate layer 5, an indium tin oxide layer 6, a polyethylene terephthalate layer 7 and a gold foil layer 8 from outside to inside. Gold films are respectively arranged on the two outer side surfaces of the electret layer to serve as electrodes.
The shunt reactor is electrically connected with the vibration induction unit, and the vibration induction unit obtains a vibration signal by inducing the vibration of the shunt reactor.
An energy conversion unit: this unit is electrically connected to the vibration sensing unit and functions to convert the vibration energy in the vibration signal obtained by the vibration sensing unit into electric energy.
A signal processing unit: this unit is electrically connected to an energy conversion unit which receives the converted electrical energy signal and processes and analyses it.
In this embodiment, lead nickel lead zirconate titanate is used as the composite piezoelectric material, which is composed of two piezoelectric materials of lead zirconate titanate PZT and lead nickel zirconium titanate PZN, combines the advantages of PZT and PZN, and has higher piezoelectric performance and a wider operating temperature range. PZN materials have higher piezoelectric and electromechanical coupling coefficients at low temperatures, while PZT materials have higher stability and durability at high temperatures. Therefore, the PZN material and the PZT material are compounded together, so that the high-voltage electric performance and the high-temperature stability can be achieved. The porous PZN-PZT layer is a porous PZN-PZT film prepared by adopting a mixed solvent phase separation method, the prepared porous PZN-PZT film is assembled on the upper layer of a traditional PZN-PZT solid film, and a spin coating technology is adopted to design a porous structure on the surface of the prepared porous PZN-PZT film, so that the piezoelectric output of the PZN-PZT nano generator can be effectively increased. The surface of the PZN-PZT thin film with holes is in a plurality of regular trapezoid structures, the structures can bear deformation of larger force in the thickness direction, and the upper surface is a plane, so that the loss generated in the using process can be effectively reduced. The indium tin oxide ITO is a transparent film, the polyethylene terephthalate PET has good flexibility and mechanical property, and the ITO film of the PET is used as a protective layer, so that the internal structure of PENG can be protected, and the stability of the sensor is improved.
Equivalent circuit of this embodiment
Electrets in self-energizing vibration sensors have equal and stable amounts of different sign charge on both sides. When vibration signals are transmitted to compress the electret, the deformation is small due to the obvious difference of Young's modulus, and the representation can be regarded as a fixed capacitor. Instead, the gas layer is compressed and the distance between the electrets changes, characterizing the variable capacitance. Thus, the sensor can be regarded as an equivalent circuit model with alternating fixed and variable capacitances.
In this vibration sensor equivalent circuit model, C11, C12, and C13 are fixed capacitances, and C21 and C22 are variable capacitances. - σi and σi represent the upper and lower surface charges of the i-th gas layer, respectively, - σ and σ induce charge densities for the upper and lower electrodes. Wherein εr and εg represent the relative dielectric constants of electret and gaseous material, respectively. Taking the electric field direction in the electret layer as the electric field reference direction, as shown in fig. 3, the output voltage converted by the vibration signal is obtained as follows:
wherein l 1i and l 2i represent the electret and gas layer thicknesses, respectively.
The voltage signal can be displayed on an upper computer by measuring the voltage signal, and the voltage signal is decomposed into a spectrogram so as to obtain various working conditions of the shunt reactor.
The technical route of this embodiment is shown in fig. 4;
Experiment platform of this embodiment
Building a test platform, and systematically analyzing the measurement capability of the sensor in practice, as shown in fig. 5:
The actual output signal from the power-supplied vibration sensor can be obtained by the technical route shown in fig. 4 and displayed on the screen. Electromagnetic vibration of the parallel reactor under the working condition of power frequency sine, electromagnetic vibration under direct current bias, electromagnetic vibration under the working condition of mixed constant amplitude odd harmonic and electromagnetic vibration under the working condition of single harmonic are respectively measured, and the measured voltage signals and frequency spectrograms are shown in fig. 6, 6 (a) to 6 (b).
Finally, it is noted that the above embodiments are only for illustrating the technical solution of the present utility model and not for limiting the same, and although the present utility model has been described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that modifications and equivalents may be made thereto without departing from the spirit and scope of the present utility model, which is intended to be covered by the claims of the present utility model.
Claims (5)
1. Reactor PENG vibration sensor based on multilayer PZT, its characterized in that: the device comprises a vibration sensing unit, an energy conversion unit and a signal processing unit;
The vibration sensing unit is electrically connected with the parallel reactor and acquires a vibration signal through the vibration of the sensing reactor; the energy conversion unit is electrically connected with the vibration induction unit and converts vibration energy in the vibration signal acquired by the vibration induction unit into electric energy; the signal processing unit is electrically connected with the energy conversion unit, receives the converted electric energy signal, and processes and analyzes the electric energy signal;
The vibration induction unit is internally composed of electret layers and air layers which are alternately distributed, wherein the electret layers are uniformly distributed and coat each air layer into a closed cavity;
The electret layer consists of a porous lead zirconium nickel lead zirconium titanate lead zirconate titanate PZN-PZT layer, an indium tin oxide ITO layer, a polyethylene terephthalate PET layer and a gold foil layer;
Taking the electret layer at the uppermost layer as an upper electrode electret, and taking the electret layer at the lowermost layer as a lower electrode electret; the electret layer of the middle layer takes the gold foil layer as a symmetrical layer, and is sequentially provided with a polyethylene terephthalate PET layer, an indium tin oxide ITO layer and a porous lead zirconium nickel lead zirconium titanate lead zirconate titanate PZN-PZT layer from inside to outside; the upper electrode electret and the lower electrode electret are sequentially provided with a porous lead-zirconium nickel-zirconium-titanate-lead-zirconium-lead-titanate PZN-PZT layer, an indium tin oxide ITO layer, a polyethylene terephthalate PET layer and a gold foil layer from outside to inside;
Gold films are respectively arranged on the two outer side surfaces of the electret layer to serve as electrodes.
2. The multilayer PZT based reactor PENG vibration sensor of claim 1, wherein: the lead zirconium nickel lead zirconate titanate is a composite piezoelectric material and consists of lead zirconium lead titanate PZT and lead zirconium nickel titanate PZN.
3. The multilayer PZT based reactor PENG vibration sensor of claim 2, wherein: the porous lead-zirconium-nickel-lead-zirconium-titanate PZN-PZT layer is a porous PZN-PZT film prepared by adopting a mixed solvent phase separation method, the prepared porous PZN-PZT film is assembled on the upper layer of a traditional PZN-PZT solid film, and a spin coating technology is adopted to design a porous structure on the surface of the prepared porous PZN-PZT film.
4. A multilayer PZT based reactor PENG vibration sensor according to claim 3, wherein: the surface of the PZN-PZT thin film with the holes is in a plurality of regular trapezoid structures.
5. The multilayer PZT based reactor PENG vibration sensor of claim 4, wherein: the indium tin oxide ITO is a transparent film and has high transparency and good conductive performance.
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| Publication Number | Publication Date |
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| CN221280439U true CN221280439U (en) | 2024-07-05 |
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